JP6094034B2 - センサーモジュールおよび電子機器 - Google Patents

センサーモジュールおよび電子機器 Download PDF

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Publication number
JP6094034B2
JP6094034B2 JP2012028664A JP2012028664A JP6094034B2 JP 6094034 B2 JP6094034 B2 JP 6094034B2 JP 2012028664 A JP2012028664 A JP 2012028664A JP 2012028664 A JP2012028664 A JP 2012028664A JP 6094034 B2 JP6094034 B2 JP 6094034B2
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Japan
Prior art keywords
sensor
rigid substrate
substrate
plate surface
storage space
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Expired - Fee Related
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JP2012028664A
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Japanese (ja)
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JP2013164394A (ja
JP2013164394A5 (enExample
Inventor
木下　裕介
裕介 木下
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2012028664A priority Critical patent/JP6094034B2/ja
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Publication of JP2013164394A5 publication Critical patent/JP2013164394A5/ja
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Publication of JP6094034B2 publication Critical patent/JP6094034B2/ja
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JP2012028664A 2012-02-13 2012-02-13 センサーモジュールおよび電子機器 Expired - Fee Related JP6094034B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012028664A JP6094034B2 (ja) 2012-02-13 2012-02-13 センサーモジュールおよび電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012028664A JP6094034B2 (ja) 2012-02-13 2012-02-13 センサーモジュールおよび電子機器

Publications (3)

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JP2013164394A JP2013164394A (ja) 2013-08-22
JP2013164394A5 JP2013164394A5 (enExample) 2015-04-02
JP6094034B2 true JP6094034B2 (ja) 2017-03-15

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JP2012028664A Expired - Fee Related JP6094034B2 (ja) 2012-02-13 2012-02-13 センサーモジュールおよび電子機器

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11569138B2 (en) * 2015-06-16 2023-01-31 Kla Corporation System and method for monitoring parameters of a semiconductor factory automation system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306047A (ja) * 1994-05-10 1995-11-21 Murata Mfg Co Ltd 多軸検出型振動ジャイロ
JPH0821732A (ja) * 1994-07-05 1996-01-23 Data Tec:Kk 姿勢方位位置計測装置
JPH08261769A (ja) * 1995-03-25 1996-10-11 Hitachi Cable Ltd 自動零点補正機能を有する光ジャイロシステム
JP2004170380A (ja) * 2002-11-18 2004-06-17 Ryuichi Yokota 直交三軸加速度計測器
JP2005197493A (ja) * 2004-01-08 2005-07-21 Ihi Aerospace Co Ltd 回路基板組立体
JP2005300749A (ja) * 2004-04-08 2005-10-27 Seiko Epson Corp 電気光学装置及び電子機器
JP2006112856A (ja) * 2004-10-13 2006-04-27 Seiko Epson Corp センサ素子基板、センサ素子基板の製造方法、センサ
JP4751085B2 (ja) * 2005-03-31 2011-08-17 東京計器株式会社 センサの組立方法
JP2007057288A (ja) * 2005-08-23 2007-03-08 Seiko Epson Corp 圧電ジャイロセンサモジュール及び電子機器
JP5206484B2 (ja) * 2009-02-24 2013-06-12 三菱マテリアル株式会社 温度センサ

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JP2013164394A (ja) 2013-08-22

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