JP6029494B2 - インプリント方法およびインプリント装置、それを用いた物品の製造方法 - Google Patents

インプリント方法およびインプリント装置、それを用いた物品の製造方法 Download PDF

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Publication number
JP6029494B2
JP6029494B2 JP2013041424A JP2013041424A JP6029494B2 JP 6029494 B2 JP6029494 B2 JP 6029494B2 JP 2013041424 A JP2013041424 A JP 2013041424A JP 2013041424 A JP2013041424 A JP 2013041424A JP 6029494 B2 JP6029494 B2 JP 6029494B2
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Japan
Prior art keywords
mold
imprint
substrate
alignment
shape
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JP2013041424A
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English (en)
Japanese (ja)
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JP2013219331A (ja
JP2013219331A5 (enExample
Inventor
望 林
望 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2013041424A priority Critical patent/JP6029494B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to KR1020147024456A priority patent/KR101666288B1/ko
Priority to CN201380013086.5A priority patent/CN104160477B/zh
Priority to EP13760734.7A priority patent/EP2791966B1/en
Priority to US14/376,221 priority patent/US10901324B2/en
Priority to PCT/JP2013/001435 priority patent/WO2013136730A1/en
Publication of JP2013219331A publication Critical patent/JP2013219331A/ja
Publication of JP2013219331A5 publication Critical patent/JP2013219331A5/ja
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Publication of JP6029494B2 publication Critical patent/JP6029494B2/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70608—Monitoring the unpatterned workpiece, e.g. measuring thickness, reflectivity or effects of immersion liquid on resist
    • H10P76/2041—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/002—Component parts, details or accessories; Auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7038—Alignment for proximity or contact printer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • H10P74/203—
    • H10W46/00—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2101/00—Use of unspecified macromolecular compounds as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2009/00—Layered products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2013041424A 2012-03-12 2013-03-04 インプリント方法およびインプリント装置、それを用いた物品の製造方法 Active JP6029494B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2013041424A JP6029494B2 (ja) 2012-03-12 2013-03-04 インプリント方法およびインプリント装置、それを用いた物品の製造方法
CN201380013086.5A CN104160477B (zh) 2012-03-12 2013-03-07 压印方法、压印装置以及使用其的物品制造方法
EP13760734.7A EP2791966B1 (en) 2012-03-12 2013-03-07 Imprint method, imprint apparatus, and article manufacturing method using the same
US14/376,221 US10901324B2 (en) 2012-03-12 2013-03-07 Imprint method, imprint apparatus, and article manufacturing method using the same
KR1020147024456A KR101666288B1 (ko) 2012-03-12 2013-03-07 임프린트 방법, 임프린트 장치 및 이를 사용한 물품 제조 방법
PCT/JP2013/001435 WO2013136730A1 (en) 2012-03-12 2013-03-07 Imprint method, imprint apparatus, and article manufacturing method using the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012053993 2012-03-12
JP2012053993 2012-03-12
JP2013041424A JP6029494B2 (ja) 2012-03-12 2013-03-04 インプリント方法およびインプリント装置、それを用いた物品の製造方法

Publications (3)

Publication Number Publication Date
JP2013219331A JP2013219331A (ja) 2013-10-24
JP2013219331A5 JP2013219331A5 (enExample) 2016-04-21
JP6029494B2 true JP6029494B2 (ja) 2016-11-24

Family

ID=49160663

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JP2013041424A Active JP6029494B2 (ja) 2012-03-12 2013-03-04 インプリント方法およびインプリント装置、それを用いた物品の製造方法

Country Status (6)

Country Link
US (1) US10901324B2 (enExample)
EP (1) EP2791966B1 (enExample)
JP (1) JP6029494B2 (enExample)
KR (1) KR101666288B1 (enExample)
CN (1) CN104160477B (enExample)
WO (1) WO2013136730A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6472189B2 (ja) * 2014-08-14 2019-02-20 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法
JP2016134441A (ja) * 2015-01-16 2016-07-25 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6671160B2 (ja) * 2015-11-30 2020-03-25 キヤノン株式会社 インプリント装置、物品製造方法および位置合わせ方法
JP6748496B2 (ja) * 2016-06-30 2020-09-02 キヤノン株式会社 モールド、インプリント方法、インプリント装置および物品製造方法
JP6716484B2 (ja) * 2017-03-14 2020-07-01 キオクシア株式会社 インプリント方法
JP2018194386A (ja) * 2017-05-16 2018-12-06 大日本印刷株式会社 センサモジュール
JP6865650B2 (ja) * 2017-07-27 2021-04-28 キヤノン株式会社 インプリント装置、および物品製造方法
JP7033994B2 (ja) * 2018-04-11 2022-03-11 キヤノン株式会社 成形装置及び物品の製造方法
JP7317575B2 (ja) * 2019-05-28 2023-07-31 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP2021044296A (ja) * 2019-09-06 2021-03-18 キオクシア株式会社 インプリント方法、半導体装置の製造方法、及びインプリント装置
ES2817099B2 (es) * 2020-11-10 2021-08-30 Rudatskiy Sergii Birzhev Molde digital transformable
JP2024003899A (ja) * 2022-06-28 2024-01-16 キヤノン株式会社 インプリントシステム、基板、インプリント方法、レプリカモールド製造方法及び、物品の製造方法
JP2024043963A (ja) * 2022-09-20 2024-04-02 キオクシア株式会社 パターン形成方法、半導体装置の製造方法、及びインプリント装置
JP2024162750A (ja) * 2023-05-11 2024-11-21 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法。

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10146583A1 (de) * 2001-09-21 2003-04-17 Siemens Ag Vorrichtung und Verfahren zum optischen Abtasten einer Substratscheibe
JP2006165371A (ja) * 2004-12-09 2006-06-22 Canon Inc 転写装置およびデバイス製造方法
CN1800975B (zh) 2005-11-28 2011-11-30 中国科学院光电技术研究所 分步重复光照纳米压印装置
JP4827513B2 (ja) * 2005-12-09 2011-11-30 キヤノン株式会社 加工方法
JP4185941B2 (ja) * 2006-04-04 2008-11-26 キヤノン株式会社 ナノインプリント方法及びナノインプリント装置
JP5020844B2 (ja) * 2007-02-06 2012-09-05 キヤノン株式会社 インプリント方法及びインプリント装置、インプリント方法を用いた部材の製造方法
EP2128701A1 (en) * 2008-05-30 2009-12-02 ASML Netherlands BV Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process
JP5279397B2 (ja) 2008-08-06 2013-09-04 キヤノン株式会社 インプリント装置、インプリント方法、およびデバイス製造方法
JP2010214913A (ja) * 2009-03-19 2010-09-30 Toppan Printing Co Ltd インプリント方法およびインプリント装置
JP2011129720A (ja) * 2009-12-17 2011-06-30 Canon Inc インプリント装置、モールド及び物品の製造方法
JP5451450B2 (ja) * 2010-02-24 2014-03-26 キヤノン株式会社 インプリント装置及びそのテンプレート並びに物品の製造方法
US9430824B2 (en) * 2013-05-14 2016-08-30 Kla-Tencor Corporation Machine learning method and apparatus for inspecting reticles
JP5909210B2 (ja) * 2013-07-11 2016-04-26 キヤノン株式会社 インプリント装置及び物品の製造方法

Also Published As

Publication number Publication date
US20150325526A1 (en) 2015-11-12
JP2013219331A (ja) 2013-10-24
CN104160477A (zh) 2014-11-19
KR101666288B1 (ko) 2016-10-13
EP2791966A1 (en) 2014-10-22
WO2013136730A1 (en) 2013-09-19
KR20140119800A (ko) 2014-10-10
EP2791966A4 (en) 2015-07-29
EP2791966B1 (en) 2020-02-26
CN104160477B (zh) 2016-11-09
US10901324B2 (en) 2021-01-26

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