JP6122271B2 - Liquid ejection device, spray pattern width measuring method, program - Google Patents

Description

  The present invention relates to a liquid ejecting apparatus that ejects a spray pattern to coat a processing target such as an electronic circuit board with a thin film such as a protective film, and more particularly to a method for measuring the spray pattern width.

Japanese Patent No. 4060275

An electronic circuit board or the like is coated with a thin film serving as a protective film for the purpose of moisture proofing and rust prevention.
For example, as disclosed in Patent Document 1, a technique for detecting a liquid ejection pattern is known, and a thin film coating is applied to an electronic circuit board or the like to be processed by discharging a coating agent as a pressurized liquid. It is carried out.

By the way, a thin film formed by such coating is required to be formed on the object to be processed with a uniform thickness as much as possible and to form a film efficiently. In addition, when there are a portion to be coated and a portion not to be coated on the object to be processed, it is also important to control the application position of the coating agent.
For this reason, it is desirable to measure the width of the spray pattern of the pressurized liquid discharged from the nozzle and make an appropriate adjustment.
In view of the above, an object of the present invention is to make it possible to efficiently measure the width of a spray pattern in a liquid ejection apparatus.

A liquid ejection apparatus according to a first aspect of the present invention includes a nozzle that ejects a spray pattern, a moving unit that moves the nozzle, and a detection signal corresponding to a light reception state of a light beam output from the light emitting unit in the light receiving unit. , A storage means for storing at least the width value of the nozzle, and a control means. Then, the control means detects the optical sensor caused by the nozzle in a state where the nozzle causes the movement means to move in one direction toward the light beam along a predetermined movement axis that is orthogonal to the light beam. A first position coordinate value acquisition process for acquiring a first position coordinate value on the predetermined movement axis when a signal change is first obtained, and a spray pattern discharged from the nozzle along the predetermined movement axis The second position coordinate value on the predetermined movement axis when the detection signal change of the photosensor due to the spray pattern is first obtained in a state where the movement means is caused to move in the one direction toward the light beam. using a second position coordinate value acquisition processing for acquiring the difference value of the second position coordinate value and the first position coordinates, and the width of the nozzle read out from said storage means, spray Performing a calculation process of calculating the width of the chromatography pattern.

Further , the control means further performs a discharge stop process for stopping the discharge of the spray pattern in accordance with the second position coordinate value acquisition process.
The nozzle is a nozzle that discharges a fan-shaped spray pattern, and the optical sensor changes in accordance with the portion where the cross-section of the fan-shaped spray pattern becomes thick during the second position coordinate value acquisition processing. A detection signal is output.
In the calculation process, the control means calculates the spray pattern width by {(the second position coordinate value) − (the first position coordinate value)} × 2 + (the nozzle width).

A spray pattern width measuring method according to a first aspect of the present invention is a nozzle that discharges a spray pattern, a moving unit that moves the nozzle, and a light output from the light emitting unit according to a light receiving state in the light receiving unit. This is a measurement method for measuring the width of a spray pattern in a coating apparatus including an optical sensor that outputs a detection signal, a storage unit that stores at least a value of the width of the nozzle, and a calculation unit. Then, the moving means moves the nozzle in one direction toward the light beam along a predetermined movement axis that is orthogonal to the light beam, and the nozzle moves in the course of the first moving step. A first position coordinate value acquisition step of acquiring a first position coordinate value on the predetermined movement axis when the change in the detection signal of the optical sensor resulting from the first is obtained; Along the second movement step of moving the spray pattern discharged from the nozzle in the one direction toward the light beam, and the detection signal change of the photosensor due to the spray pattern in the course of the second movement step. the predetermined second position coordinate value acquisition step of acquiring the second position coordinate values in the axis of movement, said calculating means, said second position coordinate value and the first position when the first obtained It comprises a difference value between target values, by using the width of the nozzle read out from the memory means, and a calculation step of calculating the width of the spray pattern.
The program as the first aspect of the present invention is a program executed by the control means in order to realize the above spray pattern width measuring method.

In the invention as the first aspect described above, first, the first position coordinate value at which the optical sensor detects the end of the nozzle is acquired as the first position coordinate.
Then, in a state where, for example, the coating agent is discharged from the nozzle, a second position coordinate value at which the optical sensor detects the spray pattern of the coating agent or the like is acquired.
The movement for obtaining the first and second position coordinate values may be in a range until the optical sensor reacts in one direction with the nozzle (spray pattern).
The difference between the first position coordinate value and the second position coordinate value is the distance from the end of the nozzle to the sensor response position of the spray pattern. The sensor reaction position is a portion where the spray pattern has a certain thickness and can be surely reacted by the optical sensor, and is near the edge of the spray pattern. It can be said that the edge of the spray pattern by the pressurized liquid is not necessarily a position where the detection by the optical sensor can be surely performed, and is an indeterminate state because it is a discharge liquid to the last. Therefore, in the present invention, the second position coordinate value is determined by targeting a location where the sensor can surely react as the vicinity of the edge. For example, the fan-shaped spray pattern has a thick cross section.
If the difference between the first and second position coordinate values and the nozzle width (nozzle diameter) are used, the width of the spray pattern can be roughly calculated.
Note that being able to roughly calculate (measure) means to exclude indefinite edges in the liquid spray pattern. The width of the spray pattern measured in the present invention can be said to be the width from the sensor reaction position to the opposite sensor reaction position instead of the edge of the spray pattern.

The coating apparatus according to the second aspect of the present invention includes a nozzle that discharges a spray pattern, a moving unit that moves the nozzle, and a detection signal corresponding to a light receiving state of the light beam output from the light emitting unit in the light receiving unit. In a state where the moving means executes the movement of the nozzle toward the light beam along a predetermined movement axis that is orthogonal to the light beam, and at least the width value of the nozzle. Storage means for storing a first position coordinate value on the predetermined movement axis as a position where a change in detection signal of the optical sensor caused by the nozzle is obtained, and control means. And said control means, said light sensor along the predetermined movement axis, the spray pattern discharged from the nozzle is caused by the spray pattern of the movement of the one direction toward the light beam in a state of being executed in the mobile unit A second position coordinate value acquisition process for acquiring a second position coordinate value on the predetermined movement axis when the change in the detection signal is first obtained, and the second position coordinate value and the read out from the storage means A calculation process for calculating the width of the spray pattern is performed using the difference value from the first position coordinate value and the width of the nozzle read from the storage means .
Further, the control means further performs a discharge stop process for stopping the discharge of the spray pattern in accordance with the second position coordinate value acquisition process.
The nozzle is a nozzle that discharges a fan-shaped spray pattern, and the optical sensor changes in accordance with the portion where the cross-section of the fan-shaped spray pattern becomes thick during the second position coordinate value acquisition processing. A detection signal is output.
In the calculation process, the control means calculates the spray pattern width by {(the second position coordinate value) − (the first position coordinate value)} × 2 + (the nozzle width).

The measurement method according to the second aspect of the present invention includes a nozzle that discharges a spray pattern, a moving unit that moves the nozzle, and a detection signal corresponding to the light receiving state of the light beam output from the light emitting unit. an optical sensor for outputting a value of the width of at least said nozzle, said moving the nozzle along a predetermined movement axis as the direction perpendicular to the above light beam in one direction toward the light were allowed to run on the moving means Spraying in a coating apparatus comprising storage means for storing a first position coordinate value on the predetermined movement axis as a position at which a change in detection signal of the optical sensor due to the nozzle is first obtained, and arithmetic means This is a measurement method for measuring the width of a pattern. The moving means causes the fan-shaped spray pattern discharged from the nozzle to move in the one direction toward the light beam along the predetermined movement axis, and the movement pattern results in the spray pattern. A second position coordinate value acquisition step of acquiring a second position coordinate value on the predetermined movement axis when the detection signal change of the optical sensor is first obtained, and the calculation means includes the second position coordinate A calculation step of calculating a width of the spray pattern using a difference value between the value and the first position coordinate value read from the storage unit and the width of the nozzle read from the storage unit .
The program of this invention is a program which a control means performs in order to implement | achieve the above spray pattern width | variety measuring method.

  The invention as the second aspect described above differs from the first aspect described above in that the first position coordinate value is stored in the storage means in advance. As a relative positional relationship between the optical sensor and the nozzle, the first position coordinate value on the predetermined movement axis as a position at which the nozzle reacts with the optical sensor can be defined by design or the like. By doing so, it is not necessary to perform processing for acquiring the first position coordinate value.

  According to the present invention, the operation for acquiring the first and second position coordinate values, or the operation for acquiring the second position coordinate value is only to move the nozzle at a short distance in one direction. The movement for measuring the spray pattern width can be completed in a short time. Thereby, the efficiency of the measurement operation is realized.

It is explanatory drawing of the example of an external appearance of the coating apparatus of embodiment of this invention. It is explanatory drawing of the discharge operation | movement of the coating apparatus of embodiment. It is a block diagram of the control composition of the coating device of an embodiment. It is explanatory drawing of the spray pattern width measurement operation | movement of embodiment. It is a flowchart of the measurement preparation process of embodiment. It is a flowchart of the measurement process of embodiment. It is explanatory drawing of a structure and detection operation | movement of the optical sensor of embodiment.

Embodiments of the present invention will be described below. As an embodiment of the liquid ejecting apparatus, an example of a coating apparatus that ejects a coating agent for forming a thin film on a circuit board, which is an object to be processed, in a fan-shaped spray pattern will be given.
The description will be given in the following order.
<1. Configuration of Coating Apparatus of Embodiment>
<2. Control configuration of coating equipment>
<3. Measurement of Spray Pattern Width of First Embodiment>
<4. Example of optical sensor configuration>
<5. Measurement of Spray Pattern Width of Second Embodiment>
<6. Program>
<7. Modification>

<1. Configuration of Coating Apparatus of Embodiment>
FIG. 1 shows an example of the appearance of a coating apparatus 1 which is an embodiment of a liquid ejection apparatus of the present invention.
The coating apparatus 1 discharges and sprays a coating agent from the nozzle 3 onto the circuit board 100 placed on the work table 2 to form a protective thin film for moisture and rust prevention on the circuit board 100. Device.

As shown in the figure, a substrate mounting table 10 is provided on the work table unit 2, and a circuit board 100 that is a coating object is mounted on the substrate mounting table 10.
For example, the coating apparatus 1 can be used as part of a production line for electronic circuit boards and the like, and the circuit board 100 is set on the substrate mounting table 10 by a transport mechanism (not shown). Then, a coating process is performed in the coating apparatus 1, and then the circuit board 100 is taken out by a transport mechanism (not shown) and transferred to the next process. Thereby, the coating process as a continuous operation is executed on the line.
Of course, the coating apparatus 1 may not only configure the line as described above, but also may be an apparatus that individually coats a processing target such as the circuit board 100.

A nozzle 3 for discharging the coating agent is positioned above the work table portion 2.
The nozzle 3 can be moved in the X direction, the Y direction, and the Z direction in the upper space of the work table 2 while being attached to the nozzle holder 4.

  The nozzle holder 4 is attached to the X direction guide 11 so as to be slidable in the X direction. The X direction guide 11 is provided with an X motor 7 and a drive shaft 11a rotated by the X motor 7. The nozzle holder 4 moves in the X direction along the X direction guide 11 by the rotation of the drive shaft 11a. It is possible. For this reason, a connection mechanism is adopted between the drive shaft 11a and the nozzle holder 4 with a gear configuration or the like in which the rotation of the drive shaft 11a is converted into the slide movement direction.

  The X direction guide 11 is fixed to a guide holder 13. The guide holder 13 is attached to the Y-direction guide 12 so as to be slidable in the Y direction. The Y-direction guide 12 is provided with a Y motor 8 and a drive shaft 12a rotated by the Y motor 8, and the guide holder 13 (that is, the entire X-direction guide 11) is rotated by the drive shaft 12a. 12 is movable in the Y direction. For this reason, a connection mechanism is employed between the drive shaft 12a and the guide holder 13 such as a gear configuration in which the rotation of the drive shaft 12a is converted into the slide movement direction.

A Z motor 5 is disposed in the nozzle holder 4, and the tip of the nozzle 3 is moved up and down (Z direction) by the Z motor 5. That is, the height position of the tip of the nozzle 3 is changed.
With the above configuration, the position of the nozzle 3 can be moved in the X direction, the Y direction, and the Z direction in the space above the work table 2 by the X motor 7, the Y motor 8, and the Z motor 5.
By moving in the X direction, Y direction, and Z direction, spraying the coating agent while moving various places on the mounted circuit board 100, movement for measuring the spray pattern width described later, etc. It becomes executable.

  Further, a nozzle rotation motor 6 is attached to the nozzle holder 4, and the rotation angle position of the nozzle 3 can be changed by the nozzle rotation motor 6. The rotation angle position is a position in the θ direction of FIG. 2A.

FIG. 2A shows an enlarged view of the nozzle 3 discharging and spraying the coating agent from above the circuit board 100. Various electronic components such as resistors, capacitors, and IC chips are mounted on the circuit board 100, and the heights w and v of the various electronic components and the sizes k and m between the electronic components are various. .
By spraying such a circuit board 100 while the nozzle 3 is moved in the X direction, the Y direction, and the Z direction, it is possible to form an appropriate thin film according to the shape of the circuit board 100 and the component arrangement. Become.
The tip of the nozzle 3 is formed as shown in FIGS. 2B and 2C, and a pressurized liquid coating agent is discharged from the discharge hole 3a. Since the discharge hole 3a is formed at a position deeper than the projecting end portions 3b, 3b, the spray pattern 90 of the discharged coating agent has a flat fan shape as shown in FIG. 2D. FIG. 2E shows the aa cross section of the spray pattern 90 of FIG. 2D, but the fan-shaped spray pattern 90 has a thick width portion 90a in the vicinity of the edge, and the edge and the center have a thickness. Relatively thin.

When the spray pattern 90 as shown in FIG. 2D goes further below the position of the a-a section line, it becomes atomized and becomes unsuitable for coating. The coating agent applied in an atomized pattern increases the number of unapplied parts and pinholes, which may result in a defective product. Therefore, for example, it is appropriate to reach the surface of the circuit board 100 around the position of the aa sectional line.
FIG. 2A shows a state where the height position of the nozzle 3 from the surface of the circuit board 100 is adjusted to the distance t by the above-described movement in the Z direction, and the coating agent is applied. The distance t from the application surface in this case is a distance for obtaining a height at which the application width by the spray pattern 90 is the width h at which application can be performed most efficiently. By being moved in the Y direction in this state, application is performed so as to progress in a band shape in the Y direction in the state of the width h.

As described above, the rotation angle position of the nozzle 3 can be changed by the nozzle rotation motor 6. For example, if the rotation angle position is changed by 90 ° from the state shown in FIG. 2A and moved in the X direction, the application proceeds in a strip shape in the X direction in the state of the width h.
Furthermore, the width of the coating band to be advanced can be adjusted by the rotational angle position. For example, if the 45 ° rotation angle position is changed from the state of FIG. 2A and moved in the Y direction, it is possible to perform coating that progresses in a band shape in the Y direction in the state of a half width of the width h shown in the figure. .
Therefore, for example, when spraying in a narrow place like the size m between parts, appropriate application | coating becomes possible by adjusting the rotation angle position and adjusting the spray pattern width seen from the advancing direction.

Although not shown in FIGS. 1 and 2, the nozzle 3 is provided with a supply mechanism and a discharge mechanism for supplying the coating agent in order to discharge the coating agent as a pressurized liquid. By adjusting the pressure with the discharge mechanism, the discharge amount of the coating agent and the fan-shaped spray pattern width are adjusted.
The coating agent is, for example, a polyolefin-based, acrylic-based, or polyurethane-based insulating coating agent. When diluted with thinner and applied to the circuit board 100 in a liquid state, a thin film as a substrate shielding layer is formed on the circuit board 100 by drying for about 10 minutes.

As shown in FIG. 1, a light emitting unit 21, a light receiving unit 22, a discarding unit 23, and a soaking unit 24 that constitute an optical sensor are provided on the work table unit 2.
The light emitting unit 21 and the light receiving unit 22 constituting the optical sensor are arranged to face each other in the X direction. The light emitting unit 21 is constituted by a semiconductor laser, for example, and outputs laser light having a diameter of about 1.5 mm, for example. This laser beam is received by the light receiving unit 22. The light receiving unit 22 outputs a detection signal according to the amount of received light.
In this case, the light beam of the laser light has a linear shape extending in the X direction. For example, when the nozzle 3 is moved in the Y direction and crosses the light beam of the laser light, the light beam is blocked by the nozzle 3 and does not reach the light receiving unit 22. As a result, the light receiving unit 22 decreases the amount of received light, and outputs a detection signal indicating a light amount reduction state.

The discarding unit 23 is used for discharging a coating agent as so-called discarding. The soaking part 24 is provided to soak the nozzle tip in the diluent. A brush 26 is attached to the side wall of the soaking part 24.
In this example, a coating agent diluted with a highly volatile solvent is used, which may be dried and hardened at the discharge hole 3a of the nozzle 3 to change the spray pattern 90 to be discharged.
Therefore, when not in use, the tip of the nozzle 3 is immersed in the soaking part 24 containing the diluent. For example, a thinner solvent is placed in the soaking part 24. This prevents clogging of the discharge hole 3a.
Further, before use, in a state where the nozzle 3 is positioned above the discarding portion 23, discharging as discarding is performed to blow off the cured portion, or the tip of the nozzle 3 is contacted with the brush 26 in the Y direction. It is made to move so that the vicinity of the discharge hole 3a can be cleaned. With these operations, a stable spray pattern shape can be obtained during an actual coating operation.

In this example, as will be described later, while the spray pattern 90 is ejected from the nozzle 3, the nozzle 3 is moved in a direction across the light beam of the sensor, and the width of the spray pattern 90 is measured.
At this time, since the above-described immersion, disposal, and brush cleaning are performed, the width of the spray pattern 90 can be measured stably even during measurement.
Further, the position above the thrown-out portion 23 is the position of the laser beam from the light emitting portion 21. Therefore, the operation of moving the nozzle 3 while discharging the spray pattern 90 as a measurement process to be described later can be performed above the discarding portion 23. That is, the throwing-out portion 23 also functions as a receiving portion for the spray pattern 90 discharged during the measurement process.
In addition, a slope is formed in the discarding portion 23 as shown in the figure, and the coating agent discarded by the slope is configured to scatter in a certain direction. In the case of FIG. 1, the coating agent 91 is scattered in the direction of the soaking part 24. For this reason, it is possible to prevent the coating agent from being scattered on the work table portion 2 at the time of disposal and measurement processing.

As shown in FIG. 1, an imaging unit 25 is attached above the workbench unit 2. The imaging unit 25 can capture an image of the circuit board 100 placed on the substrate platform 10.
Further, for example, a display unit 9 constituted by a liquid crystal panel or the like is provided. The display unit 9 is equipped with a touch panel, and an operator can perform an input operation.
The display unit 9 displays an image captured by the imaging unit 25 (captured image), an image obtained by processing the captured image, operation icons, a message display, and various other images for a user interface.
By displaying the image of the circuit board 100, the operator can designate a part to be coated on the image or designate a region where coating is prohibited.

<2. Control configuration of coating equipment>
FIG. 3 shows a control configuration of the coating apparatus 1. Here, an electric system is particularly shown here, and description of a fluid control system such as coating agent supply and pressurization control is omitted.

The main control unit 30 is an arithmetic processing unit formed by, for example, a microcomputer (CPU: Central Processing Unit), and controls the operation of each unit.
The memory unit 34 has a storage area such as a non-volatile memory such as a ROM (Read Only Memory), a RAM (Random Access Memory), and an EEP-ROM (Electrically Erasable and Programmable Read Only Memory) used by the main control unit 30 for various controls. It is shown generally.
The memory unit 34 includes both a storage area (register, RAM, ROM, EEP-ROM, etc.) formed inside the microcomputer and a memory chip area external to the chip as the microcomputer. Shown together. That is, since any storage area may be used, it is shown without distinction.

The ROM area in the memory unit 34 stores a program executed by the CPU as the main control unit 30.
The RAM area in the memory unit 34 is used by the CPU as the main control unit 30 as a work memory for various arithmetic processes, or for temporary storage of image data.
The nonvolatile memory area in the memory unit 34 stores necessary information such as coefficients and constants for arithmetic control processing.
The main control unit 30 performs necessary arithmetic processing and control processing based on a program stored in the memory unit 34, an operator's operation input from the input unit 31, or based on an instruction from a line control computer (not shown). I do.

The input unit 31 is a part for performing an operation input by an operator. For example, when a touch panel is formed on the display unit 9 as described above, the touch panel becomes the input unit 31. Moreover, the input part 31 by an operation key, a remote controller, etc. may be provided.
Input information from the input unit 31 is supplied to the main control unit 30, and the main control unit 30 performs processing according to the input information.

  The imaging unit 25 captures an image based on the control of the main control unit 30. For example, the circuit board 100 mounted on the substrate mounting table 10 is imaged as described above. A captured image signal (for example, a still image captured signal) from the image capturing unit 25 is subjected to A / D conversion processing, image adjustment processing, encoding processing, and the like by the image processing unit 32, and is transmitted to the main control unit 30 as captured image data in a predetermined format. Delivered. The main control unit 30 stores the captured image data in the memory unit 34. The main control unit 30 can read out the captured image data as necessary and perform image analysis processing, enlargement / reduction processing, image editing processing, external transmission processing, or the like.

The main control unit 30 supplies display data to the display driving unit 33 and causes the display unit 9 to execute display. The display driving unit 33 generates an image signal based on the supplied display data and drives the display unit 9.
For example, the main control unit 30 can transfer the captured image data to the display drive unit 33 and display the captured image on the display unit 9 or edit the captured image data and display the captured image data on the display unit 9.

The external interface 46 performs communication with external devices and network communication. The main control unit 30 can input and transmit various information via the external interface 46 by communication. For example, when each device on the line is networked, communication can be performed with the host device and other devices.
Through this communication, it is possible to receive captured image data and the like from an external device, load an upgrade program, and accept various processing coefficient and constant change settings. In addition, the main control unit 30 can transmit an error message, a warning, or the like to the host device, or can transmit captured image data.

The main control unit 30 transmits a nozzle movement command to the motor controller 35. The command contents are contents for instructing the nozzle movement direction (X, Y, Z direction and rotation angle position θ direction), the movement amount, and the movement speed.
For example, before starting the coating process, the main control unit 30 performs a process of creating a nozzle path according to an analysis of a captured image obtained by imaging the circuit board 100 and a prohibited area setting by an operation input by an operator. After the actual coating process is started, the nozzle movement direction is instructed to the motor controller 35 according to the created nozzle path.
The main control unit 30 also instructs the motor controller 35 to move the nozzle 3 in the measurement preparation process and the measurement process described later.
In response to these nozzle movement commands, the motor controller 35 drives and controls the motor drivers (36, 37, 38, 39).

The X motor driver 36 gives a driving current for forward rotation or reverse rotation to the X motor 7. As a result, the X motor 7 is driven, and the nozzle 3 (the entire nozzle holder 4) is slid in the forward or reverse direction of the X direction.
The Y motor driver 38 gives a driving current for forward rotation or reverse rotation to the Y motor 8. As a result, the Y motor 7 is driven, and the nozzle 3 (the X direction guide 11 as a whole) is slid in the forward or reverse direction of the Y direction.
The Z motor driver 39 gives a drive current for forward rotation or reverse rotation to the Z motor 5. Thereby, the Z motor 5 is driven, and the nozzle 3 is moved so as to be drawn out or pulled up in the vertical direction.
The nozzle rotation motor driver 38 gives a drive current for forward rotation or reverse rotation to the nozzle rotation motor 6. As a result, a rotation operation for changing the rotation angle position of the nozzle 3 is performed.
Motor controller 35, in response to a command from the main control unit 30 instructs the respective motor driver 36, 37, by executing the current application, and cooperation motors, workbench 2 The above nozzle movement is performed.

The position detector 51 detects the position in the X direction of the nozzle 3 moved by the X motor 7. For example, it is assumed that the information space of the workbench unit 2 is managed as a three-dimensional coordinate space as an X coordinate, a Y coordinate, and a Z coordinate. The position detection unit 51 detects the position in the X direction as an X coordinate value and notifies the main control unit 30 of the current X coordinate value.
The position detector 52 detects the rotational angle position of the nozzle 3 that is rotationally driven by the nozzle rotation motor 6. Then, the main control unit 30 is notified of the rotation angle position.
The position detection unit 53 detects the position in the Y direction of the nozzle 3 moved by the Y motor 8 as a Y coordinate value, and notifies the main control unit 30 of it.
The position detection unit 54 detects the position in the Z direction of the nozzle 3 moved up and down by the Z motor 5 as a Z coordinate value and notifies the main control unit 30 of the detected value.
The position detectors 51, 53, and 54 may be configured to detect positions by providing mechanical or optical sensors in the X direction guide 11, the Y direction guide 12, and the nozzle holder 4, respectively, or the X motor. 7. When the Y motor 8 and the Z motor 5 are stepping motors, the position detectors 51, 53, 54 are counters that count up / down the number of drive steps in the forward and reverse directions, and the count value is the detection position. But you can. Alternatively, the current position may be measured using signals from an FG (Frequency Generator) or a rotary encoder attached to the X motor 7, the Y motor 8, and the Z motor 5. In any case, the position detectors 51, 53, and 54 may be configured to detect the X coordinate value, the Y coordinate value, and the Z coordinate value as the current position of the nozzle 3, and the specific method thereof is not limited.
Similarly, the position detection unit 52 may be a sensor that mechanically or optically detects the nozzle rotation position. For example, an FG of the nozzle rotation motor 6, a rotary encoder, or an up / down counter of the number of steps in the case of a stepping motor. It is good.

Accordingly, the position detectors 51, 52, 53, 54 may be configured by an internal counter or the like of the motor controller 35, or may be configured in such a manner that the motor controller 35 takes in information of a mechanical or optical external sensor. Also good.
The motor controller 35 performs the nozzle drive obtained from the main control unit 30 while monitoring the position information from the position detection units 51, 52, 53, and 54.
Further, the main control unit 30 can receive the position information from the position detection units 51, 52, 53, and 54 via the motor controller 35 so that the current position of the nozzle 3 can be grasped, and the nozzle movement control is performed accurately and without waste. Can be executed.

The discharge controller 40 controls execution / stop of the discharge of the coating agent from the nozzle 3 in accordance with an instruction from the main controller 30. In this figure, the discharge mechanism 41 is conceptually shown as a mechanism part that supplies, pressurizes, and discharges the coating agent to the nozzle.
Further, the discharge control unit 40 can adjust the width of the spray pattern 90 of the coating agent by adjusting the pressure at the time of discharge in accordance with an instruction from the main control unit 30.
For example, the discharge mechanism 41 uses an electropneumatic regulator to adjust the air pressure for discharging the coating agent. The discharge control unit 40 can adjust the spray pattern 90 width of the coating agent with the injection pressure by controlling the electropneumatic regulator. Since the air pressure can be controlled steplessly in proportion to the electric signal by the electropneumatic regulator, the width of the spray pattern 90 can be changed steplessly. Thereby, adjustment of the spray pattern 90 or setting change etc. can be performed easily.

The sensor driving unit 42 executes laser light emission driving from the light emitting unit 21, detects a light reception signal of the light receiving unit 22, and generates a detection signal.
The sensor driving unit 42 performs laser emission driving in accordance with an instruction from the main control unit 30 and supplies a detection signal to the main control unit 30 at that time.

<3. Measurement of Spray Pattern Width of First Embodiment>
The spray pattern width measuring operation as the first embodiment in the coating apparatus having the above configuration will be described.
The spray pattern operation of the first embodiment is performed by two-stage operations of a measurement preparation process and a measurement process.
The measurement preparation process is a process of acquiring position coordinates at which the optical sensor reacts with the end of the nozzle 3. The measurement process is a process for actually measuring the width of the spray pattern 90.

An outline will be described. In the case of the present embodiment, the optical sensors (the light emitting unit 21 and the light receiving unit 22) are arranged to face each other in the X direction. That is, the light beam extends in the X direction.
In order to measure the width of the spray pattern 90, the nozzle 3 is moved in the Y direction, which is a direction across the light beam. Then, the position in the Y direction (Y coordinate value) is measured.
At this time, the spray pattern 90 is set to a rotation angle position in a state where the fan-shaped surface faces in the X direction, that is, the fan spreads in the Y direction. It is the state rotated 90 degrees from the state shown in FIG. 2A. Hereinafter, this rotation angle position is referred to as a measurement rotation angle position.

First, as a measurement preparation process, the Y coordinate value at which the nozzle 3 blocks the light beam is acquired while moving the nozzle 3 in the Y direction.
As shown in FIG. 4A, the nozzle 3 is moved to the −Y direction from the position where the nozzle 3 does not correspond to the optical axis JS of the light beam as indicated by a dashed arrow. Then, when the position state of FIG. 4B is reached, the light beam is blocked by the nozzle 3, the light amount of the light receiving unit 22 is sufficiently reduced, and a detection signal in the light blocking state is output.
For example, FIG. 7C shows an example of a change in the detection signal according to the light reception level of the light receiving unit 22. For example, the sensor drive unit 42 constantly compares the light reception level of the light receiving unit 22 with the threshold th, and outputs a detection signal at the L level if the light reception level is equal to or higher than the threshold th, and the H level when it is less than the threshold th. . For example, 50% of the maximum light amount is set as the threshold th.
The main control unit 30 can detect whether or not an object is located on the optical axis JS based on this detection signal.

  4B, when it is detected by the detection signal that the nozzle 3 has reached the position of the optical axis JS of the light beam, the main control unit 30 acquires the Y coordinate value Y1 at that time, and obtains the first position coordinate. The value (measurement reference value) is stored in the memory unit 34 (for example, a work area in a microcomputer including a CPU as the main control unit 30, a RAM area of a register or an external memory chip, or the like). This is the measurement preparation process (first position coordinate value acquisition process).

In the measurement process, the nozzle 3 from which the spray pattern 90 is ejected is moved in the Y direction in the same direction as the measurement preparation process, and the Y coordinate value at which the spray pattern 90 blocks the light beam is acquired.
As shown in FIG. 4C, the spray pattern 90 is ejected from the nozzle 3, and the position where the spray pattern 90 does not hit the optical axis JS of the light beam is set as the start position. Then, as indicated by a broken line arrow, the nozzle 3 is moved in the −Y direction, which is the same direction as in the measurement preparation process. Then, when the position state of FIG. 4D is reached, the amount of light received by the light receiving unit 22 is sufficiently reduced, and a detection signal in the light shielding state is output.
The position state of FIG. 4D is a state in which the thick width portion 90a of the spray pattern 90 hits the optical axis JS, not the edge of the spray pattern 90. The spray pattern 90 made of liquid has a cross-sectional shape as shown in FIG. 4E. In this case, the light quantity reduction of the light receiving unit 22 starts gradually from the edge, but the light quantity reduction level where the H / L fluctuates as a detection signal finally occurs in the illustrated thick width portion 90a. In other words, the light amount is reduced to some extent at the edge, but the reduction level is small. As described above, setting the threshold th to the 50% level is intended to detect the thick width portion 90a in the vicinity of the edge where the amount of received light is greatly reduced, rather than a slight reduction in the amount of light at the edge. But there is.

4D, when it is detected by the detection signal that the thickness width portion 90a of the spray pattern 90 has reached the position of the optical axis JS, the main control unit 30 acquires the Y coordinate value Y2 at that time, 2 is stored in the memory unit 34 (for example, a work area in a microcomputer including a CPU as the main control unit 30, a register or a RAM area of an external memory chip).
Then, the width of the spray pattern 90 is calculated using the first and second position coordinate values Y1 and Y2 and the value of the width (diameter) of the nozzle 3 stored in the memory unit 34 in advance.
Specifically, the difference between the Y coordinate values Y1 and Y2 is the distance from the nozzle end to the end of the spray pattern 90 (thick width portion 90a near the edge).
Therefore, if the width of the spray pattern 90 (width from the thick width portion 90a to the other thick width portion 90a) is Wn as shown in FIG.
(Y2-Y1) × 2 + Wn
Is calculated as

An example of specific control processing of the main control unit 30 for executing such measurement preparation processing and measurement processing will be described.
FIG. 5 shows a measurement preparation process performed by the main control unit 30 (CPU).
In step S101, the main control unit 30 instructs the motor controller 35 to move the nozzle 3 to the X and Y coordinate positions as the preparation process start position. That is, the Y coordinate value as shown in FIG. 4A is the Y coordinate value slightly inside the side wall (the side wall on the back side in the figure) of the throwing-out portion 23 in FIG.
Further, the X coordinate value is an X coordinate value corresponding to the approximate center of the side wall of the throwing-out portion 23. The X and Y coordinate values as the preparation processing start position are positions above the thrown-out portion 23 and are shifted from the optical axis JS in the Y direction.

Next, in step S102, the main control unit 30 instructs the motor controller 35 to drive the nozzle rotation motor 6 so that the fan of the spray pattern 90 reaches the rotation angle position for measurement in the Y direction. .
In the measurement preparation process, the spray pattern 90 is not actually discharged. Therefore, if the cross-sectional shape of the portion where the nozzle hits the optical axis JS is a perfect circle, this step S102 is unnecessary. However, when the nozzle shape is not a perfect circle (ellipse shape, polygonal shape, or the like), it is suitable to perform the process of step S102.
In step S103, the main control unit 30 instructs the motor controller 35 to drive the Z motor 5 to adjust the height position of the nozzle 3. That is, it is set to a height position at which the nozzle 3 hits the optical axis JS when moving in the −Y direction.
In step S <b> 104, the main control unit 30 instructs the sensor driving unit 42 to start laser emission from the light emitting unit 21.

In the above steps S101, S102, and S103, the position state of FIG. 4A is obtained, and the operation of the optical sensor is also started.
Note that the order in which the control in steps S101, S102, S103, and S104 is performed may be different. In addition, it is not always necessary to stop at the X and Y coordinate positions as the preparation process start position. When the X and Y coordinate positions of the preparation processing start position are reached from other positions, the movement may be shifted to step S105 described below without stopping.

4A, the main control unit 30 instructs the motor controller 35 to drive the Y motor 8 and move the nozzle 3 in the −Y direction in step S105.
The main control unit 30 monitors the detection signal of the optical sensor in step S106 during the movement in the -Y direction. If there is a change in the detection signal, the main control unit 30 proceeds to step S107, and the timing at which the detection signal has changed. Get the Y coordinate value at. It is the state of FIG. 4B. The acquired Y coordinate value is stored in the memory unit 34 as the first position coordinate value Y1.
In step S108, the movement in the −Y direction for measurement preparation is ended, and the operation of the optical sensor is also turned off.

Next, the measurement process will be described with reference to FIG.
In step S201, the main control unit 30 instructs the motor controller 35 to move the nozzle 3 to the X and Y coordinate positions as the measurement processing start position. This may be the same as the X and Y coordinate positions as the preparation process start position described above. That is, the Y coordinate value as shown in FIG. 4C is a Y coordinate value slightly inside the side wall (the side wall on the back side in the figure) of the throwing-out portion 23 in FIG. Further, the X coordinate value is an X coordinate value corresponding to the approximate center of the side wall of the throwing-out portion 23. Accordingly, the X and Y coordinate values as the measurement processing start position are positions above the thrown-out portion 23 and shifted from the light beam (optical axis JS) of the optical sensor in the Y direction.

Next, in step S202, the main control unit 30 instructs the motor controller 35 to drive the nozzle rotation motor 6 so that the fan of the spray pattern 90 reaches the measurement rotation angle position in the Y direction. .
Further, in step S203, the main control unit 30 instructs the motor controller 35 to drive the Z motor 5 to adjust the height position of the nozzle 3. In this case, it is set to a height position at which the spray pattern 90 discharged from the nozzle 3 hits the optical axis JS when moving in the −Y direction. In particular, a position having a height corresponding to the distance t described in FIG. 2 with reference to the height position (Z coordinate value) of the optical axis JS (see FIG. 4C).
By setting the height position in this way, it is possible to measure the width of the spray pattern 90 that actually hits the application surface during the coating process.

In step S <b> 204, the main control unit 30 instructs the sensor driving unit 42 to start laser emission from the light emitting unit 21.
In step S <b> 205, the main control unit 30 instructs the discharge control unit 40 to start discharge of the coating agent from the nozzle 3 by the discharge mechanism 41.

In the above steps S201, S202, S203, S204, and S205, the position state of FIG. 4C is reached, the operation of the optical sensor is started, and the spray pattern 90 is started to be discharged. In addition, since the measurement processing start position is above the throwing-out portion 23, the work table portion 2 is not soiled by the spray pattern 90 being discharged.
Note that the order in which the control in steps S201, S202, S203, and S204 is performed may be different. Further, the discharge start control in step S205 may be performed after at least the nozzle 3 reaches the X and Y coordinate positions of the measurement process start position.

When the measurement processing start position in FIG. 4C is reached, in step S206, the main control unit 30 instructs the motor controller 35 to drive the Y motor 8 and move the nozzle 3 in the −Y direction.
The main control unit 30 monitors the detection signal of the optical sensor in step S207 during the movement in the -Y direction, and if there is a change in the detection signal, the process proceeds to step S208 and the timing at which the detection signal has changed. Get the Y coordinate value at. It is the state of FIG. 4D. The acquired Y coordinate value is stored in the memory unit 34 as the second position coordinate value Y2.
In step S209, discharge stop control of the spray pattern 90 is performed. In step S210, measurement end control in the −Y direction and optical sensor operation off control are performed.

In step S <b> 211, the main control unit 30 calculates the width Wsp of the spray pattern 90 using the coordinate values stored in the memory unit 34. That is, using the first and second position coordinate values Y1, Y2 and the width Wn of the nozzle 3 stored in the memory unit 34 in advance,
Wsp = (Y2−Y1) × 2 + Wn
As a result, the width Wsp of the spray pattern 90 is calculated.
This completes the measurement process.

As described above, in the present embodiment, the main control unit 30 performs nozzle preparation along the Y coordinate axis that is orthogonal to the light beam (optical axis JS) of the optical sensor as the measurement preparation process (first position coordinate value acquisition process). 3 performs a movement in the −Y direction toward the light beam.
Then, the first position coordinate value (Y1) on the Y coordinate axis when the detection signal change of the optical sensor due to the nozzle 3 hitting the optical axis JS is obtained and stored in the memory unit 34.
Further, the main control unit 30 performs, as a measurement process (second position coordinate value acquisition process and calculation process), the fan-shaped spray pattern 90 ejected from the nozzle 3 toward the light beam (optical axis JS) along the Y coordinate axis − Move in the Y direction.
Then, the second position coordinate value (Y2) on the Y coordinate axis when the detection signal change of the optical sensor is obtained by the spray pattern 90 is acquired and stored in the memory unit 34.
Then, the width Wsp of the spray pattern 90 is calculated using the width Wn of the nozzle 3 read from the memory unit 34, the first position coordinate value Y1, and the second position coordinate value Y2.

The measurement preparation process (first position coordinate value acquisition process) shown in FIG. 5 is performed in advance as a preparation process, for example, when the coating apparatus 1 is started, and the first position coordinate value Y1 is stored. good. Then, when actually measuring the spray pattern width, only the measurement process (second position coordinate value acquisition process and calculation process) of FIG. 6 can be performed.
Alternatively, when measuring the spray pattern width, the measurement preparation process (first position coordinate value acquisition process) in FIG. 5 and the measurement process (second position coordinate value acquisition process and calculation process) in FIG. 6 are performed in succession. Also good.
If the measurement preparation process is performed in advance, at the time of actual measurement, the measurement can be completed in a very short time, that is, a period in which the nozzle is slightly moved once in the -Y direction.
Even if the measurement preparation process and the measurement process are continuously performed, only a slight movement in the −Y direction is performed twice, and even in this case, the measurement can be completed in a short time.

Therefore, according to the present embodiment, it is possible to efficiently measure the width of the spray pattern 90 in a very short time.
As for the measurement result of the width of the spray pattern 90, the main control unit 30 instructs the discharge control unit 40 to perform pressure adjustment of the discharge mechanism 41 as compared with the target width. Thereby, the width of the spray pattern 90 can be adjusted to the target width.
In particular, even when adjusting the spray pattern width by repeatedly measuring the width of the spray pattern 90 while changing the pressure, the measurement preparation process is only performed once (or in advance), and repeated. Only the measurement process may be performed at the time of measurement. That is, one measurement can be performed by moving once in the -Y direction. For this reason, a series of operation efficiency for width adjustment is very good.

  Also, the coating agent is discharged only for a short time between the measurement start position and the movement of the optical sensor to react. For this reason, the consumption of the coating agent for the measurement is very small, and it can be said that the consumption of the coating agent is avoided as much as possible.

In the present embodiment, first, the first position coordinate value Y1 at which the optical sensor detects the end of the nozzle 3 is acquired. Then, in a state where the coating agent is discharged from the nozzle 3, a second position coordinate value Y2 at which the optical sensor detects the spray pattern 90 of the coating agent is acquired.
The difference between the first position coordinate value Y1 and the second position coordinate value Y2 is the distance from the end of the nozzle 3 to the sensor response position of the spray pattern.
Here, the sensor reaction position is a portion where the spray pattern 90 has a certain thickness and can be surely reacted by the optical sensor, and is the thick width portion 90a in the vicinity of the edge of the spray pattern 90 as described above.
The edge portion of the spray pattern 90 by the pressurized liquid is not necessarily a position that can be reliably detected by the optical sensor, and is undefined because it is a discharge liquid to the last. Therefore, in the present embodiment, the second position coordinate value Y2 is determined by targeting the thick width portion 90a that the sensor can react reliably in the vicinity of the edge.
Then, using the difference between the first and second position coordinate values Y1 and Y2 and the width of the nozzle 3 (nozzle diameter), the width of the spray pattern is calculated. This calculation excludes indefinite edges in the liquid spray pattern 90. That is, the width of the spray pattern 90 to be measured is the width from the sensor reaction position to the opposite sensor reaction position (from the thick width portion 90a to the opposite thick portion 90a), not from the edge to the edge of the spray pattern. is there.
For this reason, the optical sensor (sensor drive unit 42) generates a detection signal, for example, with a 50% light quantity value as a threshold th so as to output a detection signal that changes according to the portion where the cross-section of the fan-shaped spray pattern becomes thick. To do.

In this way, it is possible to measure the spray pattern width without variation for each measurement.
For example, when the edge is targeted, it is difficult to set the threshold value th of the sensor. This is because the degree of light shielding at the edge is not constant. On the other hand, when the thick width portion 90a that is not the edge is targeted as in the present embodiment, since a certain amount of light shielding action can be stably expected, for example, by setting a 50% light amount value as the threshold th or the like. Thus, the thick width portion 90a can be detected stably.
That is, for the spray pattern 90 that is liquid and has an indefinite light shielding effect, the thickness-width portion 90a in the vicinity of the edge can be detected stably for each measurement, so that actual width control can be performed without actually measuring the edge from edge to edge. In contrast, the accuracy for control is improved.

In addition, since the spray pattern width including the actual edge can be predicted to some extent from the above calculation result, it is not really necessary to actually measure the edge from the edge.
In practice, the width (application width) in which the coating agent is applied by the spray pattern 90 on the circuit board 100 is from the edge to the edge.
Therefore, for example, when the above-described spray pattern width measurement is performed, the display unit 9 may display the actual application width by correcting the measured value. The correction value can be set in advance.
For example, when the width Wsp of the spray pattern 90 obtained by the above measurement process is 9 mm, it is assumed that the application width is actually measured (measured with a ruler after application) and is 10 mm. In this case, the correction value is 1 mm.
If the operation for obtaining the correction value is performed in advance by changing the pressure into several stages, the correction value for each value of the measured width Wsp can be obtained. Alternatively, a correction coefficient can be obtained.
Therefore, the correction value corresponding to each value of the width Wsp for which the correction value is calculated as table data is stored in the memory unit 34 (for example, a non-volatile memory area), or a correction coefficient for multiplying the width Wsp is stored.
When performing the measurement process, the main control unit 30 corrects the width Wsp and causes the display unit 9 to display a value as the coating width. For example, when the measured width Wsp = 9 mm, it is corrected and displayed as 10 mm. In this way, the operator can recognize the actual coating width.

Note that the following processing is conceivable as a modification of the first embodiment.
The measurement preparation process of FIG. 5 does not necessarily discharge the spray pattern 90, and thus does not necessarily have to be performed above the discarding unit 23. What is necessary is to start at least from the vicinity of the optical axis JS.
In addition to the throwing-out portion 23, a portion serving as a tray for the spray pattern 90 in the measurement process may be provided, and the measurement process of FIG. 6 may be performed in the sky.
Further, if the optical sensor is always turned on, the laser emission on / off control may not be performed during the processing of FIGS.
In the measurement preparation process and the measurement process, the nozzle movement in the −Y direction is performed. However, it is sufficient that the nozzles are moved in the same direction. In both the measurement preparation process and the measurement process, the nozzle movement is performed in the + Y direction. You may make it go to.
In the example of FIG. 1, since the light emitting unit 21 and the light receiving unit 22 are arranged so that the light beam from the light emitting unit 21 extends in the X direction, the moving direction in the measurement preparation process and the measurement process is the direction along the Y axis. However, when the light emitting unit 21 and the light receiving unit 22 are arranged so that the light beam extends in the Y direction, it goes without saying that the movement direction during the measurement preparation process and the measurement process is a direction along the X axis. .

<4. Example of optical sensor configuration>
Here, a configuration example of the optical sensor will be described.
As shown in FIG. 7A, the optical sensor can be configured to use a light emitting unit 21 and a light receiving unit 22 and to face each other as shown in FIG.
On the other hand, as shown in FIG. 7B, a light emitting / receiving unit in which the light emitting unit 21 and the light receiving unit 22 are integrally arranged may be used, and the mirror 27 may be arranged at the tip of the light beam direction. For example, the light emitting / receiving unit is arranged at the position of the light emitting unit 21 in FIG. 1, and the mirror 27 is arranged at the position of the light receiving unit 22 in FIG. Even if it does in this way, it can function for the width measurement of the above-mentioned spray pattern 90 similarly as an optical sensor.

<5. Measurement of Spray Pattern Width of Second Embodiment>
A method for measuring the width of the spray pattern 90 as the second embodiment will be described.
The second embodiment eliminates the above-described measurement preparation process. That is, on the work table portion 2, the position where the nozzle 3 hits the optical axis JS (the position in the state of FIG. 4B) can be defined in advance in terms of device design. Accordingly, not only the width value Wn of the nozzle 3 but also the first position coordinate value Y1 described above can be stored in the memory unit 34 in advance.
The first position coordinate value Y1 is when the nozzle 3 moves in one direction (−Y direction) toward the light beam along a predetermined movement axis (for example, the Y coordinate axis) that is orthogonal to the light beam of the optical sensor. Further, the Y coordinate value is a position where a change in the detection signal of the optical sensor due to the nozzle 3 is obtained.

Therefore, the configuration is such that the width value Wn of the nozzle 3 and the first position coordinate value Y1 are stored in the memory unit 34 in advance.
Then, when measuring the width of the spray pattern 90, only the operation described in the measurement process of FIG.
That is, the main control unit 30 causes movement control to move the fan-shaped spray pattern 90 discharged from the nozzle 3 along the Y coordinate axis in the −Y direction toward the optical axis JS, and this movement process is caused by the spray pattern 90. The second position coordinate value is acquired and stored as the Y coordinate value when a change in the detection signal of the photosensor is obtained. Then, using the width Wn of the nozzle 3 read from the memory unit 34, the first position coordinate value Y1, and the second position coordinate value Y2,
Wsp = (Y2−Y1) × 2 + Wn
As a result, the width Wsp of the spray pattern 90 is calculated.

As a result, the same effect as in the first embodiment can be obtained, and the time required for the measurement operation can be further shortened.
In this case as well, the optical sensor (sensor drive unit 42) outputs a detection signal that changes according to the portion where the cross-section of the fan-shaped spray pattern becomes thick when acquiring the Y coordinate value Y2. This is the same as in the first embodiment.

<6. Measurement of Spray Pattern Width of Third Embodiment>
In the first embodiment, the nozzle movement direction during the measurement preparation process and the measurement process is both the −Y direction (the same direction).
In the second embodiment, the nozzle movement direction for defining the first position coordinate value Y1 stored in advance and the nozzle movement direction in the measurement process are both set to the −Y direction (the same direction).
As described above, the nozzle moving direction with respect to the first and second position coordinate values Y1 and Y2 has been described as the same direction, but it is also possible to make this the reverse direction.
For example, in accordance with the first embodiment, when obtaining the first position coordinate value Y1 as the measurement preparation process, the nozzle is moved in the + Y direction, and when obtaining the second position coordinate value Y2 as the measurement process. In this method, the nozzle is moved in the -Y direction.

In this case, the value of Y2-Y1 in the first embodiment can be obtained as Y2-Y1-Wn using the width Wn of the nozzle 3.
Therefore, the calculation of the width Wsp of the spray pattern 90 is
Wsp = (Y2−Y1−Wn) × 2 + Wn
Can be calculated as
Even if this method is used, the width of the spray pattern 90 can be measured efficiently.

<6. Program>
The program according to the embodiment is a program for causing an arithmetic processing unit such as a CPU or a DSP (Digital Signal Processor) to execute the above-described measurement preparation process in FIG. 5 or the measurement process in FIG.
That is, the program according to the operation of the first embodiment is a first movement process in which the moving unit moves the nozzle 3 in one direction toward the light beam along a predetermined movement axis that is orthogonal to the light beam of the photosensor. And a first position coordinate value acquisition process for acquiring a first position coordinate value on a predetermined movement axis when a detection signal change of the optical sensor due to the nozzle 3 is obtained in the movement process by the first movement process. The moving means moves the fan-shaped spray pattern 90 ejected from the nozzle 3 along the predetermined moving axis in the one direction toward the light beam, and a moving process by the second moving process. The second position coordinate value acquisition process for acquiring the second position coordinate value on the predetermined movement axis when the detection signal change of the optical sensor due to the spray pattern 90 is obtained, and read from the storage means The width of the nozzle 3 which is, by using the first position coordinate value and a second position coordinate value, to perform a calculation process for calculating the width of the spray pattern 90 to the control unit (processing unit).

The program according to the operation of the second embodiment is a movement in which the fan-shaped spray pattern discharged from the nozzle 3 is moved in one direction toward the light beam of the optical sensor along the predetermined movement axis by the moving means. And a second position coordinate value acquisition process for acquiring a second position coordinate value on the predetermined movement axis when a change in the detection signal of the optical sensor due to the spray pattern 90 is obtained in the movement process by the movement process. And a calculation process for calculating the width of the spray pattern 90 using the width and first position coordinate value of the nozzle 3 read from the storage means and the second position coordinate value to the control means (arithmetic processing unit). Let it run.
With such a program, the coating apparatus 1 that efficiently measures the width of the spray pattern 90 can be realized.

Such a program can be recorded in advance in a memory unit 34 as a recording medium built in the coating apparatus 1, an HDD (Hard Disk Drive), or a ROM in a microcomputer having a CPU. .
Alternatively, a flexible disk, CD-ROM (Compact Disc Read Only Memory), MO (Magneto optical) disk, DVD (Digital Versatile Disc), Blu-ray Disc (Blu-ray Disc (registered trademark)), magnetic disk, semiconductor memory, It can be stored (recorded) temporarily or permanently in a removable recording medium such as a memory card. Such a removable recording medium can be provided as so-called package software.
Further, such a program can be downloaded from a removable recording medium to a personal computer or the like, or downloaded from a download site via a network such as a LAN (Local Area Network) or the Internet.
Moreover, according to such a program, it is suitable for wide provision of the coating apparatus 1 of embodiment.

<7. Modification>
In the embodiment, an example in which a fan-shaped spray pattern is discharged from the nozzle 3 is described. However, the nozzle does not necessarily have to discharge a fan-shaped spray pattern.
For example, when a nozzle that discharges a spray pattern spreading in a conical shape is used, the same processing as that in the above-described embodiment can be applied to measure the width (diameter) of the spray pattern. That is, it is effective for a liquid ejection apparatus in which the spray pattern is wider than the nozzle.

The coating apparatus according to the embodiment is not limited to a coating apparatus that forms a thin film on a circuit board, but can be applied to a coating apparatus that forms a thin film or the like on various objects to be processed.
The thin film can be applied to coating various films such as a moisture-proof film, a rust-proof film, a paint film, and a colored film.
In addition, the liquid ejection apparatus of the present invention is not limited to the coating apparatus as in the embodiment, but a liquid ejection apparatus that ejects pressurized liquid for various purposes such as film formation, cleaning, and painting, and its spray pattern width measurement. It can be widely applied as a method or its program.

DESCRIPTION OF SYMBOLS 1 ... Coating apparatus 2 ... Worktable part 3 ... Nozzle 4 ... Nozzle holder 5 ... Z motor 6 ... Nozzle rotation motor 7 ... X motor 8 ... Y motor 9 ... Display part 10 ... Substrate mounting table 11 ... X direction guide 12 ... Y Direction guide 21 ... Light emitting unit 22 ... Light receiving unit 23 ... Discarding unit 24 ... Dipping unit 25 ... Imaging unit 26 ... Brush 27 ... Mirror 30 ... Control unit 31 ... Input unit 32 ... Image processing unit 33 ... Display drive unit 34 ... Memory unit 35 ... Motor controller 42 ... Sensor drive unit 46 ... External interface 51, 52, 53, 54 ... Position detection unit

Claims (14)

A nozzle for discharging a spray pattern;
Moving means for moving the nozzle;
An optical sensor that outputs a detection signal corresponding to a light receiving state in the light receiving unit of the light beam output from the light emitting unit;
Storage means for storing at least the value of the width of the nozzle;
Control means;
Have
The control means includes
The detection signal change of the photosensor caused by the nozzle is first obtained in a state where the moving means executes the movement of the nozzle toward the light beam along a predetermined movement axis that is orthogonal to the light beam. A first position coordinate value acquisition process for acquiring a first position coordinate value on the predetermined movement axis when
A change in the detection signal of the optical sensor caused by the spray pattern is first performed in a state where the moving means executes the one-way movement of the spray pattern discharged from the nozzle toward the light beam along the predetermined movement axis. A second position coordinate value acquisition process for acquiring a second position coordinate value on the predetermined movement axis when obtained
A calculation process for calculating the width of the spray pattern using the difference value between the second position coordinate value and the first position coordinate value and the width of the nozzle read from the storage means;
Liquid ejecting device that performs. 2. The liquid ejection device according to claim 1, further comprising a discharge stop process for stopping spray pattern discharge in accordance with the second position coordinate value acquisition process. The nozzle is a nozzle that discharges a fan-shaped spray pattern,
The liquid ejecting apparatus according to claim 1, wherein the optical sensor outputs a detection signal that changes according to a portion where a cross-section of the fan-shaped spray pattern has a thickness width during the second position coordinate value acquisition processing. The control means includes
In the above calculation process,
{(Second position coordinate value)-(first position coordinate value)} × 2 + (width of the nozzle)
The liquid ejecting apparatus according to claim 1, wherein the width of the spray pattern is calculated by:   The liquid ejection apparatus according to claim 1, wherein the nozzle is a nozzle that ejects a coating agent for forming a thin film on the placed processing object in a fan-shaped spray pattern. Nozzle for ejecting a spray pattern, moving means for moving the nozzle, an optical sensor for outputting a detection signal corresponding to the light receiving state of the light beam output from the light emitting unit, and at least the width value of the nozzle As a measuring method for measuring the width of the spray pattern in the liquid ejection apparatus provided with the storage means for storing the calculation means,
A first moving step of moving the nozzle in one direction toward the light beam along a predetermined movement axis that is orthogonal to the light beam by the moving means;
In the course of the first movement step, a first position coordinate value acquisition step of acquiring a first position coordinate value on the predetermined movement axis when a detection signal change of the optical sensor due to the nozzle is first obtained. When,
A second moving step of moving the spray pattern discharged from the nozzle in the one direction toward the light beam along the predetermined moving axis by the moving means;
In the course of the second movement step, a second position coordinate value acquisition step of acquiring a second position coordinate value on the predetermined movement axis when the detection signal change of the optical sensor due to the spray pattern is first obtained. When,
A calculating step in which the calculation means calculates the spray pattern width using the difference value between the second position coordinate value and the first position coordinate value and the width of the nozzle read from the storage means; ,
A spray pattern width measurement method comprising: Nozzle for ejecting a spray pattern, moving means for moving the nozzle, an optical sensor for outputting a detection signal corresponding to the light receiving state of the light beam output from the light emitting unit, and at least the width value of the nozzle As a program for causing the control means of the liquid ejection apparatus having the storage means to store the process of measuring the width of the spray pattern,
A first movement process in which the moving means moves the nozzle in one direction toward the light beam along a predetermined movement axis that is orthogonal to the light beam;
Obtaining a first position coordinate value for obtaining a first position coordinate value on the predetermined movement axis when a detection signal change of the optical sensor due to the nozzle is first obtained in the movement process by the first movement process. Processing,
A second movement process for moving the spray pattern discharged from the nozzle in the one direction toward the light beam along the predetermined movement axis by the moving means;
A second position coordinate value for acquiring a second position coordinate value on the predetermined movement axis when the detection signal change of the photosensor due to the spray pattern is first obtained in the movement process by the second movement process. Acquisition process,
A calculation process for calculating the width of the spray pattern using the difference value between the second position coordinate value and the first position coordinate value and the width of the nozzle read from the storage means;
A program for causing the control means to execute. A nozzle for discharging a spray pattern;
Moving means for moving the nozzle;
An optical sensor that outputs a detection signal corresponding to a light receiving state in the light receiving unit of the light beam output from the light emitting unit;
At least the width value of the nozzle and the light caused by the nozzle in a state in which the nozzle is moved in one direction toward the light beam along a predetermined movement axis that is orthogonal to the light beam. Storage means for storing a first position coordinate value on the predetermined movement axis as a position where a detection signal change of the sensor is first obtained;
Control means;
Have
The control means includes
A change in the detection signal of the optical sensor caused by the spray pattern is first performed in a state where the moving means executes the one-way movement of the spray pattern discharged from the nozzle toward the light beam along the predetermined movement axis. A second position coordinate value acquisition process for acquiring a second position coordinate value on the predetermined movement axis when obtained
Calculation for calculating the width of the spray pattern using the difference value between the second position coordinate value and the first position coordinate value read from the storage means and the nozzle width read from the storage means. Processing,
Liquid ejecting device that performs. The liquid ejection apparatus according to claim 8, further comprising a discharge stop process for stopping the discharge of the spray pattern in accordance with the second position coordinate value acquisition process. The nozzle is a nozzle that discharges a fan-shaped spray pattern,
The liquid ejecting apparatus according to claim 8 , wherein the optical sensor outputs a detection signal that changes according to a portion where a cross-section of the fan-shaped spray pattern has a thickness width during the second position coordinate value acquisition process. The control means includes
In the above calculation process,
{(Second position coordinate value)-(first position coordinate value)} × 2 + (width of the nozzle)
The liquid ejecting apparatus according to claim 8 , wherein the width of the spray pattern is calculated by : The liquid ejection device according to claim 8 , wherein the nozzle is a nozzle that ejects a coating agent for forming a thin film on the placed processing target in a fan-shaped spray pattern. Nozzle for ejecting a spray pattern, moving means for moving the nozzle, an optical sensor for outputting a detection signal corresponding to the light receiving state of the light beam output from the light emitting unit, and at least the width value of the nozzle When, in the first detection signal change of the optical sensor in which the nozzle along a predetermined movement axis as the direction perpendicular to the said light beam caused by the nozzle moving in one direction toward the light were allowed to run on the moving means As a measuring method for measuring the width of the spray pattern in the liquid ejection apparatus provided with the storage means for storing the first position coordinate value on the predetermined movement axis as the obtained position and the calculation means,
A moving step of moving the spray pattern discharged from the nozzle in the one direction toward the light beam along the predetermined movement axis by the moving means;
A second position coordinate value acquisition step of acquiring a second position coordinate value on the predetermined movement axis when the detection signal change of the optical sensor due to the spray pattern is first obtained in the course of the movement step;
The calculation means uses the difference value between the second position coordinate value and the first position coordinate value read from the storage means, and the nozzle width read from the storage means , and the spray pattern. A calculation step for calculating the width of
A spray pattern width measurement method comprising: Nozzle for ejecting a spray pattern, moving means for moving the nozzle, an optical sensor for outputting a detection signal corresponding to the light receiving state of the light beam output from the light emitting unit, and at least the width value of the nozzle When, in the first detection signal change of the optical sensor in which the nozzle along a predetermined movement axis as the direction perpendicular to the said light beam caused by the nozzle moving in one direction toward the light were allowed to run on the moving means As a program for causing the control means of the liquid ejection apparatus having the storage means for storing the first position coordinate value on the predetermined movement axis as the obtained position to execute the process of measuring the width of the spray pattern,
A moving process for moving the spray pattern discharged from the nozzle in the one direction toward the light beam along the predetermined movement axis by the moving means;
A second position coordinate value acquisition process for acquiring a second position coordinate value on the predetermined movement axis when the detection signal change of the optical sensor due to the spray pattern is first obtained in the movement process by the movement process; ,
The width of the spray pattern is calculated using the difference value between the second position coordinate value and the first position coordinate value read from the storage means and the nozzle width read from the storage means. Calculation process,
A program for causing the control means to execute.

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