JP6043789B2 - レーザ生成プラズマ光源内の緩衝ガス流安定化のためのシステム及び方法 - Google Patents

レーザ生成プラズマ光源内の緩衝ガス流安定化のためのシステム及び方法 Download PDF

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Publication number
JP6043789B2
JP6043789B2 JP2014514465A JP2014514465A JP6043789B2 JP 6043789 B2 JP6043789 B2 JP 6043789B2 JP 2014514465 A JP2014514465 A JP 2014514465A JP 2014514465 A JP2014514465 A JP 2014514465A JP 6043789 B2 JP6043789 B2 JP 6043789B2
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light source
gas
flow
optical system
laser
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Japanese (ja)
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JP2014523640A5 (enExample
JP2014523640A (ja
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イゴー ヴィー フォーメンコフ
イゴー ヴィー フォーメンコフ
ヴラディミール ビー フリューロフ
ヴラディミール ビー フリューロフ
パートロ　ウィリアム　エヌ
ウィリアム エヌ パートロ
アーショフ　アレクサンダー　アイ
アレクサンダー アイ アーショフ
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ASML Netherlands BV
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ASML Netherlands BV
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H05G2/0027—Arrangements for controlling the supply; Arrangements for measurements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
    • H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
    • H05G2/0086—Optical arrangements for conveying the laser beam to the plasma generation location

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2014514465A 2011-06-08 2012-05-10 レーザ生成プラズマ光源内の緩衝ガス流安定化のためのシステム及び方法 Active JP6043789B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/156,188 2011-06-08
US13/156,188 US9516730B2 (en) 2011-06-08 2011-06-08 Systems and methods for buffer gas flow stabilization in a laser produced plasma light source
PCT/US2012/037363 WO2012170144A1 (en) 2011-06-08 2012-05-10 Systems and methods for buffer gas flow stabilization in a laser produced plasma light source

Publications (3)

Publication Number Publication Date
JP2014523640A JP2014523640A (ja) 2014-09-11
JP2014523640A5 JP2014523640A5 (enExample) 2015-07-02
JP6043789B2 true JP6043789B2 (ja) 2016-12-14

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JP2014514465A Active JP6043789B2 (ja) 2011-06-08 2012-05-10 レーザ生成プラズマ光源内の緩衝ガス流安定化のためのシステム及び方法

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Country Link
US (1) US9516730B2 (enExample)
EP (1) EP2719261A4 (enExample)
JP (1) JP6043789B2 (enExample)
KR (1) KR101940162B1 (enExample)
TW (1) TWI576013B (enExample)
WO (1) WO2012170144A1 (enExample)

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US10959318B2 (en) * 2018-01-10 2021-03-23 Kla-Tencor Corporation X-ray metrology system with broadband laser produced plasma illuminator
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JP7143439B2 (ja) * 2018-11-15 2022-09-28 ギガフォトン株式会社 極端紫外光生成装置及び電子デバイスの製造方法
KR102869765B1 (ko) * 2019-05-17 2025-10-13 삼성전자주식회사 소스 용기용 잔류물 제거 장치, 소스 용기 및 극자외선 노광장치
JP7368984B2 (ja) * 2019-09-05 2023-10-25 ギガフォトン株式会社 極端紫外光生成装置、及び電子デバイスの製造方法
US10923311B1 (en) * 2019-11-11 2021-02-16 Xia Tai Xin Semiconductor (Qing Dao) Ltd. Cathode for ion source comprising a tapered sidewall
JP2023121488A (ja) 2022-02-21 2023-08-31 ギガフォトン株式会社 極端紫外光生成装置及び電子デバイスの製造方法

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Also Published As

Publication number Publication date
EP2719261A1 (en) 2014-04-16
TW201251517A (en) 2012-12-16
WO2012170144A1 (en) 2012-12-13
TWI576013B (zh) 2017-03-21
KR101940162B1 (ko) 2019-01-18
US9516730B2 (en) 2016-12-06
KR20140036219A (ko) 2014-03-25
US20120313016A1 (en) 2012-12-13
JP2014523640A (ja) 2014-09-11
EP2719261A4 (en) 2015-04-08

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