JP6196684B2 - 検査装置 - Google Patents
検査装置 Download PDFInfo
- Publication number
- JP6196684B2 JP6196684B2 JP2015552247A JP2015552247A JP6196684B2 JP 6196684 B2 JP6196684 B2 JP 6196684B2 JP 2015552247 A JP2015552247 A JP 2015552247A JP 2015552247 A JP2015552247 A JP 2015552247A JP 6196684 B2 JP6196684 B2 JP 6196684B2
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- substrate
- inspection
- unit
- control unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000007689 inspection Methods 0.000 title claims description 163
- 238000003384 imaging method Methods 0.000 claims description 200
- 239000000758 substrate Substances 0.000 claims description 111
- 238000005286 illumination Methods 0.000 claims description 68
- 238000012545 processing Methods 0.000 description 25
- 238000000034 method Methods 0.000 description 24
- 238000012360 testing method Methods 0.000 description 10
- 238000004891 communication Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Supply And Installment Of Electrical Components (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2013/083255 WO2015087419A1 (fr) | 2013-12-11 | 2013-12-11 | Appareil d'inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2015087419A1 JPWO2015087419A1 (ja) | 2017-03-16 |
| JP6196684B2 true JP6196684B2 (ja) | 2017-09-20 |
Family
ID=53370760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015552247A Active JP6196684B2 (ja) | 2013-12-11 | 2013-12-11 | 検査装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6196684B2 (fr) |
| WO (1) | WO2015087419A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110791943B (zh) * | 2019-11-25 | 2020-07-31 | 创新奇智(广州)科技有限公司 | 一种智能验布机控制系统 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5563702A (en) * | 1991-08-22 | 1996-10-08 | Kla Instruments Corporation | Automated photomask inspection apparatus and method |
| JP2007263913A (ja) * | 2006-03-30 | 2007-10-11 | Shindenshi Corp | 錠剤等の外観検査装置 |
| JP2009170517A (ja) * | 2008-01-11 | 2009-07-30 | Yamaha Motor Co Ltd | 部品認識装置、表面実装機 |
| JP2009198397A (ja) * | 2008-02-22 | 2009-09-03 | Nagoya Electric Works Co Ltd | 基板検査装置および基板検査方法 |
| JP5007750B2 (ja) * | 2010-03-05 | 2012-08-22 | オムロン株式会社 | はんだ印刷状態の分析作業の支援方法およびはんだ印刷検査機 |
-
2013
- 2013-12-11 JP JP2015552247A patent/JP6196684B2/ja active Active
- 2013-12-11 WO PCT/JP2013/083255 patent/WO2015087419A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2015087419A1 (ja) | 2017-03-16 |
| WO2015087419A1 (fr) | 2015-06-18 |
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