JP6239735B2 - 応力を解放する半導体層 - Google Patents
応力を解放する半導体層 Download PDFInfo
- Publication number
- JP6239735B2 JP6239735B2 JP2016512032A JP2016512032A JP6239735B2 JP 6239735 B2 JP6239735 B2 JP 6239735B2 JP 2016512032 A JP2016512032 A JP 2016512032A JP 2016512032 A JP2016512032 A JP 2016512032A JP 6239735 B2 JP6239735 B2 JP 6239735B2
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- layer
- semiconductor
- containing layer
- cavities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 115
- 230000006911 nucleation Effects 0.000 claims description 67
- 238000010899 nucleation Methods 0.000 claims description 66
- 239000000758 substrate Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 25
- 239000000203 mixture Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 230000005669 field effect Effects 0.000 claims description 3
- 230000001939 inductive effect Effects 0.000 claims description 2
- 239000002671 adjuvant Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 267
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 20
- 238000013461 design Methods 0.000 description 17
- 150000004767 nitrides Chemical class 0.000 description 16
- 238000013459 approach Methods 0.000 description 15
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 229910002601 GaN Inorganic materials 0.000 description 4
- 208000012868 Overgrowth Diseases 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 229910002704 AlGaN Inorganic materials 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000004590 computer program Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910010093 LiAlO Inorganic materials 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 206010011376 Crepitations Diseases 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910020068 MgAl Inorganic materials 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000001534 heteroepitaxy Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- YQNQTEBHHUSESQ-UHFFFAOYSA-N lithium aluminate Chemical compound [Li+].[O-][Al]=O YQNQTEBHHUSESQ-UHFFFAOYSA-N 0.000 description 1
- MNKMDLVKGZBOEW-UHFFFAOYSA-M lithium;3,4,5-trihydroxybenzoate Chemical compound [Li+].OC1=CC(C([O-])=O)=CC(O)=C1O MNKMDLVKGZBOEW-UHFFFAOYSA-M 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000003362 semiconductor superlattice Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
- LALRXNPLTWZJIJ-UHFFFAOYSA-N triethylborane Chemical compound CCB(CC)CC LALRXNPLTWZJIJ-UHFFFAOYSA-N 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
- H01L29/158—Structures without potential periodicity in a direction perpendicular to a major surface of the substrate, i.e. vertical direction, e.g. lateral superlattices, lateral surface superlattices [LSS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
- H01L21/02507—Alternating layers, e.g. superlattice
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02513—Microstructure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02647—Lateral overgrowth
- H01L21/0265—Pendeoepitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
- H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
Description
Claims (20)
- 基板と、
前記基板上に位置し、前記基板の全面に接し、複数の核形成アイランドを含む核形成層と、
前記核形成層の直上のキャビティー含有層を有し、
前記キャビティー含有層は半導体材料で形成され、複数のキャビティーを有し、
前記複数のキャビティーの最大横断面のサイズは少なくとも1ナノメートルであり、隣接する二つのキャビティーの端部間の最小間隔は少なくとも5ナノメートルである、構造。 - 前記核形成層は、5ナノメートルから100ナノメートルの厚さを有し、最大横断面が1ナノメートル以下のキャビティーを有する、請求項1に記載の構造。
- 前記サイズは10ナノメートルから4000ナノメートルの範囲内である、請求項1に記載の構造。
- 前記キャビティー含有層に直に隣接する半導体層をさらに有する、請求項1に記載の構造。
- 前記半導体層は、前記キャビティー含有層に対し、前記基板の反対側に位置している、請求項4に記載の構造。
- 前記キャビティー含有層と前記半導体層は、複数のキャビティー含有層と複数の半導体層が交互に含まれる半導体層の超格子の一部である、請求項4に記載の構造。
- 第2のキャビティー含有層をさらに有し、
前記第2のキャビティー含有層は複数のキャビティーを有し、
前記第2のキャビティー含有層の前記複数のキャビティーの最大横断面のサイズは少なくとも1ナノメートルであり、互いに少なくとも5ナノメートル離れている、請求項1に記載の構造。 - 前記キャビティー含有層と前記第2のキャビティー含有層の間に核形成層をさらに有し、
前記核形成層は少なくとも1ナノメートルの厚さを有する、請求項7に記載の構造。 - 基板と、
前記基板上に位置し、前記基板の全面に接し、複数の核形成アイランドを有する核形成層と、
前記核形成層上のキャビティー含有層と、
前記キャビティー含有層に直に隣接する半導体層を有し、
前記キャビティー含有層は半導体材料で形成され、複数のキャビティーを有し、
前記複数のキャビティーの最大横断面のサイズは少なくとも1ナノメートルであり、隣接する二つのキャビティーの端部間の最小間隔は少なくとも5ナノメートルであるデバイス。 - 前記核形成層は、5ナノメートルから100ナノメートルの厚さを有し、最大横断面が1ナノメートル以下のキャビティーを有する、請求項9に記載のデバイス。
- 前記キャビティー含有層と前記半導体層は同一の組成で形成されている、請求項9に記載のデバイス。
- 前記キャビティー含有層と前記半導体層は、複数のキャビティー含有層と複数の半導体層が交互に含まれる半導体層の超格子の一部である、請求項9に記載のデバイス。
- 前記複数のキャビティー含有層、あるいは前記複数の半導体層の少なくとも一つは、前記超格子中で少なくとも5%変化する厚さを有している、請求項12に記載のデバイス。
- 前記複数のキャビティー含有層、あるいは前記複数の半導体層の前記少なくとも一つは、前記超格子の第1の側から前記超格子の第2の側の方向で増加する厚さを有している、請求項13に記載のデバイス。
- 前記デバイスは、レーザーダイオード、発光ダイオード、フォトダイオード、深紫外発光ダイオード、高移動度電子トランジスタ、電界効果トランジスタ、p−nダイオード、あるいはショットキーダイオードのうちの一つとして駆動されるように構成されている、請求項13に記載のデバイス。
- 基板上に、前記基板の全面に接するように、複数の核形成アイランドを有する核形成層を形成すること、および
前記核形成層上にキャビティー含有層を形成することを含み、
前記キャビティー含有層は半導体材料を含み、複数のキャビティーを有し、
前記複数のキャビティーの最大横断面のサイズは少なくとも1ナノメートルであり、隣接する二つのキャビティーの端部間の最小間隔は少なくとも5ナノメートルである、半導体構造の作製方法。 - 前記核形成層は、5ナノメートルから100ナノメートルの厚さを有し、最大横断面が1ナノメートル以下のキャビティーを有する、請求項16に記載の作製方法。
- 前記キャビティー含有層上に半導体層を成長させることを含む、請求項16に記載の作製方法。
- 前記半導体構造を用いてデバイスを作製することをさらに含む、請求項16に記載の作製方法。
- 前記キャビティー含有層の形成は、補助剤を用いて複数のキャビティーを誘起することを含む、請求項16に記載の作製方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361817970P | 2013-05-01 | 2013-05-01 | |
US61/817,970 | 2013-05-01 | ||
PCT/US2014/036291 WO2014179523A2 (en) | 2013-05-01 | 2014-05-01 | Stress relieving semiconductor layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016526281A JP2016526281A (ja) | 2016-09-01 |
JP6239735B2 true JP6239735B2 (ja) | 2017-11-29 |
Family
ID=51840980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016512032A Active JP6239735B2 (ja) | 2013-05-01 | 2014-05-01 | 応力を解放する半導体層 |
Country Status (5)
Country | Link |
---|---|
US (2) | US9330906B2 (ja) |
EP (1) | EP2992562A4 (ja) |
JP (1) | JP6239735B2 (ja) |
KR (1) | KR101909919B1 (ja) |
WO (1) | WO2014179523A2 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9653313B2 (en) | 2013-05-01 | 2017-05-16 | Sensor Electronic Technology, Inc. | Stress relieving semiconductor layer |
US10032956B2 (en) | 2011-09-06 | 2018-07-24 | Sensor Electronic Technology, Inc. | Patterned substrate design for layer growth |
US10622515B2 (en) | 2011-10-10 | 2020-04-14 | Sensor Electronic Technology, Inc. | Patterned layer design for group III nitride layer growth |
US10460952B2 (en) | 2013-05-01 | 2019-10-29 | Sensor Electronic Technology, Inc. | Stress relieving semiconductor layer |
US9412911B2 (en) | 2013-07-09 | 2016-08-09 | The Silanna Group Pty Ltd | Optical tuning of light emitting semiconductor junctions |
US10199535B2 (en) | 2014-02-22 | 2019-02-05 | Sensor Electronic Technology, Inc. | Semiconductor structure with stress-reducing buffer structure |
US9412902B2 (en) | 2014-02-22 | 2016-08-09 | Sensor Electronic Technology, Inc. | Semiconductor structure with stress-reducing buffer structure |
JP6636459B2 (ja) | 2014-05-27 | 2020-01-29 | シランナ・ユー・ブイ・テクノロジーズ・プライベート・リミテッドSilanna Uv Technologies Pte Ltd | 半導体構造と超格子とを用いた高度電子デバイス |
WO2015181648A1 (en) | 2014-05-27 | 2015-12-03 | The Silanna Group Pty Limited | An optoelectronic device |
JP6986349B2 (ja) | 2014-05-27 | 2021-12-22 | シランナ・ユー・ブイ・テクノロジーズ・プライベート・リミテッドSilanna Uv Technologies Pte Ltd | n型超格子及びp型超格子を備える電子デバイス |
US11322643B2 (en) | 2014-05-27 | 2022-05-03 | Silanna UV Technologies Pte Ltd | Optoelectronic device |
US9337023B1 (en) * | 2014-12-15 | 2016-05-10 | Texas Instruments Incorporated | Buffer stack for group IIIA-N devices |
US10181398B2 (en) | 2014-12-30 | 2019-01-15 | Sensor Electronic Technology, Inc. | Strain-control heterostructure growth |
US10032870B2 (en) * | 2015-03-12 | 2018-07-24 | Globalfoundries Inc. | Low defect III-V semiconductor template on porous silicon |
US10026872B2 (en) | 2015-06-05 | 2018-07-17 | Sensor Electronic Technology, Inc. | Heterostructure with stress controlling layer |
TW201717424A (zh) * | 2015-11-12 | 2017-05-16 | Lextar Electronics Corp | 紫外光發光二極體 |
US10418517B2 (en) | 2016-02-23 | 2019-09-17 | Silanna UV Technologies Pte Ltd | Resonant optical cavity light emitting device |
WO2017145026A1 (en) | 2016-02-23 | 2017-08-31 | Silanna UV Technologies Pte Ltd | Resonant optical cavity light emitting device |
TWI762467B (zh) * | 2017-02-22 | 2022-05-01 | 晶元光電股份有限公司 | 氮化物半導體磊晶疊層結構及其功率元件 |
CN110506338B (zh) * | 2017-04-24 | 2023-08-04 | 苏州晶湛半导体有限公司 | 一种半导体结构和制备半导体结构的方法 |
US10629770B2 (en) * | 2017-06-30 | 2020-04-21 | Sensor Electronic Technology, Inc. | Semiconductor method having annealing of epitaxially grown layers to form semiconductor structure with low dislocation density |
US10622514B1 (en) | 2018-10-15 | 2020-04-14 | Silanna UV Technologies Pte Ltd | Resonant optical cavity light emitting device |
CN111509095B (zh) | 2019-01-31 | 2022-01-04 | 财团法人工业技术研究院 | 复合式基板及其制造方法 |
JP2022161429A (ja) * | 2021-04-09 | 2022-10-21 | 住友電気工業株式会社 | 半導体積層構造、半導体装置及び半導体積層構造の製造方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63200586A (ja) * | 1987-02-17 | 1988-08-18 | Matsushita Electric Ind Co Ltd | 半導体装置 |
US7560296B2 (en) * | 2000-07-07 | 2009-07-14 | Lumilog | Process for producing an epitalixal layer of galium nitride |
FR2773261B1 (fr) * | 1997-12-30 | 2000-01-28 | Commissariat Energie Atomique | Procede pour le transfert d'un film mince comportant une etape de creation d'inclusions |
US6784074B2 (en) * | 2001-05-09 | 2004-08-31 | Nsc-Nanosemiconductor Gmbh | Defect-free semiconductor templates for epitaxial growth and method of making same |
FR2840452B1 (fr) * | 2002-05-28 | 2005-10-14 | Lumilog | Procede de realisation par epitaxie d'un film de nitrure de gallium separe de son substrat |
JP2004055864A (ja) | 2002-07-22 | 2004-02-19 | Fuji Photo Film Co Ltd | 半導体素子用基板の製造方法および半導体素子用基板ならびに半導体素子 |
JP4332720B2 (ja) * | 2003-11-28 | 2009-09-16 | サンケン電気株式会社 | 半導体素子形成用板状基体の製造方法 |
KR100576854B1 (ko) * | 2003-12-20 | 2006-05-10 | 삼성전기주식회사 | 질화물 반도체 제조 방법과 이를 이용한 질화물 반도체 |
JP4826703B2 (ja) * | 2004-09-29 | 2011-11-30 | サンケン電気株式会社 | 半導体素子の形成に使用するための板状基体 |
US7776636B2 (en) | 2005-04-25 | 2010-08-17 | Cao Group, Inc. | Method for significant reduction of dislocations for a very high A1 composition A1GaN layer |
JP4993435B2 (ja) * | 2006-03-14 | 2012-08-08 | スタンレー電気株式会社 | 窒化物半導体発光素子の製造方法 |
US20090001416A1 (en) | 2007-06-28 | 2009-01-01 | National University Of Singapore | Growth of indium gallium nitride (InGaN) on porous gallium nitride (GaN) template by metal-organic chemical vapor deposition (MOCVD) |
US20090278233A1 (en) * | 2007-07-26 | 2009-11-12 | Pinnington Thomas Henry | Bonded intermediate substrate and method of making same |
KR101137911B1 (ko) * | 2007-12-18 | 2012-05-03 | 삼성코닝정밀소재 주식회사 | 질화갈륨 기판의 제조 방법 |
JP2010098070A (ja) * | 2008-10-15 | 2010-04-30 | Sony Corp | 端面発光型半導体レーザ素子及びその製造方法 |
US7977224B2 (en) * | 2008-12-03 | 2011-07-12 | The United States Of America As Represented By The Secretary Of The Army | Method using multiple layer annealing cap for fabricating group III-nitride semiconductor device structures and devices formed thereby |
JP5313651B2 (ja) * | 2008-12-17 | 2013-10-09 | スタンレー電気株式会社 | 半導体素子の製造方法 |
KR20120103683A (ko) * | 2009-12-25 | 2012-09-19 | 소코 가가쿠 가부시키가이샤 | 애피택셜성장용 탬플릿 및 제작방법 |
JP5277270B2 (ja) * | 2010-07-08 | 2013-08-28 | 学校法人立命館 | 結晶成長方法および半導体素子 |
KR20120079393A (ko) | 2011-01-04 | 2012-07-12 | (주)세미머티리얼즈 | 반도체 발광소자의 제조방법 |
KR101246832B1 (ko) | 2011-02-18 | 2013-04-01 | 한국광기술원 | 무극성 또는 반극성 iii족 질화물 기반 발광 다이오드 및 이의 제조방법 |
-
2014
- 2014-05-01 US US14/266,900 patent/US9330906B2/en active Active
- 2014-05-01 WO PCT/US2014/036291 patent/WO2014179523A2/en active Application Filing
- 2014-05-01 JP JP2016512032A patent/JP6239735B2/ja active Active
- 2014-05-01 KR KR1020157034273A patent/KR101909919B1/ko active IP Right Grant
- 2014-05-01 EP EP14791345.3A patent/EP2992562A4/en active Pending
-
2016
- 2016-03-29 US US15/083,423 patent/US9502509B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9502509B2 (en) | 2016-11-22 |
KR20160003246A (ko) | 2016-01-08 |
WO2014179523A2 (en) | 2014-11-06 |
EP2992562A4 (en) | 2017-02-15 |
EP2992562A2 (en) | 2016-03-09 |
JP2016526281A (ja) | 2016-09-01 |
US9330906B2 (en) | 2016-05-03 |
WO2014179523A3 (en) | 2016-02-04 |
KR101909919B1 (ko) | 2018-10-19 |
US20160211331A1 (en) | 2016-07-21 |
US20140326950A1 (en) | 2014-11-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6239735B2 (ja) | 応力を解放する半導体層 | |
US9680061B2 (en) | Patterned layer design for group III nitride layer growth | |
US9966496B2 (en) | Light emitting heterostructure with partially relaxed semiconductor layer | |
KR101867867B1 (ko) | 응력-감소 버퍼 구조체를 갖는 반도체 구조체 | |
US9831382B2 (en) | Epitaxy technique for growing semiconductor compounds | |
US10297460B2 (en) | Stress relieving semiconductor layer | |
US10050175B2 (en) | Patterned layer design for group III nitride layer growth | |
KR102210744B1 (ko) | 스트레스 관리능력을 갖는 반도체 이종접합구조 | |
US10199537B2 (en) | Semiconductor structure with stress-reducing buffer structure | |
US9691939B2 (en) | Patterned layer design for group III nitride layer growth | |
US20130193480A1 (en) | Epitaxy Technique for Reducing Threading Dislocations in Stressed Semiconductor Compounds | |
US10153396B2 (en) | Patterned layer design for group III nitride layer growth | |
US10158044B2 (en) | Epitaxy technique for growing semiconductor compounds | |
US10460952B2 (en) | Stress relieving semiconductor layer | |
US10490697B2 (en) | Epitaxy technique for growing semiconductor compounds | |
WO2013070369A2 (en) | Patterned layer design for group iii nitride layer growth | |
KR20060057066A (ko) | 질화물 반도체층을 성장시키는 방법 및 이를 이용하는 질화물 반도체 발광소자 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20161226 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170110 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170406 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171003 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171101 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6239735 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |