JP5943192B2 - 物理量センサーおよびその製造方法、並びに電子機器 - Google Patents

物理量センサーおよびその製造方法、並びに電子機器 Download PDF

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Publication number
JP5943192B2
JP5943192B2 JP2012089275A JP2012089275A JP5943192B2 JP 5943192 B2 JP5943192 B2 JP 5943192B2 JP 2012089275 A JP2012089275 A JP 2012089275A JP 2012089275 A JP2012089275 A JP 2012089275A JP 5943192 B2 JP5943192 B2 JP 5943192B2
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Japan
Prior art keywords
movable body
substrate
physical quantity
quantity sensor
post
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Expired - Fee Related
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JP2012089275A
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English (en)
Japanese (ja)
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JP2013217794A (ja
JP2013217794A5 (enExample
Inventor
田中　悟
悟 田中
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Seiko Epson Corp
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Seiko Epson Corp
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012089275A priority Critical patent/JP5943192B2/ja
Priority to US13/858,284 priority patent/US9383383B2/en
Priority to CN201310123601.7A priority patent/CN103364592B/zh
Publication of JP2013217794A publication Critical patent/JP2013217794A/ja
Publication of JP2013217794A5 publication Critical patent/JP2013217794A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
JP2012089275A 2012-04-10 2012-04-10 物理量センサーおよびその製造方法、並びに電子機器 Expired - Fee Related JP5943192B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012089275A JP5943192B2 (ja) 2012-04-10 2012-04-10 物理量センサーおよびその製造方法、並びに電子機器
US13/858,284 US9383383B2 (en) 2012-04-10 2013-04-08 Physical quantity sensor, manufacturing method thereof, and electronic apparatus
CN201310123601.7A CN103364592B (zh) 2012-04-10 2013-04-10 物理量传感器及其制造方法、以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012089275A JP5943192B2 (ja) 2012-04-10 2012-04-10 物理量センサーおよびその製造方法、並びに電子機器

Publications (3)

Publication Number Publication Date
JP2013217794A JP2013217794A (ja) 2013-10-24
JP2013217794A5 JP2013217794A5 (enExample) 2015-05-07
JP5943192B2 true JP5943192B2 (ja) 2016-06-29

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JP2012089275A Expired - Fee Related JP5943192B2 (ja) 2012-04-10 2012-04-10 物理量センサーおよびその製造方法、並びに電子機器

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Country Link
US (1) US9383383B2 (enExample)
JP (1) JP5943192B2 (enExample)
CN (1) CN103364592B (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5799929B2 (ja) * 2012-10-02 2015-10-28 株式会社村田製作所 加速度センサ
ITTO20130237A1 (it) * 2013-03-22 2014-09-23 St Microelectronics Srl Struttura microelettromeccanica di rilevamento ad asse z ad elevata sensibilita', in particolare per un accelerometro mems
JP6146566B2 (ja) * 2013-08-06 2017-06-14 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
TWI497079B (zh) * 2013-09-10 2015-08-21 Globalmems Co Ltd 具有耐摔保護功能的可動裝置
CN103645342B (zh) * 2013-12-06 2016-08-17 杭州士兰微电子股份有限公司 多轴电容式加速度计及加速度检测方法
JP6344552B2 (ja) * 2014-04-18 2018-06-20 セイコーエプソン株式会社 機能素子、電子機器、および移動体
DE102014211054A1 (de) * 2014-06-10 2015-12-17 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
CN105319393A (zh) * 2014-07-31 2016-02-10 立锜科技股份有限公司 具有共构微机电感测单元的微机电系统元件
EP3038126A1 (en) * 2014-12-22 2016-06-29 DelfMEMS SAS MEMS structure with thick movable membrane
DE102015209941A1 (de) * 2015-05-29 2016-12-01 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
CN105300369A (zh) * 2015-10-26 2016-02-03 马国才 一种电子系统多轴结构
JP6642044B2 (ja) * 2016-01-28 2020-02-05 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6606601B2 (ja) * 2016-04-18 2019-11-13 株式会社日立製作所 加速度センサ
WO2017203746A1 (ja) * 2016-05-25 2017-11-30 三菱電機株式会社 半導体装置及びその製造方法
JP6897224B2 (ja) * 2017-03-27 2021-06-30 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6816603B2 (ja) * 2017-03-27 2021-01-20 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6911645B2 (ja) * 2017-08-30 2021-07-28 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体
JP2019060675A (ja) * 2017-09-26 2019-04-18 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器、および移動体
US10759656B2 (en) * 2017-09-29 2020-09-01 Apple Inc. MEMS sensor with dual pendulous proof masses
JP2020024098A (ja) * 2018-08-06 2020-02-13 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器、および移動体
DE102018213746A1 (de) * 2018-08-15 2020-02-20 Robert Bosch Gmbh Mikromechanischer Inertialsensor
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
EP4116718B1 (en) * 2021-07-05 2026-01-28 Murata Manufacturing Co., Ltd. Seesaw accelerometer
CN114487480B (zh) * 2022-01-14 2025-09-16 瑞声开泰科技(武汉)有限公司 微机电系统加速度计
JP7838299B2 (ja) * 2022-02-21 2026-04-01 セイコーエプソン株式会社 物理量センサー、慣性計測装置及び製造方法
JP2023146375A (ja) 2022-03-29 2023-10-12 セイコーエプソン株式会社 物理量センサー及び慣性計測装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2617607B1 (fr) * 1987-06-30 1989-12-01 Applic Gles Electrici Meca Accelerometre pendulaire a reequilibrage et procede de fabrication d'un tel accelerometre
US5488864A (en) 1994-12-19 1996-02-06 Ford Motor Company Torsion beam accelerometer with slotted tilt plate
JP3405108B2 (ja) 1997-01-24 2003-05-12 株式会社村田製作所 外力計測装置およびその製造方法
DE19930779B4 (de) * 1999-07-03 2010-05-06 Robert Bosch Gmbh Mikromechanisches Bauelement
JP3435665B2 (ja) * 2000-06-23 2003-08-11 株式会社村田製作所 複合センサ素子およびその製造方法
US20070220973A1 (en) 2005-08-12 2007-09-27 Cenk Acar Multi-axis micromachined accelerometer and rate sensor
ITTO20070033A1 (it) 2007-01-19 2008-07-20 St Microelectronics Srl Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata
TW200839242A (en) * 2007-02-02 2008-10-01 Alps Electric Co Ltd Electrostatic capacitance type acceleration sensor
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US8079262B2 (en) * 2007-10-26 2011-12-20 Rosemount Aerospace Inc. Pendulous accelerometer with balanced gas damping
DE102008042357A1 (de) 2008-09-25 2010-04-01 Robert Bosch Gmbh Mikromechanischer Sensor mit symmetrischem Flächenaufbau bei asymmetrischer Massenverteilung
WO2011064642A2 (ja) * 2009-11-24 2011-06-03 パナソニック電工株式会社 加速度センサ
CN202177638U (zh) * 2011-07-12 2012-03-28 东南大学 一种微电子加速度传感器

Also Published As

Publication number Publication date
CN103364592B (zh) 2018-09-14
US20140069190A1 (en) 2014-03-13
JP2013217794A (ja) 2013-10-24
US9383383B2 (en) 2016-07-05
CN103364592A (zh) 2013-10-23

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