JP6077907B2 - 拡散剤組成物および不純物拡散層の形成方法 - Google Patents
拡散剤組成物および不純物拡散層の形成方法 Download PDFInfo
- Publication number
- JP6077907B2 JP6077907B2 JP2013072001A JP2013072001A JP6077907B2 JP 6077907 B2 JP6077907 B2 JP 6077907B2 JP 2013072001 A JP2013072001 A JP 2013072001A JP 2013072001 A JP2013072001 A JP 2013072001A JP 6077907 B2 JP6077907 B2 JP 6077907B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- agent composition
- diffusing agent
- impurity diffusion
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013072001A JP6077907B2 (ja) | 2013-03-29 | 2013-03-29 | 拡散剤組成物および不純物拡散層の形成方法 |
TW103105272A TWI599573B (zh) | 2013-03-29 | 2014-02-18 | A diffusing agent composition, a method of forming an impurity diffusion layer, and a solar cell |
CN201410116893.6A CN104073157B (zh) | 2013-03-29 | 2014-03-26 | 扩散剂组合物、杂质扩散层的形成方法及太阳能电池 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013072001A JP6077907B2 (ja) | 2013-03-29 | 2013-03-29 | 拡散剤組成物および不純物拡散層の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014197589A JP2014197589A (ja) | 2014-10-16 |
JP6077907B2 true JP6077907B2 (ja) | 2017-02-08 |
Family
ID=51594775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013072001A Active JP6077907B2 (ja) | 2013-03-29 | 2013-03-29 | 拡散剤組成物および不純物拡散層の形成方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6077907B2 (zh) |
CN (1) | CN104073157B (zh) |
TW (1) | TWI599573B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016066771A (ja) * | 2014-09-17 | 2016-04-28 | 日立化成株式会社 | 太陽電池素子の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5660750B2 (ja) * | 2008-04-09 | 2015-01-28 | 東京応化工業株式会社 | 拡散層の形成方法及び不純物拡散方法 |
CN102146100B (zh) * | 2010-02-08 | 2014-07-23 | 广科工业股份有限公司 | 有机硅磷酸酯及其制备方法 |
JP5681402B2 (ja) * | 2010-07-09 | 2015-03-11 | 東京応化工業株式会社 | 拡散剤組成物および不純物拡散層の形成方法 |
JP5666267B2 (ja) * | 2010-11-25 | 2015-02-12 | 東京応化工業株式会社 | 塗布型拡散剤組成物 |
CN102634213B (zh) * | 2012-05-02 | 2013-08-28 | 江苏亚邦新材料科技有限公司 | 一种高强韧性耐高温杂化聚合树脂预混物的制备方法及成型方法 |
-
2013
- 2013-03-29 JP JP2013072001A patent/JP6077907B2/ja active Active
-
2014
- 2014-02-18 TW TW103105272A patent/TWI599573B/zh active
- 2014-03-26 CN CN201410116893.6A patent/CN104073157B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN104073157B (zh) | 2018-01-02 |
TWI599573B (zh) | 2017-09-21 |
CN104073157A (zh) | 2014-10-01 |
TW201500367A (zh) | 2015-01-01 |
JP2014197589A (ja) | 2014-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5681402B2 (ja) | 拡散剤組成物および不純物拡散層の形成方法 | |
WO2011145267A1 (ja) | 拡散剤組成物、不純物拡散層の形成方法、および太陽電池 | |
US10693021B2 (en) | Method of passivating a silicon substrate for use in a photovoltaic device | |
JP6022243B2 (ja) | 拡散剤組成物および不純物拡散層の形成方法 | |
JP6099437B2 (ja) | 拡散剤組成物、及び不純物拡散層の形成方法 | |
JP5991846B2 (ja) | 膜形成用組成物、拡散剤組成物、膜形成用組成物の製造方法、及び拡散剤組成物の製造方法 | |
JP6077907B2 (ja) | 拡散剤組成物および不純物拡散層の形成方法 | |
KR102225181B1 (ko) | 폴리실록산, 반도체용 재료, 반도체 및 태양 전지 제조 방법 | |
TWI580065B (zh) | Diffusion method of impurity diffusion component and manufacturing method of solar cell | |
JP2017069247A (ja) | 絶縁性ペーストおよびその製造方法並びに太陽電池素子の製造方法 | |
US20150295196A1 (en) | Method of producing a photovoltaic device | |
TWI699006B (zh) | p型不純物擴散組成物、使用其的半導體元件的製造方法及太陽電池的製造方法 | |
JP6108781B2 (ja) | 不純物拡散成分の拡散方法、及び太陽電池の製造方法 | |
CN103387777A (zh) | 扩散剂组合物及杂质扩散层的形成方法 | |
JP6139155B2 (ja) | 拡散剤組成物および不純物拡散層の形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20151215 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20161122 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20161129 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161213 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170110 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170113 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6077907 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |