JP6221872B2 - Surface coated cutting tool - Google Patents

Surface coated cutting tool Download PDF

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JP6221872B2
JP6221872B2 JP2014059162A JP2014059162A JP6221872B2 JP 6221872 B2 JP6221872 B2 JP 6221872B2 JP 2014059162 A JP2014059162 A JP 2014059162A JP 2014059162 A JP2014059162 A JP 2014059162A JP 6221872 B2 JP6221872 B2 JP 6221872B2
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英利 淺沼
英利 淺沼
大介 風見
大介 風見
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Mitsubishi Materials Corp
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本発明は、表面被覆切削工具(以下、被覆工具という)に関し、さらに詳しくは、例えば、チタン合金、耐熱合金、ステンレス鋼等の高熱発生を伴うとともに切刃への溶着性が著しい被削材を高速切削した場合に、硬質被覆層がすぐれた高温安定性、耐熱性、耐摩耗性、耐溶着性を発揮する被覆工具に関するものである。   The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool), and more specifically, for example, a work material that is accompanied by high heat generation such as titanium alloy, heat-resistant alloy, and stainless steel and that has a remarkable weldability to a cutting blade. The present invention relates to a coated tool that exhibits high-temperature stability, heat resistance, wear resistance, and welding resistance with excellent hard coating layers when high-speed cutting is performed.

一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるインサート、被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、またインサートを着脱自在に取り付けてソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミル工具などが知られている。   In general, coated tools are used for turning and planing of work materials such as various types of steel and cast iron, inserts that can be used detachably attached to the tip of a cutting tool, drilling processing of work materials, etc. There are drills, miniature drills, solid type end mills used for chamfering, grooving, shoulder processing, etc. of the work material, etc. Also, inserts are detachably attached and cutting is performed in the same way as solid type end mills Insert type end mill tools are known.

近年、金属材料の切削加工においては高能率化の要求が高く、切削速度を高速化させることが求められている。このため、切削工具の工具基体表面を被覆する被膜に対して耐摩耗性や耐欠損性を向上させることが要求されている。   In recent years, there is a high demand for higher efficiency in cutting metal materials, and it is required to increase the cutting speed. For this reason, it is requested | required that a wear resistance and a fracture | rupture resistance should be improved with respect to the film which coat | covers the tool base | substrate surface of a cutting tool.

特許文献1には、アルミニウム酸化物を基とする硬質被覆層であって、Al1−x(O1−Y(0≦X≦0.5、0<Y≦0.4、Z>0)で表される組成を有し、この組成におけるMは、Ti,Zr,V,Nb,Mo,W,Y,Mg,Si,Bから選択される少なくとも1種の元素であるAlM(ON)系硬質被覆層が開示されている。さらに同文献には、このような硬質被覆層は、耐摩耗性と耐熱性にすぐれており、基材の温度が1000℃以下で、具体的には400〜600℃で形成できると開示されている。 Patent Document 1 discloses a hard coating layer based on an aluminum oxide, and Al 1-x M x (O 1-Y N Y ) z (0 ≦ X ≦ 0.5, 0 <Y ≦ 0. 4, Z> 0), and M in this composition is at least one element selected from Ti, Zr, V, Nb, Mo, W, Y, Mg, Si, and B An AlM (ON) hard coating layer is disclosed. Further, the same document discloses that such a hard coating layer is excellent in wear resistance and heat resistance, and can be formed at a substrate temperature of 1000 ° C. or lower, specifically 400 to 600 ° C. Yes.

また、特許文献2は、被覆工具の工具基体上に被膜を形成するものであって、この被膜が、第1超多層膜と第2超多層膜とを各々1以上交互に積層させてなる複合超多層膜を含み、前記第1超多層膜が、A1層とB層とを各々1層以上交互に積層することにより構成され、前記第2超多層膜が、A2層とC層とを各々1層以上交互に積層することにより構成され、前記A1層とA2層が、各々TiN、TiCN、TiAlNまたはTiAlCNのいずれかにより構成され、前記B層が、TiSiNまたはTiSiCNにより構成され、前記C層が、AlCrNまたはAlCrCNにより構成されることにより、耐摩耗性と耐熱性を維持しつつ、脆性の問題を低減した積層系硬質被覆層を有する被覆工具を提供することを開示している。   Further, Patent Document 2 forms a film on a tool base of a coated tool, and this film is a composite in which one or more first super multi-layer films and one or more second super multi-layer films are alternately laminated. Including a super multi-layer film, wherein the first super multi-layer film is formed by alternately laminating one or more layers each of A1 layers and B layers, and the second super multi-layer film comprises A2 layers and C layers, respectively. It is configured by alternately laminating one or more layers, the A1 layer and the A2 layer are each composed of any one of TiN, TiCN, TiAlN, or TiAlCN, the B layer is composed of TiSiN or TiSiCN, and the C layer Discloses providing a coated tool having a laminated hard coating layer with reduced brittleness problems while maintaining wear resistance and heat resistance by being composed of AlCrN or AlCrCN.

さらに、別の従来被覆工具として、例えば、図2に概略説明図で示される物理蒸着装置の1種であるアークイオンプレーティング装置に工具基体を装入し、ヒーターで工具基体を、450℃の温度に加熱した状態で、アノード電極と所定組成を有するAl−Cr合金がセットされたカソード電極(蒸発源)との間に、電流:100Aの条件でアーク放電を発生させ、同時に装置内に反応ガスとして窒素ガスを導入して窒素雰囲気とし、一方、前記工具基体には、例えば、−200Vのバイアス電圧を印加した条件で、工具基体の表面に蒸発した粒子を蒸着させることにより(Al,Cr)N層からなる硬質被覆層が形成されることも知られている(例えば、特許文献3参照)。   Further, as another conventional coated tool, for example, an arc ion plating apparatus, which is one of physical vapor deposition apparatuses shown schematically in FIG. 2, is loaded with a tool base, and the tool base is heated to 450 ° C. with a heater. While being heated to a temperature, an arc discharge is generated between the anode electrode and a cathode electrode (evaporation source) on which an Al—Cr alloy having a predetermined composition is set under the condition of current: 100 A and simultaneously reacts in the apparatus. Nitrogen gas is introduced as a gas to form a nitrogen atmosphere. On the other hand, by evaporating evaporated particles on the surface of the tool base under the condition that a bias voltage of −200 V is applied (Al, Cr, for example) ) It is also known that a hard coating layer composed of an N layer is formed (see, for example, Patent Document 3).

特開2010−236092号公報JP 2010-236092 A 国際公開2008/146727号International Publication No. 2008/146727 特開2000−271699号公報JP 2000-271699 A

ところが、近年の切削加工装置の自動化はめざましく、一方で切削加工に対する省力化および省エネ化、さらには低コスト化の要求は強く、これに伴い、切削工具には被削材の材種にできるだけ影響を受けない汎用性、すなわち、できるだけ多くの材種の切削加工が可能な切削工具が求められる傾向にあるが、(Al,Cr)N層からなる被覆層を用いた従来被覆工具においては、これを、鋼や鋳鉄などの被削材の通常切削速度での切削加工に用いた場合には問題ないが、チタン合金、耐熱合金、ステンレス鋼等を、高い発熱を伴うとともに、切刃部への衝撃性および溶着性が著しい高速切削条件で切削した場合には、(Al,Cr)N層は高硬度な皮膜であるが、その硬度や高い残留応力のため、皮膜自体が崩壊したり、剥離したりする問題があり、この結果、切刃部における欠損(微少欠け)の発生が急激に増加し、これが原因で比較的短時間で使用寿命に至るのが現状である。   However, the automation of cutting machines in recent years has been remarkable. On the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting, and as a result, cutting tools have as much influence on the type of work material as possible. However, in a conventional coated tool using a coating layer composed of an (Al, Cr) N layer, there is a tendency to be versatile, that is, a cutting tool capable of cutting as many grades as possible. Is used for cutting at normal cutting speeds of work materials such as steel and cast iron, but titanium alloys, heat-resistant alloys, stainless steel, etc. are accompanied by high heat generation and are applied to the cutting edge. When cutting under high-speed cutting conditions with remarkable impact and weldability, the (Al, Cr) N layer is a hard film, but the film itself may collapse or peel due to its hardness and high residual stress. Questions There are, as a result, occurs rapidly increased in defects in the cutting edge (small chipping), which is at present, leading to a relatively short time service life due.

例えば、特許文献1によれば、耐摩耗性と耐熱性をある程度向上させることは可能であるが、このようなAlM(ON)系硬質被覆層の問題として脆性を示すことから切削時の衝撃等により被膜自体が破壊したり剥離したりするという問題があった。
また、特許文献2による積層系硬質被覆層によっても、過酷な切削条件下においては積層構造を構成する個々の被膜自体の破壊や剥離を十分に防止することができず、結果として十分な硬質被覆層全体としての耐摩耗性を得ることができない場合があった。
そこで、本発明が解決しようとする技術的課題、すなわち、本発明の目的は、チタン合金、耐熱合金、ステンレス鋼等を、高熱発生を伴う高速切削条件で切削した場合においてもすぐれた耐熱性、耐摩耗性および耐溶着性を発揮し、長期に亘ってすぐれた切削性能を示す被覆工具を提供することである。
For example, according to Patent Document 1, although it is possible to improve the wear resistance and heat resistance to some extent, since the problem of such an AlM (ON) hard coating layer shows brittleness, impact during cutting, etc. This causes a problem that the coating itself is broken or peeled off.
Further, even with the hard coating layer of Patent Document 2, even under severe cutting conditions, the individual coatings constituting the laminated structure cannot be sufficiently prevented from being broken or peeled, resulting in a sufficient hard coating. In some cases, the wear resistance of the entire layer could not be obtained.
Therefore, the technical problem to be solved by the present invention, that is, the object of the present invention is to have excellent heat resistance even when cutting titanium alloy, heat-resistant alloy, stainless steel, etc. under high-speed cutting conditions with high heat generation, An object of the present invention is to provide a coated tool that exhibits wear resistance and welding resistance and exhibits excellent cutting performance over a long period of time.

そこで、本発明者らは、前述のような観点から、特にチタン合金、耐熱合金、ステンレス鋼等を高温発熱が伴い、かつ切刃への溶着性が著しい被削材を高速切削条件で切削加工した場合に、硬質被覆層がすぐれた耐熱性、耐摩耗性および耐溶着性を併せ持つ被覆工具を開発すべく、鋭意研究を行った。   In view of the above, the inventors of the present invention cut a workpiece with high-temperature heat generation, particularly titanium alloy, heat-resistant alloy, stainless steel, and the like, which has remarkable weldability to the cutting edge under high-speed cutting conditions. In this case, intensive research was conducted to develop a coated tool having a hard coating layer with excellent heat resistance, wear resistance and welding resistance.

その結果、次のような新規な知見を得た。
(1)(Al,Cr)(ON)層は、耐摩耗性があり、酸素を所定量含有することで耐熱性を向上させることができる。
(2)(Al,Mn)(ON)層は、Mn酸化物自身が非常に安定な物質であり、これがAl酸化物中に導入されることにより、Al酸化物の高温安定性を向上させるという効果を奏する。さらにこれをさらに発展させて、Al,Mnの複合酸窒化物とすることで、各々の酸化物と比べ耐摩耗性が向上する。その結果、切削中に熱の発生しやすい難削材などに対して、すぐれた耐熱性、耐摩耗性、耐溶着性を示す。
(3)しかしながら、前述の(Al,Cr)(ON)層、(Al,Mn)(ON)層をそれぞれ単独で用いた場合、(Al,Cr)(ON)層だけでは、耐摩耗性は確保できたとしても耐熱性に乏しく、逆に、(Al,Mn)(ON)層を単独で用いた場合、耐熱性は確保できても、耐摩耗性に乏しく切削工具の硬質被覆層として実用的ではない。また、それぞれの層の層厚を厚くして耐摩耗性を稼ごうとすると、層内に生じる残留圧縮応力の関係でチッピングが生じやすくなり、長期に亘って切削性能を維持することができない。
As a result, the following new findings were obtained.
(1) The (Al, Cr) (ON) layer has wear resistance, and heat resistance can be improved by containing a predetermined amount of oxygen.
(2) The (Al, Mn) (ON) layer is a very stable substance of Mn oxide itself, and when introduced into the Al oxide, it improves the high-temperature stability of the Al oxide. There is an effect. Furthermore, by further developing this to form a composite oxynitride of Al and Mn, the wear resistance is improved as compared with each oxide. As a result, it exhibits excellent heat resistance, wear resistance, and welding resistance to difficult-to-cut materials that easily generate heat during cutting.
(3) However, when the above-described (Al, Cr) (ON) layer and (Al, Mn) (ON) layer are respectively used alone, the wear resistance can be obtained only by the (Al, Cr) (ON) layer. Even if it can be secured, heat resistance is poor. Conversely, when an (Al, Mn) (ON) layer is used alone, it is practically used as a hard coating layer for cutting tools with poor wear resistance even if heat resistance can be secured. Not right. Further, if it is attempted to increase wear resistance by increasing the thickness of each layer, chipping is likely to occur due to the residual compressive stress generated in the layer, and the cutting performance cannot be maintained over a long period of time.

本発明は、このような知見に基づき、下地層、(Al,Cr)(ON)層からなる薄層A、(Al,Mn)(ON)層からなる薄層B、各層の平均層厚、薄層Aと薄層Bの層厚の関係、硬質被覆層全体の合計層厚などと切削性能との関係を詳しく解析した結果得られたものであって、具体的には、以下のような構成からなる。   Based on such knowledge, the present invention is a base layer, a thin layer A composed of an (Al, Cr) (ON) layer, a thin layer B composed of an (Al, Mn) (ON) layer, an average layer thickness of each layer, It was obtained as a result of detailed analysis of the relationship between the layer thickness of the thin layer A and the thin layer B, the relationship between the total thickness of the hard coating layer and the cutting performance, and specifically, Consists of configuration.

本発明は、前記研究結果に基づいてなされたものであって、
「(1) 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に硬質被覆層を形成してなる表面被覆切削工具において、
前記硬質被覆層が、
(a)前記工具基体表面に形成された0.55〜5.5μmの平均層厚を有し、かつ、
組成式:(Al1−eCr)N(ここで、eはAlとCrの合量に占めるCrの含有割合を示し、原子比で、0.25≦e≦0.55である)を満足する下地層と、
(b)0.1〜1.0μmの平均層厚を有し、かつ、
組成式:(Al1−aCr)(O1−b)(ここで、aはAlとCrの合量に占めるCrの含有割合を示し、原子比で、0.25≦a≦0.55である。また、bはOとNの合量に占めるNの含有割合を示し、原子比で、0.50≦b≦0.95)を満足するAlとTiとの複合窒酸化物層からなる薄層Aと、
(c)0.05〜0.5μmの平均層厚を有し、かつ、
組成式:(Al1−cMn)(O1−d)(ここで、cはAlとMnの合量に占めるMnの含有割合を示し、原子比で、0.10≦c≦0.50である。また、dはOとNの合量に占めるNの含有割合を示し、原子比で、0.01≦d≦0.50)を満足するAlとMnとの複合窒酸化物層からなる薄層Bであり、
前記下地層の上に前記薄層Aおよび薄層Bが交互積層し、前記下地層の層厚の方がその上部に形成した交互積層の合計層厚よりも厚く、前記薄層Aの層厚は薄層Bの層厚よりも厚く、硬質被覆層全体の合計層厚が1.0〜10.0μmであることを特徴とする表面被覆切削工具。」
を特徴とする。
The present invention has been made based on the research results,
“(1) In a surface-coated cutting tool in which a hard coating layer is formed on the surface of a tool base composed of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
The hard coating layer is
(A) having an average layer thickness of 0.55 to 5.5 μm formed on the surface of the tool substrate; and
Composition formula: (Al 1-e Cr e ) N (where e represents the content ratio of Cr in the total amount of Al and Cr, and the atomic ratio is 0.25 ≦ e ≦ 0.55) A satisfactory underlayer,
(B) having an average layer thickness of 0.1 to 1.0 μm, and
Composition formula: (Al 1-a Cr a ) (O 1-b N b ) (where a represents the content ratio of Cr in the total amount of Al and Cr, and the atomic ratio is 0.25 ≦ a ≦ In addition, b represents the content ratio of N in the total amount of O and N, and the composite nitridation of Al and Ti satisfying the atomic ratio of 0.50 ≦ b ≦ 0.95) A thin layer A composed of physical layers;
(C) having an average layer thickness of 0.05 to 0.5 μm, and
Composition formula: (Al 1-c Mn c ) (O 1-d N d ) (where c represents the content ratio of Mn in the total amount of Al and Mn, and the atomic ratio is 0.10 ≦ c ≦ In addition, d represents the content ratio of N in the total amount of O and N, and the composite nitridation of Al and Mn satisfying the atomic ratio of 0.01 ≦ d ≦ 0.50) A thin layer B composed of physical layers,
The thin layer A and the thin layer B are alternately laminated on the foundation layer, and the layer thickness of the foundation layer is thicker than the total layer thickness of the alternate lamination formed on the upper layer. Is a surface-coated cutting tool characterized in that it is thicker than the layer thickness of the thin layer B, and the total layer thickness of the entire hard coating layer is 1.0 to 10.0 μm. "
It is characterized by.

次に、本発明の被覆工具の硬質被覆層の構成層に関し、前記の通りに数値限定した理由を説明する。   Next, the reason why the numerical values of the constituent layers of the hard coating layer of the coated tool of the present invention are limited as described above will be described.

(a)工具基体上に形成する下地層の平均層厚と組成:
本発明に係る後述する薄層Aと薄層Bは、化学的に安定であることから、工具基体とも結合しにくい。すなわち、薄層Aおよび薄層Bは工具基体表面との高い密着性を得難いため、工具基体との間に下地層を設ける必要がある。下地層としては、工具基体表面との密着性にすぐれた窒化物が好適に用いられる。下地層を形成する窒化物の一部が酸化物となると工具基体表面との密着性が低下する。そのため、下地層として形成する窒化物は、その酸化開始温度が十分に高く、皮膜の形成時に酸化しないことが条件となる。下地層に用いる窒化物を組成式:(Al1−eCr)Nで表したとき、eの値が、原子比で、0.25≦e≦0.55である場合、酸化開始温度が1100℃程度となるため、切削時の高圧・高温環境下でAlが酸化し、非晶質Alの保護膜を形成するため、熱的にも安定しており、高速切削時の耐摩耗性がすぐれている。
また、下地層の平均層厚が、0.55μm未満では、下地層に要求される耐摩耗性を十分に確保することができず、一方、5.5μmを超えると、チッピング、欠損を発生しやすくなるので、下地層の平均層厚は、0.55〜5.5μmと定めた。
したがって、工具基体上には0.55〜5.5μmの平均層厚を有し、組成式:(Al1−eCr)N(ここで、eはAlとCrの合量に占めるCrの含有割合を示し、原子比で、0.25≦e≦0.55である)を満足する下地層を形成する。
(A) Average layer thickness and composition of the underlayer formed on the tool substrate:
Since the thin layer A and the thin layer B, which will be described later, according to the present invention are chemically stable, they are difficult to bond to the tool substrate. That is, since it is difficult for the thin layer A and the thin layer B to obtain high adhesion to the tool base surface, it is necessary to provide a base layer between the thin base A and the tool base. As the underlayer, a nitride excellent in adhesion to the tool base surface is preferably used. When a part of the nitride forming the base layer becomes an oxide, the adhesion to the tool base surface is lowered. Therefore, the nitride formed as the underlayer is required to have a sufficiently high oxidation start temperature and not be oxidized during the formation of the film. When the nitride used for the underlayer is represented by the composition formula: (Al 1-e Cr e ) N, when the value of e is 0.25 ≦ e ≦ 0.55 in atomic ratio, the oxidation start temperature is Since the temperature is about 1100 ° C., Al is oxidized in a high pressure / high temperature environment during cutting, and a protective film of amorphous Al 2 O 3 is formed. Abrasion is excellent.
In addition, if the average thickness of the underlayer is less than 0.55 μm, sufficient wear resistance required for the underlayer cannot be secured, while if it exceeds 5.5 μm, chipping and defects occur. Since it becomes easy, the average layer thickness of the underlayer was determined to be 0.55 to 5.5 μm.
Therefore, it has an average layer thickness of 0.55 to 5.5 μm on the tool base, and the composition formula: (Al 1-e Cr e ) N (where e is the amount of Cr in the total amount of Al and Cr) An underlayer satisfying a content ratio and satisfying an atomic ratio of 0.25 ≦ e ≦ 0.55) is formed.

(b)薄層A層を構成する(Al,Cr)(ON)層の組成:
後述する薄層Bと共に交互積層構造を構成する薄層Aの(Al1−aCr)(O1−b)層は、層全体に亘って均質な耐摩耗性と耐熱性および靭性を示すが、その構成成分であるCr成分によって、すぐれた高温強度と高温潤滑性を備えるようになり、また、Al成分によって、高温硬さと耐熱性を補完する。そのため、高温切削条件下でも低摩擦係数が維持され、すぐれた耐熱性を発揮するようになるが、Alとの合量に占めるCrの含有割合を示すa値(原子比、以下同じ)が0.25未満になると、高温強度を確保することができないために刃先の境界部分において異常損傷を生じ欠損を発生しやすくなるため長寿命を期待することはできず、一方、Alとの合量に占めるCrの含有割合を示すa値が0.55を越えると、相対的にAlの含有割合が減少し、高速切削加工で必要とされる高温硬さを確保することができないばかりか、耐摩耗性も低下し、チッピング発生を防止することが困難になることから、a値を0.25〜0.55と定めた。
OとNの合量に占めるNの含有割合を示すb(原子比)は、(Al,Cr)(ON)層の高硬度するために必須の成分Nの含有割合である。その効果を十分なものとするためには、OとNの合量に対して半分以上を占めている必要がある。しかしながら、bが0.95を超えてしまうと、相対的にOの含有割合が0.05未満となってしまい、Oの添加により耐熱性を向上させるという効果が十分に奏されなくなる。したがって、a値を0.50〜0.95と定めた。
(B) Composition of (Al, Cr) (ON) layer constituting thin layer A layer:
The (Al 1-a Cr a ) (O 1-b N b ) layer of the thin layer A that constitutes an alternate laminated structure with the thin layer B described later has uniform wear resistance, heat resistance and toughness throughout the layer. However, the Cr component, which is a constituent component, provides excellent high-temperature strength and high-temperature lubricity, and the Al component supplements high-temperature hardness and heat resistance. For this reason, a low friction coefficient is maintained even under high temperature cutting conditions, and excellent heat resistance is exhibited, but the a value (atomic ratio, the same applies hereinafter) indicating the Cr content in the total amount with Al is 0. If it is less than .25, high temperature strength cannot be secured, and abnormal damage is caused at the boundary portion of the cutting edge and defects are likely to occur, so a long life cannot be expected. When the a value indicating the Cr content ratio exceeds 0.55, the Al content ratio is relatively decreased, and not only the high-temperature hardness required for high-speed cutting can be secured, but also wear resistance. The a value was determined to be 0.25 to 0.55 because the property also deteriorated and it was difficult to prevent the occurrence of chipping.
The b (atomic ratio) indicating the content ratio of N in the total amount of O and N is the content ratio of the component N essential for increasing the hardness of the (Al, Cr) (ON) layer. In order to make the effect sufficient, it is necessary to occupy more than half of the total amount of O and N. However, if b exceeds 0.95, the content ratio of O is relatively less than 0.05, and the effect of improving heat resistance by the addition of O is not sufficiently achieved. Therefore, the a value was set to 0.50 to 0.95.

(c)薄層B層を構成する(Al,Mn)(ON)層の組成:
前述した薄層Aと共に交互積層構造を構成する薄層Bの(Al1−cMn)(O1−d)層は、層全体に亘って均質な耐摩耗性と耐熱性および靭性を示すが、その構成成分であるMn成分によって、すぐれた高温安定性を備えるようになり、また、Al、Mnの複合酸窒化物とすることで各々の酸化物と比べて耐摩耗性が向上する。その結果、切削成分によって、高温硬さと耐熱性を補完する。そのため、高温切削条件下でも低摩擦係数が維持され、すぐれた耐熱性を発揮するようになるが、Alとの合量に占めるMnの含有割合を示すc値(原子比、以下同じ)が0.10未満になると、高温強度を確保することができないために刃先の境界部分において異常損傷を生じ欠損を発生しやすくなるため長寿命を期待することはできず、一方、Alとの合量に占めるMnの含有割合を示すc値が0.50を越えると、相対的にAlの含有割合が減少し、高速切削加工で必要とされる高温硬さ確保することができないばかりか、耐摩耗性も低下し、チッピング発生を防止することが困難になることから、c値を0.10〜0.50と定めた。
OとNの合量に占めるOの含有割合を示す1−d(原子比)は、(Al,Mn)(ON)層の耐熱性を向上させるために必須の成分Oの含有割合である。その効果を十分なものとするためには、OとNの合量に対して半分以上を占めている必要がある。しかしながら、1−dが0.99を超えてしまうと、相対的にNの含有割合が0.01未満となってしまい、Nの添加により硬度を向上させるという効果が十分に奏されなくなる。したがって、d値を0.01以上0.50以下と定めた。
(C) Composition of (Al, Mn) (ON) layer constituting thin layer B layer:
The (Al 1-c Mn c ) (O 1-d N d ) layer of the thin layer B that constitutes an alternate laminated structure with the thin layer A described above has uniform wear resistance, heat resistance and toughness throughout the layer. However, the Mn component, which is a constituent component, provides excellent high-temperature stability, and by using a composite oxynitride of Al and Mn, wear resistance is improved compared to each oxide. To do. As a result, high temperature hardness and heat resistance are complemented by cutting components. Therefore, a low friction coefficient is maintained even under high temperature cutting conditions, and excellent heat resistance is exhibited. However, the c value (atomic ratio, the same applies hereinafter) indicating the content ratio of Mn in the total amount with Al is 0. If it is less than 10.10, high temperature strength cannot be ensured, so abnormal damage is caused at the boundary portion of the blade edge and defect is likely to occur, so a long life cannot be expected. When the c value indicating the Mn content ratio exceeds 0.50, the Al content ratio is relatively reduced, and not only the high-temperature hardness required for high-speed cutting cannot be secured, but also wear resistance. The c value was determined to be 0.10 to 0.50 because it was difficult to prevent the occurrence of chipping.
1-d (atomic ratio) indicating the content ratio of O in the total amount of O and N is the content ratio of the component O essential for improving the heat resistance of the (Al, Mn) (ON) layer. In order to make the effect sufficient, it is necessary to occupy more than half of the total amount of O and N. However, when 1-d exceeds 0.99, the content ratio of N is relatively less than 0.01, and the effect of improving the hardness due to the addition of N is not sufficiently achieved. Therefore, d value was defined as 0.01 or more and 0.50 or less.

(d)薄層Aおよび薄層Bの平均層厚ならびに硬質被覆層の合計層厚:
本発明の硬質被覆層は、それぞれの組成の異なる薄層Aと薄層Bとを交互に積層して構成した交互積層構造とすることで、それぞれの層の粒子の成長の粗大化が防止され、粒子の微細化が図られ、膜強度が向上するとともに、この積層構造によってクラックの伝播・進展が防止されることで耐欠損性、耐チッピング性が向上するが、薄層Aの平均層厚が0.1μm未満、薄層Bの平均層厚が0.05μm未満になると、各薄層を所定組成のものとして明確に形成することが困難であるばかりか、各薄層の有する前記のすぐれた特性を発揮することができない。一方、薄層Aの平均層厚が1.0μm、薄層Bの平均層厚が0.5μmを超えると、粒子の粗大化による膜強度の低下により、耐欠損性、耐チッピング性が低下することから、薄層A、薄層Bのそれぞれの平均層厚を0.1〜1.0μmおよび0.05〜0.5μmと定めた。
また、前述した下地層と、薄層Aおよび薄層Bとの交互積層構造とを加えた硬質被覆層の合計層厚は、1.0μm未満では、前述した交互積層構造の備えるすぐれた耐欠損性、耐チッピング性を十分に発揮することができず、一方、10.0μmを超えると、反対に、チッピング、欠損を発生しやすくなるので、硬質被覆層の合計層厚は、1.0〜10.0μmと定めた。
更に、下地層の層厚(X)の方がその上部に形成した薄層Aおよび薄層Bの交互積層の合計層厚(Y)よりも薄くなると、総厚に占める硬質膜の割合が相対的に下がってしまい、耐摩耗性を十分に確保することができないため、下地層の層厚(X)と薄層Aおよび薄層Bの交互積層の合計層厚(Y)の関係をX>Yと定めた。
(D) Average layer thickness of thin layer A and thin layer B and total layer thickness of hard coating layer:
The hard coating layer of the present invention has an alternate laminated structure in which thin layers A and thin layers B having different compositions are alternately laminated, thereby preventing the growth of particles in each layer from being coarsened. The particle size is reduced, the film strength is improved, and crack propagation and progress are prevented by this laminated structure, thereby improving the chipping resistance and chipping resistance. Is less than 0.1 μm and the average layer thickness of the thin layer B is less than 0.05 μm, it is difficult to clearly form each thin layer as having a predetermined composition. Unable to demonstrate the characteristics. On the other hand, if the average layer thickness of the thin layer A exceeds 1.0 μm and the average layer thickness of the thin layer B exceeds 0.5 μm, the chip strength and chipping resistance decrease due to the decrease in film strength due to the coarsening of the particles. Therefore, the average layer thickness of each of the thin layer A and the thin layer B was determined to be 0.1 to 1.0 μm and 0.05 to 0.5 μm.
In addition, if the total thickness of the hard coating layer including the above-described underlayer and the alternately laminated structure of the thin layers A and B is less than 1.0 μm, the excellent defect resistance provided by the above-mentioned alternately laminated structure is less than 1.0 μm. On the other hand, when the thickness exceeds 10.0 μm, chipping and defects tend to occur, so that the total thickness of the hard coating layer is 1.0 to It was determined to be 10.0 μm.
Furthermore, when the layer thickness (X) of the underlayer is thinner than the total layer thickness (Y) of the alternately laminated thin layers A and B formed thereon, the ratio of the hard film to the total thickness is relative Since the wear resistance cannot be sufficiently secured, the relationship between the layer thickness (X) of the underlayer and the total layer thickness (Y) of the alternate lamination of the thin layers A and B is X> Y was determined.

図3に示される本発明の硬質被覆層を構成する下地層を構成する(Al,Cr)N層、薄層Aを構成する(Al,Cr)(ON)層、および、薄層Bを構成する(Al,Mn)(ON)層は、例えば、図1に概略説明図で示される物理蒸着装置の1種であるアークイオンプレーティング装置に工具基体を装入し、ヒーターで装置内を、例えば、500℃の温度に加熱した状態で、
(a)アノード電極とカソード電極(蒸発源)としてのAl−Cr合金との間に、例えば、電流:110Aの条件でアーク放電を発生させ、同時に装置内に反応ガスとして窒素ガスを導入して、例えば、5.0Paの反応雰囲気とし、工具基体には、例えば、−70Vのバイアス電圧を印加した条件で所定時間蒸着することにより、工具基体表面に、所定の目標層厚の下地層である(Al,Cr)N層が形成される。
(b)アノード電極とカソード電極(蒸発源)としてのAl−Cr合金との間に、例えば、電流:110Aの条件でアーク放電を発生させ、同時に装置内雰囲気を0.5〜9.0Paの酸素窒素混合雰囲気(例えば、酸素:窒素の流量%の比が50:50)とし、工具基体には、例えば、−100Vのバイアス電圧を印加した条件で所定時間蒸着することにより、工具基体表面に、所定の目標層厚の薄層Aである(Al,Cr)(ON)層が形成される。
(c)ついで、装置内に所定組成のAl−Mn合金からなるカソード電極(蒸発源)を配置し、アノード電極とカソード電極(蒸発源)としてのAl−Mn合金との間に、例えば、電流:110Aの条件でアーク放電を発生させ、同時に装置内雰囲気を0.5〜9.0Paの酸素窒素混合雰囲気(例えば、酸素:窒素の流量%の比が50:50)とし、一方、工具基体には、例えば、−100Vのバイアス電圧を印加した条件で所定時間蒸着することにより、前記薄層A上に所定の目標層厚の薄層Bを構成する(Al,Mn)(ON)層が形成される。
前記(b)、(c)を所定の合計層厚になるまで、交互に繰り返すことにより、本発明の硬質被覆層を蒸着形成することができる。
The (Al, Cr) N layer constituting the base layer constituting the hard coating layer of the present invention shown in FIG. 3, the (Al, Cr) (ON) layer constituting the thin layer A, and the thin layer B are constituted. The (Al, Mn) (ON) layer to be used is, for example, a tool base is loaded into an arc ion plating apparatus which is one type of physical vapor deposition apparatus shown in the schematic explanatory diagram of FIG. For example, in a state heated to a temperature of 500 ° C.
(A) For example, an arc discharge is generated between the anode electrode and the Al—Cr alloy as the cathode electrode (evaporation source) under the condition of current: 110 A, and at the same time, nitrogen gas is introduced into the apparatus as a reaction gas. For example, the reaction atmosphere is 5.0 Pa, and the tool base is a base layer having a predetermined target layer thickness on the tool base surface by vapor deposition for a predetermined time, for example, under the condition that a bias voltage of −70 V is applied. An (Al, Cr) N layer is formed.
(B) For example, an arc discharge is generated between the anode electrode and the Al—Cr alloy as the cathode electrode (evaporation source) under the condition of current: 110 A, and at the same time, the atmosphere in the apparatus is 0.5 to 9.0 Pa. An oxygen-nitrogen mixed atmosphere (for example, an oxygen: nitrogen flow rate ratio of 50:50) is deposited on the tool base surface for a predetermined time under a condition where, for example, a bias voltage of −100 V is applied. Then, the (Al, Cr) (ON) layer that is the thin layer A having a predetermined target layer thickness is formed.
(C) Next, a cathode electrode (evaporation source) made of an Al—Mn alloy having a predetermined composition is disposed in the apparatus, and, for example, an electric current is provided between the anode electrode and the Al—Mn alloy as the cathode electrode (evaporation source). : Arc discharge is generated under the condition of 110A, and the atmosphere in the apparatus is set to an oxygen-nitrogen mixed atmosphere of 0.5 to 9.0 Pa (for example, the ratio of oxygen: nitrogen flow% is 50:50). For example, an (Al, Mn) (ON) layer constituting a thin layer B having a predetermined target layer thickness is formed on the thin layer A by performing deposition for a predetermined time under the condition that a bias voltage of −100 V is applied. It is formed.
By repeating the steps (b) and (c) until a predetermined total layer thickness is obtained, the hard coating layer of the present invention can be formed by vapor deposition.

本発明の被覆工具の一態様によれば、硬質被覆層が(Al,Cr)N層からなる下地層の上に(Al,Cr)(ON)層からなる薄層Aと(Al,Mn)(ON)層からなる薄層Bとの交互積層構造を有していることによって、薄層Aが奏するすぐれた耐摩耗性および耐熱性と、薄層Bが奏するすぐれた高温硬さと耐熱性および靭性との相乗効果によって、硬質被覆層は、すぐれた高温硬さ、耐熱性、高温強度、耐摩耗性、潤滑性、耐衝撃性、耐欠損性、耐チッピング性を有することから、その結果、特に、チタン合金、耐熱合金、ステンレス鋼等の大きな発熱を伴い、かつ、高負荷のかかる高速切削加工であっても、長期に亘ってすぐれた耐摩耗性、耐熱性を発揮するものである。   According to one aspect of the coated tool of the present invention, a thin layer A composed of an (Al, Cr) (ON) layer and an (Al, Mn) layer on an underlayer composed of an (Al, Cr) N layer as a hard coating layer. By having an alternately laminated structure with the thin layer B composed of the (ON) layer, the excellent wear resistance and heat resistance exhibited by the thin layer A, and the excellent high temperature hardness and heat resistance exhibited by the thin layer B, Due to the synergistic effect with toughness, the hard coating layer has excellent high temperature hardness, heat resistance, high temperature strength, wear resistance, lubricity, impact resistance, chipping resistance, chipping resistance. In particular, high wear resistance and heat resistance are exhibited over a long period of time even when high-speed cutting is performed with a large load accompanied by large heat generation such as a titanium alloy, a heat-resistant alloy, and stainless steel.

本発明被覆工具および比較被覆工具を構成する硬質被覆層を形成するのに用いたアークイオンプレーティング装置を示し、(a)は概略平面図、(b)は概略正面図である。The arc ion plating apparatus used for forming the hard coating layer which comprises this invention coated tool and a comparative coated tool is shown, (a) is a schematic plan view, (b) is a schematic front view. 従来技術を説明する従来のアークイオンプレーティング装置の概略説明図である。It is a schematic explanatory drawing of the conventional arc ion plating apparatus explaining a prior art. 本発明被覆工具を構成する硬質被覆層の縦断面膜構成図である。It is a longitudinal cross-sectional film | membrane structural view of the hard coating layer which comprises this invention coated tool.

つぎに、本発明の被覆工具を実施例により具体的に説明する。   Next, the coated tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、ボールミルで72時間湿式混合し、乾燥した後、100MPaの圧力で圧粉体にプレス成形し、この圧粉体を6Paの真空中、温度:1400℃に1時間保持の条件で焼結し、焼結後、ISO規格・CNMG120408のインサート形状をもったWC基超硬合金製の工具基体A−1〜A−6を形成した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders are blended into the composition shown in Table 1, wet mixed by a ball mill for 72 hours, dried, and then pressed into a green compact at a pressure of 100 MPa. Medium, sintered at 1400 ° C. for 1 hour, and after sintering, tool bases A-1 to A-6 made of WC-base cemented carbide having an ISO standard / CNMG120408 insert shape were formed. .

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比で、TiC/TiN=50/50)粉末、MoC粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、100MPaの圧力で圧粉体にプレス成形し、この圧粉体を2kPaの窒素雰囲気中、温度:1500℃に1時間保持の条件で焼結し、焼結後、ISO規格・CNMG120408のインサート形状をもったTiCN基サーメット製の工具基体B−1〜B−4を形成した。 In addition, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, mix these raw material powders into the composition shown in Table 2, wet mix for 24 hours with a ball mill, dry, and press-mold into green compact at 100 MPa pressure Then, this green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, a tool substrate B made of TiCN base cermet having an ISO standard / CNMG120408 insert shape was used. -1 to B-4 were formed.

(a)ついで、前記工具基体A−1〜A−6およびB−1〜B−4のそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図1に示されるアークイオンプレーティング装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部に沿って装着し、前記回転テーブルを挟んで対向する2つのカソード電極(蒸発源)を配置し、第1の電極として、下地層および薄層A形成用の所定組成を有するAl−Cr合金、第2の電極として、薄層B形成用の所定組成を有するAl−Mn合金を配置し、
(b)まず、装置内を排気して0.1 Pa以下の真空に保持しながら、ヒーターで装置内を500℃に加熱した後、回転テーブル上で自転しながら回転する工具基体に−1000Vの直流バイアス電圧を印加し、かつAl−Cr合金(カソード電極)とアノード電極との間に100Aの電流を流してアーク放電を発生させ、もって工具基体表面をボンバード洗浄し、
(c)次に装置内雰囲気を0.5〜9.0Paの窒素雰囲気に保持して、回転テーブル上で自転しながら回転する工具基体に−20〜−150Vの直流バイアス電圧を印加し、カソード電極(蒸発源)であるAl−Cr合金電極とアノード電極との間に120Aの電流を流してアーク放電を発生させて、表3に示される目標組成、目標層厚の下地層としての(Al,Cr)N層を蒸着形成した。
(d)次に装置内雰囲気を0.5〜9.0Paの酸素窒素混合雰囲気(例えば酸素:窒素の流量%の比が50:50)に保持して、回転テーブル上で自転しながら回転する工具基体に−20〜−150Vの直流バイアス電圧を印加し、カソード電極(蒸発源)であるAl−Cr合金電極とアノード電極との間に120Aの電流を流してアーク放電を発生させて、表3に示される目標組成、目標層厚の薄層Aとしての(Al,Cr)(ON)層を蒸着形成した。
(e)次に装置内雰囲気を0.5〜9.0Paの酸素窒素混合雰囲気(例えば酸素:窒素の流量%の比が50:50)に保持して、回転テーブル上で自転しながら回転する工具基体に−50〜−150Vの直流バイアス電圧を印加し、かつ、カソード電極の前記Al−Mn合金とアノード電極との間に120Aの電流を流してアーク放電を発生させ、前記薄層Aの上に、表3に示される目標組成、目標層厚の薄層Bとしての(Al,Mn)(ON)層を蒸着形成した後、カソード電極(蒸発源)とアノード電極との間のアーク放電を停止し、
前記(d)、(e)を交互に繰り返して、表3に示される合計層厚の交互積層を工具基体上の下地層の上に蒸着形成し、本発明被覆工具としての表面被覆インサート(以下、本発明被覆インサートと云う)1〜10をそれぞれ製造した。
(A) Next, each of the tool bases A-1 to A-6 and B-1 to B-4 is ultrasonically cleaned in acetone and dried, and then the arc ion plating apparatus shown in FIG. A first electrode is provided with two cathode electrodes (evaporation sources) that are mounted along the outer peripheral portion at a predetermined distance in the radial direction from the central axis on the inner rotary table, and that face each other across the rotary table. An Al—Cr alloy having a predetermined composition for forming the underlayer and the thin layer A, and an Al—Mn alloy having a predetermined composition for forming the thin layer B as the second electrode,
(B) First, the inside of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, and the inside of the apparatus is heated to 500 ° C. with a heater, and then rotated to a tool base that rotates while rotating on a rotary table. A DC bias voltage is applied, and an arc discharge is generated by flowing a current of 100 A between the Al—Cr alloy (cathode electrode) and the anode electrode, and the tool base surface is bombard washed.
(C) Next, the atmosphere in the apparatus is maintained in a nitrogen atmosphere of 0.5 to 9.0 Pa, and a DC bias voltage of -20 to -150 V is applied to the rotating tool base while rotating on the rotary table, and the cathode An arc discharge is generated by flowing a current of 120 A between an Al—Cr alloy electrode, which is an electrode (evaporation source), and an anode electrode, and (Al) as an underlayer having a target composition and a target layer thickness shown in Table 3 , Cr) N layer was deposited.
(D) Next, the atmosphere in the apparatus is maintained in an oxygen-nitrogen mixed atmosphere of 0.5 to 9.0 Pa (for example, the ratio of the flow rate% of oxygen: nitrogen is 50:50), and rotates while rotating on the rotary table. A DC bias voltage of −20 to −150 V was applied to the tool base, and a current of 120 A was passed between the Al—Cr alloy electrode as the cathode electrode (evaporation source) and the anode electrode to generate arc discharge. The (Al, Cr) (ON) layer as the thin layer A having the target composition and target layer thickness shown in FIG.
(E) Next, the atmosphere inside the apparatus is maintained in an oxygen-nitrogen mixed atmosphere of 0.5 to 9.0 Pa (for example, the ratio of the flow rate% of oxygen: nitrogen is 50:50), and rotates while rotating on the rotary table. A direct current bias voltage of −50 to −150 V is applied to the tool base, and a current of 120 A is passed between the Al—Mn alloy of the cathode electrode and the anode electrode to generate an arc discharge. On top of this, after the (Al, Mn) (ON) layer as the thin layer B having the target composition and target layer thickness shown in Table 3 is formed by vapor deposition, arc discharge between the cathode electrode (evaporation source) and the anode electrode is performed. Stop
By alternately repeating the steps (d) and (e), an alternate lamination having a total layer thickness shown in Table 3 is formed on the underlayer on the tool substrate by vapor deposition. (Referred to as a coated insert of the present invention) 1 to 10 were produced.

また、比較の目的で、
(a)前記工具基体A−1〜A−6およびB−1〜B−4のそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図1に示されるアークイオンプレーティング装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部に沿って装着し、前記回転テーブルを挟んで対向する2つのカソード電極(蒸発源)を配置し、第1の電極として、薄層A形成用の所定組成を有するAl−Cr合金、第2の電極として、薄層B形成用の所定組成を有するAl−Mn合金を配置し、
(b)まず、装置内を排気して0.1 Pa以下の真空に保持しながら、ヒーターで装置内を500℃に加熱した後、回転テーブル上で自転しながら回転する工具基体に−1000Vの直流バイアス電圧を印加し、かつAl−Cr合金(カソード電極)とアノード電極との間に100Aの電流を流してアーク放電を発生させ、もって工具基体表面をボンバード洗浄し、
(c)次に装置内雰囲気を0.5〜9.0Paの窒素雰囲気に保持して、回転テーブル上で自転しながら回転する工具基体に−20〜−150Vの直流バイアス電圧を印加し、カソード電極(蒸発源)であるAl−Cr合金電極とアノード電極との間に120Aの電流を流してアーク放電を発生させて、表4に示される目標組成、目標層厚の下地層としての(Al,Cr)N層を蒸着形成した。
(d)次に装置内雰囲気を0.5〜9.0Paの酸素窒素混合雰囲気(例えば、酸素:窒素の流量%の比が90:10)に保持して、回転テーブル上で自転しながら回転する工具基体に−20〜−150Vの直流バイアス電圧を印加し、カソード電極(蒸発源)であるAl−Cr合金電極とアノード電極との間に120Aの電流を流してアーク放電を発生させて、表4に示される目標組成、目標層厚の薄層Aとしての(Al,Cr)(ON)層を蒸着形成した。
(e)引き続いて、装置内雰囲気を0.5〜9.0Paの酸素窒素混合雰囲気(例えば酸素:窒素の流量%の比が5:95)に保持して、回転テーブル上で自転しながら回転する工具基体に−20〜−500Vの直流バイアス電圧を印加し、かつ、カソード電極の前記Al−Mn合金とアノード電極との間に120Aの電流を流してアーク放電を発生させ、工具基体の表面に、表4に示される目標組成、目標層厚の薄層Bとしての(Al,Mn)(ON)層を蒸着形成した後、カソード電極(蒸発源)とアノード電極との間のアーク放電を停止し、
前記(d)、(e)を交互に繰り返して、表4に示される合計層厚の交互積層を下地層の上に蒸着形成し、比較被覆工具としての表面被覆インサート(以下、比較被覆インサートと云う)1〜6をそれぞれ製造した。各層の形成条件(バイアス電圧、酸素分圧、窒素分圧)を同じく表4に示す。なお、比較被覆インサート1については、交互積層の形成を行わず、(Al,Cr)N層のみからなる硬質被覆層とした。
For comparison purposes,
(A) Each of the tool bases A-1 to A-6 and B-1 to B-4 is ultrasonically cleaned in acetone and dried, and then in the arc ion plating apparatus shown in FIG. Attached along the outer periphery at a predetermined distance in the radial direction from the central axis on the rotary table, two cathode electrodes (evaporation sources) facing each other across the rotary table are arranged, and the first electrode is An Al—Cr alloy having a predetermined composition for forming the thin layer A and an Al—Mn alloy having a predetermined composition for forming the thin layer B as the second electrode are disposed,
(B) First, the inside of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, and the inside of the apparatus is heated to 500 ° C. with a heater, and then rotated to a tool base that rotates while rotating on a rotary table. A DC bias voltage is applied, and an arc discharge is generated by flowing a current of 100 A between the Al—Cr alloy (cathode electrode) and the anode electrode, and the tool base surface is bombard washed.
(C) Next, the atmosphere in the apparatus is maintained in a nitrogen atmosphere of 0.5 to 9.0 Pa, and a DC bias voltage of -20 to -150 V is applied to the rotating tool base while rotating on the rotary table, and the cathode An arc discharge is generated by passing a current of 120 A between the Al—Cr alloy electrode, which is an electrode (evaporation source), and the anode electrode, and (Al) as an underlayer having a target composition and a target layer thickness shown in Table 4 , Cr) N layer was deposited.
(D) Next, the atmosphere in the apparatus is maintained in an oxygen-nitrogen mixed atmosphere of 0.5 to 9.0 Pa (for example, the oxygen: nitrogen flow rate ratio is 90:10), and rotates while rotating on the rotary table. A DC bias voltage of −20 to −150 V is applied to the tool base, and a current of 120 A is passed between the Al—Cr alloy electrode, which is the cathode electrode (evaporation source), and the anode electrode to generate arc discharge. The (Al, Cr) (ON) layer as the thin layer A having the target composition and target layer thickness shown in Table 4 was formed by vapor deposition.
(E) Subsequently, the atmosphere in the apparatus is maintained in an oxygen-nitrogen mixed atmosphere of 0.5 to 9.0 Pa (for example, the ratio of the flow rate% of oxygen: nitrogen is 5:95) and rotates while rotating on the rotary table. A DC bias voltage of −20 to −500 V is applied to the tool base to be used, and a current of 120 A is passed between the Al—Mn alloy of the cathode electrode and the anode electrode to generate an arc discharge. Further, after the (Al, Mn) (ON) layer as the thin layer B having the target composition and the target layer thickness shown in Table 4 is formed by vapor deposition, arc discharge between the cathode electrode (evaporation source) and the anode electrode is performed. Stop,
By alternately repeating the steps (d) and (e), an alternate lamination having a total layer thickness shown in Table 4 is formed on the underlayer by vapor deposition, and a surface coating insert (hereinafter referred to as a comparative coating insert) is used as a comparative coating tool. 1) to 6 were produced. The formation conditions (bias voltage, oxygen partial pressure, nitrogen partial pressure) of each layer are also shown in Table 4. In addition, about the comparison covering insert 1, it did not form alternate lamination | stacking, but was taken as the hard coating layer which consists only of an (Al, Cr) N layer.

本発明被覆インサート1〜10および比較被覆インサート1〜4について、以下の切削条件で切削試験を行った。
被削材:質量%で、Ni−19%Cr−18.5%Fe−5.2%Cd−5%Ta−3%Mo−0.9%Ti−0.5%Al−0.3%Si−0.2%Mn−0.05%Cu−0.04%Cの組成を有するNi基合金の丸棒、
切削速度: 55 m/min.、
切り込み: 2.0 mm、
送り: 0.20 mm/rev.、
切削時間: 6 分、
の条件(切削条件A)でのNi基合金の湿式連続高速高送り切削加工試験(通常の切削速度および送りは、それぞれ、35m/min.、0.15mm/rev.)、
被削材:JIS・SUS304(HB180)の丸棒、
切削速度: 145 m/min.、
切り込み: 2.5mm、
送り: 0.3mm/rev.、
切削時間: 9 分、
の条件(切削条件B)でのステンレス鋼の湿式連続高送り切削加工試験(通常の切削速度および送りは、それぞれ、120 m/min.、0.3 mm/rev.)、
被削材:質量%で、Ti−6%Al−4%Vの組成を有するTi基合金の丸棒、
切削速度: 115 m/min.、
切り込み: 2.5 mm、
送り: 0.25 mm/rev.、
切削時間: 11 分、
の条件(切削条件C)でのTi基合金の湿式連続高速高切込切削加工試験(通常の切削速度、切込および送りは、それぞれ、100 m/min.、2.0mm.、0.2 mm/rev.)、
を行い、いずれの高速切削加工試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表5、表6に示した。
About this invention coated insert 1-10 and comparative coated inserts 1-4, the cutting test was done on the following cutting conditions.
Work Material: Ni-19% Cr-18.5% Fe-5.2% Cd-5% Ta-3% Mo-0.9% Ti-0.5% Al-0.3% by mass% Ni-based alloy round bar having a composition of Si-0.2% Mn-0.05% Cu-0.04% C;
Cutting speed: 55 m / min. ,
Cutting depth: 2.0 mm,
Feed: 0.20 mm / rev. ,
Cutting time: 6 minutes,
Wet continuous high-speed high-feed cutting test of Ni-based alloy under the following conditions (cutting condition A) (normal cutting speed and feed are 35 m / min. And 0.15 mm / rev., Respectively),
Work material: JIS / SUS304 (HB180) round bar,
Cutting speed: 145 m / min. ,
Cutting depth: 2.5mm,
Feed: 0.3 mm / rev. ,
Cutting time: 9 minutes,
(Continuous cutting speed and feed rate are 120 m / min. And 0.3 mm / rev., Respectively)
Work material: Round bar of Ti base alloy having a composition of Ti-6% Al-4% V in mass%,
Cutting speed: 115 m / min. ,
Cutting depth: 2.5 mm,
Feed: 0.25 mm / rev. ,
Cutting time: 11 minutes,
Wet continuous high-speed high-cut cutting test of Ti-based alloy under the following conditions (cutting condition C) (normal cutting speed, cutting and feed are 100 m / min., 2.0 mm., 0.2 respectively. mm / rev.),
The flank wear width of the cutting edge was measured in any high-speed cutting test. The measurement results are shown in Tables 5 and 6.

実施例1と同様、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr粉末、TiN粉末、TaN粉末、およびCo粉末からなる原料粉末を、表1に示される配合組成に配合し、ボールミルで72時間湿式混合し、乾燥した後、100MPaの圧力で圧粉体にプレス成形し、この圧粉体を6Paの真空中、温度:1400℃に1時間保持の条件で焼結し、直径が13mmの工具基体形成用丸棒焼結体を形成し、さらに前記の丸棒焼結体から、研削加工にて、切刃部の直径×長さが10mm×22mmの寸法、並びにねじれ角30度の4枚刃スクエア形状をもったWC基超硬合金製の工具基体(エンドミル)A−1〜A−6をそれぞれ製造した。 As in Example 1, all of WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder having an average particle diameter of 1 to 3 μm. The raw material powder consisting of the above is blended in the composition shown in Table 1, wet mixed for 72 hours with a ball mill, dried, and then pressed into a green compact at a pressure of 100 MPa. , Temperature: Sintered at 1400 ° C. for 1 hour to form a round tool sintered body for forming a tool base having a diameter of 13 mm. WC-base cemented carbide tool bases (end mills) A-1 to A-6 having a four-blade square shape with a diameter x length of 10 mm x 22 mm and a twist angle of 30 degrees were manufactured. .

ついで、これらの工具基体(エンドミル)A−1〜A−6の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図1に示されるアークイオンプレーティング装置に装入し、実施例1と同一の条件で、表7に示される目標組成、目標層厚の(Al,Cr)N層からなる下地層と、表7に示される目標組成、目標層厚の(Al,Mn)(ON)層からなる表7に示される目標組成、目標層厚の(Al,Cr)(ON)層からなる薄層Aと(Al,Mn)(ON)層からなる薄層Bとの交互積層構造からなる表7に示される目標合計層厚の硬質被覆層を蒸着形成することにより、本発明被覆工具としての本発明表面被覆超硬製エンドミル(以下、本発明被覆エンドミルと云う)1〜10をそれぞれ製造した。   Then, the surfaces of these tool bases (end mills) A-1 to A-6 were ultrasonically cleaned in acetone and dried, and then charged into the arc ion plating apparatus shown in FIG. 1 under the same conditions as in Table 1, the target composition shown in Table 7 and the target layer thickness (Al, Cr) N layer, and the target composition shown in Table 7 and target layer thickness (Al, Mn) ( ON) Layers composed of (Al, Cr) (ON) layers with target composition and target layer thicknesses shown in Table 7 and alternating layers of thin layers B (Al, Mn) (ON) layers By forming a hard coating layer having a target total layer thickness shown in Table 7 having a structure by vapor deposition, the surface coated carbide end mill (hereinafter referred to as the present coated end mill) 1 to 10 as the coated tool of the present invention. Were manufactured respectively.

また、比較の目的で、前記工具基体(エンドミル)A−1〜A−5の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図1に示されるアークイオンプレーティング装置に装入し、実施例1と同様工程で、表8に示される形成条件(バイアス電圧、窒素分圧)を用いて、表8に示される目標組成、目標層厚の(Al,Cr)N層からなる下地層と、表8に示される目標組成、目標層厚の(Al,Cr)(ON)層からなる薄層Aと(Al,Mn)(ON)層からなる薄層Bとの交互積層構造からなる表8に示される目標合計層厚の硬質被覆層を蒸着形成することにより、比較被覆工具としての表面被覆超硬製エンドミル(以下、比較被覆エンドミルと云う)1〜5をそれぞれ製造した。なお、比較被覆エンドミル1については、交互積層の形成を行わず、(Al,Cr)N層のみの硬質被覆層とした。
つぎに、本発明被覆エンドミル1〜10および比較被覆エンドミル1〜5について、
被削材−平面寸法:100mm×250mm、厚さ:50mmの、質量%で、Ni−19%Cr−14%Co−4.5%Mo−2.5%Ti−2%Fe−1.2%Al−0.7%Mn−0.4%Siの組成を有するNi基合金の板材、
切削速度: 60 m/min.、
溝深さ(切り込み): 2 mm、
テーブル送り: 135mm/分、
の条件でのNi基合金の湿式高速溝切削加工試験(通常の切削速度および溝深さは、それぞれ、50 m/min.および1.0 mm)、
を行い、切刃部の外周刃の逃げ面摩耗幅が使用寿命の目安とされる0.1mmに至るまでの切削溝長を測定した。この測定結果を表7、8にそれぞれ示した。
For comparison purposes, the surfaces of the tool bases (end mills) A-1 to A-5 are ultrasonically cleaned in acetone and dried, and then loaded into the arc ion plating apparatus shown in FIG. Then, in the same process as in Example 1, using the formation conditions (bias voltage, nitrogen partial pressure) shown in Table 8, the target composition and target layer thickness (Al, Cr) N layers shown in Table 8 are used. Alternating layered structure of underlayer and thin layer A composed of (Al, Cr) (ON) layer having the target composition and thickness shown in Table 8 and thin layer B composed of (Al, Mn) (ON) layer Surface-coated cemented carbide end mills (hereinafter referred to as comparative coated end mills) 1 to 5 as comparative coated tools were produced by vapor-depositing and forming a hard coated layer having a target total layer thickness shown in Table 8 below. In addition, about the comparison coating | coated end mill 1, the formation of an alternating lamination was not performed but it was set as the hard coating layer of only the (Al, Cr) N layer.
Next, for the present invention coated end mills 1-10 and comparative coated end mills 1-5,
Work Material-Plane Dimensions: 100mm x 250mm, Thickness: 50mm, Mass%, Ni-19% Cr-14% Co-4.5% Mo-2.5% Ti-2% Fe-1.2 Ni-base alloy plate material having a composition of% Al-0.7% Mn-0.4% Si,
Cutting speed: 60 m / min. ,
Groove depth (cut): 2 mm,
Table feed: 135mm / min,
Wet high-speed grooving test of Ni-based alloy under the following conditions (normal cutting speed and groove depth are 50 m / min. And 1.0 mm, respectively),
The cutting groove length was measured until the flank wear width of the outer peripheral edge of the cutting edge reached 0.1 mm, which is a guide for the service life. The measurement results are shown in Tables 7 and 8, respectively.

実施例2で製造した直径が13mmの丸棒焼結体を用い、この丸棒焼結体から、研削加工にて、溝形成部の直径×長さがそれぞれ8mm×22mmの寸法、並びにねじれ角30度の2枚刃形状をもったWC基超硬合金製の工具基体(ドリル)A−1〜A−6をそれぞれ製造した。   The round bar sintered body with a diameter of 13 mm manufactured in Example 2 was used, and from this round bar sintered body, the dimensions of the groove forming part diameter × length were 8 mm × 22 mm and the twist angle by grinding. WC base cemented carbide tool bases (drills) A-1 to A-6 each having a 30-degree two-blade shape were produced.

ついで、これらの工具基体(ドリル)A−1〜A−6の切刃に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図1に示されるアークイオンプレーティング装置に装入し、実施例1と同一の条件で、表9に示される目標組成、目標層厚の(Al,Cr)N層からなる下地層と、表9に示される目標組成、目標層厚の(Al,Cr)(ON)層からなる薄層Aと、同じく表9に示される目標組成および目標層厚の(Al,Mn)(ON)層からなる薄層Bとの交互積層構造からなる同じく表9に示される目標合計層厚の硬質被覆層を蒸着形成することにより、本発明被覆工具としての本発明表面被覆超硬製ドリル(以下、本発明被覆ドリルと云う)1〜10をそれぞれ製造した。   Next, the cutting blades of these tool bases (drills) A-1 to A-6 are subjected to honing, ultrasonically cleaned in acetone, and dried in the arc ion plating apparatus shown in FIG. Under the same conditions as in Example 1, the base composition composed of (Al, Cr) N layers with the target composition and target layer thickness shown in Table 9, and the target composition and target layer thickness shown in Table 9 It is composed of an alternating laminated structure of a thin layer A composed of (Al, Cr) (ON) layers and a thin layer B composed of (Al, Mn) (ON) layers having the target composition and target layer thickness also shown in Table 9. Similarly, by forming a hard coating layer having a target total layer thickness shown in Table 9 by vapor deposition, the surface-coated carbide drills (hereinafter referred to as the present invention-coated drills) 1 to 10 as the present invention-coated tools are respectively provided. Manufactured.

また、比較の目的で、前記工具基体(ドリル)A−1、2、4〜6の表面に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図1に示されるアークイオンプレーティング装置に装入し、実施例1と同様工程で、表10に示される形成条件(バイアス電圧、窒素分圧)を用いて、表10に示される目標組成、目標層厚の(Al,Cr)N層からなる下地層と、表10に示される目標組成、目標層厚の(Al,Cr)(ON)層からなる薄層Aと、表10に示される目標組成、目標層厚の(Al,Mn)(ON)層からなる薄層Bとの交互積層構造からなる表10に示される目標合計層厚の硬質被覆層を蒸着形成することにより、比較被覆工具としての表面被覆超硬製ドリル(以下、比較被覆ドリルと云う)1〜5をそれぞれ製造した。なお、比較被覆ドリル1については、交互積層の形成を行わず、(Al,Cr)N層のみの硬質被覆層とした。   For the purpose of comparison, the surfaces of the tool bases (drills) A-1, 2, 4 to 6 are subjected to honing, ultrasonically cleaned in acetone and dried, and the arc shown in FIG. The ion plating apparatus was charged, and in the same process as in Example 1, using the formation conditions (bias voltage, nitrogen partial pressure) shown in Table 10, the target composition and target layer thickness (Al , Cr) N layer, a target composition shown in Table 10 and a thin layer A consisting of an (Al, Cr) (ON) layer with a target layer thickness, and a target composition and target layer thickness shown in Table 10. Surface coating as a comparative coating tool by vapor-depositing a hard coating layer having a target total layer thickness shown in Table 10 consisting of an alternately laminated structure with thin layers B consisting of (Al, Mn) (ON) layers. Hard drills (hereinafter referred to as comparative coated drills) 1 to 5 Each was produced. In addition, about the comparison covering drill 1, the formation of an alternating lamination was not performed but it was set as the hard coating layer only of the (Al, Cr) N layer.

つぎに、本発明被覆ドリル1〜10および比較被覆ドリル1〜5について、
被削材−平面寸法:100mm×250mm、厚さ:50mmの、質量%で、Ni−19%Cr−18.5%Fe−5.2%Cd−5%Ta−3%Mo−0.9%Ti−0.5%Al−0.3%Si−0.2%Mn−0.05%Cu−0.04%Cの組成を有するNi基合金の板材、
切削速度: 60 m/min.、
送り: 0.20 mm/rev、
穴深さ: 25 mm、
の条件でのNi基合金の湿式高速穴あけ切削加工試験(通常の切削速度および送りは、それぞれ、20m/min.および0.12mm/rev)、
を行い(水溶性切削油使用)、先端切刃面の逃げ面摩耗幅が0.3mmに至るまでの穴あけ加工数を測定した。この測定結果を表9、10にそれぞれ示した。
Next, for the present invention coated drills 1-10 and comparative coated drills 1-5,
Work Material—Plane Size: 100 mm × 250 mm, Thickness: 50 mm, Mass%, Ni-19% Cr-18.5% Fe-5.2% Cd-5% Ta-3% Mo-0.9 Ni-based alloy plate having a composition of% Ti-0.5% Al-0.3% Si-0.2% Mn-0.05% Cu-0.04% C,
Cutting speed: 60 m / min. ,
Feed: 0.20 mm / rev,
Hole depth: 25 mm,
Wet high-speed drilling machining test of Ni-based alloy under the conditions (normal cutting speed and feed are 20 m / min. And 0.12 mm / rev, respectively),
(Using water-soluble cutting oil), and the number of drilling operations was measured until the flank wear width of the cutting edge surface reached 0.3 mm. The measurement results are shown in Tables 9 and 10, respectively.

この結果得られた本発明被覆工具としての本発明被覆インサート1〜10、本発明被覆エンドミル1〜10、および本発明被覆ドリル1〜10の硬質被覆層を構成する薄層Aである(Al,Cr)(ON)層と薄層Bである(Al,Mn)(ON)層の組成、比較被覆工具としての比較被覆インサート1〜6、比較被覆エンドミル1〜5、および、比較被覆ドリル1〜5の硬質被覆層を構成する薄層Aである(Al,Cr)(ON)層と薄層Bである(Al,Mn)(ON)層の組成、ならびに下地層である(Al,Cr)N層の組成を透過型電子顕微鏡を用いてのエネルギー分散X線分析法により測定したところ、それぞれ目標組成と実質的に同じ組成を示した。   It is a thin layer A constituting the hard coating layer of the present coated inserts 1 to 10, the present coated end mills 1 to 10, and the present coated drills 1 to 10 as the present coated tool obtained as a result (Al, Cr) (ON) layer and thin layer B (Al, Mn) (ON) layer composition, comparative coated inserts 1-6 as comparative coated tools, comparative coated end mills 1-5, and comparative coated drill 1 The composition of the (Al, Cr) (ON) layer that is the thin layer A and the (Al, Mn) (ON) layer that is the thin layer B and the base layer (Al, Cr) When the composition of the N layer was measured by energy dispersive X-ray analysis using a transmission electron microscope, it showed substantially the same composition as the target composition.

また、前記硬質被覆層を構成する各層の平均層厚を走査型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に等しい平均層厚(5ヶ所の平均値)を示した。   Moreover, when the average layer thickness of each layer which comprises the said hard coating layer was cross-sectional measured using the scanning electron microscope, all showed the average layer thickness (average value of five places) substantially equal to target layer thickness. .

表3〜10に示される結果から、本発明被覆工具は、工具基体の上に所定の組成、目標層厚の下地層を形成した後、所定の組成、目標層厚の薄層Aと、所定の組成、目標層厚の薄層Bとからなる交互積層を形成した結果、薄層Aである(Al,Cr)(ON)層によって、工具基体表面に強固に密着接合した状態で、耐欠損性、高温硬さ、高温強度が向上し、薄層Bである(Al,Mn)(ON)層がすぐれた耐熱性および耐摩耗性を有するとともに、組成が異なる薄層Aと薄層Bとの交互積層による相乗効果によって、耐衝撃性、耐チッピング性、耐クラック進展性を向上させる結果、チタン合金、耐熱合金、ステンレス鋼等の高速切削加工でも、すぐれた耐欠損性が確保され、チッピングの発生なく、長期に亘ってすぐれた耐摩耗性を発揮する。これに対して、硬質被覆層を構成する各層のいずれかが本発明で規定した組成、平均層厚を逸脱する比較被覆工具においては、いずれもチタン合金、耐熱合金、ステンレス鋼の高速切削加工では、耐摩耗性が十分でなく、かつ皮膜の靭性が低下するために、切刃部にチッピングが発生するようになり、比較的短時間で使用寿命に至ることが明らかである。   From the results shown in Tables 3 to 10, the coated tool of the present invention formed an underlayer having a predetermined composition and target layer thickness on the tool base, and then a thin layer A having a predetermined composition and target layer thickness, and a predetermined layer. As a result of forming an alternate laminate composed of a thin layer B having a composition of the target layer thickness and a thin layer A, the (Al, Cr) (ON) layer, which is the thin layer A, is in a state of being firmly bonded to the tool base surface. The thin layer A and the thin layer B have different heat resistance and wear resistance, and the (Al, Mn) (ON) layer, which is the thin layer B, has improved properties, high temperature hardness, and high temperature strength. As a result of improving the impact resistance, chipping resistance, and crack progress resistance by the synergistic effect of alternating lamination, excellent chipping resistance is ensured even during high-speed cutting of titanium alloys, heat-resistant alloys, stainless steel, etc. No wear and excellent wear resistance over a long period of time To. On the other hand, in the comparative coated tool in which any one of the layers constituting the hard coating layer deviates from the composition and average layer thickness specified in the present invention, all are high-speed cutting of titanium alloy, heat-resistant alloy, and stainless steel. It is apparent that the wear resistance is not sufficient and the toughness of the film is reduced, so that chipping occurs at the cutting edge and the service life is reached in a relatively short time.

前述のように、本発明の被覆工具は、一般的な被削材の切削加工は勿論のこと、特に、チタン合金、耐熱合金、ステンレス鋼等の高速切削加工でもすぐれた耐摩耗性と耐欠損性を発揮し、長期に亘ってすぐれた切削性能を示すものであるから、切削加工装置の自動化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。   As described above, the coated tool of the present invention is excellent in wear resistance and fracture resistance in high-speed cutting such as titanium alloy, heat-resistant alloy, stainless steel as well as cutting of general work materials. Since it exhibits excellent cutting performance and exhibits excellent cutting performance over a long period of time, it can satisfactorily respond to automation of the cutting apparatus, labor saving and energy saving of cutting, and cost reduction.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に硬質被覆層を形成してなる表面被覆切削工具において、
前記硬質被覆層が、
(a)前記工具基体表面に形成された0.55〜5.5μmの平均層厚を有し、かつ、
組成式:(Al1−eCr)N(ここで、eはAlとCrの合量に占めるCrの含有割合を示し、原子比で、0.25≦e≦0.55である)を満足する下地層と、
(b)0.1〜1.0μmの平均層厚を有し、かつ、
組成式:(Al1−aCr)(O1−b)(ここで、aはAlとCrの合量に占めるCrの含有割合を示し、原子比で、0.25≦a≦0.55である。また、bはOとNの合量に占めるNの含有割合を示し、原子比で、0.50≦b≦0.95)を満足するAlとTiとの複合窒酸化物層からなる薄層Aと、
(c)0.05〜0.5μmの平均層厚を有し、かつ、
組成式:(Al1−cMn)(O1−d)(ここで、cはAlとMnの合量に占めるMnの含有割合を示し、原子比で、0.10≦c≦0.50である。また、dはOとNの合量に占めるNの含有割合を示し、原子比で、0.01≦d≦0.50)を満足するAlとMnとの複合窒酸化物層からなる薄層Bであり、
前記下地層の上に前記薄層Aおよび薄層Bが交互積層し、前記下地層の層厚の方がその上部に形成した交互積層の合計層厚よりも厚く、前記薄層Aの層厚は薄層Bの層厚よりも厚く、硬質被覆層全体の合計層厚が1.0〜10.0μmであることを特徴とする表面被覆切削工具。
In a surface-coated cutting tool formed by forming a hard coating layer on the surface of a tool base composed of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
The hard coating layer is
(A) having an average layer thickness of 0.55 to 5.5 μm formed on the surface of the tool substrate; and
Composition formula: (Al 1-e Cr e ) N (where e represents the content ratio of Cr in the total amount of Al and Cr, and the atomic ratio is 0.25 ≦ e ≦ 0.55) A satisfactory underlayer,
(B) having an average layer thickness of 0.1 to 1.0 μm, and
Composition formula: (Al 1-a Cr a ) (O 1-b N b ) (where a represents the content ratio of Cr in the total amount of Al and Cr, and the atomic ratio is 0.25 ≦ a ≦ In addition, b represents the content ratio of N in the total amount of O and N, and the composite nitridation of Al and Ti satisfying the atomic ratio of 0.50 ≦ b ≦ 0.95) A thin layer A composed of physical layers;
(C) having an average layer thickness of 0.05 to 0.5 μm, and
Composition formula: (Al 1-c Mn c ) (O 1-d N d ) (where c represents the content ratio of Mn in the total amount of Al and Mn, and the atomic ratio is 0.10 ≦ c ≦ In addition, d represents the content ratio of N in the total amount of O and N, and the composite nitridation of Al and Mn satisfying the atomic ratio of 0.01 ≦ d ≦ 0.50) A thin layer B composed of physical layers,
The thin layer A and the thin layer B are alternately laminated on the foundation layer, and the layer thickness of the foundation layer is thicker than the total layer thickness of the alternate lamination formed on the upper layer. Is a surface-coated cutting tool characterized in that it is thicker than the layer thickness of the thin layer B, and the total layer thickness of the entire hard coating layer is 1.0 to 10.0 μm.
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