JP6080861B2 - スート法に従って合成石英ガラスを製造する方法 - Google Patents

スート法に従って合成石英ガラスを製造する方法 Download PDF

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Publication number
JP6080861B2
JP6080861B2 JP2014542829A JP2014542829A JP6080861B2 JP 6080861 B2 JP6080861 B2 JP 6080861B2 JP 2014542829 A JP2014542829 A JP 2014542829A JP 2014542829 A JP2014542829 A JP 2014542829A JP 6080861 B2 JP6080861 B2 JP 6080861B2
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Prior art keywords
sio
feed
liquid
feed material
quartz glass
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JP2014542829A
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Japanese (ja)
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JP2015504408A5 (enExample
JP2015504408A (ja
Inventor
ハインツ　ファビアン
ファビアン ハインツ
レーパー ユルゲン
レーパー ユルゲン
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Heraeus Quarzglas GmbH and Co KG
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Heraeus Quarzglas GmbH and Co KG
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP2014542829A 2011-11-25 2012-11-22 スート法に従って合成石英ガラスを製造する方法 Active JP6080861B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102011119341.7 2011-11-25
DE102011119341A DE102011119341A1 (de) 2011-11-25 2011-11-25 Verfahren zur Herstellung von synthetischem Quarzglas nach der Sootmethode
US201161569151P 2011-12-09 2011-12-09
US61/569,151 2011-12-09
PCT/EP2012/073341 WO2013076193A1 (de) 2011-11-25 2012-11-22 Verfahren zur herstellung von synthetischem quarzglas nach der sootmethode

Publications (3)

Publication Number Publication Date
JP2015504408A JP2015504408A (ja) 2015-02-12
JP2015504408A5 JP2015504408A5 (enExample) 2015-11-19
JP6080861B2 true JP6080861B2 (ja) 2017-02-15

Family

ID=48287835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014542829A Active JP6080861B2 (ja) 2011-11-25 2012-11-22 スート法に従って合成石英ガラスを製造する方法

Country Status (7)

Country Link
US (1) US8997528B2 (enExample)
EP (1) EP2782880B1 (enExample)
JP (1) JP6080861B2 (enExample)
KR (1) KR101569790B1 (enExample)
CN (1) CN103946170B (enExample)
DE (1) DE102011119341A1 (enExample)
WO (1) WO2013076193A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011121190A1 (de) * 2011-12-16 2013-06-20 Heraeus Quarzglas Gmbh & Co. Kg OMCTS-Verdampfungsverfahren
DE102012013134B4 (de) * 2012-07-03 2014-04-03 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von Zylindern aus Quarzglas
DE102013202256B3 (de) * 2013-02-12 2014-07-17 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von Titan-dotiertem synthetischen Quarzglas und dessen Verwendung
WO2017103153A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt
WO2017103124A2 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Erhöhen des siliziumgehalts bei der herstellung von quarzglas
JP7048053B2 (ja) 2015-12-18 2022-04-05 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー マルチチャンバ炉内での石英ガラス体の調製
CN108698890A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 利用在熔融烘箱中的露点监测制备石英玻璃体
EP3390292B1 (de) 2015-12-18 2023-03-15 Heraeus Quarzglas GmbH & Co. KG Herstellung einer synthetischen quarzglaskörnung
TWI812586B (zh) 2015-12-18 2023-08-21 德商何瑞斯廓格拉斯公司 石英玻璃體、其製備方法與應用、及用於控制烘箱出口處之露點
JP6981710B2 (ja) 2015-12-18 2021-12-17 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 二酸化ケイ素造粒体からの石英ガラス体の調製
WO2017103125A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Sprühgranulieren von siliziumdioxid bei der herstellung von quarzglas
JP7044454B2 (ja) 2015-12-18 2022-03-30 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 石英ガラス調製時の中間体としての炭素ドープ二酸化ケイ素造粒体の調製
US11236002B2 (en) 2015-12-18 2022-02-01 Heraeus Quarzglas Gmbh & Co. Kg Preparation of an opaque quartz glass body
EP3516435B1 (en) * 2016-09-21 2022-04-27 Corning Incorporated Optical fibers having a varying clad index and methods of forming same
JP2018193279A (ja) * 2017-05-18 2018-12-06 住友電気工業株式会社 ガラス微粒子堆積体の製造方法、ガラス母材の製造方法及びガラス微粒子堆積体
KR102014913B1 (ko) 2017-11-08 2019-08-27 주식회사 에스티아이 광섬유 모재 증착 시스템
CN108793692B (zh) * 2018-06-19 2021-04-23 江苏省晶瑞石英工业开发研究院有限公司 一种气炼石英玻璃碇自整型的方法
KR101943598B1 (ko) * 2018-08-08 2019-01-30 주식회사 에스티아이 기화기 일체형 광섬유 모재 제조용 버너

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Also Published As

Publication number Publication date
DE102011119341A1 (de) 2013-05-29
CN103946170B (zh) 2016-05-18
EP2782880B1 (de) 2016-04-20
US20130133377A1 (en) 2013-05-30
WO2013076193A1 (de) 2013-05-30
EP2782880A1 (de) 2014-10-01
KR20140098174A (ko) 2014-08-07
KR101569790B1 (ko) 2015-11-19
CN103946170A (zh) 2014-07-23
JP2015504408A (ja) 2015-02-12
US8997528B2 (en) 2015-04-07

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