JP6163398B2 - 撮像素子、製造装置、製造方法 - Google Patents
撮像素子、製造装置、製造方法 Download PDFInfo
- Publication number
- JP6163398B2 JP6163398B2 JP2013193376A JP2013193376A JP6163398B2 JP 6163398 B2 JP6163398 B2 JP 6163398B2 JP 2013193376 A JP2013193376 A JP 2013193376A JP 2013193376 A JP2013193376 A JP 2013193376A JP 6163398 B2 JP6163398 B2 JP 6163398B2
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- Japan
- Prior art keywords
- shape
- photoelectric conversion
- correction unit
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/61—Noise processing, e.g. detecting, correcting, reducing or removing noise the noise originating only from the lens unit, e.g. flare, shading, vignetting or "cos4"
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/04—Simple or compound lenses with non-spherical faces with continuous faces that are rotationally symmetrical but deviate from a true sphere, e.g. so called "aspheric" lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/804—Containers or encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B2003/0093—Simple or compound lenses characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2209/00—Details of colour television systems
- H04N2209/04—Picture signal generators
- H04N2209/041—Picture signal generators using solid-state devices
- H04N2209/042—Picture signal generators using solid-state devices having a single pick-up sensor
- H04N2209/047—Picture signal generators using solid-state devices having a single pick-up sensor using multispectral pick-up elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Lenses (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Studio Devices (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013193376A JP6163398B2 (ja) | 2013-09-18 | 2013-09-18 | 撮像素子、製造装置、製造方法 |
| KR1020167006374A KR102310376B1 (ko) | 2013-09-18 | 2014-09-10 | 촬상 장치, 제조 장치, 제조 방법, 및 전자 기기 |
| PCT/JP2014/004647 WO2015040825A2 (en) | 2013-09-18 | 2014-09-10 | Imaging device, manufacturing apparatus, manufacturing method, and electronic apparatus |
| US14/911,590 US10401619B2 (en) | 2013-09-18 | 2014-09-10 | Imaging device, manufacturing apparatus, manufacturing method, and electronic apparatus |
| CN201480050326.3A CN105612619B (zh) | 2013-09-18 | 2014-09-10 | 成像器件、制造装置、制造方法以及电子装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013193376A JP6163398B2 (ja) | 2013-09-18 | 2013-09-18 | 撮像素子、製造装置、製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015061193A JP2015061193A (ja) | 2015-03-30 |
| JP2015061193A5 JP2015061193A5 (enExample) | 2016-03-10 |
| JP6163398B2 true JP6163398B2 (ja) | 2017-07-12 |
Family
ID=51628417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013193376A Active JP6163398B2 (ja) | 2013-09-18 | 2013-09-18 | 撮像素子、製造装置、製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10401619B2 (enExample) |
| JP (1) | JP6163398B2 (enExample) |
| KR (1) | KR102310376B1 (enExample) |
| CN (1) | CN105612619B (enExample) |
| WO (1) | WO2015040825A2 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6918409B2 (ja) * | 2017-01-26 | 2021-08-11 | ソニーセミコンダクタソリューションズ株式会社 | カメラモジュールおよびその製造方法、並びに電子機器 |
| JP2018200980A (ja) | 2017-05-29 | 2018-12-20 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置および固体撮像素子、並びに電子機器 |
| JP2018200423A (ja) | 2017-05-29 | 2018-12-20 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置、および電子機器 |
| JP7146376B2 (ja) | 2017-08-31 | 2022-10-04 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置、および電子機器 |
| US12306382B2 (en) | 2018-06-08 | 2025-05-20 | Sony Semiconductor Solutions Corporation | Imaging device |
| DE112019002909B4 (de) | 2018-06-08 | 2024-05-23 | Sony Semiconductor Solutions Corporation | Bildgebungsvorrichtung |
| KR102725516B1 (ko) | 2018-06-08 | 2024-11-01 | 소니 세미컨덕터 솔루션즈 가부시키가이샤 | 촬상 장치 |
| KR102724357B1 (ko) | 2018-06-08 | 2024-10-30 | 소니 세미컨덕터 솔루션즈 가부시키가이샤 | 촬상 장치 |
| JP2019213151A (ja) | 2018-06-08 | 2019-12-12 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
| JP2020068302A (ja) | 2018-10-24 | 2020-04-30 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
| EP3982410B1 (en) | 2019-06-06 | 2025-09-10 | Sony Semiconductor Solutions Corporation | Imaging device |
| CN110365886A (zh) * | 2019-08-01 | 2019-10-22 | 珠海格力电器股份有限公司 | 一种光学防抖摄像头模组 |
| US12107103B2 (en) | 2019-11-13 | 2024-10-01 | Sony Semiconductor Solutions Corporation | Imaging apparatus and electronic equipment for peeling off prevention in lens |
| KR102813299B1 (ko) * | 2019-12-24 | 2025-05-28 | 삼성전자주식회사 | 이미지 장치 및 이미지 센싱 방법 |
| WO2021166672A1 (ja) * | 2020-02-20 | 2021-08-26 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置、電子機器 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1062609A (ja) * | 1996-08-22 | 1998-03-06 | Nikon Corp | マイクロレンズ及び該レンズを用いた撮像装置 |
| JPH10229180A (ja) * | 1997-02-14 | 1998-08-25 | Sony Corp | 固体撮像素子 |
| JP4270689B2 (ja) * | 1999-11-24 | 2009-06-03 | 本田技研工業株式会社 | 太陽光発電装置 |
| US6702483B2 (en) * | 2000-02-17 | 2004-03-09 | Canon Kabushiki Kaisha | Optical element |
| KR100477784B1 (ko) * | 2000-08-31 | 2005-03-22 | 매그나칩 반도체 유한회사 | 트렌치 내부의 공기로 이루어지는 집광층을 구비하는이미지 센서 및 그 제조 방법 |
| JP4776181B2 (ja) | 2004-06-02 | 2011-09-21 | 三菱電機株式会社 | 照明制御装置、照明装置、照明制御システム及び照明システム |
| JP4599497B2 (ja) | 2005-03-18 | 2010-12-15 | ヤンマー株式会社 | 根菜作物収穫機 |
| JP4538353B2 (ja) | 2005-03-25 | 2010-09-08 | 富士フイルム株式会社 | 光電変換膜積層型カラー固体撮像素子 |
| JP4456040B2 (ja) | 2005-06-17 | 2010-04-28 | パナソニック株式会社 | 固体撮像素子 |
| JP2007184322A (ja) * | 2006-01-04 | 2007-07-19 | Sony Corp | 固体撮像装置およびその製造方法、並びにカメラ |
| JP2007189021A (ja) * | 2006-01-12 | 2007-07-26 | Fujifilm Corp | 固体撮像素子及び固体撮像素子の製造方法 |
| TW200913238A (en) | 2007-06-04 | 2009-03-16 | Sony Corp | Optical member, solid state imaging apparatus, and manufacturing method |
| US7729055B2 (en) * | 2008-03-20 | 2010-06-01 | Aptina Imaging Corporation | Method and apparatus providing concave microlenses for semiconductor imaging devices |
| JP5671789B2 (ja) * | 2009-08-10 | 2015-02-18 | ソニー株式会社 | 固体撮像装置とその製造方法および撮像装置 |
| WO2011050496A1 (en) * | 2009-10-30 | 2011-05-05 | Carestream Health, Inc. | Intraoral camera with liquid lens |
| US8878123B2 (en) * | 2011-03-11 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Lens sheet and photoelectric conversion module |
| WO2014087726A1 (ja) * | 2012-12-03 | 2014-06-12 | 三菱電機株式会社 | 半導体レーザ装置 |
-
2013
- 2013-09-18 JP JP2013193376A patent/JP6163398B2/ja active Active
-
2014
- 2014-09-10 KR KR1020167006374A patent/KR102310376B1/ko not_active Expired - Fee Related
- 2014-09-10 WO PCT/JP2014/004647 patent/WO2015040825A2/en not_active Ceased
- 2014-09-10 CN CN201480050326.3A patent/CN105612619B/zh not_active Expired - Fee Related
- 2014-09-10 US US14/911,590 patent/US10401619B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20160202475A1 (en) | 2016-07-14 |
| WO2015040825A2 (en) | 2015-03-26 |
| CN105612619B (zh) | 2019-09-13 |
| KR20160058779A (ko) | 2016-05-25 |
| JP2015061193A (ja) | 2015-03-30 |
| KR102310376B1 (ko) | 2021-10-08 |
| CN105612619A (zh) | 2016-05-25 |
| WO2015040825A3 (en) | 2015-05-21 |
| US10401619B2 (en) | 2019-09-03 |
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