JP6126690B2 - 研磨粒子、研磨材物品、並びにその製造及び使用方法 - Google Patents
研磨粒子、研磨材物品、並びにその製造及び使用方法 Download PDFInfo
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- JP6126690B2 JP6126690B2 JP2015517262A JP2015517262A JP6126690B2 JP 6126690 B2 JP6126690 B2 JP 6126690B2 JP 2015517262 A JP2015517262 A JP 2015517262A JP 2015517262 A JP2015517262 A JP 2015517262A JP 6126690 B2 JP6126690 B2 JP 6126690B2
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- Prior art keywords
- abrasive
- abrasive particles
- alumina
- particles
- present disclosure
- Prior art date
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- 239000002245 particle Substances 0.000 title claims description 274
- 238000000034 method Methods 0.000 title claims description 46
- 239000006185 dispersion Substances 0.000 claims description 85
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 82
- 239000000463 material Substances 0.000 claims description 57
- 239000002243 precursor Substances 0.000 claims description 52
- 239000013078 crystal Substances 0.000 claims description 37
- 229910000873 Beta-alumina solid electrolyte Inorganic materials 0.000 claims description 30
- -1 aluminum ions Chemical class 0.000 claims description 20
- 238000005245 sintering Methods 0.000 claims description 20
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 150000001768 cations Chemical class 0.000 claims description 12
- 229910052749 magnesium Inorganic materials 0.000 claims description 10
- 238000002156 mixing Methods 0.000 claims description 10
- 229910052725 zinc Inorganic materials 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 229910052788 barium Inorganic materials 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 229910052712 strontium Inorganic materials 0.000 claims description 9
- 239000002667 nucleating agent Substances 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 description 49
- 238000000227 grinding Methods 0.000 description 34
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 31
- 229910052751 metal Inorganic materials 0.000 description 31
- 239000002184 metal Substances 0.000 description 31
- 239000003607 modifier Substances 0.000 description 30
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 29
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- 238000005498 polishing Methods 0.000 description 26
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- 239000000499 gel Substances 0.000 description 20
- 239000002253 acid Substances 0.000 description 18
- 239000007788 liquid Substances 0.000 description 18
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 230000008859 change Effects 0.000 description 14
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 12
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 12
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- 238000012360 testing method Methods 0.000 description 10
- 239000011701 zinc Substances 0.000 description 10
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- 239000011575 calcium Substances 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 239000000395 magnesium oxide Substances 0.000 description 8
- 239000012702 metal oxide precursor Substances 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
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- 238000000576 coating method Methods 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000000835 fiber Substances 0.000 description 6
- 239000002609 medium Substances 0.000 description 6
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 239000012700 ceramic precursor Substances 0.000 description 5
- 238000001125 extrusion Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
- 239000011236 particulate material Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000002023 wood Substances 0.000 description 5
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 4
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 4
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 4
- 150000007942 carboxylates Chemical class 0.000 description 4
- 238000007596 consolidation process Methods 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
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- 239000003085 diluting agent Substances 0.000 description 4
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- 239000000945 filler Substances 0.000 description 4
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- 150000002500 ions Chemical class 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 235000019483 Peanut oil Nutrition 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- 235000011054 acetic acid Nutrition 0.000 description 3
- 150000001242 acetic acid derivatives Chemical class 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 3
- 239000011324 bead Substances 0.000 description 3
- 235000013339 cereals Nutrition 0.000 description 3
- 150000003841 chloride salts Chemical class 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 150000001860 citric acid derivatives Chemical class 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 229910001610 cryolite Inorganic materials 0.000 description 3
- 239000002612 dispersion medium Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 235000019253 formic acid Nutrition 0.000 description 3
- 238000001879 gelation Methods 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910001960 metal nitrate Inorganic materials 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 150000004682 monohydrates Chemical class 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000000312 peanut oil Substances 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
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- 238000007517 polishing process Methods 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 229910052596 spinel Inorganic materials 0.000 description 3
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- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 150000003754 zirconium Chemical class 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical group [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-M Formate Chemical compound [O-]C=O BDAGIHXWWSANSR-UHFFFAOYSA-M 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical group [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- IWOUKMZUPDVPGQ-UHFFFAOYSA-N barium nitrate Chemical compound [Ba+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O IWOUKMZUPDVPGQ-UHFFFAOYSA-N 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 229910000019 calcium carbonate Inorganic materials 0.000 description 2
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- 239000000292 calcium oxide Substances 0.000 description 2
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- 235000012241 calcium silicate Nutrition 0.000 description 2
- 229910052918 calcium silicate Inorganic materials 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
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- 239000003795 chemical substances by application Substances 0.000 description 2
- PHFQLYPOURZARY-UHFFFAOYSA-N chromium trinitrate Chemical compound [Cr+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O PHFQLYPOURZARY-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
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- 238000001723 curing Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- WMWXXXSCZVGQAR-UHFFFAOYSA-N dialuminum;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3] WMWXXXSCZVGQAR-UHFFFAOYSA-N 0.000 description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
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- 239000003822 epoxy resin Substances 0.000 description 2
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(iii) oxide Chemical compound O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 description 2
- 150000004675 formic acid derivatives Chemical class 0.000 description 2
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- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 150000008040 ionic compounds Chemical class 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- IIPYXGDZVMZOAP-UHFFFAOYSA-N lithium nitrate Chemical compound [Li+].[O-][N+]([O-])=O IIPYXGDZVMZOAP-UHFFFAOYSA-N 0.000 description 2
- YIXJRHPUWRPCBB-UHFFFAOYSA-N magnesium nitrate Chemical compound [Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O YIXJRHPUWRPCBB-UHFFFAOYSA-N 0.000 description 2
- 229940091250 magnesium supplement Drugs 0.000 description 2
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- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 2
- 150000002823 nitrates Chemical class 0.000 description 2
- UJVRJBAUJYZFIX-UHFFFAOYSA-N nitric acid;oxozirconium Chemical compound [Zr]=O.O[N+]([O-])=O.O[N+]([O-])=O UJVRJBAUJYZFIX-UHFFFAOYSA-N 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
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- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- UUZZMWZGAZGXSF-UHFFFAOYSA-N peroxynitric acid Chemical compound OON(=O)=O UUZZMWZGAZGXSF-UHFFFAOYSA-N 0.000 description 2
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- 238000002360 preparation method Methods 0.000 description 2
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- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical group [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- DHEQXMRUPNDRPG-UHFFFAOYSA-N strontium nitrate Chemical compound [Sr+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O DHEQXMRUPNDRPG-UHFFFAOYSA-N 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
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- OSCVBYCJUSOYPN-UHFFFAOYSA-K ytterbium(3+);triacetate Chemical compound [Yb+3].CC([O-])=O.CC([O-])=O.CC([O-])=O OSCVBYCJUSOYPN-UHFFFAOYSA-K 0.000 description 2
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 2
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 2
- YOBOXHGSEJBUPB-MTOQALJVSA-N (z)-4-hydroxypent-3-en-2-one;zirconium Chemical compound [Zr].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O YOBOXHGSEJBUPB-MTOQALJVSA-N 0.000 description 1
- JRZKNHITLINYHV-UHFFFAOYSA-N 1,2,3,4,5-pentachloronaphthalene Chemical compound ClC1=CC=CC2=C(Cl)C(Cl)=C(Cl)C(Cl)=C21 JRZKNHITLINYHV-UHFFFAOYSA-N 0.000 description 1
- NAQWICRLNQSPPW-UHFFFAOYSA-N 1,2,3,4-tetrachloronaphthalene Chemical compound C1=CC=CC2=C(Cl)C(Cl)=C(Cl)C(Cl)=C21 NAQWICRLNQSPPW-UHFFFAOYSA-N 0.000 description 1
- WQXKGOOORHDGFP-UHFFFAOYSA-N 1,2,4,5-tetrafluoro-3,6-dimethoxybenzene Chemical compound COC1=C(F)C(F)=C(OC)C(F)=C1F WQXKGOOORHDGFP-UHFFFAOYSA-N 0.000 description 1
- WYOIGGSUICKDNZ-UHFFFAOYSA-N 2,3,5,6,7,8-hexahydropyrrolizin-1-one Chemical compound C1CCC2C(=O)CCN21 WYOIGGSUICKDNZ-UHFFFAOYSA-N 0.000 description 1
- OAVRWNUUOUXDFH-UHFFFAOYSA-H 2-hydroxypropane-1,2,3-tricarboxylate;manganese(2+) Chemical compound [Mn+2].[Mn+2].[Mn+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O OAVRWNUUOUXDFH-UHFFFAOYSA-H 0.000 description 1
- SDTMFDGELKWGFT-UHFFFAOYSA-N 2-methylpropan-2-olate Chemical compound CC(C)(C)[O-] SDTMFDGELKWGFT-UHFFFAOYSA-N 0.000 description 1
- BYDYILQCRDXHLB-UHFFFAOYSA-N 3,5-dimethylpyridine-2-carbaldehyde Chemical compound CC1=CN=C(C=O)C(C)=C1 BYDYILQCRDXHLB-UHFFFAOYSA-N 0.000 description 1
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Description
本開示は、研磨粒子及びその製造方法に関する。これらの研磨粒子は、結合研磨材、被覆研磨材、不織布研磨材、及び研磨ブラシを含む多様な研磨材物品に組み込むことができる。
α−アルミナは、研磨材産業において研磨材料として広く使用されている。α−アルミナは、純粋な形態でも使用できるが、その研磨特性を向上する添加剤を含有する形態での使用がより好ましい。β−アルミナは、アルミニウム及び酸素以外の金属イオンが結晶格子に含まれているアルミナの形態である。β−アルミナは、概して、α−アルミナと比較して研磨材料として劣った特性を示す。
一態様において、本開示は、研磨粒子を提供するものであって、研磨粒子のそれぞれは、α−アルミナ結晶相と、α−アルミナ結晶相及びβ−アルミナ結晶相を合わせた総重量に基づいて0.25〜20重量%のβ−アルミナ結晶相とを含むものであり、β−アルミナ結晶相は、実験式(X)(Q)Al10O17により表され、式中、
XはSr、Ca、及びBaからなる群から選択され、
QはMg、Co、Ni、及びZnからなる群から選択される。
アルミナ前駆体材料を含むディスパージョンを提供する工程であって、アルミナ前駆体材料が、
アルミニウムイオンと、
Sr、Ca、及びBaからなる群から選択される少なくとも1つの第1の二価カチオンと、
Mg、Co、Ni、及びZnからなる群から選択される少なくとも1つの第2の二価カチオンと、を含むものである、工程と、
シード粒子を上記ディスパージョンと混合する工程であって、シード粒子が、(例えば、焼結工程中の)アルミナ前駆体材料からα−アルミナへの変換を促進する成核剤又はその前駆体を含むものである、工程と、
ディスパージョンを研磨材前駆体粒子に変換する工程と、
研磨粒子を提供するために研磨材前駆体粒子を焼結する工程であって、研磨粒子のそれぞれは、α−アルミナ結晶相と、α−アルミナ結晶相及びβ−アルミナ結晶相を合わせた総重量に基づいて0.25〜20重量%のβ−アルミナ結晶相とを含むものである、工程と、を含む。
本開示による研磨粒子を被加工物の表面と摩擦接触させる工程と、
研磨粒子及び被加工物の表面のうちの少なくとも一方を他方に対して移動させて、被加工物の表面の少なくとも一部分を研磨する工程と、を含む。
本開示による研磨粒子は、α−アルミナ結晶相とβ−アルミナ結晶相とを含んでいる。
実施形態1において、本開示は、研磨粒子を提供するものであって、その研磨粒子のそれぞれは、α−アルミナ結晶相と、α−アルミナ結晶相及びβ−アルミナ結晶相を合わせた総重量に基づいて0.25〜20重量%のβ−アルミナ結晶相とを含むものであり、β−アルミナ結晶相は、実験式(X)(Q)Al10O17により表され、式中、
XはSr、Ca、及びBaからなる群から選択され、
QはMg、Co、Ni、及びZnからなる群から選択される。
実施形態1〜13のいずれか1つの実施形態による研磨粒子を被加工物の表面と摩擦接触させる工程と、
研磨粒子及び被加工物の表面のうちの少なくとも一方を他方に対して移動させて、被加工物の表面の少なくとも一部分を研磨する工程と、を含む。
アルミナ前駆体材料を含むディスパージョンを提供する工程であって、アルミナ前駆体材料が、
アルミニウムイオンと、
Sr、Ca、及びBaからなる群から選択される少なくとも1つの第1の二価カチオンと、
Mg、Co、Ni、及びZnからなる群から選択される少なくとも1つの第2の二価カチオンと、を含むものである、工程と、
シード粒子をディスパージョンと混合する工程であって、シード粒子が、アルミナ前駆体材料からα−アルミナへの変換を促進する成核剤又はその前駆体を含むものである、工程と、
ディスパージョンを研磨材前駆体粒子に変換する工程と、
研磨粒子を提供するために研磨材前駆体粒子を焼結する工程であって、研磨粒子のそれぞれは、α−アルミナ結晶相と、α−アルミナ結晶相及びβ−アルミナ結晶相を合わせた総重量に基づいて0.25〜20重量%のβ−アルミナ結晶相とを含むものである、工程と、を含む。
Xは第1の二価カチオンを表し、Sr、Ca、Baからなる群から選択され、
Qは第2の二価カチオンを表し、Mg、Co、Ni、Zn、及びこれらの組み合わせからなる群から選択される。
厚さ0.83mm(33ミル)のバルカンファイバー裏材を有する、直径7インチ(17.8cm)、心棒穴直径8分の7インチ(2.2cm)のディスク(DYNOS GmbH(ドイツ、Troisdorf)から入手したDYNOS VULCANIZED FIBRE)に、49.15重量部のレゾールフェノール樹脂、40.56重量部のフィラー、0.1重量部の界面活性剤1、及び10.19重量部の水からなるメイクコート組成物を、3.5グラム/ディスク(g/disc)でコーティングした。次いで、15.0g/discの研磨粒子、次いで、29.42重量部のレゾールフェノール樹脂、50.65重量部の研削助剤1、1.81重量部の界面活性剤1、及び18.12重量部の水からなる13.0g/discのサイズコート組成物で、ディスクを静電コーティングした。次いで、90℃で90分間ディスクを加熱した。次いで、部分的に硬化したディスクを、30.96重量部のエポキシ樹脂、56.34重量部の研削助剤2、0.78重量部の界面活性剤2、0.36重量部の硬化剤、0.04重量部の消泡剤、及び11.52重量部の水からなるスーパーサイズコート10グラムで更にコーティングした。102℃で10時間硬化した後、得られた研磨ディスクを曲げた。
以下の手順を用いて研磨ディスクを試験した。評価用の直径7インチ(17.8cm)の研磨ディスクを、7インチ(17.8cm)のリブ付きディスクパッド平面皿(3M Company(ミネソタ州St.Paul)から入手した「80514 Extra Hard Red」)が装備された回転研削盤に取り付けた。次に、研削盤を稼動させ、0.75×0.75インチ(1.9×1.9cm)の予め計量した304ステンレス鋼棒の末端面を、12ポンド(5.5kg)の荷重下で押し付けた。この荷重下でのこの被加工物に対する研削盤の結果的な回転速度は5000rpmであった。この被加工物を、これらの条件下で合計25回、12秒の研削インターバル(パス)で研磨した。それぞれの12秒インターバルの後、被加工物を室温まで冷却させ、計量して、研磨動作による切削量を測定した。試験結果は、切削量の合計(少なくとも3つの研磨ディスクの平均)及び対照ディスク(後述)のパーセントとして表される切削量として報告した。対照ディスクは、理想的には実施例1の研磨粒子と同じように作製された研磨粒子を使用したこと、それらの研磨粒子がMgO 1.2%、La2O3 2.4%、及びY2O3 1.2%のゾル−ゲル変性剤を含んでいたことを除いて、上記の手順により調製した。
研磨グレインのビッカース微小硬度は、ダイヤモンド圧子を用いる従来の微小硬度試験装置(MINILOAD 2 MICROHARDNESS TESTER、E.Leitz GmbH、ドイツ、Wetzlar)を用いて測定した。圧子(面角136度の先端がよく磨かれた四角錐形ダイヤモンド)を被測定試料に徐々に、滑らかに接触させた。所定荷重は500グラムとした。各実施例につき10回の測定値の平均を報告した。
焼成した研磨グレイン前駆体をロータリー焼結炉に供した。焼結炉は、水平に対して傾斜した1.22メートルの長さの内径7.6cmのシリコンカーバイドチューブで構成されており、35cmのホットゾーンを有した。SiC電気加熱素子により外部から熱を与えた。種々の実施例の焼きは、5.8度の傾斜で7.0rpm(表2では「FF」と記されている)か、2.9度の傾斜で3.0rpm(表2では「SF」と記されている)のいずれかで稼動するロータリー焼結炉により、表2に示す条件で行った。
実施例1は、シードを入れずにアルミナのゾル−ゲルから調製した成形研磨粒子であった。実施例1の成形研磨粒子は、次のレシピを用いてベーマイトのゾル−ゲルを調製することにより作製した。DISPERAL酸化アルミニウム一水和物粉末(1600重量部(Sasol North Americaより入手))は、水(2400重量部)と70%の硝酸水溶液(72重量部)とを含有する溶液を11分間、高せん断混合することにより分散させた。得られたゾル−ゲルは、コーティング前に少なくとも1時間エージングした。ゾル−ゲルは、28ミル(0.71mm)の深さ及び各辺110ミル(2.78mm)の三角形の成形鋳型キャビティを有する生産用金型に押し入れた。成形鋳型の側壁と底部との間の抜き勾配角は98度であった。金型は、成形鋳型のキャビティの50%が、三角形の一辺と90度の角度で交差するキャビティの底面から出る8つの平行の隆起部を有し、残りのキャビティが平滑な成形鋳型底面を有するように製造された。平行な隆線は0.277mmごとに離隔され、隆線の断面は、高さ0.0127mmで、先端におけるそれぞれの隆線の辺の間の角度が45度の三角形であった。メタノール中1%のピーナッツオイルの離型剤を使用して生産金型をコーティングし、約0.5mg/インチ2(mg/in2)のピーナッツオイルを金型に適用した。過剰なメタノールは、生産工具のシートを空気対流炉内に45℃で5分間配置することにより除去した。ゾル−ゲルは、生産用金型の開口部が完全に充填されるように、パテナイフを使用してキャビティに押し入れた。ゾル−ゲルで被覆された生産用金型は45℃の空気対流炉に少なくとも45分間配置して乾燥させた。超音波ホーン上を通過させることにより、前駆成形研磨粒子を生産用金型から取り出した。前駆成形研磨粒子を約650℃で焼成した後、表2の濃度(酸化物として報告)にするように、硝酸溶液で飽和した。飽和した前駆成形研磨粒子を乾燥させ、その後、この粒子は再び650℃で焼成され、約1400℃で焼結された。焼成及び焼結の両方は、ロータリーチューブ炉を用いて行われた。得られた焼結した研磨粒子を炉から室温の空気中に出し、金属容器に収集し、室温に冷ました。
実施例4〜9は、表2に示すように変性剤組成物を変更し、Fe2O3シードを加え、焼き条件を変更したことを除き、実施例1と同じように調製した。β−アルミナを含有するこれらの実施例は全てシードされており、はるかに高い密度及び高度を実現した。表3に報告するように、研削性能は、全ての例において、シードされていない実施例3を超えており、2例においては、対照のディスクと同等又はそれ以上であった。
実施例10〜15は、様々なレベルのFe2O3シードを有する未成形(破砕)粒子として、表2に示す焼き条件で調製した。実施例15は、Al2O3でシードした。これらの実施例は、次のレシピを用いてベーマイトのゾル−ゲルを調製することにより作製した。DISPERALとして入手可能な酸化アルミニウム一水和物粉末(800重量部)(Sasol North America)の分散は、水(1800重量部)と70%の硝酸水溶液(44重量部)とを含有する溶液を1分間、高せん断混合することにより行った。ゾルを22cm×33cm×5cmのPYREXトレーに注ぎ入れ、100℃の強制空気炉で約24時間乾燥した。鋼板の間に1.1mmの隙間を有するBraun型UD微粉砕機を用い、得られた乾燥した材料を破砕し、粒子を形成した。粒子をスクリーニングし、0.125〜1mmの大きさの粒子を提供した。
実施例16〜19は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。実施例16〜19は、SF条件下で焼いた。結果を表3に示す。SF条件でのより長い焼き時間は、より低い温度でのグレインの稠密化を可能にし、1340℃という低温で3.90g/cm3の密度を達成した。
実施例20〜34は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。概して、SrOの量が低くZnOの量が高いものが最良の研削性能をもたらし、FF条件はSF条件より優れた研削をもたらすことが示された。
実施例35〜39は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。
実施例40〜43は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。これらの実施例は、様々な量のSrO及びMgOの使用を実証しており、表3に報告したような良好な性能を示した。
実施例44〜49は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。実施例44〜48は、実施例35〜39のSFバージョンである。表3からわかるように、研削性能は非常に類似している。
実施例50〜52は、表2に示すように、変性剤組成物の変更、Al2O3がFe2O3の代わりにシードとして存在すること、及び焼き条件を変更したことを除いて、実施例10〜15と同じように調製した。表3からわかるように、FF条件は、顕著に低い密度を有する粒子を生成するときでさえも高い硬度を維持する。
実施例53〜56は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。ZnO及びMgOは、β−アルミナ相に対応できるAl2O3を有する最も一般的で最も安価なスピネルフォーマーである。表3は、実施例53〜56が他のスピネルフォーマー、例えば、CoO及びNiOもまた使用できることを示している。
実施例57〜61は、表2に示す変性剤組成物の変更及び焼き条件の変更、並びに生産用金型のキャビティの側面の寸法を54ミル(1.37mm)に下げたことを除いて、実施例1と同じように調製した。
実施例62〜64は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。これらの実施例はβ−アルミナフォーマーとしてCaOを利用した。研削は、対照ディスクと同等であった。
実施例65〜67及び比較例Gは、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。表3からわかるように、比較的少量のSrOが研削性能に影響を与えており、0.05%のレベルでさえもわずかな向上が見られることがわかる。研削性能は、SrO含有量の増加とともに急速に向上する。
実施例68〜72及び比較例Hは、表2に示す変性剤組成物の変更及び焼き条件の変更、並びに生産用金型のキャビティの側面の寸法を54ミル(1.37mm)に下げたことを除いて、実施例1と同じように調製した。これらは、Al2O3がシードされた実施例である。表3からわかるように、0.3% SrO及び2.0% MgOを用いた実施例70は比較例Hより優れている。
実施例73は、表2に示す変性剤組成物の変更及び焼き条件の変更、並びに生産用金型のキャビティの側面の寸法を54ミル(1.37mm)に下げたことを除いて、実施例1と同じように調製した。実施例73は、BaOを用いてβ−アルミナフォーマー(BaMgAl10O17)として作製した。それは、よく焼け、仕上がり密度は3.888g/cm3であった。
実施例74は、表2に示す変性剤組成物の変更及び焼き条件の変更、並びに実施例10で説明するように粒子を成形する代わりに破砕したことを除いて、実施例10と同じように調製した。表3に報告した試験結果を比較例Iと比較すべきである。
この比較例は、3M Companyから入手可能なCUBITRON 321、等級36の破砕研磨グレイン(希土類酸化物含有α−アルミナ)である。
実施例75〜78は、表2に示す変性剤組成物の変更及び焼き条件の変更を除いて、実施例1と同じように調製した。ZrO2は、表2に示すレベルで実施例76〜78に添加した。表3からわかるように、実施例75〜78は、研削試験において対照ディスクより良好な性能であった。
Claims (2)
- 研磨粒子であって、
前記研磨粒子のそれぞれが、α−アルミナ結晶相と、前記α−アルミナ結晶相及びβ−アルミナ結晶相を合わせた総重量に基づいて0.25〜20重量%のβ−アルミナ結晶相と、を含むものであり、
前記β−アルミナ結晶相が、実験式XQAl10O17[式中、XはSr及びBaからなる群から選択され、QはMg、Co、Ni、及びZnからなる群から選択される。]により表され、前記研磨粒子が希土類酸化物を含まない、研磨粒子。 - 研磨粒子を作製する方法であって、
アルミナ前駆体材料を含むディスパージョンを提供する工程であって、前記アルミナ前駆体材料が、アルミニウムイオンと、Sr及びBaからなる群から選択される少なくとも1つの第1の二価カチオンと、Mg、Co、Ni及びZnからなる群から選択される少なくとも1つの第2の二価カチオンと、を含むものである、工程と、
シード粒子を前記ディスパージョンと混合する工程であって、前記シード粒子が、前記アルミナ前駆体材料からα−アルミナへの変換を促進する成核剤又はその前駆体を含むものである、工程と、
前記ディスパージョンを研磨材前駆体粒子に変換する工程と、
前記研磨粒子を提供するために前記研磨材前駆体粒子を焼結する工程であって、前記研磨粒子のそれぞれは、α−アルミナ結晶相と、前記α−アルミナ結晶相とβ−アルミナ結晶相とを合わせた総重量に基づいて0.25〜20重量%のβ−アルミナ結晶相とを含み、前記研磨粒子が希土類酸化物を含まないものである、工程と、を含む、方法。
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CN104350025A (zh) | 2015-02-11 |
EP2861545A1 (en) | 2015-04-22 |
EP2861545B1 (en) | 2019-06-26 |
WO2013188038A1 (en) | 2013-12-19 |
CN104350025B (zh) | 2017-02-22 |
US20130337725A1 (en) | 2013-12-19 |
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