JP5092649B2 - Coating agent deterioration inspection device, deterioration inspection method, and deterioration inspection program - Google Patents

Description

  The present invention relates to a deterioration inspection apparatus, a deterioration inspection method, and a deterioration inspection program, and more particularly to a deterioration inspection apparatus, a deterioration inspection method, and a deterioration inspection program for inspecting deterioration of a coating agent to be applied.

  Resin for bonding used in the assembly process of semiconductors, for example, fillets filled on the surface and lower surface of semiconductor chips mounted on a substrate are subject to rapid changes over time, such as viscosity changes when exposed to the outside air. From the above, it has the property that the external shape of the resin changes. Therefore, in order to know the replacement time of the resin, a method has been proposed in which a change in the external shape of the resin is measured by image processing or the like and the degree of deterioration of the resin is determined based on the result.

  For example, in Patent Document 1 below, the shape of the paste discharged from the discharge nozzle is determined by a camera based on the characteristic that the shape of the resin after application varies as the resin deteriorates in the application operation under the same application conditions. A method of manufacturing a semiconductor device that takes an image from directly above, calculates a paste discharge amount from a flat area projected by an imaging pattern of a camera, calculates a difference value from an appropriate required amount, and feeds back to the discharge unit It is disclosed.

  Further, in Patent Document 2 below, in the application operation under the same application conditions, the resin is discharged from the discharge port of the dispenser based on the characteristic that the shape of the resin staying at the nozzle tip varies with the deterioration of the resin. A liquid material ejection system is disclosed in which the shape of a liquid material is imaged from the side by a camera, the ejection volume of the liquid material is obtained based on the imaging shape, and the ejection parameters of the dispenser are set based on the ejection volume.

Japanese Patent Laid-Open No. 03-36740 JP 2002-361145 A

  However, since imaging of the appearance is often performed only once for each field of view in one inspection, in the method of inspecting the deterioration state based on the appearance shape of the resin after application as in Patent Document 1, a resin is used. There is a problem that it is difficult to accurately determine the deterioration state based on the timing of imaging.

  For example, as shown in FIG. 3, when inspecting a resin having a property of changing the appearance feature amount such as the area of the coating region viewed from the upper surface, sufficient time is required until the appearance feature amount becomes a steady state. is there. Therefore, if an image is taken immediately after application (before the time period in which deterioration can be detected in the figure), the appearance feature amount becomes almost the same regardless of the degree of deterioration of the resin, and the deterioration of the resin cannot be accurately determined. On the other hand, in the case of inspecting a resin having the property of changing the appearance feature value as shown in FIG. 4, the appearance feature value changes immediately after application, and thereafter, the appearance feature value becomes substantially constant in a steady state. For this reason, if an image is taken after a predetermined time has elapsed since application (after the degradation detectable time zone in the figure), the appearance feature amount becomes almost the same regardless of the degree of resin degradation, and the resin degradation is accurately determined. Cannot judge.

  Further, as in Patent Document 2, in the method of inspecting the deterioration state based on the appearance shape of the resin staying at the nozzle tip, the change in the appearance feature amount of the resin having low viscosity is small. Therefore, even if the appearance shape of the resin staying at the nozzle tip is the same, the appearance shape of the resin after application is not always the same, and it is difficult to accurately determine the deterioration of the resin by this method. Further, Patent Document 2 discloses a configuration in which data in a normal continuous ejection process is stored in a memory as a history, and an imaging result at a certain point is compared with an imaging result stored in the memory. However, since the appearance feature amount varies depending on the timing at which each image pickup result is taken after supplying the resin to the nozzle tip, it is difficult to accurately determine the deterioration of the resin.

  The present invention has been made in view of the above-mentioned problems, and its main object is to provide a deterioration inspection apparatus and a deterioration inspection method for a coating agent that can accurately determine the deterioration of the coating agent by the appearance shape after coating. And providing a deterioration inspection program.

  In order to achieve the above object, the degradation inspection apparatus of the present invention includes an imaging unit that images the appearance of the applied coating agent, and a plurality of images obtained by imaging with the imaging unit at a predetermined timing immediately after application. A storage unit for storing the image of the image, the appearance feature amount of the coating agent is measured from each of the images, and based on a comparison result between the data indicating the temporal change of the appearance feature amount and a reference value, A processing unit that determines deterioration.

  According to the deterioration inspection apparatus, the deterioration inspection method, and the deterioration inspection program of the coating agent of the present invention, it is possible to accurately determine the deterioration of the coating agent by the appearance shape after coating.

  The reason for this is that the appearance shape of the coating agent from immediately after application to the steady state is imaged at regular time intervals, and the appearance feature quantities such as the diameter, area, and height are measured from the captured images, In order to determine the deterioration of the coating agent based on the comparison result between the data showing the change with time and the reference value, the coating agent has a property that the appearance feature amount changes gently, or the property that the appearance feature amount changes immediately after application. This is because the deterioration of the coating agent of any property, such as a coating agent, can be inspected.

  Then, by inspecting the deterioration of the coating agent by such a method, it is possible to appropriately determine the replacement time of the coating agent in the minimum necessary time, which can contribute to the quality improvement of the coating agent application process. .

  In a preferred embodiment of the present invention, a general coating agent coating apparatus is provided with means for transiently observing a change with time of the appearance of the coating agent. Specifically, the imaging unit that images the appearance of the droplets of the coating agent, the time immediately after the replacement of the coating agent, and the inspection after a predetermined time has elapsed since the replacement, after the application of the coating agent is fixed Storage unit for storing images obtained by imaging at time intervals, and measuring the appearance feature amount of the droplet from the stored image, comparing the reference value with the data indicating the change in appearance feature amount over time And a processing unit that determines deterioration of the coating agent based on whether or not the amount of change exceeds an allowable range.

  In order to describe the above-described embodiment of the present invention in more detail, with reference to FIGS. 1 to 5, the coating agent deterioration inspection apparatus, the deterioration inspection method, and the deterioration inspection program according to the first embodiment of the present invention will be described. I will explain. FIG. 1 is a schematic diagram illustrating a configuration of a deterioration inspection apparatus according to the present embodiment. FIG. 2 is a plan view showing an example of the shape of a dot-applied coating agent, and FIGS. 3 and 4 are diagrams showing temporal changes in the appearance feature amount of the coating agent. FIG. 5 is a flowchart showing the procedure of the deterioration inspection method of this embodiment.

  The deterioration inspection apparatus of the present embodiment is provided with a deterioration inspection means that is a characteristic part of the present embodiment on a general coating agent coating apparatus that applies a liquid coating agent such as a silver paste or an adhesive used in a semiconductor assembly process. It is added.

  Specifically, as shown in FIG. 1, a general coating agent coating apparatus includes a syringe 5 for storing a coating agent, a nozzle 6 for discharging a certain amount of coating agent, and positioning them by moving them. A biaxial or triaxial stage 3, a dispenser 4 for controlling the coating amount of the coating agent, a coating member 7 to be coated, a coating stage 8 for coating the coating agent, and the stage 3 The controller 2 is configured to control the dispenser 4.

  The coating agent coating apparatus moves the coating stage 8 to a predetermined coating position and lowers the Z axis so that the nozzle 6 is in contact with the surface of the member 7 to be coated or is at a certain distance from the surface. After a certain amount of discharge, a point application operation that raises the Z axis, or after starting discharge, the XY axes are moved on a predetermined trajectory while the Z axis is lowered, and the discharge is terminated at the end point. A line coating operation that repeats the operation of raising the shaft is possible. Furthermore, according to the application, an inspection stage 9 for confirming the adjustment and state of the coating amount, and a transfer means (not shown) such as a handler or a conveyor for transferring the coated member 7 to the coating stage 8 are provided. You may prepare.

  And in such a coating agent coating apparatus, the imaging part 11 which images the apply | coated coating agent 10, the memory | storage part 13 which preserve | saves the image etc. which were imaged, etc., the diameter of a coating shape, an area, etc. from the captured image And a processing unit 12 for determining deterioration of the coating agent based on a comparison result between the data indicating the temporal change of the appearance feature amount and the reference value. A deterioration inspection apparatus 1 is configured.

  The imaging unit 11 can be configured by a CCD (Charge Coupled Devices) camera or the like. However, it only needs to be able to image the coating agent applied on the member 7 to be applied, and its installation location, shape, and imaging method. The resolution and the like are not particularly limited. Further, the imaging unit 11 may acquire the appearance shape of the coating agent at predetermined time intervals immediately after the coating agent application operation as a still image, or acquire the appearance shape of the coating agent immediately after the coating agent application operation as a moving image. May be. The storage unit 13 can be configured by a flash memory, a hard disk, or the like, as long as it can record a still image every predetermined time interval immediately after the coating agent application operation or a moving image immediately after the coating agent application operation. The recording form and recording capacity are not particularly limited. The processing unit 12 may be configured as hardware, or may be configured as a deterioration inspection program that causes a computer to function as the processing unit 12, and the deterioration inspection program may be operated on the control unit 2 or the like.

  Moreover, the structure of the said coating agent coating device is not specifically limited. For example, it is good also as an apparatus aiming at application | coating of the adhesive agent in the apparatus which pastes flat things, such as a chip mounter and a board | substrate sticking apparatus. Also, like a fillet coating device, the coating agent is filled between the semiconductor chip and the substrate by applying the coating agent by bringing the nozzle portion close to the periphery of the semiconductor chip previously attached to the substrate or the lead frame. It is good also as an apparatus for the purpose. In FIG. 1, the deterioration inspection apparatus 1 is configured by adding the imaging unit 11, the storage unit 13, and the processing unit 12 to the coating agent application device. However, the deterioration inspection device 1 is disposed as a single device along with the coating agent application device. It is good also as a structure.

  Next, the coating agent deterioration inspection method of the present embodiment will be described with reference to the flowchart of FIG.

  First, prior to operation of the coating agent coating apparatus, a new coating agent to be coated is supplied (S101). This supply method is typically performed mainly by exchanging the syringe 5, but may be a form in which the syringe 5 is directly filled with the coating agent.

  Next, a coating operation for inspection such as spot coating is performed on the inspection target member 7 or inspection stage 9 mounted on the coating stage 8 (S102). At this time, the control unit 2 causes the storage unit 13 to store the application operation completion time.

  Next, the control unit 2 controls the stage 3 to move the imaging unit 11 onto the coated member 7 or the inspection stage 9 to which the coating agent is applied, and causes the imaging unit 11 to capture the appearance shape of the coating agent. Then, the image obtained by imaging is stored in the storage unit 13 (S103). This image has, for example, a circular shape or an elliptical shape as shown in FIG.

  Then, the control unit 2 monitors the elapsed time from the first imaging (that is, after the point application) (S104), and performs imaging and storage at a predetermined timing, for example, at a constant time interval until the predetermined time elapses. Repeat the inspection. The predetermined time and the predetermined timing can be appropriately set according to the type of the coating agent. For example, when the coating agent is a fillet resin used in a flip chip substrate, as shown in FIG. 3, the appearance feature amount monotonously increases immediately after point application and finally converges at a certain value. If the time does not elapse, there is no difference in the appearance feature amount between the coating agent immediately after replacement (that is, the coating agent that has not deteriorated) and the coating agent immediately before replacement (that is, the coating agent that has deteriorated to an allowable limit). It is preferable to set so that imaging is performed at least once in the deterioration detection time zone. In addition, when the liquid coating agent has the properties as shown in FIG. 4, when a certain amount of time has passed after coating, there is no difference in the appearance feature amount between the coating agent immediately after replacement and the coating agent immediately before replacement, It is preferable to set so that imaging is performed at least once in the degradation detection time zone.

  Next, when a predetermined time has elapsed since the first imaging (“Yes” in S104), the processing unit 12 reads the image obtained by imaging in step S103 from the storage unit 13, measures the appearance feature amount, The appearance feature amount is stored in the storage unit 13 (S105). Specifically, when the application shape is circular as shown in FIG. 2A, the diameter and area of the application region in each image obtained by imaging are measured, and the application shape is shown in FIG. In the case of such an ellipse, the major axis, minor axis, area, etc. are measured. When this inspection is the first inspection after supplying the coating agent, the stored appearance feature amount becomes a reference value for determining a change in the appearance feature amount in the subsequent inspection. In addition, when the imaging interval is long with respect to the measurement time, the appearance feature value may be measured by repeating the measurement operation for each imaging within an arbitrary range within the degradation detectable time zone.

  Next, the control unit 2 determines whether or not the current inspection is the first inspection after supplying the coating agent (S106), and if it is the first inspection, it can be determined that the coating agent has not deteriorated. The normal coating agent application driving operation is performed. On the other hand, if it is not the first inspection, the processing unit 12 reads the appearance feature value (reference value) in the first inspection from the storage unit 13, the data indicating the temporal change of the appearance feature value obtained in the current inspection, and the first time The change amount is calculated by comparing with the data indicating the temporal change of the appearance feature amount in the inspection (S107). For example, in the case of a fillet resin used for a flip chip substrate, curing progresses by touching the outside air for a long time, and the appearance feature value changes from the reference value because the change in appearance feature value becomes gentler than immediately after replacement. become. Here, the data indicating the temporal change in the appearance feature amount in the first inspection is used as the reference value. However, a deterioration confirmation experiment is previously performed on the target coating agent, and the reference value may be set based on the experimental result. Good.

  If the amount of change exceeds the allowable limit, it is determined that the coating agent has deteriorated ("Yes" in S108), a message prompting the replacement of the coating agent is output, and the flow returns to step S101 to return to the coating agent. Exchange. On the other hand, if the amount of change is less than the allowable limit, it is determined that the coating agent has not deteriorated ("No" in S108), and a normal coating agent application operation is performed (S109). In addition, the allowable limit may be set based on a result of an experiment for confirming deterioration in advance with respect to the target coating agent, or may be set based on a property value of the coating agent. The ratio to the reference value (for example, 10%) may be used.

  Thereafter, the control unit 2 monitors the elapsed time from the time of the first inspection (S110), and when a predetermined time elapses, the controller 2 performs inspection using the inspection target member 7 or the inspection stage 9 mounted on the application stage 8 again. The coating operation is performed (S102).

  As described above, in this example, the appearance feature value is measured by imaging the appearance shape of the coating agent once or a plurality of times at a predetermined timing immediately after the point application, and the data indicating the temporal change of the appearance measurement value; Since the comparison with the reference value and the change amount exceeds the allowable limit and it is determined that the coating agent has deteriorated, the coating agent of any property can be reliably inspected for deterioration.

  Next, a coating agent deterioration inspection apparatus, a deterioration inspection method, and a deterioration inspection program according to a second embodiment of the present invention will be described with reference to FIGS. FIG. 6 is a schematic diagram illustrating a configuration of the deterioration inspection apparatus of the present embodiment, and FIG. 7 is a plan view and a cross-sectional view illustrating a shape example of a dot-coated coating agent.

  In the first embodiment described above, the point-applied coating agent is imaged from above. However, as shown in FIG. 6, a plurality of imaging units such as a CCD camera (in the figure, the imaging unit 11a and the imaging unit). 11b), and a configuration in which an appearance feature amount is measured from a plurality of captured images by imaging the application shape of the coating agent from different directions.

  In this case, if the imaging unit 11a is disposed at a position where the point-applied coating agent can be imaged from above, and the imaging unit 11b is disposed at a position where the applied coating agent can be imaged from the side, the point application is performed. The diameter, coating area, and height of the coating agent can be easily measured. Also, the diameter of the dot-applied coating agent can also be obtained by arranging a plurality of imaging units at positions where the dot-applied coating agent can be imaged obliquely and converting it to a three-dimensional image using a known image processing technique. And the application area and height can be acquired.

  When the diameter or the coating area and the maximum coating height (Hmax) are used as the appearance feature amount of the coating agent, the time zone in which the difference in the appearance feature amount is different from each other. The inspection can be performed more quickly and reliably. For example, when a coating agent having a shape as shown in FIG. 7 (a) immediately after point application spreads after being crushed by its own weight and becomes a shape as shown in FIG. 7 (b), the diameter or application area is Even if it does not change, the maximum application height changes, so that the deterioration of the coating agent can be inspected quickly and reliably as compared with the case of imaging only the planar shape.

  In each of the above embodiments, the coating agent is spot-coated and the appearance shape is imaged. However, the coating agent may be line-coated and the appearance shape is imaged. In that case, what is necessary is just to let the width | variety and the largest application | coating height of a coating agent be appearance feature-value.

  Further, in each of the above embodiments, the appearance feature amounts of the coating agent in each inspection are compared as they are, but there may be variations in the coating amount of the coating agent in each inspection. However, even in such a case, as shown in FIGS. 3 and 4, since the shape of the coating agent immediately after application in each inspection is substantially constant, application immediately after application in the second and subsequent inspections. Each ratio is calculated by calculating the ratio between the appearance feature amount of the agent and the appearance feature amount of the coating agent immediately after application in the first inspection, and multiplying the calculated ratio with the appearance feature amount in the second and subsequent inspections. It is possible to accurately calculate the amount of change in the appearance feature amount.

  Further, in each of the above embodiments, the case where the deterioration of the coating agent is inspected is described. However, the present invention can be similarly applied to any coating material whose viscosity changes due to the deterioration.

  INDUSTRIAL APPLICABILITY The present invention can be used for any deterioration inspection apparatus and deterioration inspection method for inspecting deterioration of a coating agent such as a silver paste and an adhesive used in a chip mount apparatus, a bonding apparatus, and the like by an appearance shape.

It is a schematic diagram which shows the structure of the deterioration inspection apparatus which concerns on 1st Example of this invention. It is a figure which shows the example of the external appearance shape of the coating agent which concerns on 1st Example of this invention. It is a figure which shows the example of a time-dependent change of the external appearance feature-value of a coating agent. It is a figure which shows the other example of a time-dependent change of the external appearance feature-value of a coating agent. It is a flowchart figure which shows the procedure of the deterioration inspection method which concerns on 1st Example of this invention. It is a schematic diagram which shows the structure of the deterioration inspection apparatus which concerns on the 2nd Example of this invention. It is a figure which shows the example of the external appearance shape of the coating agent which concerns on the 2nd Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Degradation inspection apparatus 2 Control part 3 Stage 4 Dispenser 5 Syringe 6 Nozzle 7 Application | coating member 8 Application | coating stage 9 Inspection | inspection stage 10 Coating agent 11, 11a, 11b Imaging part 12 Processing part 13 Storage part

Claims (3)

An application means for applying a predetermined amount of a liquid coating agent in a spot shape;
An imaging unit for imaging the appearance of the applied coating agent;
A storage unit that stores a plurality of images obtained by imaging with the imaging unit immediately after application and at predetermined time intervals thereafter for each inspection timing;
Measure the external feature amount having at least one of the diameter, area, and height of the coating agent applied in the form of dots from each of the images, and refer to the data indicating the temporal change of the external feature amount, and the change A processing unit that determines viscosity deterioration of the coating agent based on whether or not the amount exceeds a predetermined allowable range as compared with a change with time of a reference appearance feature amount. Degradation inspection device. A deterioration inspection method for inspecting the deterioration of the coating agent based on the appearance shape of the coating agent applied in the form of dots,
An imaging step of capturing a plurality of images by imaging the coating agent at a predetermined timing immediately after application,
The appearance feature amount having at least one of the diameter, area, and height of the coating agent is measured from each of the images, and the comparison result between the data indicating the change over time of the appearance feature amount and the reference change over time data And a processing step of determining viscosity deterioration of the coating agent based on the above. A deterioration inspection program that operates in a coating agent coating apparatus that includes a coating unit that coats a predetermined amount of a liquid coating agent in a spot shape,
Computer
Appearance characteristics having at least one of the diameter, area, and height of the coating agent from each of a plurality of images obtained by imaging the applied coating agent immediately after application and at predetermined time intervals for each inspection timing Measure the amount, refer to the data showing the temporal change of the appearance feature amount, based on whether the change amount exceeds a predetermined allowable range in comparison with the temporal change of the reference appearance feature amount, A deterioration inspection program that functions as a processing unit that determines viscosity deterioration of the coating agent .

Images