JP5983810B1 - Light irradiation device - Google Patents

Abstract

A compact light irradiation apparatus capable of performing light irradiation efficiently is provided. A light irradiation apparatus is a light irradiation apparatus that irradiates light to a workpiece that passes through a preset irradiation region, and extends in a direction in which the workpiece passes through the irradiation region, and blows gas under the workpiece. A pair of levitating bases 31 for levitating the work and a pair of both sides sandwiching the levitating base 31 in the direction intersecting the passing direction, each of the pair holding the work and moving in the passing direction When the pair of one side holds and moves the workpiece, the other pair of holding and moving machines 32 and 33 move to pass the workpiece. [Selection] Figure 1

Description

  The present invention relates to a light irradiation apparatus that irradiates light to a work passing through a light irradiation region, and more particularly to a light irradiation apparatus for light processing a large and heavy work such as a glass substrate for a liquid crystal panel.

Conventionally, as an apparatus for performing light irradiation processing efficiently (with high throughput) on a substrate (workpiece) for a liquid crystal panel, for example, Patent Document 1 discloses light that allows a substrate to alternately pass through a light irradiation region on two stages. An irradiation device is described.
In recent years, liquid crystal panel substrates and the like have become particularly large, and for example, substrates having a length exceeding 2 m have been used. As the workpiece becomes larger, the weight also increases, so in the case of conveyance by the stage as described above, in order to convey a large and heavy workpiece, a larger and heavier stage is required, which includes a conveyance mechanism. The entire light irradiation device is also large and heavy.
As a light irradiation apparatus that transports and processes a workpiece without using such a stage, for example, Patent Document 2 describes a device that floats and transports a workpiece by ejecting air.

Japanese Patent No. 5344105 JP 2014-123769 A

In the case of the light irradiation apparatus described in Patent Document 2, since the stage is not used, the light irradiation apparatus is relatively small even if the workpiece is enlarged, but the light irradiation apparatus described in Patent Document 2 is described in Patent Document 1. A high throughput like a light irradiation device cannot be realized.
For this reason, there is a demand for a light irradiation apparatus that can reduce the weight of the entire apparatus and reduce the size of the apparatus even when the workpiece is large, and can perform light irradiation with high throughput.
Then, this invention makes it a subject to provide the small light irradiation apparatus which can perform light irradiation efficiently.

  In order to solve the above-described problem, one aspect of a light irradiation apparatus according to the present invention is a light irradiation apparatus that irradiates light to a workpiece that passes through a preset irradiation region, and the workpiece passes through the irradiation region. A pair of levitation bases that extend in the passing direction and blow the gas under the work to float the work, and a pair on both sides sandwiching the levitation base in a direction crossing the passing direction, each of the pair A holding and moving machine having a function of holding the workpiece and moving in the passing direction, and moving the pair of the other by passing the workpiece while the one of the pair of holding and moving the workpiece. And comprising.

According to such a light irradiation device, a pair of holding and moving machines provided on both sides of the levitating platform can alternately convey a plurality of workpieces by moving alternately in the passing direction, resulting in high throughput. Realize. In addition, since the work is lifted by blowing the gas, a stage is not necessary, and since the transport direction is one direction of the passing direction, each size sandwiching the irradiation region in the passing direction is a size on which one work is placed. I just need it. For this reason, the light irradiation apparatus can be reduced in weight and size.
In the light irradiation apparatus, it is preferable that the holding and transporting device is moved in a state of being lowered below the workpiece when moving in a direction passing the workpiece. According to the light irradiation device having such a preferable configuration, it is possible to easily prevent contact between the workpiece and the holding and conveying machine.

Moreover, in the light irradiation device, it is also preferable that the holding and transporting device holds and holds a part of the workpiece protruding from the levitation base from below. According to the light irradiation apparatus having such a preferable configuration, it is possible to ensure the holding property of the workpiece and to irradiate light to a held part.
The light irradiation apparatus further includes a rotating machine that rotates the work on the levitation table, the work is a rectangular work, and the holding and conveying machine is rotated by the rotating machine, It is preferable to hold the corner portion of the workpiece protruding from the edge.
According to the light irradiation device of this preferred configuration, it is possible to sufficiently hold the workpiece while ensuring the area for receiving the gas blown from the levitation stand and sufficiently floating the workpiece.

  According to the light irradiation apparatus of the present invention, light irradiation can be performed efficiently and the apparatus can be miniaturized.

It is a perspective view which shows schematic structure of the polarized light irradiation apparatus corresponded to one Embodiment of the light irradiation apparatus of this invention. It is a top view which shows schematic structure of the polarized light irradiation apparatus corresponded to one Embodiment of the light irradiation apparatus of this invention. It is a top view which shows the state in which the workpiece | work W was conveyed by the polarized light irradiation apparatus. It is a side view which shows the state in which the workpiece | work W was conveyed by the polarized light irradiation apparatus. It is a top view which shows a mode that the direction of the workpiece | work W is adjusted to a desired direction. It is a side view which shows a mode that the direction of the workpiece | work W is adjusted to a desired direction. It is a top view which shows the movement of a workpiece | work holding | maintenance moving mechanism. It is a front view which shows the movement of a workpiece | work holding | maintenance moving mechanism.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 and 2 are diagrams showing a schematic configuration of a polarized light irradiation apparatus corresponding to an embodiment of the light irradiation apparatus of the present invention. 1 is a perspective view, and FIG. 2 is a top view.
The polarized light irradiation apparatus 100 includes a light irradiation unit 10 that irradiates polarized light having a predetermined wavelength (polarized light) on a base 5 having high rigidity, and an alignment unit 20 that aligns the direction of the workpiece W with a predetermined direction. In FIG. 1, an illustration is omitted, see FIG. Here, the workpiece W is a large rectangular substrate having a photo-alignment film formed thereon, for example, used for manufacturing a liquid crystal panel, for example, exceeding 300 mm × 500 mm. In the present embodiment, the work W is rectangular, but the work referred to in the present invention is not limited to this, and can be any shape.

The polarized light irradiation device 100 linearly moves the work W by the transport unit 30 while irradiating the polarized light from the light irradiation unit 10, and irradiates the light alignment film of the work W with the polarized light to perform the light alignment process. is there.
The light irradiation unit 10 includes a lamp 11 that is a linear light source and a mirror 12 that reflects light from the lamp 11. Moreover, the light irradiation part 10 is equipped with the polarizer unit 13 arrange | positioned at the light emission side. Furthermore, the light emitting unit 10 includes a lamp house 14 that houses the lamp 11, the mirror 12, and the polarizer unit 13.

The light irradiation unit 10 is installed in a state in which the longitudinal direction of the lamp 11 is made to coincide with the direction (Y direction) orthogonal to the conveyance direction (X direction) of the workpiece W.
The lamp 11 is a long lamp, and its light emitting portion has a length corresponding to the width of the workpiece W in a direction orthogonal to the transport direction. The lamp 11 is, for example, a high-pressure mercury lamp or a metal halide lamp obtained by adding another metal to mercury, and emits ultraviolet light having a wavelength of 200 nm to 400 nm.

As materials for the photo-alignment film, those that are aligned by light having a wavelength of 254 nm, those that are aligned by light having a wavelength of 313 nm, and materials that are aligned by light having a wavelength of 365 nm are known. Depending on the wavelength to be selected, it is appropriately selected.
As the light source, a linear light source in which LEDs or LDs that emit ultraviolet light are arranged in a straight line can be used. In that case, the direction in which the LEDs and LDs are arranged corresponds to the longitudinal direction of the lamp. A plurality of lamps may be arranged in the Y direction.

The mirror 12 reflects the radiated light from the lamp 11 to the bottom surface side of the lamp house 14 and is a bowl-shaped condensing mirror whose section is elliptical or parabolic. The mirror 12 is arranged such that its longitudinal direction coincides with the longitudinal direction of the lamp 11.
The lamp house 14 has, on the bottom surface, a light exit port through which radiated light from the lamp 11 and reflected light from the mirror 12 pass. The polarizer unit 13 is attached to the light exit of the lamp house 14 and polarizes light passing through the light exit. The light that has passed through the light exit is irradiated onto the polarized light irradiation region R formed under the light irradiation unit 10.

The polarizer unit 13 has a configuration in which a plurality of polarizers are arranged side by side along the longitudinal direction of the lamp 11. The plurality of polarizers are supported by, for example, a frame.
The polarizer is, for example, a wire grid type polarization element, and the number of the polarizers is appropriately selected according to the size of the region where the polarized light is irradiated. Each polarizer is arranged such that the transmission axis faces the same direction.
The alignment unit 20 includes an alignment camera 21 and a rotary stage 22, and directs the workpiece W in a preset direction based on the detection of the alignment mark. The rotating stage 22 corresponds to an example of a rotating machine according to the present invention.
For example, two alignment cameras 21 are arranged above the workpiece W, and each alignment camera 21 detects one alignment mark M provided on the workpiece W, for example.

The upper surface of the rotary stage 22 has a round plate shape. For example, a vacuum suction hole or a vacuum suction groove is formed on the upper surface so that the work W can be sucked and held. In this embodiment, the work W is sucked and held on the upper surface of the round plate shape. However, the rotating machine according to the present invention is not limited to this structure, and the work W is held by a plurality of pins. It may be held by adsorption.
The rotary stage 22 rotates about a Z axis orthogonal to a plane including the X axis and the Y axis (θ rotation). The rotating stage 22 sucks and holds the lower surface of the workpiece W and rotates it, and directs the workpiece W to an angle at which the position of the alignment mark M detected by the alignment camera 21 becomes a predetermined position. The alignment is performed so that the direction of the polarization axis of the polarized light has a desired relationship.

The conveyance unit 30 ejects air onto the lower surface of the workpiece W to float the workpiece W, and a pair of workpiece holding and moving mechanisms that hold and move the workpiece W lifted by the air floating unit 31 ( A first workpiece holding and moving mechanism 32 and a second workpiece holding and moving mechanism 33), a rail 34 for moving the workpiece holding and moving mechanisms 32 and 33 along the air levitation unit 31, and workpiece holding and moving mechanisms 32 and 33. And a driving machine (not shown) for driving the motor.
The air levitation unit 31 corresponds to an example of a levitation base according to the present invention, and the workpiece holding and moving mechanisms 32 and 33 correspond to an example of a holding and moving machine according to the present invention.
The transport unit 30 transports the workpiece W in the transport direction and passes the polarized light irradiation region R.
The size of the conveyance unit 30 on both sides (the left and right sides in FIG. 2) sandwiching the polarized light irradiation region R is, for example, about the size of one workpiece W, and even when the workpiece W is enlarged. The polarized light irradiation device 100 is a relatively small device.

  The air levitation unit 31 has, for example, a structure in which block members with holes and grooves formed on the upper surface are connected in, for example, three rows. Illustrations of holes and grooves for blowing air and structures for blowing air are omitted. The width of the air floating unit 31 (the size in the Y direction) is narrower than the size of the workpiece W, and part of the workpiece W protrudes from both sides of the air floating unit 31 in the Y direction.

  The first and second workpiece holding and moving mechanisms 32 and 33 are provided on both sides of the air levitation unit 31 and adsorb the portions of the workpiece W protruding from the air levitation unit 31 from the lower surface by a method such as vacuum adsorption. Hold W. These workpiece holding and moving mechanisms 32 and 33 have a flat top surface, and a vacuum suction hole or a vacuum suction groove is formed on the top surface so that the workpiece W can be sucked and held. In the present embodiment, the work W is sucked and held on a flat plate-like upper surface. However, the holding and moving machine according to the present invention is not limited to this structure, and the work W is held by a plurality of pins. It may be held by adsorption.

Both the first and second workpiece holding and moving mechanisms 32 and 33 hold the workpiece W on the left side of FIG. 2 and move to the right side of FIG. By such movement of the workpiece holding and moving mechanisms 32 and 33, the workpiece W is transported from the left to the right in FIG. During conveyance, the workpiece W passes through the polarized light irradiation region R, and a photo-alignment process is performed.
The procedure of the photo-alignment process by the polarized light irradiation apparatus 100 will be described below.
In the first stage of the photo-alignment process, the workpiece W is conveyed from the outside of the polarized light irradiation device 100 onto the air floating unit 31 of the polarized light irradiation device 100.
3 and 4 are a top view and a side view showing a state in which the workpiece W has been conveyed to the polarized light irradiation device. FIG. 4 shows a state in which the polarized light irradiation device 100 is viewed from the left side of FIG.

As shown in FIG. 3, the position of the alignment mark M at the time when the workpiece W is conveyed onto the air levitation unit 31 is out of the field of view of the alignment camera 21. The conveyed workpiece W is levitated by the air levitation unit 31, and the upper surface of the rotary stage 22 rises with respect to the levitated workpiece W as shown in FIG. 4 to suck and hold the lower surface of the workpiece W.
In the second stage of the photo-alignment process following the first stage, the direction of the workpiece W is adjusted to a desired direction.
5 and 6 are a top view and a side view showing how the orientation of the workpiece W is adjusted to a desired orientation. FIG. 6 shows a state where the polarized light irradiation apparatus 100 is viewed from the left side of FIG.

  As illustrated in FIG. 5, the rotary stage 22 rotates so that the direction of the workpiece W is inclined by, for example, about 20 ° with respect to the light irradiation unit 10. As a result of the rotation of the rotary stage 22, the alignment mark M on the workpiece W enters the field of view of the alignment camera 21 and is detected. Further, the position of the alignment mark M is aligned with a predetermined position in the field of view of the alignment camera 21 by adjusting the rotation angle of the rotary stage 22. By such alignment, the direction of the workpiece W and the direction of the polarization axis of the polarized light irradiated to the polarized light irradiation region R have a desired relationship. Further, when the workpiece W is rotated, the corner portion C of the workpiece W protrudes from the air levitation unit 31.

  Thereafter, as shown in FIG. 6, the upper surface of the workpiece holding and moving mechanism (here, the first workpiece holding and moving mechanism 32 as an example) rises and a part of the workpiece W (in this example, the corner) protrudes from the air floating unit 31. Part C) is sucked and held from the lower surface of the workpiece W. On the other hand, the upper surface of the rotary stage 22 is lowered and retracted. One workpiece W is held by one of the first and second workpiece holding and moving mechanisms 32 and 33 (the first workpiece holding and moving mechanism 32 in the example of FIG. 6).

When the workpiece holding and moving mechanism 32 holds the corner C of the workpiece W as in the examples shown in FIGS. 5 and 6, the area for receiving the air from the air floating unit 31 is sufficiently large. Float easily and sufficiently. Further, although the corner portion C has a small area, the base portion closest to the air levitation unit 31 has a sufficient length in the transport direction, so that the workpiece holding and moving mechanism 32 holds the corner portion C. Sufficient retention is ensured.
In the third stage of the photo-alignment process following the second stage, the work holding and moving mechanism 32 moves and the work W is transported.

7 and 8 are a top view and a front view showing movement of the workpiece holding and moving mechanism. FIG. 8 shows a state in which the polarized light irradiation device 100 is viewed from the lower side of FIG.
A workpiece holding / moving mechanism that holds the workpiece W (here, the first workpiece holding / moving mechanism 32 as an example) moves along the rail 34 in the transfer direction to transfer the workpiece W. The workpiece W passes through the polarized light irradiation region R by the conveyance by the workpiece holding and moving mechanism, and the polarized light is irradiated in the polarized light irradiation region R, so that the optical alignment process is performed. The corner portion C of the workpiece W is also subjected to a photo-alignment process by being irradiated with polarized light because the workpiece holding and moving mechanism holds and holds the lower surface.

When one workpiece holding and moving mechanism (for example, the first workpiece holding and moving mechanism 32) holding the workpiece W moves in the transport direction, the other workpiece holding and moving mechanism (for example, the second workpiece holding and moving mechanism 33) Then, it passes by the workpiece W and moves in the direction opposite to the conveying direction. When moving in the opposite direction, the upper surface of the other workpiece holding / moving mechanism is lowered below the lower surface of the workpiece W held by the one workpiece holding / moving mechanism, so that contact with the workpiece W when passing is easily avoided. Is done.
Even during the execution of the photo-alignment process, the polarized light irradiation apparatus 100 has a space in which the work W is accommodated on the left side in FIG. 7, so that the next work W is conveyed from the outside of the polarized light irradiation apparatus 100 and Alignment is performed.

  Further, the passing speed at which the workpiece W passes through the polarized light irradiation region R becomes a speed limited for the photo-alignment processing, but the other workpiece holding and moving mechanism passing the workpiece W has no such speed limitation. Before the photo-alignment process is completed, it is possible to return to the next work W loading position (left side in FIG. 7). Then, the next workpiece W is held by the other workpiece holding and moving mechanism, and the optical alignment processing of the next workpiece W is executed without interruption following the optical alignment processing of the previous workpiece W. For this reason, the throughput of photo-alignment processing is high.

In addition, in the said embodiment, although the case where this invention was applied to a polarized light irradiation apparatus was demonstrated, this invention is not limited to this, The floating stand which blows off gas under a workpiece | work and floats a workpiece | work If it is a light irradiation apparatus which has this, the effect similar to the said embodiment is acquired by applying this invention. Examples of such a light irradiation apparatus include a DI (direct image) exposure apparatus and an ultraviolet irradiation apparatus that performs thermosetting with ultraviolet rays.
In the above-described embodiment, an example in which one light irradiation unit is provided has been described. However, the light irradiation device of the present invention includes a plurality of light irradiation units provided in series in the workpiece conveyance direction. May be.

  DESCRIPTION OF SYMBOLS 10 ... Light irradiation part, 11 ... Discharge lamp, 12 ... Mirror, 13 ... Polarizer unit, 14 ... Lamp house, 20 ... Alignment part, 21 ... Alignment camera, 22 ... Rotation stage, 30 ... Conveyance part, 31 ... Air floating Unit: 32... First work holding and moving mechanism, 33... Second work holding and moving mechanism, 34... Rail, 100.

Claims (4)

A light irradiation device for irradiating light to a workpiece passing through a preset irradiation region,
A levitation base that extends in the passing direction through which the work passes through the irradiation area, and blows a gas under the work to float the work;
A pair is provided on both sides sandwiching the levitation table in a direction intersecting the passing direction, each of the pair has a function of holding the workpiece and moving in the passing direction, and the one of the pair is A holding and moving machine that moves in the direction opposite to the passing direction when the other of the pair passes the workpiece when holding and moving the workpiece;
A light irradiation apparatus comprising:   The light irradiation apparatus according to claim 1, wherein the holding and moving device moves in a state of being lowered below the workpiece when moving in a direction opposite to the passing direction.   The light irradiation apparatus according to claim 1, wherein the holding and moving unit holds and holds a part of the work protruding from the levitation base from below. It further comprises a rotating machine for rotating the work on the levitation table, the work is a rectangular work,
The light irradiation apparatus according to claim 1, wherein the holding and moving machine holds a corner portion of the work projecting from a side of the levitation base by rotation by the rotating machine.

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