JP6104029B2 - Grinding wheel - Google Patents

Description

  The present invention relates to a grinding wheel that is detachably attached to a wheel mount of a grinding apparatus.

  A semiconductor wafer in which a number of devices such as IC and LSI are formed on the surface, and each device is partitioned by a line to be divided (street), the back surface is ground by a grinding machine and processed to a predetermined thickness. A dividing line is cut by a dicing apparatus to be divided into individual devices, and the divided devices are used in various electronic devices such as mobile phones and personal computers.

  A grinding apparatus for grinding a back surface of a wafer includes a chuck table for holding a wafer, a grinding means for rotatably supporting a grinding wheel provided with a grinding wheel for grinding the wafer held by the chuck table, and a grinding region And a grinding water supply means for supplying the grinding water to the wafer, so that the wafer can be ground to a desired thickness.

  As disclosed in, for example, Japanese Patent Application Laid-Open No. 2009-248267, the grinding wheel is detachably fastened by a plurality of fastening screws to a wheel mount fixed to the tip of a spindle of a grinding device. Normally, sufficient tightening is possible by continuously tightening the opposing screws when tightening the screws.

JP 2009-248267 A

  However, for example, some unskilled workers do not know or forget to continuously tighten the opposing screws, and for example, tighten them in order in the circumferential direction, so that the grinding wheel is suitable for the wheel mount of the grinding device. There is a risk of not being installed.

  If the grinding wheel is not properly mounted on the wheel mount, the fastening bolt may be deformed or the spindle may be damaged due to eccentricity when the grinding wheel is rotated.

  The present invention has been made in view of such a point, and an object of the present invention is to provide a grinding wheel that can be appropriately fastened to a wheel mount of a grinding apparatus regardless of an operator.

According to the present invention, a grinding wheel is detachably mounted on a wheel mount fixed to a spindle tip of a grinding apparatus, the mounting portion mounted on the wheel mount, and a free end on the opposite side of the mounting portion. An annular wheel base, and a plurality of grinding wheels disposed at the free end of the annular wheel base, and a fastening bolt is screwed into the mounting portion of the annular wheel base. An even number of female screws are formed at equal intervals in the circumferential direction, and on the side surface of the annular wheel base, a fastening order for continuously fastening female screws facing each other corresponding to each female screw is imprinted. A grinding wheel is provided that is formed by either sealing or coloring .

  Since the grinding wheel of the present invention has a fastening order display indicating the fastening order, for example, even an unskilled worker can reduce the risk of fastening in the wrong order, and can be properly fastened to the wheel mount of the grinding apparatus regardless of the worker. It becomes possible.

It is a perspective view of the grinding device which can mount the grinding wheel of the present invention. It is a perspective view which shows an example of a grinding wheel. It is a schematic diagram which shows the fastening order of a grinding wheel.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of a grinding apparatus 2 suitable for mounting the grinding wheel of the present invention is shown. Reference numeral 4 denotes a base of the grinding apparatus 2, and a column 6 is erected on the rear side of the base 4. A pair of guide rails 8 extending in the vertical direction is fixed to the column 6.

  A grinding unit (grinding means) 10 is mounted along the pair of guide rails 8 so as to be movable in the vertical direction. The grinding unit 10 includes a spindle housing 12 and a support portion 14 that holds the spindle housing 12, and the support portion 14 is attached to a moving base 16 that moves up and down along a pair of guide rails 8. Yes.

  The grinding unit 10 includes a spindle 18 rotatably accommodated in a spindle housing 12, a motor 20 that rotationally drives the spindle 18, a wheel mount 22 fixed to the tip of the spindle 18, and a detachable attachment to the wheel mount 22. And a mounted grinding wheel 24.

  The grinding apparatus 2 includes a grinding unit feed mechanism 34 including a ball screw 30 and a pulse motor 32 that move the grinding unit 10 in the vertical direction along the pair of guide rails 8. When the pulse motor 32 is driven, the ball screw 30 rotates and the moving base 16 is moved in the vertical direction.

  A recess 4a is formed on the upper surface of the base 4, and a chuck table mechanism 36 is disposed in the recess 4a. The chuck table mechanism 36 has a chuck table 38 and is moved in the Y-axis direction between a wafer attaching / detaching position A and a grinding position B facing the grinding unit 10 by a moving mechanism (not shown). 40 and 42 are bellows. An operation panel 44 is provided on the front side of the base 4 so that an operator of the grinding apparatus 2 can input grinding conditions and the like.

  Referring to FIG. 2, a perspective view showing how the grinding wheel 24 of the embodiment of the present invention is mounted on the wheel mount 22 is shown. The grinding wheel 24 includes an annular wheel base 26 having a mounting portion 26 a mounted on the wheel mount 22, a free end portion 26 b opposite to the mounting portion 26 a, and a plurality of grinding wheels 24 on the free end portion 26 b of the annular wheel base 26. The grinding wheel 28 is fixed in an annular shape.

  The wheel mount 22 is fixed to the tip of the spindle 18 of the grinding unit (grinding means) 10, and a plurality of, preferably an even number, of mounting holes 23 for attaching the grinding wheel 24 are formed at equal intervals in the circumferential direction. ing.

  The mounting portion 26a of the annular wheel base 26 of the grinding wheel 24 has an even number (six in this embodiment) of female screws (screw holes) 27 in the circumferential direction so as to correspond to the mounting holes 23 of the wheel mount 22. They are formed at intervals.

  Further, the annular wheel base 26 has a fastening order display 29 indicating the fastening order on its side surface. The fastening order display 29 is formed by engraving, sealing, coloring or the like. As shown in the schematic diagram of FIG. 3, the fastening order display 29 is an order in which the female screws 27 facing each other are continuously fastened.

  For example, when the fastening bolt 25 is inserted into the mounting hole 23 of the wheel mount 22 and the fastening bolt 25 is fastened to the female screw 27 at the first position, the fastening bolt 25 is then attached to the female screw 27 at the second position facing the first. Conclude.

  Next, when the fastening bolt 25 is fastened to the female screw 27 at the third position, the fastening bolt 25 is fastened to the female screw 27 at the fourth position facing the third, and the fastening bolt 25 is further attached to the female screw 27 at the fifth position. The fastening bolt 25 is finally fastened to the female screw 27 at the sixth position facing the fifth.

  When the fastening bolt 25 is fastened to the female screw 27 of the grinding wheel 24, the bolt 25 is not fully tightened, and after the fastening bolt 25 is fastened according to the fastening order indication displayed on the grinding wheel 24, It is preferable that the fastening bolt 25 is finally tightened with an appropriate fastening torque, for example, 4 N · m, as indicated by the fastening order.

  In the grinding wheel 24 of the present embodiment, since the annular wheel base 26 of the grinding wheel 24 has an even number of fastening order indications 29 indicating the fastening order on its side surface, even an unskilled worker can follow the grinding wheel 24 according to the fastening order indication. , The grinding wheel 24 can be appropriately attached to the wheel mount 22, and even the unskilled worker can reduce the risk of fastening in the wrong order. Can be fastened to the wheel mount 22.

2 Grinding device 10 Grinding unit 18 Spindle 22 Wheel mount 23 Mounting hole 24 Grinding wheel 25 Fastening bolt 26 Annular wheel base 27 Female thread (screw hole)
28 Grinding wheel 29

Claims (1)

A grinding wheel that is detachably attached to a wheel mount fixed to a spindle tip of a grinding device,
An annular wheel base having a mounting portion mounted on the wheel mount and a free end on the opposite side of the mounting portion;
A plurality of grinding wheels disposed at the free end of the annular wheel base,
The mounting portion of the annular wheel base is formed with an even number of female screws, into which fastening bolts are screwed, spaced apart at equal intervals in the circumferential direction.
A grinding wheel characterized in that a fastening order for continuously fastening female screws facing each other corresponding to each female screw is formed on the side surface of the annular wheel base by any one of stamping, sealing, or coloring. .

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