JP5994091B2 - 露光装置 - Google Patents
露光装置 Download PDFInfo
- Publication number
- JP5994091B2 JP5994091B2 JP2012112386A JP2012112386A JP5994091B2 JP 5994091 B2 JP5994091 B2 JP 5994091B2 JP 2012112386 A JP2012112386 A JP 2012112386A JP 2012112386 A JP2012112386 A JP 2012112386A JP 5994091 B2 JP5994091 B2 JP 5994091B2
- Authority
- JP
- Japan
- Prior art keywords
- exposure light
- light source
- exposure
- connection terminal
- transparent substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/447—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using arrays of radiation sources
- B41J2/45—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using arrays of radiation sources using light-emitting diode [LED] or laser arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/70391—Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Physics & Mathematics (AREA)
- Led Device Packages (AREA)
- Electroluminescent Light Sources (AREA)
- Semiconductor Lasers (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Led Devices (AREA)
Description
この露光装置は、基板やフィルム等の露光対象物を搬送しながら露光するものであって、図1に示すように、透明基板1と、露光光源2と、接続端子3と、駆動電極4と、接地電極6と、を含んで構成されている。
図5に示すように、露光光源2は、透明基板1上に(N+1)行N列のマトリクスを形成するように配置される。このマトリクスは、露光対象物の搬送方向(図5の矢印方向)Bに対して垂直な方向に並べられた露光光源2の行Rと、搬送方向Bに対して所定の角度だけ傾いて並べられた露光光源2の列Cと、から構成される。なお、本明細書において、Nは2以上の整数を示す。
2…露光光源
3…接続端子
4…駆動電極
5…駆動電極基板
6…接地電極
7…接地配線
8…基本パターン
9…マイクロレンズ
10…集光可能領域
R…露光光源の行
C…露光光源の列
Claims (6)
- 透明基板と、
前記透明基板上に配置され、露光光を放射する露光光源と、
前記露光光源を挟んで前記透明基板と反対側にて該透明基板に対して上下方向に積層して配置され、前記露光光源と電気的に接続する接続端子と、
前記露光光源と前記接続端子との間に設けられ、前記接続端子の下面にその上面が接触し、前記露光光源の上面にその下面が接触して、前記露光光源と前記接続端子とを電気的に接続する駆動電極と、
を含んで構成されたことを特徴とする露光装置。 - 1つの前記接続端子に対して、複数の前記露光光源が電気的に接続されたことを特徴とする請求項1に記載の露光装置。
- 前記露光光源から放射された露光光を集光するマイクロレンズをさらに含んで構成されたことを特徴とする請求項1又は2に記載の露光装置。
- 1つの前記マイクロレンズによって、複数の前記露光光源から放射された露光光を集光することを特徴とする請求項3に記載の露光装置。
- 前記透明基板は、サファイアにより形成されたことを特徴とする請求項1〜4のいずれか1項に記載の露光装置。
- 前記露光光源は、発光ダイオード、レーザダイオード又は有機ELから構成されることを特徴とする請求項1〜5のいずれか1項に記載の露光装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012112386A JP5994091B2 (ja) | 2012-05-16 | 2012-05-16 | 露光装置 |
PCT/JP2013/062084 WO2013172163A1 (ja) | 2012-05-16 | 2013-04-24 | 露光装置 |
TW102117147A TW201411293A (zh) | 2012-05-16 | 2013-05-15 | 曝光裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012112386A JP5994091B2 (ja) | 2012-05-16 | 2012-05-16 | 露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013239626A JP2013239626A (ja) | 2013-11-28 |
JP5994091B2 true JP5994091B2 (ja) | 2016-09-21 |
Family
ID=49583576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012112386A Expired - Fee Related JP5994091B2 (ja) | 2012-05-16 | 2012-05-16 | 露光装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5994091B2 (ja) |
TW (1) | TW201411293A (ja) |
WO (1) | WO2013172163A1 (ja) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4233196B2 (ja) * | 2000-06-14 | 2009-03-04 | 富士フイルム株式会社 | 露光装置 |
JP4611141B2 (ja) * | 2005-07-25 | 2011-01-12 | 京楽産業.株式会社 | パチンコ遊技機のセンター役物装置 |
JP4660389B2 (ja) * | 2006-02-07 | 2011-03-30 | 富士フイルム株式会社 | 露光装置 |
JP2008132760A (ja) * | 2006-10-26 | 2008-06-12 | Seiko Epson Corp | ラインヘッド及びそれを用いた画像形成装置 |
JP5127481B2 (ja) * | 2007-02-16 | 2013-01-23 | キヤノン株式会社 | 発光素子アレイチップおよび露光光源装置 |
JP2010274256A (ja) * | 2009-01-29 | 2010-12-09 | Kyocera Corp | 光照射ヘッド、露光デバイス、画像形成装置、液滴硬化装置、および液滴硬化方法 |
JP5061139B2 (ja) * | 2009-02-12 | 2012-10-31 | 株式会社住田光学ガラス | 発光装置の製造方法 |
US20130303777A1 (en) * | 2010-10-06 | 2013-11-14 | Sharp Kabushiki Kaisha | Luminescent material, and organic light-emitting element, wavelength-converting light-emitting element, light-converting light-emitting element, organic laser diode light-emitting element, dye laser, display device, and illumination device using same |
-
2012
- 2012-05-16 JP JP2012112386A patent/JP5994091B2/ja not_active Expired - Fee Related
-
2013
- 2013-04-24 WO PCT/JP2013/062084 patent/WO2013172163A1/ja active Application Filing
- 2013-05-15 TW TW102117147A patent/TW201411293A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP2013239626A (ja) | 2013-11-28 |
TW201411293A (zh) | 2014-03-16 |
WO2013172163A1 (ja) | 2013-11-21 |
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