JP5979667B2 - 金属ケイ化物形成方法 - Google Patents
金属ケイ化物形成方法 Download PDFInfo
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- JP5979667B2 JP5979667B2 JP2012205508A JP2012205508A JP5979667B2 JP 5979667 B2 JP5979667 B2 JP 5979667B2 JP 2012205508 A JP2012205508 A JP 2012205508A JP 2012205508 A JP2012205508 A JP 2012205508A JP 5979667 B2 JP5979667 B2 JP 5979667B2
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- metal
- ammonia
- silicide
- substrate
- temperature
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Photovoltaic Devices (AREA)
Description
ここで、前記不活性雰囲気は窒素またはアルゴンであってよい。
また、前記金属はアルカリ金属、アルカリ土類金属、または希土類元素であってよい。
また、前記金属はバリウムであってよい。
また、前記アンモニアを前記シリコン基板から蒸発させる際の温度は室温から100℃の範囲であってよい。
また、前記不活性雰囲気中で300から1200℃の範囲内の温度まで昇温させてよい。
また、前記不活性ガス雰囲気中で500から750℃の範囲内の温度まで昇温させてよい。
本発明の他の側面によれば、前記金属としてバリウムを使用して前記何れかの方法で形成したBaSi2薄膜付きシリコン基材が与えられる。
本発明の更に他の側面によれば、前記BaSi2薄膜付きシリコン基材を使用した太陽電池が与えられる。
Claims (7)
- 金属を溶解した液体アンモニアを少なくとも表面がシリコンでできたシリコン基材に被着し、アンモニアを前記シリコン基材から蒸発させ、前記基材を不活性雰囲気中で昇温させて前記金属のケイ化物を前記シリコン基材の表面に形成する、金属ケイ化物の形成方法。
- 前記不活性雰囲気は窒素またはアルゴンである、請求項1に記載の金属ケイ化物の形成方法。
- 前記金属はアルカリ金属、アルカリ土類金属、または希土類元素である、請求項1または2に記載の金属ケイ化物の形成方法。
- 前記金属はバリウムである、請求項3に記載の金属ケイ化物の形成方法。
- 前記アンモニアを前記シリコン基板から蒸発させる際の温度は室温から100℃の範囲である、請求項1〜4の何れかに記載の金属ケイ化物の形成方法。
- 前記不活性雰囲気中で300から1200℃の範囲内の温度まで昇温させる、請求項1から5の何れかに記載の金属ケイ化物の形成方法。
- 前記不活性ガス雰囲気中で500から750℃の範囲内の温度まで昇温させる、請求項6に記載の金属ケイ化物の形成方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2012205508A JP5979667B2 (ja) | 2012-09-19 | 2012-09-19 | 金属ケイ化物形成方法 |
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JP2012205508A JP5979667B2 (ja) | 2012-09-19 | 2012-09-19 | 金属ケイ化物形成方法 |
Publications (2)
Publication Number | Publication Date |
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JP2014058429A JP2014058429A (ja) | 2014-04-03 |
JP5979667B2 true JP5979667B2 (ja) | 2016-08-24 |
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Family Applications (1)
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JP2012205508A Expired - Fee Related JP5979667B2 (ja) | 2012-09-19 | 2012-09-19 | 金属ケイ化物形成方法 |
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JP (1) | JP5979667B2 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50107860A (ja) * | 1974-01-31 | 1975-08-25 | ||
US5393564A (en) * | 1993-05-14 | 1995-02-28 | Micron Semiconductor, Inc. | High efficiency method for performing a chemical vapor deposition utilizing a nonvolatile precursor |
KR0162673B1 (ko) * | 1994-01-11 | 1998-12-01 | 문정환 | 반도체 도전층 및 반도체소자의 제조방법 |
KR19990008289A (ko) * | 1995-05-03 | 1999-01-25 | 와이너 길버트 피. | 유체의 여과 및/또는 정화와 관련된 장치 및 방법 |
JP2008300416A (ja) * | 2007-05-29 | 2008-12-11 | Univ Of Electro-Communications | 発光素子とその製造方法、並びにErSi2ナノワイヤーとその製造方法 |
US8728854B2 (en) * | 2007-08-30 | 2014-05-20 | Japan Science And Technology Agency | Semiconductor material, solar cell using the semiconductor material, and methods for producing the semiconductor material and the solar cell |
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2012
- 2012-09-19 JP JP2012205508A patent/JP5979667B2/ja not_active Expired - Fee Related
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JP2014058429A (ja) | 2014-04-03 |
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