JP6223975B2 - 光学装置の、特にコンピュテーショナルカメラ用モジュールのウェハレベルの製作 - Google Patents

光学装置の、特にコンピュテーショナルカメラ用モジュールのウェハレベルの製作 Download PDF

Info

Publication number
JP6223975B2
JP6223975B2 JP2014526351A JP2014526351A JP6223975B2 JP 6223975 B2 JP6223975 B2 JP 6223975B2 JP 2014526351 A JP2014526351 A JP 2014526351A JP 2014526351 A JP2014526351 A JP 2014526351A JP 6223975 B2 JP6223975 B2 JP 6223975B2
Authority
JP
Japan
Prior art keywords
optical
spacer
wafer
members
processing step
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014526351A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014526067A5 (OSRAM
JP2014526067A (ja
Inventor
ラドマン,ハルトムート
マルック,マティアス
ビーチ,アレクサンダー
レントゲン,ペーター
ハイムガルトナー,シュテファン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Sensors Singapore Pte Ltd
Original Assignee
Heptagon Micro Optics Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heptagon Micro Optics Pte Ltd filed Critical Heptagon Micro Optics Pte Ltd
Publication of JP2014526067A publication Critical patent/JP2014526067A/ja
Publication of JP2014526067A5 publication Critical patent/JP2014526067A5/ja
Application granted granted Critical
Publication of JP6223975B2 publication Critical patent/JP6223975B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0085—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/804—Containers or encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49718—Repairing
    • Y10T29/49748—Repairing by shaping, e.g., bending, extruding, turning, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/04—Processes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Lens Barrels (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Camera Bodies And Camera Details Or Accessories (AREA)
  • Studio Devices (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
JP2014526351A 2011-08-25 2012-08-24 光学装置の、特にコンピュテーショナルカメラ用モジュールのウェハレベルの製作 Active JP6223975B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161527355P 2011-08-25 2011-08-25
US61/527,355 2011-08-25
PCT/CH2012/000200 WO2013026174A2 (en) 2011-08-25 2012-08-24 Wafer-level fabrication of optical devices. in particular of modules for computational cameras

Publications (3)

Publication Number Publication Date
JP2014526067A JP2014526067A (ja) 2014-10-02
JP2014526067A5 JP2014526067A5 (OSRAM) 2015-10-15
JP6223975B2 true JP6223975B2 (ja) 2017-11-01

Family

ID=46969906

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2014526351A Active JP6223975B2 (ja) 2011-08-25 2012-08-24 光学装置の、特にコンピュテーショナルカメラ用モジュールのウェハレベルの製作
JP2014526352A Active JP6282225B2 (ja) 2011-08-25 2012-08-24 前方焦点距離訂正を有する光学装置のウェハレベルの製作

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014526352A Active JP6282225B2 (ja) 2011-08-25 2012-08-24 前方焦点距離訂正を有する光学装置のウェハレベルの製作

Country Status (8)

Country Link
US (2) US20140307081A1 (OSRAM)
EP (2) EP2748854B1 (OSRAM)
JP (2) JP6223975B2 (OSRAM)
KR (2) KR102056501B1 (OSRAM)
CN (2) CN103890948B (OSRAM)
SG (4) SG2014008726A (OSRAM)
TW (3) TWI567956B (OSRAM)
WO (2) WO2013026174A2 (OSRAM)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130122247A1 (en) * 2011-11-10 2013-05-16 Omnivision Technologies, Inc. Spacer Wafer For Wafer-Level Camera And Method For Manufacturing Same
US9595553B2 (en) 2012-11-02 2017-03-14 Heptagon Micro Optics Pte. Ltd. Optical modules including focal length adjustment and fabrication of the optical modules
CN105765722B (zh) 2013-11-22 2019-10-22 赫普塔冈微光有限公司 紧凑光电模块
US9977153B2 (en) 2014-02-07 2018-05-22 Heptagon Micro Optics Pte. Ltd. Stacks of arrays of beam shaping elements including stacking, self-alignment and/or self-centering features
WO2015126328A1 (en) * 2014-02-18 2015-08-27 Heptagon Micro Optics Pte. Ltd. Optical modules including customizable spacers for focal length adjustment and/or reduction of tilt, and fabrication of the optical modules
WO2015191001A1 (en) 2014-06-10 2015-12-17 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules including hybrid arrangements of beam shaping elements, and imaging devices incorporating the same
US9711552B2 (en) * 2014-08-19 2017-07-18 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules having a silicon substrate, and fabrication methods for such modules
US9507143B2 (en) 2014-09-19 2016-11-29 Intel Corporation Compact illumination system
EP3207416B1 (en) 2014-10-14 2020-02-26 Heptagon Micro Optics Pte. Ltd. Optical element stack assemblies
US20160307881A1 (en) * 2015-04-20 2016-10-20 Advanced Semiconductor Engineering, Inc. Optical sensor module and method for manufacturing the same
KR102329129B1 (ko) * 2015-05-12 2021-11-19 삼성전자주식회사 샘플값 보상을 위한 영상 부호화 방법과 그 장치, 및 샘플값 보상을 위한 영상 복호화 방법과 그 장치
WO2016191142A2 (en) * 2015-05-27 2016-12-01 Verily Life Sciences Llc Nanophotonic hyperspectral/lightfield superpixel imager
JP6619174B2 (ja) * 2015-07-31 2019-12-11 ソニーセミコンダクタソリューションズ株式会社 製造装置および方法
WO2017023211A1 (en) * 2015-08-06 2017-02-09 Heptagon Micro Optics Pte. Ltd. Optical modules including customizable spacers for focal length adjustment and/or reduction of tilt, and fabrication of the optical modules
DE102015215833A1 (de) 2015-08-19 2017-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multiaperturabbildungsvorrichtung mit Optiksubstrat
CN108700721B (zh) 2015-11-12 2021-12-31 赫普塔冈微光有限公司 光学元件堆叠组件
KR20170073910A (ko) 2015-12-21 2017-06-29 에스케이하이닉스 주식회사 라이트 필드 이미징 장치 및 그 제조방법
DE102016200285A1 (de) * 2016-01-13 2017-07-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multiaperturabbildungsvorrichtung, Abbildungssystem und Verfahren zum Erfassen eines Objektbereichs
CN108941932A (zh) * 2017-05-23 2018-12-07 东莞东阳光科研发有限公司 人工晶体制备方法
US10677964B2 (en) * 2017-10-23 2020-06-09 Omnivision Technologies, Inc. Lens wafer assembly and associated method for manufacturing a stepped spacer wafer
WO2020183600A1 (ja) 2019-03-12 2020-09-17 オリンパス株式会社 内視鏡用撮像装置、および、内視鏡
JP7654570B2 (ja) 2020-01-30 2025-04-01 古河電気工業株式会社 光モジュールおよび光学装置
US11664399B2 (en) * 2021-02-01 2023-05-30 Visera Technologies Company Limited Solid-state image sensor

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232549A (en) * 1992-04-14 1993-08-03 Micron Technology, Inc. Spacers for field emission display fabricated via self-aligned high energy ablation
DE10058305A1 (de) * 2000-11-24 2002-06-06 Wacker Siltronic Halbleitermat Verfahren zur Oberflächenpolitur von Siliciumscheiben
WO2002065165A2 (en) * 2001-02-09 2002-08-22 Digital Optics Corporation Compensation and/or variation of wafer level produced lenses and resultant structures
JP4397819B2 (ja) * 2002-09-17 2010-01-13 アンテルヨン、ベスローテン、フェンノートシャップ カメラ・デバイス、ならびに、カメラ・デバイスおよびウェハスケールパッケージの製造方法
DE102005002545A1 (de) 2005-01-19 2006-07-20 Airbus Deutschland Gmbh Energiepuffereinrichtung für ein Flugzeug
CA2558898C (en) * 2005-09-07 2013-11-05 Purdue Research Foundation Laser assisted machining process with distributed lasers
JP2007110588A (ja) * 2005-10-17 2007-04-26 Funai Electric Co Ltd 複眼撮像装置
CN101009779B (zh) 2006-01-24 2010-06-16 采钰科技股份有限公司 高精密度成像控制的影像感应模块
US7721564B2 (en) 2006-11-21 2010-05-25 B/E Aerospace, Inc. Wild frequency avionic refrigeration system and controller therefor
US7692256B2 (en) * 2007-03-23 2010-04-06 Heptagon Oy Method of producing a wafer scale package
US7812869B2 (en) * 2007-05-11 2010-10-12 Aptina Imaging Corporation Configurable pixel array system and method
KR101575915B1 (ko) * 2007-11-27 2015-12-08 헵타곤 마이크로 옵틱스 피티이. 리미티드 봉지된 렌즈 스택
EP2223173B1 (en) 2007-12-19 2013-09-04 Heptagon Micro Optics Pte. Ltd. Camera device and manufacturing methods therefor
US20090159200A1 (en) 2007-12-19 2009-06-25 Heptagon Oy Spacer element and method for manufacturing a spacer element
TWI478808B (zh) * 2007-12-19 2015-04-01 Heptagon Micro Optics Pte Ltd 製造光學元件的方法
US8319301B2 (en) * 2008-02-11 2012-11-27 Omnivision Technologies, Inc. Self-aligned filter for an image sensor
CN102037383B (zh) * 2008-03-27 2014-09-17 数字光学公司 包括至少一个复制面的光学器件及其相关方法
WO2010074743A1 (en) * 2008-12-22 2010-07-01 Tessera North America, Inc. Focus compensation for thin cameras
TW201115205A (en) 2009-03-18 2011-05-01 Artificial Muscle Inc Wafer level optical system
JP2011018974A (ja) * 2009-07-07 2011-01-27 Renesas Electronics Corp D/aコンバータ
US8193599B2 (en) * 2009-09-02 2012-06-05 Himax Semiconductor, Inc. Fabricating method and structure of a wafer level module
US8059341B2 (en) * 2009-09-23 2011-11-15 Visera Technologies Company Limited Lens assembly and method for forming the same
EP2491590B1 (en) 2009-10-20 2015-08-05 FLIR Systems Trading Belgium BVBA Focus compensation for optical elements and applications thereof
US8885257B2 (en) * 2009-10-20 2014-11-11 Flir Systems Trading Belgium Bvba Focus compensation for optical elements and applications thereof
WO2011063347A2 (en) 2009-11-20 2011-05-26 Pelican Imaging Corporation Capturing and processing of images using monolithic camera array with heterogeneous imagers
WO2011156928A2 (en) 2010-06-14 2011-12-22 Heptagon Oy Camera, and method of manufacturing a plurality of cameras

Also Published As

Publication number Publication date
CN103890949B (zh) 2017-10-03
TW201316497A (zh) 2013-04-16
TW201724487A (zh) 2017-07-01
KR102056501B1 (ko) 2019-12-16
TWI620310B (zh) 2018-04-01
CN103890948A (zh) 2014-06-25
JP6282225B2 (ja) 2018-02-21
KR20140054280A (ko) 2014-05-08
US20140299587A1 (en) 2014-10-09
WO2013026174A3 (en) 2013-04-11
CN103890949A (zh) 2014-06-25
EP2748853B1 (en) 2023-10-11
EP2748854A1 (en) 2014-07-02
EP2748853A2 (en) 2014-07-02
TWI567956B (zh) 2017-01-21
WO2013026174A2 (en) 2013-02-28
TWI582969B (zh) 2017-05-11
KR101966480B1 (ko) 2019-04-05
TW201327790A (zh) 2013-07-01
SG2014008718A (en) 2014-04-28
US10444477B2 (en) 2019-10-15
WO2013026175A1 (en) 2013-02-28
CN103890948B (zh) 2017-12-01
US20140307081A1 (en) 2014-10-16
JP2014524597A (ja) 2014-09-22
SG10201606884TA (en) 2016-10-28
EP2748854B1 (en) 2021-06-02
JP2014526067A (ja) 2014-10-02
SG2014008726A (en) 2014-04-28
SG10201606882XA (en) 2016-10-28
KR20140068984A (ko) 2014-06-09

Similar Documents

Publication Publication Date Title
JP2014526067A (ja) 光学装置の、特にコンピュテーショナルカメラ用モジュールのウェハレベルの製作
TWI629525B (zh) 包含焦距調整之光學模組及光學模組之製造
JP5634064B2 (ja) 光電子構成要素を製造する方法、およびその方法で製造された製品
JP2022019935A (ja) 半導体装置及び電子機器
CN108307095B (zh) 具有单独遮光的相机的无盖板玻璃阵列相机
TWI703344B (zh) 堆疊的晶圓透鏡及影像攝錄器
US20100321563A1 (en) Solid-state imaging unit
CN106133919A (zh) 晶元级光学组件及其制造方法
KR101168362B1 (ko) 렌즈모듈 및 그 제조방법

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150817

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20150817

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150817

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160713

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160726

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161026

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170104

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170330

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170605

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170905

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20171004

R150 Certificate of patent or registration of utility model

Ref document number: 6223975

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250