CN104108073A - Grinding wheel - Google Patents
Grinding wheel Download PDFInfo
- Publication number
- CN104108073A CN104108073A CN201410150383.0A CN201410150383A CN104108073A CN 104108073 A CN104108073 A CN 104108073A CN 201410150383 A CN201410150383 A CN 201410150383A CN 104108073 A CN104108073 A CN 104108073A
- Authority
- CN
- China
- Prior art keywords
- wheel
- grinding
- pedestal
- emery wheel
- internal thread
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Abstract
The invention provides a grinding wheel. The grinding wheel can be properly fastened to a wheel stand of a grinding device by any of workers. The grinding wheel is detachably disposed on a wheel stand fixed to a tail end of a main shaft of a grinding device. The grinding wheel is characterized by comprising an annular wheel pedestal and multiple grinding tools, wherein the annular wheel pedestal has a mounting part disposed on the wheel stand and also has a free end part opposite to the mounting part, the multiple grinding tools are configured on the free end part of the annular wheel pedestal, and multiple internal screw thread parts for screw connection with fastening bolts are formed in a separate manner along the circumference of the mounting part of the annular wheel pedestal. The grinding wheel is provided with fastening order display marks that show fastening orders of the internal screw thread parts.
Description
Technical field
The mode loading and unloading of the present invention relates to is mounted to the emery wheel of the wheel seat of grinding attachment.
Background technology
Be formed with multiple devices such as IC, LSI on the surface of semiconductor wafer, and the divided preset lines of each device (spacing track) is divided and is come, semiconductor wafer is machined to after the thickness of regulation utilizing the back side of grinding attachment grinded semiconductor wafer, utilize cutter sweep cutting to cut apart preset lines and semiconductor wafer is divided into device one by one, the device being partitioned into is widely used in the various electronic equipments such as portable phone, PC.
The grinding attachment that the back side of wafer is carried out to grinding possesses: chuck table, and it keeps wafer; Grinding member, it is supported to emery wheel can rotate, and described emery wheel is equipped with the grinding grinding tool that the wafer to being held on this chuck table carries out grinding; And grinding fluid supply member, it supplies with grinding fluid to grinding area, and grinding attachment can be by grinding wafer to the thickness of expecting.
For example as disclosed in TOHKEMY 2009-248267 communique, emery wheel is anchored on wheel seat in the mode that can load and unload by multiple trip bolts, and described wheel seat is fixed on the main the tip of the axis of grinding attachment.Conventionally,, in the time tightening screw, by tightening continuously opposed screw, can realize fully and tightening.
Patent documentation 1: TOHKEMY 2009-248267 communique
, for for example unskilled operator, may not know or forget fastening opposed screw continuously, but for example next fastening with circumferential order, thus cause emery wheel not to be mounted to rightly the wheel seat of grinding attachment.
In the situation that emery wheel is not mounted to wheel seat rightly, the eccentric and possibility of damage main shaft while there is fastening bolt distortion or emery wheel rotation.
Summary of the invention
The present invention completes in view of such problem, and it is a kind of no matter operator is the emery wheel who can both be fastened to the wheel seat of grinding attachment rightly that its object is to provide.
According to the present invention, a kind of emery wheel is provided, it is mounted in the mode that can load and unload on the end fixed wheel seat of main shaft of grinding attachment, described emery wheel is characterised in that, described emery wheel possesses: ring-type wheel pedestal, and it has the free end that is mounted to the installation portion of this wheel seat and the opposition side of this installation portion; With multiple grinding grinding tools, they are provided in this free end of this ring-type wheel pedestal, at this installation portion of this ring-type wheel pedestal, upwards be formed with discretely the multiple internal thread parts that screw togather for fastening bolt week, this emery wheel has the tightening sequence show tags of the tightening sequence that represents this internal thread part.
Preferably, at the installation portion of ring-type wheel pedestal, at the circumferential first-class even number internal thread part screwing togather for fastening bolt that is formed with, tightening sequence is the order of fastening internal thread part opposite each other continuously with being spaced apart.
Emery wheel of the present invention has the tightening sequence show tags that represents tightening sequence, therefore, even for example unskilled operator, also can reduce with wrong order and carry out fastening possibility, thereby, no matter whom operator is, this emery wheel can both be fastened to rightly to the wheel seat of grinding attachment.
Brief description of the drawings
Fig. 1 is the stereogram that the grinding attachment of emery wheel of the present invention can be installed.
Fig. 2 is the stereogram that an example of emery wheel is shown.
Fig. 3 is the schematic diagram that the tightening sequence of emery wheel is shown.
Label declaration
2: grinding attachment;
10: grinding unit;
18: main shaft;
22: wheel seat;
23: installing hole;
24: emery wheel;
25: fastening bolt;
26: ring-type wheel pedestal;
27: internal thread part (screwed hole);
28: grinding grinding tool;
29: tightening sequence show tags.
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are at length described.With reference to Fig. 1, show the stereoscopic figure that is applicable to the grinding attachment 2 that emery wheel of the present invention is installed.The 4th, the pedestal of grinding attachment 2, erects and is provided with column 6 at the rear of pedestal 4.On column 6, be fixed with the pair of guide rails 8 of extending along the vertical direction.
Grinding unit (grinding member) 10 is installed into and can moves up at upper and lower along this pair of guide rails 8.Grinding unit 10 has main shaft housing 12 and keeps the support 14 of main shaft housing 12, and support 14 is installed on the mobile foundation 16 moving up at upper and lower along pair of guide rails 8.
Grinding unit 10 comprises: main shaft 18, and it is accommodated in main shaft housing 12 in the mode that can rotate; Motor 20, its drive shaft 18 is rotated; Wheel seat 22, it is fixed in the end of main shaft 18; And emery wheel 24, it is mounted to wheel seat 22 in the mode that can load and unload.
Grinding attachment 2 possesses grinding unit feed mechanism 34, and described grinding unit feed mechanism 34 makes grinding unit 10 move up at upper and lower along pair of guide rails 8, and is made up of ball-screw 30 and impulse motor 32.In the time of driving pulse motor 32, ball-screw 30 rotates, and mobile foundation 16 moves along the vertical direction.
Be formed with recess 4a at the upper surface of pedestal 4, and be equipped with chuck table mechanism 36 in this recess 4a.Chuck table mechanism 36 has chuck table 38, chuck table mechanism 36 utilize not shown travel mechanism wafer loading position A and and the opposed grinding position B of grinding unit 10 between move along Y direction.Label the 40, the 42nd, Wavelet piece.Be equipped with operating personnel for grinding attachment 2 and input the guidance panel 44 of grinding condition etc. at the front side of pedestal 4.
With reference to Fig. 2, show the stereogram that represents the emery wheel of embodiment of the present invention 24 to be mounted to the state of wheel seat 22.Emery wheel 24 is configured to: this emery wheel has ring-type wheel pedestal 26, this ring-type wheel pedestal 26 has the free end 26b that is mounted to the installation portion 26a of wheel seat 22 and the opposition side of installation portion 26a, and multiple grinding grinding tools 28 are fixedly installed in the free end 26b of ring-type wheel pedestal 26 in the form of a ring.
Wheel seat 22 is fixed on the end of the main shaft 18 of grinding unit (grinding member) 10, on this wheel seat 22, for install emery wheel 24 multiple, preferably even number installing hole 23 is formed as upwards separating with equal intervals in week.
The installation portion 26a that takes turns pedestal 26 in the ring-type of emery wheel 24, is upwards formed with even number (in the present embodiment as 6) internal thread part (screwed hole) 27 taking equal intervals in the mode corresponding with the installing hole 23 of wheel seat 22 discretely in week.
And, there is in the side of ring-type wheel pedestal 26 the tightening sequence show tags 29 that represents tightening sequence.Tightening sequence show tags 29 is by mint-mark, stickup, the formation such as painted.As shown in the schematic diagram of Fig. 3, this tightening sequence show tags 29 is Cis orders of fastening internal thread part 27 opposite one another continuously.
For example, in the installing hole 23 that fastening bolt 25 is inserted to wheel seat 22 and fastening bolt 25 is anchored on after the internal thread part 27 of No. 1 position, next fastening bolt 25 is anchored in the internal thread part 27 with No. 1 opposed No. 2 positions.
Next, fastening bolt 25 is being anchored on after the internal thread part 27 of No. 3 positions, fastening bolt 25 is anchored in the internal thread part 27 with No. 3 opposed No. 4 positions, then fastening bolt 25 is anchored in the internal thread part 27 of No. 5 positions, finally fastening bolt 25 is anchored in the internal thread part 27 with No. 5 opposed No. 6 positions.
And, preferably, in the internal thread part 27 that fastening bolt 25 is fastened to emery wheel 24 time, fastening bolt 25 is not tightened completely, but as the tightening sequence show tags as shown on emery wheel 24, fastening bolt 25 is carried out fastening after, finally fastening bolt 25 is tightened as tightening sequence show tags with suitable tightening torque, for example 4Nm.
In the emery wheel 24 of present embodiment, the ring-type wheel pedestal 26 of emery wheel 24 has the even number tightening sequence show tags 29 that represents tightening sequence in its side, even unskilled operator, as long as even fastening emery wheel 24 as tightening sequence show tags, just can be mounted to wheel seat 22 by emery wheel 24, rightly unskilled operator, also can reduce with wrong order and carry out fastening possibility, thereby, no matter whom operator is, can both rightly emery wheel 24 be fastened to wheel seat 22.
Claims (2)
1. an emery wheel, it is mounted in the mode that can load and unload on the end fixed wheel seat of main shaft of grinding attachment,
Described emery wheel is characterised in that,
Described emery wheel possesses:
Ring-type wheel pedestal, it has the free end that is mounted to the installation portion of this wheel seat and the opposition side of this installation portion; With
Multiple grinding grinding tools, they are provided in this free end of this ring-type wheel pedestal,
At this installation portion of this ring-type wheel pedestal, be upwards formed with discretely the multiple internal thread parts that screw togather for fastening bolt week,
This emery wheel has the tightening sequence show tags of the tightening sequence that represents this internal thread part.
2. emery wheel according to claim 1, wherein,
At the described installation portion of described ring-type wheel pedestal, at the circumferential first-class even number internal thread part screwing togather for fastening bolt that is formed with being spaced apart,
Described tightening sequence is the order of fastening internal thread part opposite each other continuously.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-087143 | 2013-04-18 | ||
| JP2013087143A JP6104029B2 (en) | 2013-04-18 | 2013-04-18 | Grinding wheel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104108073A true CN104108073A (en) | 2014-10-22 |
| CN104108073B CN104108073B (en) | 2018-04-24 |
Family
ID=51705163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410150383.0A Active CN104108073B (en) | 2013-04-18 | 2014-04-15 | Emery wheel |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6104029B2 (en) |
| CN (1) | CN104108073B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009248267A (en) * | 2008-04-09 | 2009-10-29 | Disco Abrasive Syst Ltd | Grinding device |
| CN101659033A (en) * | 2008-08-27 | 2010-03-03 | 株式会社迪思科 | Grinding wheel |
| CN101869969A (en) * | 2010-06-03 | 2010-10-27 | 上海宝冶集团有限公司 | Copper plate assembly method of slab continuous casting machine crystallizer |
| CN102011256A (en) * | 2010-09-15 | 2011-04-13 | 诸暨鑫犇机械有限公司 | Novel belt pulley device |
| CN102430916A (en) * | 2011-09-16 | 2012-05-02 | 黑龙江建龙钢铁有限公司 | Fastening method for bolt group connection |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0715729Y2 (en) * | 1991-12-16 | 1995-04-12 | ニューレジストン株式会社 | Rotary whetstone |
| JP2001105310A (en) * | 1999-09-30 | 2001-04-17 | Toyoda Mach Works Ltd | Grinding wheel locking structure to rotary main spindle |
-
2013
- 2013-04-18 JP JP2013087143A patent/JP6104029B2/en active Active
-
2014
- 2014-04-15 CN CN201410150383.0A patent/CN104108073B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009248267A (en) * | 2008-04-09 | 2009-10-29 | Disco Abrasive Syst Ltd | Grinding device |
| CN101659033A (en) * | 2008-08-27 | 2010-03-03 | 株式会社迪思科 | Grinding wheel |
| CN101869969A (en) * | 2010-06-03 | 2010-10-27 | 上海宝冶集团有限公司 | Copper plate assembly method of slab continuous casting machine crystallizer |
| CN102011256A (en) * | 2010-09-15 | 2011-04-13 | 诸暨鑫犇机械有限公司 | Novel belt pulley device |
| CN102430916A (en) * | 2011-09-16 | 2012-05-02 | 黑龙江建龙钢铁有限公司 | Fastening method for bolt group connection |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014210305A (en) | 2014-11-13 |
| JP6104029B2 (en) | 2017-03-29 |
| CN104108073B (en) | 2018-04-24 |
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