JP6170916B2 - 質量分析計 - Google Patents

質量分析計 Download PDF

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Publication number
JP6170916B2
JP6170916B2 JP2014518577A JP2014518577A JP6170916B2 JP 6170916 B2 JP6170916 B2 JP 6170916B2 JP 2014518577 A JP2014518577 A JP 2014518577A JP 2014518577 A JP2014518577 A JP 2014518577A JP 6170916 B2 JP6170916 B2 JP 6170916B2
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JP
Japan
Prior art keywords
plasma
magnetic field
aperture
mass spectrometer
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2014518577A
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English (en)
Japanese (ja)
Other versions
JP2014524111A (ja
JP2014524111A5 (enExample
Inventor
クーリー，ジェイムズ・エドワード
コタリ，サメール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
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Agilent Technologies Inc
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Publication date
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Publication of JP2014524111A publication Critical patent/JP2014524111A/ja
Publication of JP2014524111A5 publication Critical patent/JP2014524111A5/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2014518577A 2011-06-28 2012-06-01 質量分析計 Expired - Fee Related JP6170916B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/170,282 2011-06-28
US13/170,282 US8563924B2 (en) 2011-06-28 2011-06-28 Windowless ionization device
PCT/US2012/040407 WO2013002954A2 (en) 2011-06-28 2012-06-01 Windowless ionization device

Publications (3)

Publication Number Publication Date
JP2014524111A JP2014524111A (ja) 2014-09-18
JP2014524111A5 JP2014524111A5 (enExample) 2015-07-23
JP6170916B2 true JP6170916B2 (ja) 2017-07-26

Family

ID=47389601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014518577A Expired - Fee Related JP6170916B2 (ja) 2011-06-28 2012-06-01 質量分析計

Country Status (5)

Country Link
US (1) US8563924B2 (enExample)
EP (1) EP2727130B1 (enExample)
JP (1) JP6170916B2 (enExample)
CN (1) CN103635989A (enExample)
WO (1) WO2013002954A2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8410704B1 (en) * 2011-11-30 2013-04-02 Agilent Technologies, Inc. Ionization device
JP6076838B2 (ja) * 2013-05-31 2017-02-08 住友重機械イオンテクノロジー株式会社 絶縁構造及び絶縁方法
US9029797B2 (en) 2013-07-25 2015-05-12 Agilent Technologies, Inc. Plasma-based photon source, ion source, and related systems and methods
US11605536B2 (en) * 2020-09-19 2023-03-14 Tokyo Electron Limited Cyclic low temperature film growth processes

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4476392A (en) 1981-12-28 1984-10-09 Young Robert A Photoelectron source for use in a gas chromatograph detector and mass spectrometer ion source
JP2631650B2 (ja) * 1986-12-05 1997-07-16 アネルバ株式会社 真空装置
JP3367719B2 (ja) 1993-09-20 2003-01-20 株式会社日立製作所 質量分析計および静電レンズ
US20030038236A1 (en) 1999-10-29 2003-02-27 Russ Charles W. Atmospheric pressure ion source high pass ion filter
US7106438B2 (en) * 2002-12-12 2006-09-12 Perkinelmer Las, Inc. ICP-OES and ICP-MS induction current
US7217941B2 (en) * 2003-04-08 2007-05-15 Cymer, Inc. Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
WO2005017943A2 (en) * 2003-07-17 2005-02-24 Sionex Corporation Method and apparatus for plasma generation
WO2005050172A2 (en) 2003-11-14 2005-06-02 Indiana University Research And Technology Corporation Methods and apparatus for mass spectral analysis of peptides and proteins
DE102004025841B4 (de) 2004-05-24 2015-07-09 Bruker Daltonik Gmbh Verfahren und Vorrichtung zur massenspektroskopischen Untersuchung von Analyten
US20120112051A1 (en) * 2007-06-01 2012-05-10 Jeol Usa, Inc. Atmospheric Pressure Charge-Exchange Analyte Ionization
US8101923B2 (en) 2007-11-12 2012-01-24 Georgia Tech Research Corporation System and method for spatially-resolved chemical analysis using microplasma desorption and ionization of a sample
US20100032559A1 (en) * 2008-08-11 2010-02-11 Agilent Technologies, Inc. Variable energy photoionization device and method for mass spectrometry
JP5136300B2 (ja) * 2008-09-02 2013-02-06 株式会社島津製作所 放電イオン化電流検出器
US20110109226A1 (en) * 2009-11-06 2011-05-12 Agilent Technologies, Inc. Microplasma device with cavity for vacuum ultraviolet irradiation of gases and methods of making and using the same

Also Published As

Publication number Publication date
WO2013002954A3 (en) 2013-03-07
EP2727130B1 (en) 2018-02-28
CN103635989A (zh) 2014-03-12
US20130001416A1 (en) 2013-01-03
JP2014524111A (ja) 2014-09-18
US8563924B2 (en) 2013-10-22
EP2727130A2 (en) 2014-05-07
EP2727130A4 (en) 2015-04-08
WO2013002954A2 (en) 2013-01-03

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