JP6138897B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP6138897B2
JP6138897B2 JP2015238692A JP2015238692A JP6138897B2 JP 6138897 B2 JP6138897 B2 JP 6138897B2 JP 2015238692 A JP2015238692 A JP 2015238692A JP 2015238692 A JP2015238692 A JP 2015238692A JP 6138897 B2 JP6138897 B2 JP 6138897B2
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JP
Japan
Prior art keywords
rotor
stator
vacuum pump
pump
pure
Prior art date
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JP2015238692A
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English (en)
Japanese (ja)
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JP2016109137A (ja
Inventor
ヤン・ホフマン
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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Priority claimed from DE102014118083.6A external-priority patent/DE102014118083A1/de
Application filed by プファイファー・ヴァキューム・ゲーエムベーハー filed Critical プファイファー・ヴァキューム・ゲーエムベーハー
Publication of JP2016109137A publication Critical patent/JP2016109137A/ja
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Publication of JP6138897B2 publication Critical patent/JP6138897B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2015238692A 2014-12-08 2015-12-07 真空ポンプ Active JP6138897B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102014118083.6A DE102014118083A1 (de) 2014-12-08 2014-12-08 Turbomolekularpumpe
DE102014118083.6 2014-12-08
EP15177253.0 2015-07-17
EP15177253.0A EP3032106B1 (de) 2014-12-08 2015-07-17 Vakuumpumpe

Publications (2)

Publication Number Publication Date
JP2016109137A JP2016109137A (ja) 2016-06-20
JP6138897B2 true JP6138897B2 (ja) 2017-05-31

Family

ID=57003097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015238692A Active JP6138897B2 (ja) 2014-12-08 2015-12-07 真空ポンプ

Country Status (2)

Country Link
EP (1) EP3032106B1 (de)
JP (1) JP6138897B2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4293232A1 (de) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pumpe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (de) * 1959-12-17
JPH03237295A (ja) * 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
JPH09303288A (ja) * 1996-05-16 1997-11-25 Daikin Ind Ltd ターボ分子ポンプの翼
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102006020081A1 (de) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor- oder Statorscheibe für eine Molekularpumpe
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets

Also Published As

Publication number Publication date
EP3032106B1 (de) 2020-02-12
JP2016109137A (ja) 2016-06-20
EP3032106A1 (de) 2016-06-15

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