JP6138286B2 - 色情報を測定することができる3次元形状測定装置 - Google Patents
色情報を測定することができる3次元形状測定装置 Download PDFInfo
- Publication number
- JP6138286B2 JP6138286B2 JP2015561283A JP2015561283A JP6138286B2 JP 6138286 B2 JP6138286 B2 JP 6138286B2 JP 2015561283 A JP2015561283 A JP 2015561283A JP 2015561283 A JP2015561283 A JP 2015561283A JP 6138286 B2 JP6138286 B2 JP 6138286B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measurement object
- color information
- adjusting unit
- dimensional shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 claims description 82
- 230000003287 optical effect Effects 0.000 claims description 45
- 230000005540 biological transmission Effects 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 16
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000010409 thin film Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/506—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors measuring the colour produced by screens, monitors, displays or CRTs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8845—Multiple wavelengths of illumination or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
Claims (5)
- 干渉計を用いて測定対象物の形状を測定する3次元形状測定装置において、
光を放出する光源と、
前記光源から放出された光を反射させ、測定対象物によって反射された光を透過させる光分割器と、
前記光分割器によって反射された光を前記測定対象物に集束させるレンズ部と、
前記測定対象物から反射される光を検出する光検出部と、
前記光源と前記光分割器との間の光経路上に配置され、前記光源の中心領域から放出される光を遮断して前記レンズ部で発生する光の干渉を弱化させる光調節部とを含み、
前記光調節部は、前記光源と前記光分割器との間の光経路上に選択的に装着され、
前記光調節部と前記光分割器との間の光経路上に配置され、前記光調節部を通過した光の一部を遮断し、前記レンズ部の倍率に応じて、測定対象物に入射される光を可変的に調節する補助光調節部をさらに含む
ことを特徴とする色情報を測定することができる3次元形状測定装置。 - 前記光検出部は、干渉光測定に使用される第1カメラと色情報測定に使用される第2カメラを含み、前記光検出部と前記光分割器との間の光経路に設けられ、前記測定対象物から反射された光の一部を透過させて前記第1カメラに入射させるとともに、前記測定対象物から反射された光の一部を反射させて前記第2カメラに入射させる第2光分割器をさらに含むことを特徴とする請求項1に記載の色情報を測定することができる3次元形状測定装置。
- 前記光調節部は、光を透過させる透過部が備えられる本体部と、前記透過部の内部に設けられて光を遮断する光絞りを含み、
前記光源から放出された光が透過する光経路を前記透過部の外面と前記光絞りの外面との間の領域に制限し、前記光源の中心領域から放出される光が測定対象物に入射することを弱化させることを特徴とする請求項1に記載の色情報を測定することができる3次元形状測定装置。 - 前記光絞りは、円形、多角形及び棒状のうちの少なくともいずれか1つで設けられることを特徴とする請求項3記載の色情報を測定することができる3次元形状測定装置。
- 前記補助光調節部は、光を透過させる開口部が備えられ、
前記光調節部を透過した光のうちで一部が前記開口部を透過して測定対象物に到達することを特徴とする請求項1に記載の色情報を測定することができる3次元形状測定装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20130028630A KR101462848B1 (ko) | 2013-03-18 | 2013-03-18 | 색정보를 측정할 수 있는 3차원 형상 측정 장치 |
KR10-2013-0028630 | 2013-03-18 | ||
PCT/KR2014/002217 WO2014148781A1 (ko) | 2013-03-18 | 2014-03-17 | 색정보를 측정할 수 있는 3차원 형상 측정 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016510113A JP2016510113A (ja) | 2016-04-04 |
JP6138286B2 true JP6138286B2 (ja) | 2017-05-31 |
Family
ID=51580392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015561283A Expired - Fee Related JP6138286B2 (ja) | 2013-03-18 | 2014-03-17 | 色情報を測定することができる3次元形状測定装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9696144B2 (ja) |
JP (1) | JP6138286B2 (ja) |
KR (1) | KR101462848B1 (ja) |
TW (1) | TWI504855B (ja) |
WO (1) | WO2014148781A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3436768A1 (en) * | 2016-04-01 | 2019-02-06 | The University of Liverpool | Optical interferometry apparatus and method |
EP3477252A1 (de) * | 2017-10-25 | 2019-05-01 | Unity Semiconductor GmbH | Anordnung zur erfassung des oberflächenprofils einer objektoberfläche mittels interferometrischer abstandsmessung |
TWI707308B (zh) * | 2019-07-25 | 2020-10-11 | 大陸商富泰華工業(深圳)有限公司 | 基於單色光之物體檢測方法及檢測系統 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10281739A (ja) * | 1997-04-08 | 1998-10-23 | Nikon Corp | 形状測定装置 |
KR100927560B1 (ko) * | 2002-01-29 | 2009-11-23 | 가부시키가이샤 니콘 | 이미지 형성 상태 조정 시스템, 노광 방법 및 노광 장치, 그리고 프로그램 및 정보 기록 매체 |
KR100672818B1 (ko) * | 2006-01-26 | 2007-01-22 | 주식회사 고영테크놀러지 | 3차원형상 측정방법 |
EP1921867B1 (en) * | 2006-10-17 | 2016-05-25 | Harman Becker Automotive Systems GmbH | Sensor assisted video compression |
KR101274517B1 (ko) * | 2007-11-13 | 2013-06-13 | 지고 코포레이션 | 편광 스캐닝을 이용한 간섭계 |
KR100939537B1 (ko) * | 2007-12-14 | 2010-02-03 | (주) 인텍플러스 | 표면 형상 측정 시스템 및 그를 이용한 측정 방법 |
US8120781B2 (en) * | 2008-11-26 | 2012-02-21 | Zygo Corporation | Interferometric systems and methods featuring spectral analysis of unevenly sampled data |
KR101640935B1 (ko) * | 2010-01-22 | 2016-07-20 | 주식회사 고영테크놀러지 | 3차원 형상 측정장치 |
NL2006935A (en) * | 2010-06-28 | 2011-12-29 | Asml Netherlands Bv | Inspection apparatus and method. |
WO2014126778A2 (en) * | 2013-02-12 | 2014-08-21 | Zygo Corporation | Surface topography interferometer with surface color |
GB201404468D0 (en) * | 2014-03-13 | 2014-04-30 | Givaudan Sa | Process |
WO2016045945A1 (en) * | 2014-09-26 | 2016-03-31 | Asml Netherlands B.V. | Inspection apparatus and device manufacturing method |
-
2013
- 2013-03-18 KR KR20130028630A patent/KR101462848B1/ko active IP Right Grant
-
2014
- 2014-03-17 WO PCT/KR2014/002217 patent/WO2014148781A1/ko active Application Filing
- 2014-03-17 US US14/777,653 patent/US9696144B2/en not_active Expired - Fee Related
- 2014-03-17 JP JP2015561283A patent/JP6138286B2/ja not_active Expired - Fee Related
- 2014-03-18 TW TW103110122A patent/TWI504855B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI504855B (zh) | 2015-10-21 |
US20160102970A1 (en) | 2016-04-14 |
JP2016510113A (ja) | 2016-04-04 |
KR101462848B1 (ko) | 2014-11-18 |
TW201437604A (zh) | 2014-10-01 |
CN105190227A (zh) | 2015-12-23 |
WO2014148781A1 (ko) | 2014-09-25 |
US9696144B2 (en) | 2017-07-04 |
KR20140114156A (ko) | 2014-09-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10184875B2 (en) | Apparatus and method for determining the particle size and/or the particle shape of particles in a particle stream | |
US10883944B2 (en) | Inspection system and method of inspection | |
TWI464362B (zh) | 用於測量物體高度及獲得其對焦圖像的裝置與方法 | |
JP5895305B2 (ja) | 検査用照明装置及び検査用照明方法 | |
JPWO2014178294A1 (ja) | 標本観察装置及び標本観察方法 | |
JP2016164675A5 (ja) | ||
US20130093854A1 (en) | Three dimensional shape measurement apparatus, control method therefor, and storage medium | |
US20130258324A1 (en) | Surface defect detecting apparatus and method of controlling the same | |
JP6138286B2 (ja) | 色情報を測定することができる3次元形状測定装置 | |
TW201518845A (zh) | 投影機 | |
JP2005258622A (ja) | 三次元情報取得システムおよび三次元情報取得方法 | |
JP2018032005A (ja) | オートフォーカスシステム、方法及び画像検査装置 | |
JP5733846B2 (ja) | デジタル光学技術を用いた厚さ測定装置及び方法 | |
KR101239409B1 (ko) | 2d 형상 정보와 3d 형상 정보의 동시 획득이 가능하며 레이저와 백색광을 광원으로 한 위상천이기반 형상측정장치 및 형상측정방법 | |
JP2019080804A5 (ja) | ||
US20220257114A1 (en) | Confocal and multi-scatter ophthalmoscope | |
JP2013122393A (ja) | 欠陥検査装置および欠陥検査方法 | |
KR20160087057A (ko) | 레이저 어닐링 장치 | |
JP2014190733A (ja) | カラーフィルタの色認識方法 | |
JP2015224912A (ja) | 欠陥測定装置及び欠陥測定方法 | |
WO2018235709A1 (ja) | 測距カメラおよび測距方法 | |
JP2015161859A (ja) | 観察装置 | |
JP7458617B1 (ja) | 検査用照明装置及び照明光学系及び検査システム | |
JP2005106820A5 (ja) | ||
JP2018054454A5 (ja) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160726 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160802 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20161102 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161201 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170208 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170418 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170425 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6138286 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |