JP6150500B2 - 配列用マスク - Google Patents
配列用マスク Download PDFInfo
- Publication number
- JP6150500B2 JP6150500B2 JP2012256573A JP2012256573A JP6150500B2 JP 6150500 B2 JP6150500 B2 JP 6150500B2 JP 2012256573 A JP2012256573 A JP 2012256573A JP 2012256573 A JP2012256573 A JP 2012256573A JP 6150500 B2 JP6150500 B2 JP 6150500B2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- mask
- shape
- solder ball
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910000679 solder Inorganic materials 0.000 claims description 66
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 37
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 238000005323 electroforming Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000004907 flux Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/71—Means for bonding not being attached to, or not being formed on, the surface to be connected
- H01L24/72—Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/1012—Auxiliary members for bump connectors, e.g. spacers
- H01L2224/10122—Auxiliary members for bump connectors, e.g. spacers being formed on the semiconductor or solid-state body to be connected
- H01L2224/10135—Alignment aids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012256573A JP6150500B2 (ja) | 2012-11-22 | 2012-11-22 | 配列用マスク |
KR1020130096587A KR20140066080A (ko) | 2012-11-22 | 2013-08-14 | 배열용 마스크 |
CN201310383108.9A CN103839843A (zh) | 2012-11-22 | 2013-08-29 | 排列用掩模 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012256573A JP6150500B2 (ja) | 2012-11-22 | 2012-11-22 | 配列用マスク |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016171741A Division JP6277239B2 (ja) | 2016-09-02 | 2016-09-02 | 配列用マスク |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014107282A JP2014107282A (ja) | 2014-06-09 |
JP2014107282A5 JP2014107282A5 (ru) | 2015-03-12 |
JP6150500B2 true JP6150500B2 (ja) | 2017-06-21 |
Family
ID=50803223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012256573A Active JP6150500B2 (ja) | 2012-11-22 | 2012-11-22 | 配列用マスク |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6150500B2 (ru) |
KR (1) | KR20140066080A (ru) |
CN (1) | CN103839843A (ru) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6381322B2 (ja) * | 2014-07-07 | 2018-08-29 | マクセルホールディングス株式会社 | 配列用マスク |
TW201602715A (zh) * | 2014-07-07 | 2016-01-16 | Hitachi Maxell | 配列用遮罩及其製造方法 |
TWI582873B (zh) * | 2015-02-26 | 2017-05-11 | Hitachi Maxell | A masking method for manufacturing the same, and a method of manufacturing the solder bump |
TWI610376B (zh) * | 2016-01-19 | 2018-01-01 | 日立麥克賽爾股份有限公司 | 配列用遮罩及其製造方法、焊料凸塊之形成方法 |
JP2018170529A (ja) * | 2018-07-31 | 2018-11-01 | マクセルホールディングス株式会社 | 配列用マスク |
JP7170456B2 (ja) * | 2018-08-09 | 2022-11-14 | マクセル株式会社 | 配列用マスク |
JP7256083B2 (ja) | 2019-07-02 | 2023-04-11 | マクセル株式会社 | 配列用マスク |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3497550B2 (ja) * | 1994-03-14 | 2004-02-16 | 株式会社東芝 | バンプの形成方法 |
JPH08264932A (ja) * | 1995-03-23 | 1996-10-11 | Hitachi Techno Eng Co Ltd | はんだバンプ形成法 |
JP2004253770A (ja) * | 2003-01-31 | 2004-09-09 | Hitachi Metals Ltd | 導電性ボールの配列方法および配列装置 |
JP2009182068A (ja) * | 2008-01-30 | 2009-08-13 | Kyushu Hitachi Maxell Ltd | 配列用マスク及びその製造方法 |
JP2012227466A (ja) * | 2011-04-22 | 2012-11-15 | Bonmaaku:Kk | ボール搭載マスク |
-
2012
- 2012-11-22 JP JP2012256573A patent/JP6150500B2/ja active Active
-
2013
- 2013-08-14 KR KR1020130096587A patent/KR20140066080A/ko not_active Application Discontinuation
- 2013-08-29 CN CN201310383108.9A patent/CN103839843A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN103839843A (zh) | 2014-06-04 |
KR20140066080A (ko) | 2014-05-30 |
JP2014107282A (ja) | 2014-06-09 |
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