JP5988690B2 - 分光センサ - Google Patents

分光センサ Download PDF

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Publication number
JP5988690B2
JP5988690B2 JP2012114341A JP2012114341A JP5988690B2 JP 5988690 B2 JP5988690 B2 JP 5988690B2 JP 2012114341 A JP2012114341 A JP 2012114341A JP 2012114341 A JP2012114341 A JP 2012114341A JP 5988690 B2 JP5988690 B2 JP 5988690B2
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JP
Japan
Prior art keywords
light
layer
light receiving
receiving surface
separator
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Application number
JP2012114341A
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English (en)
Japanese (ja)
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JP2013242179A5 (enExample
JP2013242179A (ja
Inventor
柴山　勝己
勝己 柴山
笠原　隆
隆 笠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2012114341A priority Critical patent/JP5988690B2/ja
Priority to PCT/JP2013/062915 priority patent/WO2013172230A1/ja
Priority to CN201380023122.6A priority patent/CN104303032B/zh
Priority to DE112013002556.6T priority patent/DE112013002556B4/de
Priority to US14/400,695 priority patent/US9846076B2/en
Publication of JP2013242179A publication Critical patent/JP2013242179A/ja
Publication of JP2013242179A5 publication Critical patent/JP2013242179A5/ja
Application granted granted Critical
Publication of JP5988690B2 publication Critical patent/JP5988690B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Filters (AREA)
JP2012114341A 2012-05-18 2012-05-18 分光センサ Active JP5988690B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012114341A JP5988690B2 (ja) 2012-05-18 2012-05-18 分光センサ
PCT/JP2013/062915 WO2013172230A1 (ja) 2012-05-18 2013-05-08 分光センサ
CN201380023122.6A CN104303032B (zh) 2012-05-18 2013-05-08 分光传感器
DE112013002556.6T DE112013002556B4 (de) 2012-05-18 2013-05-08 Spektralsensor
US14/400,695 US9846076B2 (en) 2012-05-18 2013-05-08 Spectral sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012114341A JP5988690B2 (ja) 2012-05-18 2012-05-18 分光センサ

Publications (3)

Publication Number Publication Date
JP2013242179A JP2013242179A (ja) 2013-12-05
JP2013242179A5 JP2013242179A5 (enExample) 2015-05-28
JP5988690B2 true JP5988690B2 (ja) 2016-09-07

Family

ID=49583637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012114341A Active JP5988690B2 (ja) 2012-05-18 2012-05-18 分光センサ

Country Status (4)

Country Link
US (1) US9846076B2 (enExample)
JP (1) JP5988690B2 (enExample)
DE (1) DE112013002556B4 (enExample)
WO (1) WO2013172230A1 (enExample)

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EP3324161B1 (de) * 2016-11-18 2020-06-17 Espros Photonics AG Spektrometer und verfahren zur justierung eines filterarrays
DE102016223917B4 (de) * 2016-12-01 2019-12-05 Robert Bosch Gmbh Interferometerbauelement und Verfahren zum Herstellen eines Interferometerbauelements
DE102017201129A1 (de) * 2017-01-25 2018-07-26 Robert Bosch Gmbh Bauelement zum Begrenzen eines Einfallswinkels von Licht, Mikrospektrometer und Verfahren zum Herstellen des Bauelements
DE102017205212A1 (de) 2017-03-28 2018-10-04 Carl Zeiss Smt Gmbh Verfahren zum Detektieren von Partikeln an der Oberfläche eines Objekts, Wafer und Maskenblank
US10699691B1 (en) * 2017-06-29 2020-06-30 Amazon Technologies, Inc. Active noise cancellation for bone conduction speaker of a head-mounted wearable device
US10817700B2 (en) 2017-12-18 2020-10-27 China Wafer Level Csp Co., Ltd. Optical fingerprint recognition chip package and packaging method
DE102018202777A1 (de) * 2018-02-23 2019-08-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Farbsensor mit Mikrolinsen umfassenden winkelselektiven Strukturen
JP2019174151A (ja) * 2018-03-27 2019-10-10 株式会社島津製作所 分光器
US10770489B2 (en) * 2018-03-30 2020-09-08 Vishay Intertechnology, Inc. Optoelectronic device arranged as a multi-spectral light sensor having a photodiode array with aligned light blocking layers and N-well regions
JP1680385S (enExample) * 2018-05-01 2021-03-01
JP1625135S (enExample) * 2018-05-01 2019-03-18
JP1639597S (enExample) * 2018-05-01 2019-08-19
JP1680755S (enExample) 2018-05-01 2021-03-08
USD907085S1 (en) * 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
JP1625495S (enExample) 2018-05-01 2019-03-18
JP1680388S (enExample) * 2018-05-01 2021-03-01
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
JP1680387S (enExample) * 2018-05-01 2021-03-01
JP1680507S (enExample) * 2018-05-01 2021-03-08
JP1680386S (enExample) * 2018-05-01 2021-03-01

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Also Published As

Publication number Publication date
DE112013002556T5 (de) 2015-01-29
DE112013002556B4 (de) 2023-03-30
US9846076B2 (en) 2017-12-19
WO2013172230A1 (ja) 2013-11-21
CN104303032A (zh) 2015-01-21
JP2013242179A (ja) 2013-12-05
US20150153224A1 (en) 2015-06-04

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