JP6117136B2 - イオン注入装置、ビームエネルギー測定装置、及びビームエネルギー測定方法 - Google Patents

イオン注入装置、ビームエネルギー測定装置、及びビームエネルギー測定方法 Download PDF

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Publication number
JP6117136B2
JP6117136B2 JP2014052176A JP2014052176A JP6117136B2 JP 6117136 B2 JP6117136 B2 JP 6117136B2 JP 2014052176 A JP2014052176 A JP 2014052176A JP 2014052176 A JP2014052176 A JP 2014052176A JP 6117136 B2 JP6117136 B2 JP 6117136B2
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Prior art keywords
energy
ion
parallelism
ion implantation
collimator
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JP2014052176A
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English (en)
Japanese (ja)
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JP2015176750A (ja
JP2015176750A5 (enExample
Inventor
玄 佐々木
玄 佐々木
一浩 渡邉
一浩 渡邉
宏行 狩谷
宏行 狩谷
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Sumitomo Heavy Industries Ion Technology Co Ltd
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Sumitomo Heavy Industries Ion Technology Co Ltd
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Publication date
Application filed by Sumitomo Heavy Industries Ion Technology Co Ltd filed Critical Sumitomo Heavy Industries Ion Technology Co Ltd
Priority to JP2014052176A priority Critical patent/JP6117136B2/ja
Priority to TW104106308A priority patent/TWI688995B/zh
Priority to KR1020150029582A priority patent/KR102272806B1/ko
Priority to CN201510104340.3A priority patent/CN104916518B/zh
Priority to US14/656,132 priority patent/US9343263B2/en
Publication of JP2015176750A publication Critical patent/JP2015176750A/ja
Application granted granted Critical
Publication of JP6117136B2 publication Critical patent/JP6117136B2/ja
Publication of JP2015176750A5 publication Critical patent/JP2015176750A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
    • H01J2237/24528—Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/304—Controlling tubes
    • H01J2237/30472—Controlling the beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation
    • H01J2237/31703—Dosimetry

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP2014052176A 2014-03-14 2014-03-14 イオン注入装置、ビームエネルギー測定装置、及びビームエネルギー測定方法 Active JP6117136B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2014052176A JP6117136B2 (ja) 2014-03-14 2014-03-14 イオン注入装置、ビームエネルギー測定装置、及びビームエネルギー測定方法
TW104106308A TWI688995B (zh) 2014-03-14 2015-02-26 離子植入裝置、射束能量測定裝置以及射束能量測定方法
KR1020150029582A KR102272806B1 (ko) 2014-03-14 2015-03-03 이온주입장치, 빔에너지 측정장치, 및 빔에너지 측정방법
CN201510104340.3A CN104916518B (zh) 2014-03-14 2015-03-10 离子注入装置、射束能量测定装置以及射束能量测定方法
US14/656,132 US9343263B2 (en) 2014-03-14 2015-03-12 Ion implanter, beam energy measuring device, and method of measuring beam energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014052176A JP6117136B2 (ja) 2014-03-14 2014-03-14 イオン注入装置、ビームエネルギー測定装置、及びビームエネルギー測定方法

Publications (3)

Publication Number Publication Date
JP2015176750A JP2015176750A (ja) 2015-10-05
JP6117136B2 true JP6117136B2 (ja) 2017-04-19
JP2015176750A5 JP2015176750A5 (enExample) 2017-04-27

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JP2014052176A Active JP6117136B2 (ja) 2014-03-14 2014-03-14 イオン注入装置、ビームエネルギー測定装置、及びビームエネルギー測定方法

Country Status (5)

Country Link
US (1) US9343263B2 (enExample)
JP (1) JP6117136B2 (enExample)
KR (1) KR102272806B1 (enExample)
CN (1) CN104916518B (enExample)
TW (1) TWI688995B (enExample)

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* Cited by examiner, † Cited by third party
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JP6150632B2 (ja) * 2013-06-26 2017-06-21 住友重機械イオンテクノロジー株式会社 イオンビーム測定装置及びイオンビーム測定方法
JP6588323B2 (ja) * 2015-12-10 2019-10-09 住友重機械イオンテクノロジー株式会社 イオン注入方法およびイオン注入装置
EP3306248B1 (en) 2016-10-05 2019-03-06 Hs R & A Co., Ltd. Double pipe heat exchanger and method for manufacturing the same
JP6662549B2 (ja) * 2016-11-21 2020-03-11 住友重機械イオンテクノロジー株式会社 イオン注入方法およびイオン注入装置
JP6675789B2 (ja) 2017-02-27 2020-04-01 住友重機械イオンテクノロジー株式会社 イオン注入装置
JP6785189B2 (ja) * 2017-05-31 2020-11-18 住友重機械イオンテクノロジー株式会社 イオン注入装置およびイオン注入方法
US10549117B2 (en) * 2017-07-21 2020-02-04 Varian Medical Systems, Inc Geometric aspects of radiation therapy planning and treatment
JP6440809B2 (ja) * 2017-11-28 2018-12-19 住友重機械イオンテクノロジー株式会社 ビーム照射装置
JP6982531B2 (ja) * 2018-03-26 2021-12-17 住友重機械イオンテクノロジー株式会社 イオン注入装置および測定装置
US10763071B2 (en) 2018-06-01 2020-09-01 Varian Semiconductor Equipment Associates, Inc. Compact high energy ion implantation system
US11164722B2 (en) 2018-07-31 2021-11-02 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implantation method
US10818473B2 (en) 2018-08-14 2020-10-27 Taiwan Semiconductor Manufacturing Co., Ltd. Implanter calibration
CN119890016B (zh) * 2024-12-23 2025-10-10 杭州富芯半导体有限公司 离子束检测装置及离子束检测方法、离子注入设备

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JPS553643Y2 (enExample) 1972-12-12 1980-01-28
IN139201B (enExample) 1972-12-14 1976-05-22 Cor Tech Res Ltd
JPH03272557A (ja) 1990-03-20 1991-12-04 Nissin Electric Co Ltd イオン注入装置
JP3358336B2 (ja) * 1994-10-14 2002-12-16 日新電機株式会社 イオン注入装置における注入条件異常検出方法
JP2748869B2 (ja) 1994-11-22 1998-05-13 日本電気株式会社 イオン注入装置
JP3448731B2 (ja) * 1998-06-19 2003-09-22 住友イートンノバ株式会社 イオン注入装置
US6137112A (en) 1998-09-10 2000-10-24 Eaton Corporation Time of flight energy measurement apparatus for an ion beam implanter
WO2002058103A2 (en) * 2001-01-17 2002-07-25 Varian Semiconductor Equipment Associates, Inc. In situ ion beam incidence angle and beam divergence monitor
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TWI253096B (en) * 2004-08-12 2006-04-11 Nanya Technology Corp Ion implantation monitor system and method thereof
JP5100963B2 (ja) * 2004-11-30 2012-12-19 株式会社Ｓｅｎ ビーム照射装置
JP2006196351A (ja) * 2005-01-14 2006-07-27 Seiko Epson Corp イオン注入装置及び半導体装置の製造方法
JP4997756B2 (ja) * 2005-12-20 2012-08-08 日新イオン機器株式会社 イオンビーム照射装置およびビーム均一性調整方法
KR100785725B1 (ko) * 2006-05-23 2007-12-18 닛신 이온기기 가부시기가이샤 이온 빔 계측 방법 및 이온 주입 장치
WO2007145849A2 (en) * 2006-06-12 2007-12-21 Axcelis Technologies, Inc. Beam angle adjustment in ion implanters
WO2009122555A1 (ja) * 2008-03-31 2009-10-08 富士通マイクロエレクトロニクス株式会社 半導体装置の製造方法、イオンビームの調整方法及びイオン注入装置
CN102194635A (zh) * 2010-03-18 2011-09-21 上海凯世通半导体有限公司 离子注入系统及方法
JP5808706B2 (ja) * 2012-03-29 2015-11-10 住友重機械イオンテクノロジー株式会社 イオン注入装置及びその制御方法
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JP6150632B2 (ja) * 2013-06-26 2017-06-21 住友重機械イオンテクノロジー株式会社 イオンビーム測定装置及びイオンビーム測定方法

Also Published As

Publication number Publication date
JP2015176750A (ja) 2015-10-05
TW201535484A (zh) 2015-09-16
KR20150107615A (ko) 2015-09-23
US9343263B2 (en) 2016-05-17
TWI688995B (zh) 2020-03-21
KR102272806B1 (ko) 2021-07-05
CN104916518A (zh) 2015-09-16
US20150262787A1 (en) 2015-09-17
CN104916518B (zh) 2018-09-28

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