JP6073256B2 - ランプアセンブリを使用した基板下面のオフアングル加熱 - Google Patents
ランプアセンブリを使用した基板下面のオフアングル加熱 Download PDFInfo
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- JP6073256B2 JP6073256B2 JP2013558073A JP2013558073A JP6073256B2 JP 6073256 B2 JP6073256 B2 JP 6073256B2 JP 2013558073 A JP2013558073 A JP 2013558073A JP 2013558073 A JP2013558073 A JP 2013558073A JP 6073256 B2 JP6073256 B2 JP 6073256B2
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Description
106 基板支持体
112 放射源アセンブリ
116 基板受け面
172 基板裏側
Claims (15)
- 半導体基板を処理するためのチャンバであって、
チャンバの処理位置と搬送位置の間に放射源を与えるためにチャンバ内の周囲領域に位置決めされた放射エネルギ源であって、前記チャンバの側壁から半径方向内向きに延びる複数の断続的な支持体上に配置された放射エネルギ源と、
前記処理位置の下に位置決めされ、前記処理位置に向けて上向きとされて前記放射エネルギ源の周りに配置された反射器と、
前記処理位置の上方に配置されたガス源と、
を含むことを特徴とするチャンバ。 - 前記反射器は、前記放射エネルギ源から前記処理位置に向けて放射を反射するように成形されることを特徴とする請求項1に記載のチャンバ。
- 垂直アクチュエータに連結された基板支持体と、該基板支持体に連結されてその基板受け面を通して延びるリフトピンアセンブリとを更に含み、
前記リフトピンアセンブリは、複数のリフトピンを含み、その各々は、前記基板支持体の前記基板受け面が前記放射源と前記搬送位置の間に位置決めされている間、基板を前記処理位置に維持するのに十分な長さを有する、
ことを特徴とする請求項1に記載のチャンバ。 - 前記反射器は、前記放射エネルギ源と前記チャンバの内側の前記処理位置の各周囲部分との間に突き出る半径方向延長部を含むことを特徴とする請求項1に記載のチャンバ。
- 反射面を有するシールドリングを備えた基板支持体を更に含むことを特徴とする請求項1に記載のチャンバ。
- 前記放射エネルギ源は、前記反射器から離れる方向に向く該放射エネルギ源の面上にコーティングを有することを特徴とする請求項1に記載のチャンバ。
- その第1の面に開口が形成された基板を処理する方法であって、
処理チャンバ内の基板支持体上に基板を位置決めする段階と、
前記処理チャンバ内で前記第1の面にわたってかつ前記開口に第1の材料を堆積させる段階と、
前記処理チャンバ内で前記第1の面の反対側の前記基板の第2の面を照射することによって、前記堆積された第1の材料をリフローさせる段階と、
を含むことを特徴とする方法。 - 前記処理チャンバ内で前記第1の面にわたってかつ前記開口に第2の材料を堆積させる段階を更に含むことを特徴とする請求項7に記載の方法。
- 前記基板の第2の面を照射する段階は、該基板を前記基板支持体の上方に位置決めする段階と、環状の放射熱源を活性化する段階とを含むことを特徴とする請求項7に記載の方法。
- 前記基板の前記第2の面を照射することによって、前記堆積された第2の材料をリフローさせる段階を更に含むことを特徴とする請求項8に記載の方法。
- 単一基板を処理するためのチャンバであって、
チャンバの内側の処理位置と基板搬送位置の間を移動するように作動される基板支持体であって、該基板支持体が、
複数のチャンネルがそこに形成された基板受け面、及び
前記基板支持体に連結され、前記基板受け面の上方に延びるように作動される複数のリフトピンを含むリフトピンアセンブリ、
を含む前記基板支持体と、
チャンバの側壁から半径方向内向きに延びる複数の断続的な支持体上に配置され、前記処理位置と前記基板搬送位置の間にある放射源平面を定める環状ランプと、
前記処理位置の下に位置決めされ、前記処理位置に向けて上向きとされて前記環状ランプの周りに配置された凹面環状反射器と、
を含むことを特徴とするチャンバ。 - 前記基板受け面に形成されたチャンネルは、該基板受け面の中心から該基板受け面の周囲部分まで増加する深さを有することを特徴とする請求項11に記載のチャンバ。
- 前記基板支持体の周りに配置され、かつ反射性の上面を有するシールドリングを更に含み、
前記基板支持体も、反射性の上面を有する、
ことを特徴とする請求項11に記載のチャンバ。 - 前記基板支持体は、誘電体ミラーを含む反射性の基板受け面を有することを特徴とする請求項11に記載のチャンバ。
- 前記環状ランプは、該環状ランプの面上に反射コーティングを有することを特徴とする請求項11に記載のチャンバ。
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