JP6017461B2 - 単一パッケージ磁気抵抗角度センサ - Google Patents

単一パッケージ磁気抵抗角度センサ Download PDF

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Publication number
JP6017461B2
JP6017461B2 JP2013555741A JP2013555741A JP6017461B2 JP 6017461 B2 JP6017461 B2 JP 6017461B2 JP 2013555741 A JP2013555741 A JP 2013555741A JP 2013555741 A JP2013555741 A JP 2013555741A JP 6017461 B2 JP6017461 B2 JP 6017461B2
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Prior art keywords
magnetoresistive
mtj
gmr
sensor
magnetic field
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Japanese (ja)
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JP2014507001A (ja
Inventor
ジーザ ディーク、ジェイムス
ジーザ ディーク、ジェイムス
ジン、インシク
レイ、シャオフォン
シェン、ウェイフォン
シュエ、ソンシュン
ジャン、シャオジュン
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MultiDimension Technology Co Ltd
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MultiDimension Technology Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2013555741A 2011-03-03 2012-03-02 単一パッケージ磁気抵抗角度センサ Active JP6017461B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201110050704 2011-03-03
CN201110050704.6 2011-03-03
PCT/CN2012/071889 WO2012116660A1 (fr) 2011-03-03 2012-03-02 Détecteur d'angle à magnétorésistance sous boîtier individuel

Publications (2)

Publication Number Publication Date
JP2014507001A JP2014507001A (ja) 2014-03-20
JP6017461B2 true JP6017461B2 (ja) 2016-11-02

Family

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Family Applications (1)

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JP2013555741A Active JP6017461B2 (ja) 2011-03-03 2012-03-02 単一パッケージ磁気抵抗角度センサ

Country Status (5)

Country Link
US (1) US9116199B2 (fr)
EP (1) EP2682772B1 (fr)
JP (1) JP6017461B2 (fr)
CN (2) CN102297652B (fr)
WO (1) WO2012116660A1 (fr)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202230192U (zh) * 2011-03-03 2012-05-23 江苏多维科技有限公司 推挽桥式磁电阻传感器
CN102297652B (zh) * 2011-03-03 2012-12-05 江苏多维科技有限公司 一种独立封装的磁电阻角度传感器
CN102621504B (zh) * 2011-04-21 2013-09-04 江苏多维科技有限公司 单片参考全桥磁场传感器
CN102590768B (zh) 2012-03-14 2014-04-16 江苏多维科技有限公司 一种磁电阻磁场梯度传感器
JP5590349B2 (ja) * 2012-07-18 2014-09-17 Ｔｄｋ株式会社 磁気センサシステム
CN202974369U (zh) * 2012-08-24 2013-06-05 江苏多维科技有限公司 直读式计量装置和直读式水表
CN103913183A (zh) * 2013-01-09 2014-07-09 江苏多维科技有限公司 一种角度磁编码器和电子水表
CN103925933B (zh) * 2013-01-11 2016-12-28 江苏多维科技有限公司 一种多圈绝对磁编码器
CN103278216A (zh) * 2013-05-31 2013-09-04 江苏多维科技有限公司 液位传感器系统
CN103630855B (zh) * 2013-12-24 2016-04-13 江苏多维科技有限公司 一种高灵敏度推挽桥式磁传感器
EP3100311A4 (fr) 2014-01-28 2018-03-21 Crocus Technology Inc. Circuits analogiques comprenant des unités logiques magnétiques
US9350359B2 (en) 2014-01-28 2016-05-24 Crocus Technology Inc. Magnetic logic units configured as analog circuit building blocks
CN103768679B (zh) 2014-02-20 2016-08-24 江苏多维科技有限公司 精密注射器泵及其制造方法
JP6548357B2 (ja) * 2014-03-28 2019-07-24 Dmg森精機株式会社 位置検出装置
US10232109B2 (en) 2014-04-14 2019-03-19 MultiDimension Technology Co., Ltd. Mini lead screw pump utilizing a magnetoresistive sensor and manufacturing method thereof
CN104197828B (zh) * 2014-08-20 2017-07-07 江苏多维科技有限公司 一种单芯片偏轴磁电阻z‑x角度传感器和测量仪
DE102014113374B4 (de) * 2014-09-17 2024-01-11 Infineon Technologies Ag Magnetpositionssensor und Erfassungsverfahren
US9625281B2 (en) 2014-12-23 2017-04-18 Infineon Technologies Ag Fail-safe operation of an angle sensor with mixed bridges having separate power supplies
CN104596605B (zh) 2015-02-04 2019-04-26 江苏多维科技有限公司 一种磁自动化流量记录器
US9772385B2 (en) * 2015-04-09 2017-09-26 International Business Machines Corporation Rotating magnetic field hall measurement system
US9678040B2 (en) 2015-04-09 2017-06-13 International Business Machines Corporation Rotating magnetic field hall measurement system
CN104776794B (zh) * 2015-04-16 2017-11-10 江苏多维科技有限公司 一种单封装的高强度磁场磁电阻角度传感器
CN105044631B (zh) * 2015-08-28 2018-08-07 江苏多维科技有限公司 一种半翻转两轴线性磁电阻传感器
US10048328B2 (en) * 2015-11-05 2018-08-14 Infineon Technologies Ag Redundant magnetic angle sensor with improved accuracy
DE102016103325A1 (de) 2016-02-25 2017-08-31 Infineon Technologies Ag Magnetischer Winkelpositionssensor
CN205581283U (zh) * 2016-04-11 2016-09-14 江苏多维科技有限公司 一种具有初始化线圈封装的磁电阻传感器
JP6741913B2 (ja) * 2016-04-27 2020-08-19 パナソニックＩｐマネジメント株式会社 磁気センサこれを用いた回転検出装置
DE102016218530A1 (de) * 2016-09-27 2018-03-29 Te Connectivity Germany Gmbh Weggeber zum berührungslosen Messen einer relativen Position, Herstellungsverfahren für eine Magnetfeldsensoranordnung und Magnetfeldsensor
CN108387852A (zh) * 2018-04-23 2018-08-10 北京航空航天大学青岛研究院 单、双轴磁场传感器及其制备方法
US10677620B2 (en) * 2018-05-01 2020-06-09 Nxp B.V. System and method for sensor diagnostics during functional operation
JP6784283B2 (ja) * 2018-09-19 2020-11-11 Tdk株式会社 角度センサシステム
GB2583016A (en) * 2019-02-16 2020-10-14 Ispot Ip Ltd Fishing bite indicator
US11131727B2 (en) 2019-03-11 2021-09-28 Tdk Corporation Magnetic sensor device
CN110120724B (zh) * 2019-05-31 2024-04-26 宁波拓普集团股份有限公司 一种电机转子角度测量装置及方法
JP7070532B2 (ja) * 2019-11-19 2022-05-18 Tdk株式会社 磁気センサ
US11761793B2 (en) 2020-05-26 2023-09-19 Analog Devices International Unlimited Company Magnetic sensor package
CN117615635A (zh) * 2022-08-22 2024-02-27 迈来芯电子科技有限公司 磁传感器器件以及生产磁传感器器件的方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6529114B1 (en) * 1998-05-27 2003-03-04 Honeywell International Inc. Magnetic field sensing device
JP3623366B2 (ja) * 1998-07-17 2005-02-23 アルプス電気株式会社 巨大磁気抵抗効果素子を備えた磁界センサおよびその製造方法と製造装置
DE60037790T2 (de) * 1999-06-18 2009-01-08 Koninklijke Philips Electronics N.V. Magnetisches messsystem mit irreversibler charakteristik, sowie methode zur erzeugung, reparatur und verwendung eines solchen systems
US6633462B2 (en) * 2000-07-13 2003-10-14 Koninklijke Philips Electronics N.V. Magnetoresistive angle sensor having several sensing elements
US7005958B2 (en) * 2002-06-14 2006-02-28 Honeywell International Inc. Dual axis magnetic sensor
JP3835447B2 (ja) * 2002-10-23 2006-10-18 ヤマハ株式会社 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ
CN101308199B (zh) * 2002-11-29 2011-05-25 雅马哈株式会社 磁传感器及补偿磁传感器的温度相关特性的方法
EP1566649B1 (fr) * 2002-11-29 2011-01-12 Yamaha Corporation Detecteur magnetique et son procede de compensation de caracteristique de dependance thermique
DE10308030B4 (de) * 2003-02-24 2011-02-03 Meas Deutschland Gmbh Magnetoresistiver Sensor zur Bestimmung eines Winkels oder einer Position
JP4557134B2 (ja) * 2004-03-12 2010-10-06 ヤマハ株式会社 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法
JP4424093B2 (ja) * 2004-06-28 2010-03-03 ヤマハ株式会社 磁気センサ
JP4023476B2 (ja) * 2004-07-14 2007-12-19 日立金属株式会社 スピンバルブ型巨大磁気抵抗効果素子を持った方位計
WO2006070305A1 (fr) * 2004-12-28 2006-07-06 Koninklijke Philips Electronics N.V. Capteur de type pont presentant une caracteristique accordable
DE102006032277B4 (de) * 2006-07-12 2017-06-01 Infineon Technologies Ag Magnetfeldsensorbauelement
JP2008270471A (ja) * 2007-04-19 2008-11-06 Yamaha Corp 磁気センサ及びその製造方法
JP5292726B2 (ja) * 2007-06-13 2013-09-18 ヤマハ株式会社 磁気センサ及びその製造方法
US8134361B2 (en) * 2007-06-13 2012-03-13 Ricoh Company, Ltd. Magnetic sensor including magnetic field detectors and field resistors arranged on inclined surfaces
JP2008014954A (ja) * 2007-08-07 2008-01-24 Alps Electric Co Ltd 磁気センサ
US8270204B2 (en) * 2008-10-09 2012-09-18 Seagate Technology Llc Domain wall movement on magnetic strip tracks
US8451003B2 (en) * 2009-07-29 2013-05-28 Tdk Corporation Magnetic sensor having magneto-resistive elements on a substrate
JP4807535B2 (ja) * 2009-07-31 2011-11-02 Ｔｄｋ株式会社 磁気センサ
US8518734B2 (en) * 2010-03-31 2013-08-27 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
CN202433514U (zh) * 2011-01-17 2012-09-12 江苏多维科技有限公司 独立封装的桥式磁场传感器
CN202230192U (zh) * 2011-03-03 2012-05-23 江苏多维科技有限公司 推挽桥式磁电阻传感器
CN102297652B (zh) * 2011-03-03 2012-12-05 江苏多维科技有限公司 一种独立封装的磁电阻角度传感器

Also Published As

Publication number Publication date
US20130335073A1 (en) 2013-12-19
JP2014507001A (ja) 2014-03-20
CN102297652A (zh) 2011-12-28
EP2682772B1 (fr) 2019-01-16
CN202119391U (zh) 2012-01-18
EP2682772A1 (fr) 2014-01-08
WO2012116660A1 (fr) 2012-09-07
EP2682772A4 (fr) 2015-06-10
US9116199B2 (en) 2015-08-25
CN102297652B (zh) 2012-12-05

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