JP6076682B2 - 収差補正器を備えたstemの調整方法 - Google Patents
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
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- H—ELECTRICITY
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- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
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Description
留意点として、許容収差係数の同様の、しかしもっと詳細なリストが非特許文献3(より具体的にはその表1)に記載されている。
a)サンプルの結晶部分または多結晶部分の、デフォーカスレンジをカバーするスルーフォーカス法による高解像度STEM画像I1...Inのシリーズを記録するステップと、
b)前記画像を逆空間におけるあるパターンで構成された強度を示す複数のスポットを示す表示R1...Rnに変換するステップと、
c)各表示R1...Rnに対して、前記複数のスポットの少なくとも一部の強度における非対称性を決定するステップと、
d)前記補正器の励起と、前記対物レンズのF値とを変化させ、前記収差補正器に関する知識を前記非対称性と組み合わせるステップと、
e)任意的にデフォーカスレンジを変更するステップと、
f)任意的に、変更した励起及び/又はフォーカスの値を用いて、高解像度STEM画像を記録し、前記画像を逆空間における表示に変換し、前記表示の対称性と、最大伝達限界の表示を与える、スポットが見えるパターンの中心からの距離とを決定するステップと、
前記ステップの繰り返しは、
・補正器の励起と対物レンズにおける変化が所定値よりも小さいとき、
・前記任意的に記録されたインフォーカス画像が、所定値よりもよい対称性と、所定伝達限界よりも高い最大伝達限界を示すとき、及び/又は
・繰り返し数が所定最大繰り返し数を超えたとき、に停止される。
Claims (7)
- 対物レンズと、前記対物レンズの収差を補正する収差補正器とを備えた走査型透過電子顕微鏡(STEM)を調整する方法であって、前記収差補正器はある作動値で作動され、前記対物レンズは焦点値Fにフォーカスされ:
a)サンプルの結晶部分または多結晶部分の高解像度STEM画像I1...Inのスルーフォーカスシリーズを記録するステップであって、前記スルーフォーカスシリーズはデフォーカスレンジをカバーするステップと、
b)前記高解像度STEM画像を逆空間における表示R1...Rnに変換するステップであって、前記表示はあるパターンで構成された複数のスポットを示し、各スポットは強度を示すステップと、
c)各表示R1...Rnに対して、前記複数のスポットの少なくとも一部の強度分布における非対称性を決定するステップと、
d)前記収差補正器の作動値と、前記焦点値Fとを変化させるステップと、
e)任意的にデフォーカスレンジを変更するステップと、
f)任意的に、変更した作動値及び/又はフォーカスの値を用いて、高解像度STEM画像を記録し、前記高解像度STEM画像を逆空間における表示に変換し、前記表示の対称性と、スポットが見えるパターンの中心からの距離とを決定する、前記距離は最大伝達限界の表示を与える、ステップとを繰り返すことを含み、
前記ステップa乃至fの繰り返しは、
・前記任意的に記録されたインフォーカス画像の逆空間における表示が、所定値よりもよい対称性と、所定伝達限界よりも高い最大伝達限界を示すとき、及び/又は
・収差補正器の作動値と対物レンズにおける変化が所定値よりも小さいとき、及び/又は
・繰り返し数が所定最大繰り返し数を超えたとき、
に中止される、方法。 - 前記収差補正器の作動値の変化は、2回非点収差、コマ収差、及び3回非点収差を組み合わせた効果を最小化するものである、請求項1に記載の方法。
- 逆像R1...Rnは離散余弦変換、離散フーリエ変換、又は離散Hardaman変換を用いて形成される、請求項1または2に記載の方法。
- 前記方法は分析するサンプルに対して実行される、請求項1ないし3いずれか一項に記載の方法。
- 前記方法は、分析する他のサンプルと共にサンプルキャリヤにマウントされたサンプルに対して実行される、請求項1ないし4いずれか一項に記載の方法。
- 前記収差補正器は、球面収差の補正器及び/又は非点収差の補正器である、請求項1ないし5いずれか一項に記載の方法。
- 汚染を避けるため、ステップa乃至fの各繰り返しにおいて、前記サンプルの異なる部分の画像を記録する、請求項1ないし6いずれか一項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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EP11185734.8 | 2011-10-19 | ||
EP11185734.8A EP2584584A1 (en) | 2011-10-19 | 2011-10-19 | Method for adjusting a STEM equipped with an aberration corrector |
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JP2013089599A JP2013089599A (ja) | 2013-05-13 |
JP6076682B2 true JP6076682B2 (ja) | 2017-02-08 |
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US (1) | US9029767B2 (ja) |
EP (2) | EP2584584A1 (ja) |
JP (1) | JP6076682B2 (ja) |
CN (1) | CN103065917B (ja) |
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DK3033762T3 (da) | 2013-08-13 | 2019-05-06 | Res & Innovation Uk | Prøvebærer omfattende porøs metalfolie til elektronmikroskopi |
JP6190409B2 (ja) * | 2014-06-06 | 2017-08-30 | 原田工業株式会社 | 車載アンテナ装置 |
EP2966668B1 (en) * | 2014-07-10 | 2016-10-12 | Fei Company | Method of calibrating a scanning transmission charged-particle microscope |
PL3172757T3 (pl) * | 2014-07-22 | 2020-05-18 | Intelligent Virus Imaging Inc. | Sposób automatycznej korekcji astygmatyzmu |
US10031328B2 (en) * | 2015-07-24 | 2018-07-24 | General Electric Company | Systems and methods for image processing in optical microscopes |
US9978557B2 (en) | 2016-04-21 | 2018-05-22 | Fei Company | System for orienting a sample using a diffraction pattern |
CN110567959B (zh) * | 2019-09-17 | 2022-05-17 | 哈工大机器人(中山)无人装备与人工智能研究院 | 一种自适应像差校正图像扫描显微成像方法 |
CN113192816B (zh) * | 2021-04-26 | 2023-11-17 | 中国科学院物理研究所 | 一种电子显微镜载网、其制备方法和显微镜产品 |
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2011
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2012
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- 2012-10-18 EP EP12188969.5A patent/EP2584585B1/en active Active
- 2012-10-19 CN CN201210399492.7A patent/CN103065917B/zh active Active
- 2012-10-19 US US13/655,672 patent/US9029767B2/en active Active
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EP2584584A1 (en) | 2013-04-24 |
CN103065917A (zh) | 2013-04-24 |
EP2584585A3 (en) | 2013-06-12 |
CN103065917B (zh) | 2016-09-28 |
US20130105689A1 (en) | 2013-05-02 |
EP2584585A2 (en) | 2013-04-24 |
US9029767B2 (en) | 2015-05-12 |
JP2013089599A (ja) | 2013-05-13 |
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