JP6130880B2 - キャプダクタアセンブリに関連する技術及び構成 - Google Patents
キャプダクタアセンブリに関連する技術及び構成 Download PDFInfo
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- JP6130880B2 JP6130880B2 JP2015139616A JP2015139616A JP6130880B2 JP 6130880 B2 JP6130880 B2 JP 6130880B2 JP 2015139616 A JP2015139616 A JP 2015139616A JP 2015139616 A JP2015139616 A JP 2015139616A JP 6130880 B2 JP6130880 B2 JP 6130880B2
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Description
Claims (24)
- 集積回路アセンブリ(ICアセンブリ)であって、
開口を有する複数のビルドアップ層と、
半導体ウェハと、前記半導体ウェハの第1面上に配置され、少なくとも部分的に電気絶縁性材料に埋め込まれた複数のインダクタと、前記半導体ウェハの前記第1面に対向する前記半導体ウェハの第2面上に配置される複数のコンデンサとを有し、前記開口内に配置される、ディスクリートチップであるアセンブリと、
前記電気絶縁性材料の表面上に配置され、前記複数のインダクタに電気的に連結される第1の複数の相互接続構造であって、前記複数のインダクタを前記第1の複数の相互接続構造上に配置されるダイに電気的に連結する第1の複数の相互接続構造と、
前記複数のコンデンサを前記ダイに電気的に連結する第2の複数の相互接続構造と
を備え、
前記第2の複数の相互接続構造は、前記複数のビルドアップ層の複数のビアと、前記複数のコンデンサの複数の端子とを電気的に連結する追加のビルドアップ層を含む
ICアセンブリ。 - 前記複数のインダクタは、複数の磁心インダクタ(MCI)又は複数の空心インダクタ(ACI)からなる群から選択される
請求項1に記載のICアセンブリ。 - 前記複数のコンデンサは、前記複数のコンデンサを前記半導体ウェハに物理的に連結する接着層上に配置される
請求項1に記載のICアセンブリ。 - 前記複数のコンデンサは、複数のディスクリートセラミックコンデンサを含み、前記第2の複数の相互接続構造は、前記複数のディスクリートセラミックコンデンサの複数の金属端子を含む
請求項3に記載のICアセンブリ。 - 前記電気絶縁性材料が第1の電気絶縁性材料であり、前記複数のコンデンサが複数の金属−絶縁体−金属コンデンサ(複数のMIMコンデンサ)を含み、前記第2の複数の相互接続構造が前記複数のコンデンサの上方に配置される第2の電気絶縁性材料の表面に配置される
請求項1に記載のICアセンブリ。 - 前記ダイはプロセッサである
請求項1から5のいずれか一項に記載のICアセンブリ。 - モジュールの製造方法であって、
ウェハを提供する段階と、前記ウェハの第1面上に複数のインダクタを形成する段階と、前記複数のインダクタの上方に電気絶縁性材料を堆積し、少なくとも部分的に前記複数のインダクタを前記電気絶縁性材料に埋め込む段階と、前記ウェハの前記第1面と対向して配置される前記ウェハの第2面上に、複数のコンデンサを形成する段階とにより、ディスクリートチップであるアセンブリを提供する段階と、
複数のビルドアップ層を提供する段階と、
前記複数のビルドアップ層に開口を形成する段階と、
前記開口内に前記アセンブリを配置する段階と、
前記電気絶縁性材料の表面上に配置され、前記複数のインダクタに電気的に連結される第1の複数の相互接続構造であって、前記複数のインダクタを前記第1の複数の相互接続構造上に配置されるダイに電気的に連結する第1の複数の相互接続構造を形成する段階と、
前記複数のビルドアップ層の複数のビアと、前記複数のコンデンサの複数の端子とを電気的に連結する追加のビルドアップ層を含み、前記複数のコンデンサを前記ダイに電気的に連結する第2の複数の相互接続構造を形成する段階と
を備える
方法。 - 前記複数のインダクタは、複数の磁心インダクタ(MCI)又は複数の空心インダクタ(ACI)からなる群から選択される
請求項7に記載の方法。 - 前記ウェハの前記第2面上に前記複数のコンデンサを形成する段階は、
前記ウェハの前記第2面上に接着層を堆積する段階と、
前記接着層上に前記複数のコンデンサを堆積する段階と
を更に備える請求項7に記載の方法。 - 前記複数のコンデンサが複数のディスクリートセラミックコンデンサであり、前記第2の複数の相互接続構造が前記複数のディスクリートセラミックコンデンサの複数の金属端子である
請求項9に記載の方法。 - 前記電気絶縁性材料が第1の電気絶縁性材料であり、前記ウェハの前記第2面上に前記複数のコンデンサを形成する段階は、
前記ウェハの前記第2面上に複数の金属−絶縁体−金属コンデンサ(複数のMIMコンデンサ)を形成する段階と、
前記複数のMIMコンデンサの上方に第2の電気絶縁性材料を堆積し、前記複数のMIMコンデンサを前記第2の電気絶縁性材料に少なくとも部分的に埋め込む段階と
を更に備え、
前記第2の複数の相互接続構造を形成する段階は、前記第2の電気絶縁性材料の表面に前記第2の複数の相互接続構造を形成する段階を含む、請求項7に記載の方法。 - 前記ウェハは半導体ウェハである
請求項7から11のいずれか一項に記載の方法。 - 前記ダイはプロセッサである
請求項7から11のいずれか一項に記載の方法。 - 装置であって、
複数の電気配線特徴部、及び中に埋め込んだ集積回路アセンブリ(ICアセンブリ)を有する複数のビルドアップ層を含み、
前記ICアセンブリは、
半導体ウェハの第1面上に配置され、電気絶縁性材料に少なくとも部分的に埋め込まれた複数のインダクタと、前記ウェハの前記第1面に対向して配置される前記ウェハの第2面上に配置される複数のコンデンサとを有する、ディスクリートチップであるアセンブリと、
前記複数のインダクタに電気的に連結され、且つ、前記電気絶縁性材料の表面上に配置される第1の複数の相互接続構造と、
前記複数のビルドアップ層の複数のビアと、前記複数のコンデンサの複数の端子とを電気的に連結する追加のビルドアップ層を含む第2の複数の相互接続構造と
を含み、
前記複数の電気配線特徴部の第1サブセットが前記第1の複数の相互接続構造と、前記装置の面との間に複数の電気信号を送り、
前記複数の電気配線特徴部の第2サブセットに含まれる前記複数のビアが前記第2の複数の相互接続構造と、前記装置の前記面との間に複数の電気信号を送る
装置。 - 前記複数のインダクタは、複数の磁心インダクタ(MCI)又は複数の空心インダクタ(ACI)からなる群から選択される
請求項14に記載の装置。 - 前記複数のコンデンサは、前記複数のコンデンサを前記ウェハに物理的に連結する接着層上に配置される
請求項14に記載の装置。 - 前記複数のコンデンサが複数のディスクリートセラミックコンデンサを含み、前記第2の複数の相互接続構造が前記複数のディスクリートセラミックコンデンサの複数の金属端子を含む
請求項16に記載の装置。 - 前記電気絶縁性材料が第1の電気絶縁性材料であり、前記複数のコンデンサが複数の金属−絶縁体−金属コンデンサ(複数のMIMコンデンサ)を有し、前記第2の複数の相互接続構造が前記複数のコンデンサの上方に配置される第2の電気絶縁性材料の表面に配置される
請求項14に記載の装置。 - 前記ICアセンブリが統合電圧レギュレータの受動部分であり、パッケージコアのダイ面に提供される電圧を規制するための有効電圧調整回路を更に含み、前記有効電圧調整回路は、前記ICアセンブリに電気的に連結される
請求項14から18のいずれか一項に記載の装置。 - 前記装置がパッケージアセンブリであり、前記装置の前記面が前記パッケージアセンブリのダイ面である
請求項14から18のいずれか一項に記載の装置。 - 前記装置はマザーボードである
請求項14から18のいずれか一項に記載の装置。 - パッケージコアを提供する段階と、
前記パッケージコア内に孔をレーザ形成する段階と、
半導体ウェハの第1面上に配置される複数のインダクタと、前記半導体ウェハの前記第1面と反対側の第2面上に配置される複数のコンデンサとを有する、ディスクリートチップであるアセンブリを前記孔内に置く段階と、
前記アセンブリの上方に封止材料を堆積し、前記アセンブリを前記パッケージ内に埋め込む段階と、
前記複数のコンデンサを前記パッケージコアのダイ面と電気的に連結するためのコンデンサ配線特徴部を形成する段階と、
前記複数のインダクタを前記パッケージコアの前記ダイ面と電気的に連結するためのインダクタ配線特徴部を形成する段階と
を備え、
前記コンデンサ配線特徴部は、前記パッケージコアの複数のビアと、前記複数のコンデンサの複数の端子とを電気的に連結するビルドアップ層を含む、パッケージの製造方法。 - 前記複数のインダクタは、複数の磁心インダクタ(MCI)又は複数の空心インダクタ(ACI)からなる群から選択される
請求項22に記載の方法。 - 前記複数のコンデンサは複数のディスクリートセラミックコンデンサを含む
請求項22に記載の方法。
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