JP6040254B2 - ジオルガノジハロシランの調製方法 - Google Patents
ジオルガノジハロシランの調製方法 Download PDFInfo
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- JP6040254B2 JP6040254B2 JP2014542310A JP2014542310A JP6040254B2 JP 6040254 B2 JP6040254 B2 JP 6040254B2 JP 2014542310 A JP2014542310 A JP 2014542310A JP 2014542310 A JP2014542310 A JP 2014542310A JP 6040254 B2 JP6040254 B2 JP 6040254B2
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- Prior art keywords
- silicon
- containing metal
- copper
- metal
- organohalide
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- 238000000034 method Methods 0.000 title claims description 60
- 229910052751 metal Inorganic materials 0.000 claims description 144
- 239000002184 metal Substances 0.000 claims description 144
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 92
- 229910052710 silicon Inorganic materials 0.000 claims description 92
- 239000010703 silicon Substances 0.000 claims description 92
- 239000000543 intermediate Substances 0.000 claims description 69
- 239000003054 catalyst Substances 0.000 claims description 68
- 239000010949 copper Substances 0.000 claims description 38
- 229910052802 copper Inorganic materials 0.000 claims description 37
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 33
- 239000010931 gold Substances 0.000 claims description 30
- 150000008282 halocarbons Chemical class 0.000 claims description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 26
- 229910052737 gold Inorganic materials 0.000 claims description 25
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 19
- 229910052702 rhenium Inorganic materials 0.000 claims description 12
- 229910052703 rhodium Inorganic materials 0.000 claims description 12
- 239000010948 rhodium Substances 0.000 claims description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 11
- 239000011777 magnesium Substances 0.000 claims description 11
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 10
- 229910052749 magnesium Inorganic materials 0.000 claims description 10
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 10
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 238000010926 purge Methods 0.000 claims description 7
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 150000003376 silicon Chemical class 0.000 claims description 5
- 125000006657 (C1-C10) hydrocarbyl group Chemical group 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 230000000779 depleting effect Effects 0.000 claims description 4
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 claims description 3
- NEHMKBQYUWJMIP-NJFSPNSNSA-N chloro(114C)methane Chemical compound [14CH3]Cl NEHMKBQYUWJMIP-NJFSPNSNSA-N 0.000 claims description 2
- 230000007062 hydrolysis Effects 0.000 claims description 2
- 238000006460 hydrolysis reaction Methods 0.000 claims description 2
- 125000001475 halogen functional group Chemical group 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 description 15
- 239000001257 hydrogen Substances 0.000 description 15
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 11
- 125000004432 carbon atom Chemical group C* 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 5
- 239000006227 byproduct Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910000077 silane Inorganic materials 0.000 description 5
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 4
- 125000000753 cycloalkyl group Chemical group 0.000 description 4
- -1 flakes Substances 0.000 description 4
- 125000005843 halogen group Chemical group 0.000 description 4
- 125000001183 hydrocarbyl group Chemical group 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 2
- 125000003542 3-methylbutan-2-yl group Chemical group [H]C([H])([H])C([H])(*)C([H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- GZUXJHMPEANEGY-UHFFFAOYSA-N bromomethane Chemical compound BrC GZUXJHMPEANEGY-UHFFFAOYSA-N 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 2
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- BYLOHCRAPOSXLY-UHFFFAOYSA-N dichloro(diethyl)silane Chemical compound CC[Si](Cl)(Cl)CC BYLOHCRAPOSXLY-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 2
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 229910001629 magnesium chloride Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000005055 methyl trichlorosilane Substances 0.000 description 2
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 2
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 150000001282 organosilanes Chemical class 0.000 description 2
- 125000003538 pentan-3-yl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 238000011946 reduction process Methods 0.000 description 2
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 125000003548 sec-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- 125000004493 2-methylbut-1-yl group Chemical group CC(C*)CC 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- 229910003771 Gold(I) chloride Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 150000001350 alkyl halides Chemical class 0.000 description 1
- 230000029936 alkylation Effects 0.000 description 1
- 238000005804 alkylation reaction Methods 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- JPHWRWNAPMZGNL-UHFFFAOYSA-N benzyl(tribromo)silane Chemical compound Br[Si](Br)(Br)CC1=CC=CC=C1 JPHWRWNAPMZGNL-UHFFFAOYSA-N 0.000 description 1
- GONOPSZTUGRENK-UHFFFAOYSA-N benzyl(trichloro)silane Chemical compound Cl[Si](Cl)(Cl)CC1=CC=CC=C1 GONOPSZTUGRENK-UHFFFAOYSA-N 0.000 description 1
- XRSYOWTXEBJRKF-UHFFFAOYSA-N benzyl(trifluoro)silane Chemical compound F[Si](F)(F)CC1=CC=CC=C1 XRSYOWTXEBJRKF-UHFFFAOYSA-N 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- KXVUSQIDCZRUKF-UHFFFAOYSA-N bromocyclobutane Chemical compound BrC1CCC1 KXVUSQIDCZRUKF-UHFFFAOYSA-N 0.000 description 1
- AQNQQHJNRPDOQV-UHFFFAOYSA-N bromocyclohexane Chemical compound BrC1CCCCC1 AQNQQHJNRPDOQV-UHFFFAOYSA-N 0.000 description 1
- RDHPKYGYEGBMSE-UHFFFAOYSA-N bromoethane Chemical compound CCBr RDHPKYGYEGBMSE-UHFFFAOYSA-N 0.000 description 1
- FQEKAFQSVPLXON-UHFFFAOYSA-N butyl(trichloro)silane Chemical compound CCCC[Si](Cl)(Cl)Cl FQEKAFQSVPLXON-UHFFFAOYSA-N 0.000 description 1
- GBAJYMPPJATTKV-UHFFFAOYSA-N butyl(trifluoro)silane Chemical compound CCCC[Si](F)(F)F GBAJYMPPJATTKV-UHFFFAOYSA-N 0.000 description 1
- ZZZTWYAOPYYLPZ-UHFFFAOYSA-N butyl(triiodo)silane Chemical compound CCCC[Si](I)(I)I ZZZTWYAOPYYLPZ-UHFFFAOYSA-N 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- YGZSVWMBUCGDCV-UHFFFAOYSA-N chloro(methyl)silane Chemical class C[SiH2]Cl YGZSVWMBUCGDCV-UHFFFAOYSA-N 0.000 description 1
- STJYMUBZVMSMBP-UHFFFAOYSA-N chlorocyclobutane Chemical compound ClC1CCC1 STJYMUBZVMSMBP-UHFFFAOYSA-N 0.000 description 1
- HRYZWHHZPQKTII-UHFFFAOYSA-N chloroethane Chemical compound CCCl HRYZWHHZPQKTII-UHFFFAOYSA-N 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 125000000490 cinnamyl group Chemical group C(C=CC1=CC=CC=C1)* 0.000 description 1
- 238000010960 commercial process Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- ATLTUPOAGVFJLN-UHFFFAOYSA-N dibromo(dicyclohexyl)silane Chemical compound C1CCCCC1[Si](Br)(Br)C1CCCCC1 ATLTUPOAGVFJLN-UHFFFAOYSA-N 0.000 description 1
- LIQOCGKQCFXKLF-UHFFFAOYSA-N dibromo(dimethyl)silane Chemical compound C[Si](C)(Br)Br LIQOCGKQCFXKLF-UHFFFAOYSA-N 0.000 description 1
- IESPKCNRKMAVIB-UHFFFAOYSA-N dichloro(dicyclohexyl)silane Chemical compound C1CCCCC1[Si](Cl)(Cl)C1CCCCC1 IESPKCNRKMAVIB-UHFFFAOYSA-N 0.000 description 1
- GPTNEHSWPUSHFX-UHFFFAOYSA-N diethyl(diiodo)silane Chemical compound CC[Si](I)(I)CC GPTNEHSWPUSHFX-UHFFFAOYSA-N 0.000 description 1
- XRRDNAZMVAXXQP-UHFFFAOYSA-N difluoro(dimethyl)silane Chemical compound C[Si](C)(F)F XRRDNAZMVAXXQP-UHFFFAOYSA-N 0.000 description 1
- UYZARHCMSBEPFF-UHFFFAOYSA-N diiodo(dimethyl)silane Chemical compound C[Si](C)(I)I UYZARHCMSBEPFF-UHFFFAOYSA-N 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 229960003750 ethyl chloride Drugs 0.000 description 1
- NHOREJPMXSLGGR-UHFFFAOYSA-N ethyl(trifluoro)silane Chemical compound CC[Si](F)(F)F NHOREJPMXSLGGR-UHFFFAOYSA-N 0.000 description 1
- RXBOMHDFBHOQHF-UHFFFAOYSA-N ethyl(triiodo)silane Chemical compound CC[Si](I)(I)I RXBOMHDFBHOQHF-UHFFFAOYSA-N 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 125000002346 iodo group Chemical group I* 0.000 description 1
- HVTICUPFWKNHNG-UHFFFAOYSA-N iodoethane Chemical compound CCI HVTICUPFWKNHNG-UHFFFAOYSA-N 0.000 description 1
- INQOMBQAUSQDDS-UHFFFAOYSA-N iodomethane Chemical compound IC INQOMBQAUSQDDS-UHFFFAOYSA-N 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 229940102396 methyl bromide Drugs 0.000 description 1
- 229940050176 methyl chloride Drugs 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- UNFUYWDGSFDHCW-UHFFFAOYSA-N monochlorocyclohexane Chemical compound ClC1CCCCC1 UNFUYWDGSFDHCW-UHFFFAOYSA-N 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000005054 phenyltrichlorosilane Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 1
- 239000005053 propyltrichlorosilane Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- SDKPSXWGRWWLKR-UHFFFAOYSA-M sodium;9,10-dioxoanthracene-1-sulfonate Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)[O-] SDKPSXWGRWWLKR-UHFFFAOYSA-M 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- HCSBZSDRJAJWHR-UHFFFAOYSA-N tribromo(butyl)silane Chemical compound CCCC[Si](Br)(Br)Br HCSBZSDRJAJWHR-UHFFFAOYSA-N 0.000 description 1
- KVENDAGPVNAYLY-UHFFFAOYSA-N tribromo(ethyl)silane Chemical compound CC[Si](Br)(Br)Br KVENDAGPVNAYLY-UHFFFAOYSA-N 0.000 description 1
- KBSUPJLTDMARAI-UHFFFAOYSA-N tribromo(methyl)silane Chemical compound C[Si](Br)(Br)Br KBSUPJLTDMARAI-UHFFFAOYSA-N 0.000 description 1
- HPTIEXHGTPSFDC-UHFFFAOYSA-N tribromo(phenyl)silane Chemical compound Br[Si](Br)(Br)C1=CC=CC=C1 HPTIEXHGTPSFDC-UHFFFAOYSA-N 0.000 description 1
- RWRKNKVDHIEKHS-UHFFFAOYSA-N tribromo(propyl)silane Chemical compound CCC[Si](Br)(Br)Br RWRKNKVDHIEKHS-UHFFFAOYSA-N 0.000 description 1
- ZOYFEXPFPVDYIS-UHFFFAOYSA-N trichloro(ethyl)silane Chemical compound CC[Si](Cl)(Cl)Cl ZOYFEXPFPVDYIS-UHFFFAOYSA-N 0.000 description 1
- ORVMIVQULIKXCP-UHFFFAOYSA-N trichloro(phenyl)silane Chemical compound Cl[Si](Cl)(Cl)C1=CC=CC=C1 ORVMIVQULIKXCP-UHFFFAOYSA-N 0.000 description 1
- DOEHJNBEOVLHGL-UHFFFAOYSA-N trichloro(propyl)silane Chemical compound CCC[Si](Cl)(Cl)Cl DOEHJNBEOVLHGL-UHFFFAOYSA-N 0.000 description 1
- BHOCBLDBJFCBQS-UHFFFAOYSA-N trifluoro(methyl)silane Chemical compound C[Si](F)(F)F BHOCBLDBJFCBQS-UHFFFAOYSA-N 0.000 description 1
- KGWNTHHPMKEAIK-UHFFFAOYSA-N trifluoro(phenyl)silane Chemical compound F[Si](F)(F)C1=CC=CC=C1 KGWNTHHPMKEAIK-UHFFFAOYSA-N 0.000 description 1
- JGHTXIKECBJCFI-UHFFFAOYSA-N trifluoro(propyl)silane Chemical compound CCC[Si](F)(F)F JGHTXIKECBJCFI-UHFFFAOYSA-N 0.000 description 1
- ARIHFGQDMNMGQJ-UHFFFAOYSA-N triiodo(methyl)silane Chemical compound C[Si](I)(I)I ARIHFGQDMNMGQJ-UHFFFAOYSA-N 0.000 description 1
- HBVCQKOZPHBDAR-UHFFFAOYSA-N triiodo(phenyl)silane Chemical compound I[Si](I)(I)C1=CC=CC=C1 HBVCQKOZPHBDAR-UHFFFAOYSA-N 0.000 description 1
- GTLPSNWPFBXKQA-UHFFFAOYSA-N triiodo(propyl)silane Chemical compound CCC[Si](I)(I)I GTLPSNWPFBXKQA-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
- C07F7/14—Preparation thereof from optionally substituted halogenated silanes and hydrocarbons hydrosilylation reactions
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
- C07F7/121—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20
- C07F7/122—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20 by reactions involving the formation of Si-C linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
- C07F7/121—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20
- C07F7/126—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20 by reactions involving the formation of Si-Y linkages, where Y is not a carbon or halogen atom
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
Description
(a)500〜1400℃の温度で、i)金、ii)金及び銅、iii)金、銅、及びマグネシウム、iv)銅、ロジウム、及び金、v)銅、ロジウム、及びレニウム、vi)レニウム及びパラジウム、vii)銅、並びにviii)銅及びマグネシウムからなる群から選択される金属を含む金属触媒を、水素ガス及びオルガノトリハロシランを含む混合物で処理して、ケイ素含有金属中間体を形成する工程と、
(b)100〜600℃の温度で、ケイ素含有金属中間体を、式RXに従うオルガノハライド(式中、RはC1〜C10ヒドロカルビルであり、Xはハロである)と反応させて、ジオルガノジハロシラン及び枯渇性ケイ素含有金属中間体を形成する工程と、を含む、方法。
18重量%Cu/0.6重量%Au/0.2重量%MgCl2触媒を、次のように調製した:0.0194gのAuCl3(99+%、Sigma Aldrich)及び0.0363gのMgCl2 *6H2O(99+%、Sigma Aldrich)を、0.1mLのHClと2.1mLの脱イオン水に添加し、溶解させた。これを0.8317gのCaCl2 *2H2O(99+%、Alfa Aesar)に添加し、CuCl2を溶解させた。次に、溶液を1.1418gのCに添加した。あらゆる過剰な溶液を排出し、混合物を170℃で24時間乾燥させた。0.69gのこの触媒を石英管に充填し、管炉(Lindberg/Blue Minimite管炉)の内側の特注ステンレススチール流管反応装置に設置した。触媒を、100sccmのH2下、600℃で2時間還元し、その後、温度を650℃にした。この時点で、最初に、室温で蒸気起泡機に含まれる液体n−PrSiCl3を通して、100sccmのH2ガス流を起泡する(約2.0sccmのn−PrSiCl3蒸気流量を与える)ことによって、n−PrSiCl3を触媒上に導入して、ケイ素含有金属中間体を形成した。次に、ケイ素含有金属中間体を100sccmのH2下で300℃に冷却し、その後、反応装置を30分間Arでパージした。30分後、1sccmのMeClを、300℃で66分間ケイ素含有金属中間体上に流し、エチル化クロロシランを反応装置から溶出した。溶出したクロロシランを、高速LTMカラムモジュール及びSPB−オクチルカラム(長さ30m×内径250um、Supelco)を用いてAgilent GC−MSによって特徴付け、注入を、100uLの試料ループを備える6方弁(Valco)を介して反応装置の出口から直接試料抽出した。66分後、少量のMeSiCl3、MeHSiCl2、Me2HSiCl、Me3SiCl、n−PrSiCl3、n−PrMeSiCl3、n−PrHSiCl2、アリル−SiCl3、EtSiCl3、EtMeSiCl2、Me4Si、及びClMe2SiOCH2CH2OSiMe2Clと共に、約25mgのMe2SiCl2が生産された。
約1.5℃の液体MeSiCl3を含むステンレススチール起泡機を通して、750℃の金属触媒を含む流通反応装置内に、H2(100sccm)を起泡することによって、22.3%(w/w)Cu、0.7%(w/w)Au、及び0.2%(w/w)Mgの活性炭坦持混合物を含む金属触媒(0.4856g)(実施例1において触媒を作製するために使用された手順を用いて調製された)を、H2対MeSiCl3のモル比が17:1のH2及びMeSiCl3で30分間処理し、ケイ素含有金属中間体を形成した。30分後、MeSiCl3流は停止し、水素流は、反応装置を300℃に冷却している間、約1時間維持した。
活性炭上に20.9%のCu及び0.6%のAuを含む金属触媒を、実施例2に記載されるように調製し、処理した。金属触媒を処理してケイ素含有金属中間体を形成するサイクルを1回行った。ステンレススチールの起泡機は24℃であり、ケイ素含有金属中間体の形成において、5:1のH2対MeSiCl3のモル比を得た。ケイ素含有金属中間体を形成した後、300℃で実施例2のMeClと反応させた。全てのパラメーター及び結果を表3に示す。
活性炭上に14.9%のAuを含む金属触媒を、実施例2に記載されるように調製し、処理した。1回のサイクルが、ケイ素含有金属中間体を生成し、ケイ素含有金属中間体をMeClと反応させて、その後MeClと反応させたケイ素含有触媒からケイ素含有金属中間体を再生する工程を含む、3回のサイクルを行った。サイクル中、MeSiCl3が金属触媒上を通過させてケイ素含有金属中間体を形成する間、ステンレススチール起泡機を0〜10℃に保った。ケイ素含有金属中間体を、実施例2にあるように300℃でMeClと反応させた。全てのパラメーター及び結果を表4に示す。
活性炭上に4.9%のCu、2.5%のRh、及び0.3%のAuを含む金属触媒を、実施例2に記載されるように調製し、処理した。1回のサイクルが実施例4に記載される通りである、2回の反応サイクルを行い、MeSiCl3が金属触媒上を通過させてケイ素含有金属中間体を形成する間、ステンレススチールの起泡機を室温に保った。ケイ素含有金属中間体を、実施例2に記載されるように300℃でMeClと反応させた。全てのパラメーター及び結果を表5に示す。
活性炭上に4.9%のCu、2.6%のRh、及び2.5%のReを含む金属触媒を、実施例2に記載されるように調製し、処理した。実施例4に記載されるように、1回の反応サイクルを行った。ステンレススチールの起泡機は23℃であり、ケイ素含有金属中間体の形成において、6:1のH2対MeSiCl3のモル比を得た。ケイ素含有金属中間体を、実施例2にあるように300℃でMeClと反応させた。全てのパラメーター及び結果を表6に示す。
活性炭上に6.9%のRe及び1.2%のPdを含む金属触媒を、実施例2に記載されるように調製し、処理した。実施例4に記載されるように、1回の反応サイクルを行った。ステンレススチールの起泡機は23℃であり、ケイ素含有金属中間体の形成において、6:1のH2対MeSiCl3のモル比を得た。ケイ素含有金属中間体を、実施例2にあるように300℃でMeClと反応させた。全てのパラメーター及び結果を表7に示す。
Claims (15)
- SiR 2 X 2 を調製する方法であって、次の別個の連続する工程であって、
(a)500〜1400℃の温度で、i)金、ii)金及び銅、iii)金、銅、及びマグネシウム、iv)銅、ロジウム、及び金、v)銅、ロジウム、及びレニウム、vi)レニウム及びパラジウム、vii)銅、並びにviii)銅及びマグネシウムからなる群から選択される金属を含む金属触媒を、水素ガス及びオルガノトリハロシランを含む混合物で処理して、ケイ素含有金属中間体を形成する工程と、
(b)100〜600℃の温度で、前記ケイ素含有金属中間体を、式RXに従うオルガノハライド(式中、RはC1〜C10ヒドロカルビルであり、Xはハロである)と反応させて、SiR 2 X 2 及び枯渇性ケイ素含有金属中間体を形成する工程と、を含む、方法。 - (c)500〜1400℃の温度で、工程(b)で形成された前記枯渇性ケイ素含有金属中間体を、前記水素ガス及び前記オルガノトリハロシランと接触させて、少なくとも0.1%(w/w)のケイ素を含む前記ケイ素含有金属中間体を改質する工程と、(d)100〜600℃の温度で、前記改質されたケイ素含有金属中間体を前記オルガノハライドと接触させて、SiR 2 X 2 を形成する工程と、を更に含む、請求項1に記載の方法。
- 工程(c)及び(d)を少なくとも1回反復することを更に含む、請求項2に記載の方法。
- 工程(d)において、前記改質されたケイ素含有金属中間体を前記オルガノハライドと接触させる前に、パージすることを更に含む、請求項2又は3に記載の方法。
- 工程(b)において、前記ケイ素含有金属中間体を前記オルガノハライドと接触させる前に、パージすることを更に含む、請求項1〜4のいずれか一項に記載の方法。
- 前記パージが、アルゴン又はオルガノトリハロシランによって行われる、請求項4又は請求項5に記載の方法。
- 前記金属触媒が、担体を更に含む、請求項1〜6のいずれか一項に記載の方法。
- 前記金属触媒が、0.1〜35%(w/w)の前記金属を含み、前記金属が、銅、金、及びマグネシウムを含む、請求項7に記載の方法。
- 前記担体が、活性炭である、請求項7又は8に記載の方法。
- 前記ケイ素含有金属中間体が、1〜5%(w/w)のケイ素を含む、請求項1〜9のいずれか一項に記載の方法。
- 前記オルガノハライドが、塩化メチルであり、前記オルガノトリハロシランが、CH3SiCl3である、請求項1〜10のいずれか一項に記載の方法。
- 前記SiR 2 X 2 を回収することを更に含む、請求項1〜11のいずれか一項に記載の方法。
- 工程(b)が、7〜1000kPagの圧力においてである、及び/又は工程(a)が、7〜1000kPagの圧力においてである、請求項1〜12のいずれか一項に記載の方法。
- 前記SiR 2 X 2 が、ジメチルジクロロシランである、請求項1〜13のいずれか一項に記載の方法。
- 前記方法が、前記SiR 2 X 2 を加水分解して、ポリオルガノシロキサンを形成する工程を更に含む、請求項1〜14のいずれか一項に記載の方法。
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US201161561077P | 2011-11-17 | 2011-11-17 | |
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WO2015073213A1 (en) * | 2013-11-12 | 2015-05-21 | Dow Corning Corporation | Method for preparing a halosilane |
US10081643B2 (en) | 2014-12-18 | 2018-09-25 | Dow Silicones Corporation | Method for producing aryl-functional silanes |
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US4888435A (en) * | 1989-06-22 | 1989-12-19 | Dow Corning Corporation | Integrated process for alkylation and redistribution of halosilanes |
DE4041644A1 (de) | 1990-12-22 | 1992-06-25 | Nuenchritz Chemie Gmbh | Verfahren zur reduktiven umwandlung von siliciumtetrachlorid in trichlorsilan |
US5427952A (en) * | 1993-01-11 | 1995-06-27 | Dow Corning Corporation | Analytical method for nonmetallic contaminates in silicon |
DE4343169A1 (de) | 1993-12-17 | 1995-06-22 | Solvay Deutschland | Katalytische Hydrodehalogenierung halogenhaltiger Verbindungen von Elementen der vierten Hauptgruppe |
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CN1185238C (zh) * | 2002-06-28 | 2005-01-19 | 中国石油天然气股份有限公司 | 一种利用CH3SiC13合成(CH3)2SiC12的方法 |
FR2848211B1 (fr) * | 2002-12-09 | 2005-01-14 | Rhodia Chimie Sa | Procede et systeme catalytique comprenant un metal alcalin et du phosphore comme additifs promoteurs pour la synthese directe d'alkylhalogenosilanes |
FR2887551B1 (fr) * | 2005-06-22 | 2008-02-15 | Rhodia Chimie Sa | Procede de synthese directe d'alkylhalogenosilanes |
WO2011149588A1 (en) * | 2010-05-28 | 2011-12-01 | Dow Corning Corporation | A method for preparing a diorganodihalosilane |
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US8765090B2 (en) * | 2010-09-08 | 2014-07-01 | Dow Corning Corporation | Method for preparing a trihalosilane |
WO2012082686A1 (en) * | 2010-12-17 | 2012-06-21 | Dow Corning Corporation | Method of making a trihalosilane |
US8674129B2 (en) * | 2010-12-17 | 2014-03-18 | Dow Corning Corporation | Method of making a diorganodihalosilane |
US8697900B2 (en) * | 2011-01-25 | 2014-04-15 | Dow Corning Corporation | Method of preparing a diorganodihalosilane |
DE102011005647A1 (de) | 2011-03-16 | 2012-10-04 | Evonik Degussa Gmbh | Verbundverfahren zur Umstetzung von STC-haltigen und OCS-haltigen Nebenströmen zu wasserstoffhaltigen Chlorsilanen |
WO2013074425A1 (en) | 2011-11-14 | 2013-05-23 | Centrotherm Photovoltaics Usa, Inc. | Processes and systems for non-equilibrium trichlorosilane production |
WO2014028417A1 (en) | 2012-08-13 | 2014-02-20 | Dow Corning Corporation | Method of preparing an organohalosilane by reacting hydrogen, halosilane and organohalide in a two step process on a copper catalyst |
US9422316B2 (en) | 2012-10-16 | 2016-08-23 | Dow Corning Corporation | Method of preparing halogenated silahydrocarbylenes |
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