JP2013164394A5 - - Google Patents
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- Publication number
- JP2013164394A5 JP2013164394A5 JP2012028664A JP2012028664A JP2013164394A5 JP 2013164394 A5 JP2013164394 A5 JP 2013164394A5 JP 2012028664 A JP2012028664 A JP 2012028664A JP 2012028664 A JP2012028664 A JP 2012028664A JP 2013164394 A5 JP2013164394 A5 JP 2013164394A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sensor
- sensor module
- module according
- plate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims description 82
- 230000002265 prevention Effects 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012028664A JP6094034B2 (ja) | 2012-02-13 | 2012-02-13 | センサーモジュールおよび電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012028664A JP6094034B2 (ja) | 2012-02-13 | 2012-02-13 | センサーモジュールおよび電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013164394A JP2013164394A (ja) | 2013-08-22 |
| JP2013164394A5 true JP2013164394A5 (enExample) | 2015-04-02 |
| JP6094034B2 JP6094034B2 (ja) | 2017-03-15 |
Family
ID=49175808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012028664A Expired - Fee Related JP6094034B2 (ja) | 2012-02-13 | 2012-02-13 | センサーモジュールおよび電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6094034B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11569138B2 (en) * | 2015-06-16 | 2023-01-31 | Kla Corporation | System and method for monitoring parameters of a semiconductor factory automation system |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07306047A (ja) * | 1994-05-10 | 1995-11-21 | Murata Mfg Co Ltd | 多軸検出型振動ジャイロ |
| JPH0821732A (ja) * | 1994-07-05 | 1996-01-23 | Data Tec:Kk | 姿勢方位位置計測装置 |
| JPH08261769A (ja) * | 1995-03-25 | 1996-10-11 | Hitachi Cable Ltd | 自動零点補正機能を有する光ジャイロシステム |
| JP2004170380A (ja) * | 2002-11-18 | 2004-06-17 | Ryuichi Yokota | 直交三軸加速度計測器 |
| JP2005197493A (ja) * | 2004-01-08 | 2005-07-21 | Ihi Aerospace Co Ltd | 回路基板組立体 |
| JP2005300749A (ja) * | 2004-04-08 | 2005-10-27 | Seiko Epson Corp | 電気光学装置及び電子機器 |
| JP2006112856A (ja) * | 2004-10-13 | 2006-04-27 | Seiko Epson Corp | センサ素子基板、センサ素子基板の製造方法、センサ |
| JP4751085B2 (ja) * | 2005-03-31 | 2011-08-17 | 東京計器株式会社 | センサの組立方法 |
| JP2007057288A (ja) * | 2005-08-23 | 2007-03-08 | Seiko Epson Corp | 圧電ジャイロセンサモジュール及び電子機器 |
| JP5206484B2 (ja) * | 2009-02-24 | 2013-06-12 | 三菱マテリアル株式会社 | 温度センサ |
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2012
- 2012-02-13 JP JP2012028664A patent/JP6094034B2/ja not_active Expired - Fee Related