JP6105538B2 - ソリッドステート撮像装置とその製造方法 - Google Patents
ソリッドステート撮像装置とその製造方法 Download PDFInfo
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- JP6105538B2 JP6105538B2 JP2014194558A JP2014194558A JP6105538B2 JP 6105538 B2 JP6105538 B2 JP 6105538B2 JP 2014194558 A JP2014194558 A JP 2014194558A JP 2014194558 A JP2014194558 A JP 2014194558A JP 6105538 B2 JP6105538 B2 JP 6105538B2
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- 238000003384 imaging method Methods 0.000 title claims description 114
- 238000004519 manufacturing process Methods 0.000 title description 31
- 238000002161 passivation Methods 0.000 claims description 80
- 239000007787 solid Substances 0.000 claims description 58
- 238000005192 partition Methods 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 38
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 239000010408 film Substances 0.000 description 71
- 239000000463 material Substances 0.000 description 51
- 238000000034 method Methods 0.000 description 24
- 239000004065 semiconductor Substances 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 16
- 238000005530 etching Methods 0.000 description 11
- 238000000059 patterning Methods 0.000 description 11
- 238000000206 photolithography Methods 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- 239000003086 colorant Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- ZQXQADNTSSMHJI-UHFFFAOYSA-N hafnium(4+) oxygen(2-) tantalum(5+) Chemical compound [O-2].[Ta+5].[Hf+4] ZQXQADNTSSMHJI-UHFFFAOYSA-N 0.000 description 1
- KQHQLIAOAVMAOW-UHFFFAOYSA-N hafnium(4+) oxygen(2-) zirconium(4+) Chemical compound [O--].[O--].[O--].[O--].[Zr+4].[Hf+4] KQHQLIAOAVMAOW-UHFFFAOYSA-N 0.000 description 1
- KUVFGOLWQIXGBP-UHFFFAOYSA-N hafnium(4+);oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[O-2].[Ti+4].[Hf+4] KUVFGOLWQIXGBP-UHFFFAOYSA-N 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
- Optical Filters (AREA)
Description
11〜半導体基板;
13〜遮光層;
15〜絶縁層;
17〜カラーフィルター層;
19〜マイクロレンズ;
100〜ソリッドステート撮像装置;
101〜基板;
101A〜基板正面;
101B〜基板背面;
102〜入射光線;
103A、103B、103C〜フォトダイオード;
105〜高誘電率膜;
107〜第一パッシベーション層;
109〜遮光膜;
109P〜遮光パーティション;
110、112〜ホール;
111〜第二パッシベーション層;
113〜カラーフィルター層;
113R、113G、113B〜カラーフィルター素子;
114〜低屈折率材料層;
115〜バッファ層;
116〜マイクロレンズ材料層;
117〜マイクロレンズ構造;
117ML〜マイクロレンズ素子;
118〜マイクロレンズ素子の上方部分;
119〜突起部;
120、130〜パターン化ステップ。
Claims (1)
- ソリッドステート撮像装置であって、
第一、第二、および、第三光電変換素子を含む基板と、
それぞれ、前記第一、第二、および、第三 光電変換素子上に設置される第一、第二、および、第三カラーフィルター素子を有するカラーフィルター層と、
高さが、それぞれ、前記カラーフィルター層より低く、前記第一と第二カラーフィルター素子間に設置される第一遮光パーティションと前記第二と第三カラーフィルター素子間に設置される第二遮光パーティションと、
前記基板上に設置され、前記カラーフィルタ層が上部に上面に接して形成される第一パッシベーション層と、
前記遮光パーティションを被覆する第二パッシベーション層と、
前記カラーフィルター層上に設置され、前記第二カラーフィルター素子が、前記第一と第二遮光パーティションを完全に被覆し、前記第二カラーフィルター素子の屈折率がそれよりも高いマイクロレンズ構造と、を含み、
前記第二カラーフィルター素子は、前記第一カラーフィルター素子、および、前記第三カラーフィルター素子より大きい面積を有し、前記第二カラーフィルター素子が、前記第一と第三カラーフィルター素子と接触することを特徴とするソリッドステート撮像装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/220,864 US9412775B2 (en) | 2014-03-20 | 2014-03-20 | Solid-state imaging devices and methods of fabricating the same |
US14/220,864 | 2014-03-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015185844A JP2015185844A (ja) | 2015-10-22 |
JP6105538B2 true JP6105538B2 (ja) | 2017-03-29 |
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Application Number | Title | Priority Date | Filing Date |
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JP2014194558A Active JP6105538B2 (ja) | 2014-03-20 | 2014-09-25 | ソリッドステート撮像装置とその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9412775B2 (ja) |
JP (1) | JP6105538B2 (ja) |
CN (1) | CN104934452B (ja) |
TW (1) | TWI566389B (ja) |
Families Citing this family (27)
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KR102159166B1 (ko) | 2014-05-09 | 2020-09-23 | 삼성전자주식회사 | 색분리 소자 및 상기 색분리 소자를 포함하는 이미지 센서 |
US9991307B2 (en) | 2015-04-16 | 2018-06-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stacked grid design for improved optical performance and isolation |
US9853076B2 (en) | 2015-04-16 | 2017-12-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stacked grid for more uniform optical input |
US9570493B2 (en) | 2015-04-16 | 2017-02-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Dielectric grid bottom profile for light focusing |
US20160307942A1 (en) * | 2015-04-16 | 2016-10-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Deeply buried color filter array (cfa) by stacked grid structure |
US10515991B2 (en) * | 2015-04-17 | 2019-12-24 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor structure and manufacturing method thereof |
US10431624B2 (en) * | 2015-07-08 | 2019-10-01 | Samsung Electronics Co., Ltd. | Method of manufacturing image sensor including nanostructure color filter |
US9786710B2 (en) * | 2015-09-30 | 2017-10-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor device with sub-isolation in pixels |
US10636826B2 (en) * | 2015-10-26 | 2020-04-28 | Sony Semiconductor Solutions Corporation | Solid-state imaging device, manufacturing method thereof, and electronic device |
JP6796039B2 (ja) * | 2017-05-01 | 2020-12-02 | 采▲ぎょく▼科技股▲ふん▼有限公司VisEra Technologies Company Limited | イメージセンサー |
US10192916B2 (en) | 2017-06-08 | 2019-01-29 | Visera Technologies Company Limited | Methods of fabricating solid-state imaging devices having flat microlenses |
US10269844B2 (en) * | 2017-06-27 | 2019-04-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure and formation method of light sensing device |
JP2019041142A (ja) * | 2017-08-22 | 2019-03-14 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子、固体撮像素子の製造方法、及び電子機器 |
US10224357B1 (en) | 2017-09-07 | 2019-03-05 | Visera Technologies Company Limited | Image sensor packages |
CN115166888A (zh) * | 2017-09-29 | 2022-10-11 | 富士胶片株式会社 | 滤光器的制造方法 |
KR102509639B1 (ko) * | 2017-12-12 | 2023-03-15 | 삼성전자주식회사 | 발광소자 패키지 제조방법 |
KR102498582B1 (ko) * | 2018-02-26 | 2023-02-14 | 에스케이하이닉스 주식회사 | 파티션 패턴들을 가진 이미지 센서 |
US10684400B2 (en) * | 2018-08-03 | 2020-06-16 | Visera Technologies Company Limited | Optical elements and method for fabricating the same |
CN110828490B (zh) * | 2018-08-07 | 2023-05-23 | 联华电子股份有限公司 | 背照式影像传感器 |
US10850462B2 (en) * | 2018-10-03 | 2020-12-01 | Visera Technologies Company Limited | Optical elements and method for fabricating the same |
CN113169200A (zh) * | 2018-12-27 | 2021-07-23 | 索尼半导体解决方案公司 | 成像元件以及成像元件的制造方法 |
KR102651605B1 (ko) | 2019-01-11 | 2024-03-27 | 삼성전자주식회사 | 이미지 센서 |
US10777609B1 (en) * | 2019-04-01 | 2020-09-15 | Visera Technologies Company Limited | Optical devices with light collection elements formed in pixels |
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KR102236357B1 (ko) * | 2019-11-29 | 2021-04-05 | (주)애니캐스팅 | 색변환 기능을 갖는 마이크로 렌즈 어레이 제조 방법 |
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2014
- 2014-03-20 US US14/220,864 patent/US9412775B2/en active Active
- 2014-05-27 TW TW103118359A patent/TWI566389B/zh active
- 2014-06-09 CN CN201410253500.6A patent/CN104934452B/zh active Active
- 2014-09-25 JP JP2014194558A patent/JP6105538B2/ja active Active
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Publication number | Publication date |
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TWI566389B (zh) | 2017-01-11 |
CN104934452B (zh) | 2018-01-23 |
CN104934452A (zh) | 2015-09-23 |
US9412775B2 (en) | 2016-08-09 |
TW201537735A (zh) | 2015-10-01 |
JP2015185844A (ja) | 2015-10-22 |
US20150270298A1 (en) | 2015-09-24 |
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