JP5988107B2 - スクリーン印刷装置を用いた半導体装置の製造方法 - Google Patents
スクリーン印刷装置を用いた半導体装置の製造方法 Download PDFInfo
- Publication number
- JP5988107B2 JP5988107B2 JP2013556167A JP2013556167A JP5988107B2 JP 5988107 B2 JP5988107 B2 JP 5988107B2 JP 2013556167 A JP2013556167 A JP 2013556167A JP 2013556167 A JP2013556167 A JP 2013556167A JP 5988107 B2 JP5988107 B2 JP 5988107B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- substrate
- plane
- pin
- printing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/14—Details
- B41F15/16—Printing tables
- B41F15/18—Supports for workpieces
- B41F15/26—Supports for workpieces for articles with flat surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Description
Claims (1)
- 第1平面を有する第1支持部及び第2平面を有する第2支持部を備えるステージと、
前記第1支持部と前記第2支持部とを相対移動させる相対移動部と、
塗布材をスクリーン印刷する印刷部と、
を有するスクリーン印刷装置を用い、
前記相対移動部によって前記第2平面を有する第2支持部を上昇させることによって、前記第1平面と前記第2平面とを同一平面とした基板支持面に基板を載せ置いた状態において前記塗布材を塗布する、半導体装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013556167A JP5988107B2 (ja) | 2012-02-03 | 2012-02-03 | スクリーン印刷装置を用いた半導体装置の製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013556167A JP5988107B2 (ja) | 2012-02-03 | 2012-02-03 | スクリーン印刷装置を用いた半導体装置の製造方法 |
PCT/JP2012/052505 WO2013114616A1 (ja) | 2012-02-03 | 2012-02-03 | スクリーン印刷装置及びそれを用いた半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2013114616A1 JPWO2013114616A1 (ja) | 2015-05-11 |
JP5988107B2 true JP5988107B2 (ja) | 2016-09-07 |
Family
ID=48904692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013556167A Expired - Fee Related JP5988107B2 (ja) | 2012-02-03 | 2012-02-03 | スクリーン印刷装置を用いた半導体装置の製造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5988107B2 (ja) |
WO (1) | WO2013114616A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106298620B (zh) * | 2016-09-08 | 2019-07-16 | 京东方科技集团股份有限公司 | 一种承载基板及柔性显示器件的制备方法 |
CN110303757A (zh) * | 2019-07-31 | 2019-10-08 | 常州时创能源科技有限公司 | 硅片印刷机的上料装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0244033U (ja) * | 1988-08-24 | 1990-03-27 | ||
JPH10128951A (ja) * | 1996-10-31 | 1998-05-19 | Sakurai Graphic Syst:Kk | スクリーン式印刷装置及び印刷位置調整方法 |
JP2007050657A (ja) * | 2005-08-19 | 2007-03-01 | Alps Electric Co Ltd | スクリーン印刷装置 |
JP5488015B2 (ja) * | 2009-02-10 | 2014-05-14 | 信越化学工業株式会社 | スクリーン印刷方法 |
-
2012
- 2012-02-03 WO PCT/JP2012/052505 patent/WO2013114616A1/ja active Application Filing
- 2012-02-03 JP JP2013556167A patent/JP5988107B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPWO2013114616A1 (ja) | 2015-05-11 |
WO2013114616A1 (ja) | 2013-08-08 |
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