JP6017461B2 - 単一パッケージ磁気抵抗角度センサ - Google Patents

単一パッケージ磁気抵抗角度センサ Download PDF

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Publication number
JP6017461B2
JP6017461B2 JP2013555741A JP2013555741A JP6017461B2 JP 6017461 B2 JP6017461 B2 JP 6017461B2 JP 2013555741 A JP2013555741 A JP 2013555741A JP 2013555741 A JP2013555741 A JP 2013555741A JP 6017461 B2 JP6017461 B2 JP 6017461B2
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magnetoresistive
mtj
gmr
sensor
magnetic field
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Japanese (ja)
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JP2014507001A (ja
Inventor
ジーザ ディーク、ジェイムス
ジーザ ディーク、ジェイムス
ジン、インシク
レイ、シャオフォン
シェン、ウェイフォン
シュエ、ソンシュン
ジャン、シャオジュン
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MultiDimension Technology Co Ltd
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MultiDimension Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/098Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2013555741A 2011-03-03 2012-03-02 単一パッケージ磁気抵抗角度センサ Active JP6017461B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201110050704 2011-03-03
CN201110050704.6 2011-03-03
PCT/CN2012/071889 WO2012116660A1 (fr) 2011-03-03 2012-03-02 Détecteur d'angle à magnétorésistance sous boîtier individuel

Publications (2)

Publication Number Publication Date
JP2014507001A JP2014507001A (ja) 2014-03-20
JP6017461B2 true JP6017461B2 (ja) 2016-11-02

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JP2013555741A Active JP6017461B2 (ja) 2011-03-03 2012-03-02 単一パッケージ磁気抵抗角度センサ

Country Status (5)

Country Link
US (1) US9116199B2 (fr)
EP (1) EP2682772B1 (fr)
JP (1) JP6017461B2 (fr)
CN (2) CN202119391U (fr)
WO (1) WO2012116660A1 (fr)

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CN202974369U (zh) * 2012-08-24 2013-06-05 江苏多维科技有限公司 直读式计量装置和直读式水表
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CN103925933B (zh) 2013-01-11 2016-12-28 江苏多维科技有限公司 一种多圈绝对磁编码器
CN103278216A (zh) * 2013-05-31 2013-09-04 江苏多维科技有限公司 液位传感器系统
CN103630855B (zh) * 2013-12-24 2016-04-13 江苏多维科技有限公司 一种高灵敏度推挽桥式磁传感器
WO2015116601A1 (fr) 2014-01-28 2015-08-06 Crocus Technology Inc. Circuits analogiques comprenant des unités logiques magnétiques
EP3100312A1 (fr) 2014-01-28 2016-12-07 Crocus Technology Inc. Unité logique magnétique (mlu) configurée sous forme de blocs de construction de circuit analogique
CN103768679B (zh) 2014-02-20 2016-08-24 江苏多维科技有限公司 精密注射器泵及其制造方法
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CN105044631B (zh) * 2015-08-28 2018-08-07 江苏多维科技有限公司 一种半翻转两轴线性磁电阻传感器
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JP6741913B2 (ja) * 2016-04-27 2020-08-19 パナソニックIpマネジメント株式会社 磁気センサこれを用いた回転検出装置
DE102016218530A1 (de) * 2016-09-27 2018-03-29 Te Connectivity Germany Gmbh Weggeber zum berührungslosen Messen einer relativen Position, Herstellungsverfahren für eine Magnetfeldsensoranordnung und Magnetfeldsensor
CN108387852B (zh) * 2018-04-23 2024-07-19 北京航空航天大学青岛研究院 单、双轴磁场传感器及其制备方法
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JP6784283B2 (ja) * 2018-09-19 2020-11-11 Tdk株式会社 角度センサシステム
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Also Published As

Publication number Publication date
US9116199B2 (en) 2015-08-25
WO2012116660A1 (fr) 2012-09-07
EP2682772A4 (fr) 2015-06-10
CN202119391U (zh) 2012-01-18
US20130335073A1 (en) 2013-12-19
CN102297652A (zh) 2011-12-28
EP2682772B1 (fr) 2019-01-16
EP2682772A1 (fr) 2014-01-08
JP2014507001A (ja) 2014-03-20
CN102297652B (zh) 2012-12-05

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