JP6017461B2 - 単一パッケージ磁気抵抗角度センサ - Google Patents
単一パッケージ磁気抵抗角度センサ Download PDFInfo
- Publication number
- JP6017461B2 JP6017461B2 JP2013555741A JP2013555741A JP6017461B2 JP 6017461 B2 JP6017461 B2 JP 6017461B2 JP 2013555741 A JP2013555741 A JP 2013555741A JP 2013555741 A JP2013555741 A JP 2013555741A JP 6017461 B2 JP6017461 B2 JP 6017461B2
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- JP
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- Prior art keywords
- magnetoresistive
- mtj
- gmr
- sensor
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110050704 | 2011-03-03 | ||
CN201110050704.6 | 2011-03-03 | ||
PCT/CN2012/071889 WO2012116660A1 (fr) | 2011-03-03 | 2012-03-02 | Détecteur d'angle à magnétorésistance sous boîtier individuel |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014507001A JP2014507001A (ja) | 2014-03-20 |
JP6017461B2 true JP6017461B2 (ja) | 2016-11-02 |
Family
ID=45358231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013555741A Active JP6017461B2 (ja) | 2011-03-03 | 2012-03-02 | 単一パッケージ磁気抵抗角度センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US9116199B2 (fr) |
EP (1) | EP2682772B1 (fr) |
JP (1) | JP6017461B2 (fr) |
CN (2) | CN202119391U (fr) |
WO (1) | WO2012116660A1 (fr) |
Families Citing this family (38)
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CN202119391U (zh) * | 2011-03-03 | 2012-01-18 | 江苏多维科技有限公司 | 一种独立封装的磁电阻角度传感器 |
CN202230192U (zh) * | 2011-03-03 | 2012-05-23 | 江苏多维科技有限公司 | 推挽桥式磁电阻传感器 |
CN102621504B (zh) * | 2011-04-21 | 2013-09-04 | 江苏多维科技有限公司 | 单片参考全桥磁场传感器 |
CN102590768B (zh) * | 2012-03-14 | 2014-04-16 | 江苏多维科技有限公司 | 一种磁电阻磁场梯度传感器 |
JP5590349B2 (ja) * | 2012-07-18 | 2014-09-17 | Tdk株式会社 | 磁気センサシステム |
CN202974369U (zh) * | 2012-08-24 | 2013-06-05 | 江苏多维科技有限公司 | 直读式计量装置和直读式水表 |
CN103913183A (zh) * | 2013-01-09 | 2014-07-09 | 江苏多维科技有限公司 | 一种角度磁编码器和电子水表 |
CN103925933B (zh) | 2013-01-11 | 2016-12-28 | 江苏多维科技有限公司 | 一种多圈绝对磁编码器 |
CN103278216A (zh) * | 2013-05-31 | 2013-09-04 | 江苏多维科技有限公司 | 液位传感器系统 |
CN103630855B (zh) * | 2013-12-24 | 2016-04-13 | 江苏多维科技有限公司 | 一种高灵敏度推挽桥式磁传感器 |
WO2015116601A1 (fr) | 2014-01-28 | 2015-08-06 | Crocus Technology Inc. | Circuits analogiques comprenant des unités logiques magnétiques |
EP3100312A1 (fr) | 2014-01-28 | 2016-12-07 | Crocus Technology Inc. | Unité logique magnétique (mlu) configurée sous forme de blocs de construction de circuit analogique |
CN103768679B (zh) | 2014-02-20 | 2016-08-24 | 江苏多维科技有限公司 | 精密注射器泵及其制造方法 |
JP6548357B2 (ja) * | 2014-03-28 | 2019-07-24 | Dmg森精機株式会社 | 位置検出装置 |
US10232109B2 (en) | 2014-04-14 | 2019-03-19 | MultiDimension Technology Co., Ltd. | Mini lead screw pump utilizing a magnetoresistive sensor and manufacturing method thereof |
CN104197828B (zh) * | 2014-08-20 | 2017-07-07 | 江苏多维科技有限公司 | 一种单芯片偏轴磁电阻z‑x角度传感器和测量仪 |
DE102014113374B4 (de) * | 2014-09-17 | 2024-01-11 | Infineon Technologies Ag | Magnetpositionssensor und Erfassungsverfahren |
US9625281B2 (en) | 2014-12-23 | 2017-04-18 | Infineon Technologies Ag | Fail-safe operation of an angle sensor with mixed bridges having separate power supplies |
CN104596605B (zh) | 2015-02-04 | 2019-04-26 | 江苏多维科技有限公司 | 一种磁自动化流量记录器 |
US9678040B2 (en) | 2015-04-09 | 2017-06-13 | International Business Machines Corporation | Rotating magnetic field hall measurement system |
US9772385B2 (en) * | 2015-04-09 | 2017-09-26 | International Business Machines Corporation | Rotating magnetic field hall measurement system |
CN104776794B (zh) * | 2015-04-16 | 2017-11-10 | 江苏多维科技有限公司 | 一种单封装的高强度磁场磁电阻角度传感器 |
CN105044631B (zh) * | 2015-08-28 | 2018-08-07 | 江苏多维科技有限公司 | 一种半翻转两轴线性磁电阻传感器 |
US10048328B2 (en) * | 2015-11-05 | 2018-08-14 | Infineon Technologies Ag | Redundant magnetic angle sensor with improved accuracy |
DE102016103325A1 (de) | 2016-02-25 | 2017-08-31 | Infineon Technologies Ag | Magnetischer Winkelpositionssensor |
CN205581283U (zh) * | 2016-04-11 | 2016-09-14 | 江苏多维科技有限公司 | 一种具有初始化线圈封装的磁电阻传感器 |
JP6741913B2 (ja) * | 2016-04-27 | 2020-08-19 | パナソニックIpマネジメント株式会社 | 磁気センサこれを用いた回転検出装置 |
DE102016218530A1 (de) * | 2016-09-27 | 2018-03-29 | Te Connectivity Germany Gmbh | Weggeber zum berührungslosen Messen einer relativen Position, Herstellungsverfahren für eine Magnetfeldsensoranordnung und Magnetfeldsensor |
CN108387852B (zh) * | 2018-04-23 | 2024-07-19 | 北京航空航天大学青岛研究院 | 单、双轴磁场传感器及其制备方法 |
US10677620B2 (en) * | 2018-05-01 | 2020-06-09 | Nxp B.V. | System and method for sensor diagnostics during functional operation |
JP6784283B2 (ja) * | 2018-09-19 | 2020-11-11 | Tdk株式会社 | 角度センサシステム |
EP3695719A1 (fr) * | 2019-02-16 | 2020-08-19 | Ispot IP Limited | Indicateur de touche pour la pêche |
US11131727B2 (en) | 2019-03-11 | 2021-09-28 | Tdk Corporation | Magnetic sensor device |
CN110120724B (zh) * | 2019-05-31 | 2024-04-26 | 宁波拓普集团股份有限公司 | 一种电机转子角度测量装置及方法 |
JP2021064780A (ja) * | 2019-10-11 | 2021-04-22 | メレキシス テクノロジーズ エス エーMelexis Technologies SA | 積層ダイアセンブリ |
JP7070532B2 (ja) * | 2019-11-19 | 2022-05-18 | Tdk株式会社 | 磁気センサ |
US11761793B2 (en) | 2020-05-26 | 2023-09-19 | Analog Devices International Unlimited Company | Magnetic sensor package |
CN117615635A (zh) * | 2022-08-22 | 2024-02-27 | 迈来芯电子科技有限公司 | 磁传感器器件以及生产磁传感器器件的方法 |
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US6529114B1 (en) * | 1998-05-27 | 2003-03-04 | Honeywell International Inc. | Magnetic field sensing device |
JP3623366B2 (ja) * | 1998-07-17 | 2005-02-23 | アルプス電気株式会社 | 巨大磁気抵抗効果素子を備えた磁界センサおよびその製造方法と製造装置 |
WO2000079298A2 (fr) * | 1999-06-18 | 2000-12-28 | Koninklijke Philips Electronics N.V. | Systemes magnetiques aux caracteristiques irreversibles et procede pour fabriquer, reparer et exploiter ces systemes |
US6633462B2 (en) * | 2000-07-13 | 2003-10-14 | Koninklijke Philips Electronics N.V. | Magnetoresistive angle sensor having several sensing elements |
US7005958B2 (en) * | 2002-06-14 | 2006-02-28 | Honeywell International Inc. | Dual axis magnetic sensor |
JP3835447B2 (ja) * | 2002-10-23 | 2006-10-18 | ヤマハ株式会社 | 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ |
CN101308199B (zh) * | 2002-11-29 | 2011-05-25 | 雅马哈株式会社 | 磁传感器及补偿磁传感器的温度相关特性的方法 |
EP1566649B1 (fr) * | 2002-11-29 | 2011-01-12 | Yamaha Corporation | Detecteur magnetique et son procede de compensation de caracteristique de dependance thermique |
DE10308030B4 (de) * | 2003-02-24 | 2011-02-03 | Meas Deutschland Gmbh | Magnetoresistiver Sensor zur Bestimmung eines Winkels oder einer Position |
JP4557134B2 (ja) * | 2004-03-12 | 2010-10-06 | ヤマハ株式会社 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
JP4424093B2 (ja) * | 2004-06-28 | 2010-03-03 | ヤマハ株式会社 | 磁気センサ |
JP4023476B2 (ja) * | 2004-07-14 | 2007-12-19 | 日立金属株式会社 | スピンバルブ型巨大磁気抵抗効果素子を持った方位計 |
US20100001723A1 (en) * | 2004-12-28 | 2010-01-07 | Koninklijke Philips Electronics, N.V. | Bridge type sensor with tunable characteristic |
DE102006032277B4 (de) * | 2006-07-12 | 2017-06-01 | Infineon Technologies Ag | Magnetfeldsensorbauelement |
JP2008270471A (ja) * | 2007-04-19 | 2008-11-06 | Yamaha Corp | 磁気センサ及びその製造方法 |
JP5292726B2 (ja) * | 2007-06-13 | 2013-09-18 | ヤマハ株式会社 | 磁気センサ及びその製造方法 |
US8134361B2 (en) * | 2007-06-13 | 2012-03-13 | Ricoh Company, Ltd. | Magnetic sensor including magnetic field detectors and field resistors arranged on inclined surfaces |
JP2008014954A (ja) * | 2007-08-07 | 2008-01-24 | Alps Electric Co Ltd | 磁気センサ |
US8270204B2 (en) * | 2008-10-09 | 2012-09-18 | Seagate Technology Llc | Domain wall movement on magnetic strip tracks |
US8451003B2 (en) * | 2009-07-29 | 2013-05-28 | Tdk Corporation | Magnetic sensor having magneto-resistive elements on a substrate |
JP4807535B2 (ja) * | 2009-07-31 | 2011-11-02 | Tdk株式会社 | 磁気センサ |
US8518734B2 (en) * | 2010-03-31 | 2013-08-27 | Everspin Technologies, Inc. | Process integration of a single chip three axis magnetic field sensor |
CN102298126B (zh) * | 2011-01-17 | 2013-03-13 | 江苏多维科技有限公司 | 独立封装的桥式磁场传感器 |
CN202119391U (zh) * | 2011-03-03 | 2012-01-18 | 江苏多维科技有限公司 | 一种独立封装的磁电阻角度传感器 |
CN202230192U (zh) * | 2011-03-03 | 2012-05-23 | 江苏多维科技有限公司 | 推挽桥式磁电阻传感器 |
-
2011
- 2011-05-19 CN CN201120160722.5U patent/CN202119391U/zh not_active Expired - Lifetime
- 2011-05-19 CN CN201110130222.1A patent/CN102297652B/zh active Active
-
2012
- 2012-03-02 US US14/002,734 patent/US9116199B2/en active Active
- 2012-03-02 EP EP12751985.8A patent/EP2682772B1/fr active Active
- 2012-03-02 WO PCT/CN2012/071889 patent/WO2012116660A1/fr active Application Filing
- 2012-03-02 JP JP2013555741A patent/JP6017461B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US9116199B2 (en) | 2015-08-25 |
WO2012116660A1 (fr) | 2012-09-07 |
EP2682772A4 (fr) | 2015-06-10 |
CN202119391U (zh) | 2012-01-18 |
US20130335073A1 (en) | 2013-12-19 |
CN102297652A (zh) | 2011-12-28 |
EP2682772B1 (fr) | 2019-01-16 |
EP2682772A1 (fr) | 2014-01-08 |
JP2014507001A (ja) | 2014-03-20 |
CN102297652B (zh) | 2012-12-05 |
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