JP5932320B2 - Grinding equipment - Google Patents

Description

  The present invention relates to a grinding apparatus for grinding a circular plate-shaped workpiece.

  When the back surface of a circular plate-shaped workpiece (wafer) is ground by a grinding device, grinding dust may adhere to the workpiece after grinding. In some cases, grinding dust or the like may also adhere to a conveyance pad that conveys the workpiece. is there. Moreover, dust may adhere to the front and back surfaces of the workpiece before grinding, and dust may also adhere to the transport pad that transports the workpiece. Therefore, the grinding device is equipped with a cleaning device that cleans grinding scraps attached to the workpiece itself, grinding scraps attached to the conveyance pad, and the like. As the cleaning device, there are a workpiece cleaning mechanism in which the cleaning sponge rotates and cleans the back surface of the workpiece, and a pad cleaning mechanism in which the cleaning brush rotates and cleans the transport pad of the transport means for holding the workpiece (for example, the following) Patent Document 1, Patent Document 2, Patent Document 3, and Patent Document 4).

JP 2003-045841 A Japanese Patent Laid-Open No. 11-031674 JP 2005-302831 A JP 2010-094785 A

  However, in the pad cleaning mechanism, since the workpiece is cleaned by swinging the cleaning plate while moving the transport pad, the cleaning speed is affected by the width of the cleaning plate, and it is difficult to change the cleaning rate. In addition, when the cleaning plate swings, the outer periphery of the transport pad may not be sufficiently cleaned.

  On the other hand, in the above workpiece cleaning mechanism, the upper surface of the workpiece is sucked and held by the conveyance pad and the cleaning sponge is brought into contact with the lower surface of the workpiece to perform cleaning. It may not be possible. In order to avoid such a problem, as disclosed in Patent Document 3, it is necessary to devise such as switching the rotation direction of the cleaning sponge.

  Further, as disclosed in Patent Document 4, in the type of apparatus having both the pad cleaning mechanism and the workpiece cleaning mechanism, the cleaning brush is omitted, and the cleaning plate and the cleaning sponge intersect. Therefore, the central part of either the cleaning plate or the cleaning sponge is divided, and it becomes impossible to clean the transport pad or the central part of the workpiece.

  The present invention has been considered in view of such problems. In the grinding apparatus, it is possible to sufficiently clean the entire surface of the conveyance pad and the workpiece, and it is possible to change the cleaning speed including the efficiency of cleaning. The problem is to do.

The present invention provides a chuck table for holding a circular plate-shaped workpiece, a conveyance pad having a holding surface for sucking and holding the upper surface of the circular plate-shaped workpiece held by the chuck table, and moving a carry-out path to the conveyance pad. In the grinding apparatus comprising at least a moving unit, the transport pad includes a rotation unit that rotates the transport pad in a horizontal direction around the center of the transport pad, and is held by the holding surface on the carry- out path. A workpiece cleaning means for cleaning the circular plate-shaped workpiece is disposed, and the workpiece cleaning means includes a rectangular cleaning sponge and a plurality of cleaning water supply ports arranged in parallel with the longitudinal direction of the cleaning sponge, The cleaning sponge is disposed on the carry-out path with the longitudinal direction of the wash sponge intersecting the carry-out path, and the transport pad and the cleaning sponge are approached or separated from each other. The lower surface of the circular plate-shaped workpiece is in contact with the cleaning sponge while supplying cleaning water from the cleaning supply port toward the lower surface of the circular plate-shaped workpiece sucked and held by the transport pad. And rotating the transport pad by the rotating means to clean the circular plate workpiece, and the transport pad that sucks and holds the circular plate workpiece reverses the rotation direction every time the circular plate workpiece is cleaned. Let

A drying unit having a drying nozzle serving as an air blowing port facing the holding surface is disposed on the carry-out path, and the circular plate-like workpiece sucked and held by the transport pad is disposed on the drying nozzle by the moving unit. Move to the air blowing start position, rotate the transport pad by the rotating means while blowing air to the circular plate workpiece by the drying means, and move the blowing position of the drying nozzle by the moving means It is desirable to dry the circular plate workpiece.

The present invention provides a chuck table for holding a circular plate-shaped workpiece, a conveyance pad having a holding surface for sucking and holding the upper surface of the circular plate-shaped workpiece held by the chuck table, and moving a carry-out path to the conveyance pad. In the grinding apparatus comprising at least a moving unit, the transport pad includes a rotation unit that rotates the transport pad in a horizontal direction around the center of the transport pad, and a holding surface of the transport pad is provided on the carry-out path. The holding surface cleaning means is disposed in parallel with the cleaning brush and a rectangular cleaning brush for cleaning the holding surface for sucking and holding the upper surface of the circular plate-like workpiece. And a longitudinal direction of the cleaning brush and the cleaning plate intersects the carry-out path, and the transfer pad is air, water, or water from the holding surface of the circular plate-shaped workpiece. Blow means capable of releasing a mixture of air and water, the transport pad, the cleaning brush, the transport pad, and the cleaning plate are relatively operable in a direction approaching or separating from the transport pad, the cleaning brush, The holding surface is brought into contact with the cleaning brush or the cleaning plate by the moving means, and the transport pad is rotated by the rotation means, whereby the holding surface can be cleaned.

A workpiece cleaning means for cleaning the circular plate-like workpiece held on the holding surface is disposed on the carry-out path, and the workpiece cleaning means includes a rectangular cleaning sponge and a plurality of workpiece cleaning means parallel to the longitudinal direction of the cleaning sponge. A cleaning water supply port arranged, and the cleaning sponge is disposed on the carry-out path with the longitudinal direction of the wash sponge intersecting the carry-out path, and the transport pad and the cleaning sponge are The lower surface of the circular plate-shaped workpiece is operable relative to the approaching or separating direction and supplying cleaning water from the cleaning supply port toward the lower surface of the circular plate-shaped workpiece sucked and held by the transport pad. It is desirable that the circular plate-shaped workpiece is cleaned by bringing the conveying pad into rotation by the rotation means and contacting the cleaning sponge.

It is desirable that the holding surface cleaning means cleans the holding surface by sliding the holding surface simultaneously with the cleaning brush and the cleaning plate.

  In the present invention, in a grinding apparatus comprising a transport pad having a holding surface for sucking and holding the upper surface of a circular plate-like workpiece held by a chuck table, and a moving means for moving a transport path to the transport pad, the transport pad is Since the rotation means for rotating in the horizontal direction around the center of the transport pad is provided, when the workpiece cleaning means or the holding surface cleaning means is installed in the grinding apparatus, the rotation speed of the transport pad is adjusted by the rotation means. The cleaning speed can be changed, and the entire surface of the circular plate workpiece or the transport pad can be sufficiently cleaned without swinging the cleaning plate or the cleaning sponge. Since sufficient cleaning is possible without switching, cleaning can be performed efficiently.

  In the present invention, a work cleaning means for cleaning the circular plate-like work held on the holding surface is disposed on the carry-out path, and the work cleaning means has a rectangular cleaning sponge and a plurality of parallel parts in parallel with the longitudinal direction of the cleaning sponge. The cleaning sponge is disposed on the carry-out path with the longitudinal direction of the wash sponge intersecting the carry-out path, and the transport pad and the cleaning sponge are close or The lower surface of the circular plate-shaped workpiece can be moved relative to the separation pad, while the cleaning water is supplied from the cleaning supply port toward the lower surface of the circular plate-shaped workpiece sucked and held by the transport pad. The circular plate-shaped workpiece can be cleaned by contacting the sponge and rotating the transport pad by the rotating means.

  Furthermore, in the present invention, the rotation direction of the conveyance pad is reversed every time the circular plate-shaped workpiece is cleaned, so that the portion where the grinding scraps are easily accumulated due to the strong pressing force due to the rotation direction of the conveyance pad is reversed. Therefore, the entire surface of the cleaning sponge that can be cleaned can be used.

  In the present invention, a drying means having a drying nozzle that serves as an air blowing port facing the holding surface is disposed on the carry-out path. Therefore, the air is rotated by the rotation means while blowing air to the circular plate-like workpiece by the drying means. The circular plate-like workpiece can be dried by rotating the transport pad and moving the spray position of the drying nozzle by the moving means.

  In the present invention, a holding surface cleaning means for cleaning the holding surface of the transport pad is disposed on the carry-out path, and the holding surface cleaning means is a rectangular cleaning that cleans the holding surface that sucks and holds the upper surface of the circular plate-like workpiece. A brush and a rectangular cleaning plate disposed in parallel with the cleaning brush, and the longitudinal direction of the cleaning brush and the cleaning plate intersects the carry-out path, and the transport pad is the circular plate Blow means capable of releasing air, water, or a mixture of air and water from the holding surface of the workpiece, the transport pad and the cleaning brush, and the transport pad and the cleaning plate are relatively close to each other in the approaching or separating direction. The blowing means is operated by operating the blowing means, bringing the holding surface into contact with the cleaning brush or the cleaning plate by moving means, and rotating the transport pad by rotating means. Air that is released, water or using what was them mixed by washing the retaining surface, can be performed more efficiently cleaning the transport pad.

It is a top view which shows typically an example of the grinding device provided with the workpiece | work washing | cleaning means which wash | cleans a workpiece | work, and the holding surface cleaning means which wash | cleans the holding surface of a conveyance pad. It is a top view which shows the detailed structure of a workpiece | work washing | cleaning means and a holding surface washing | cleaning means. It is sectional drawing which shows the state which a conveyance pad conveys a workpiece | work to a workpiece | work washing | cleaning means. It is sectional drawing which shows the state which wash | cleans a workpiece | work by a workpiece | work washing | cleaning means. It is sectional drawing which shows the state which dries a workpiece | work with a drying means. It is sectional drawing which shows the state which a conveyance pad moves to a holding surface washing | cleaning means. It is sectional drawing which shows the state which wash | cleans the holding surface of a conveyance pad by a holding surface washing | cleaning means.

  A grinding apparatus 1 shown in FIG. 1 is an example of a grinding apparatus that includes a workpiece cleaning mechanism and a transport pad cleaning mechanism and grinds a circular plate-shaped workpiece W.

  In the center of the upper surface of the grinding apparatus 1, a disk-shaped rotatable turntable 2 is disposed. A plurality of chuck tables 3 that hold and rotate the workpiece W are arranged on the upper surface of the turntable 2. The turntable 2 rotates to revolve the plurality of chuck tables 3 to attach / detach the workpiece W, and a grinding region P2, a grinding region P3, and a grinding region P4 for grinding the workpiece W. The chuck table 3 can be moved between them.

  The grinding area P2 is provided with a first grinding means 13 for rough grinding the workpiece W, and the grinding area P3 is provided with a second grinding means 14 for finishing grinding the workpiece W. In P4, a third grinding means 15 for performing a dry polishing process for removing grinding distortion of the workpiece W by the first grinding means 13 and the second grinding means 14 is disposed. In the third grinding means 15, since the upper surface of the workpiece W subjected to the grinding process may be distorted, it is only necessary to perform a process that can remove these, and it is limited to the dry polishing described above. Is not to be done.

  An accommodation cassette 9 for accommodating the workpiece W before grinding is disposed in the front upper portion of the grinding apparatus 1, and an accommodation cassette for accommodating the workpiece W after grinding is disposed in the vicinity of the accommodation cassette 9. 10 is disposed. In the vicinity of the storage cassette 9 and the storage cassette 10, a transfer robot 11 that carries the workpiece W out of the storage cassette 9 and carries it into the storage cassette 10 is disposed. The transfer robot 11 includes a bendable arm 11a and a pickup hand 11b that holds a workpiece W, and can reciprocate in the directions of arrows A1 and A2. A spinner table 12 and moving means 4 are disposed in the movable region of the transfer robot 11. The spinner table 12 can clean grinding scraps adhering to the upper surface of the workpiece W after grinding.

  As shown in FIG. 1, the moving means 4 includes a disc-shaped transport pad 40, an arm 42 having the transport pad 40 at one end, and a moving base 43 connected to the other end of the arm 42. The transport pad 40 can reciprocate on the transport path L in the directions of arrows B1 and B2. Further, as shown in FIG. 1, the arm 42 is configured to be able to turn with the moving base 43 as a fulcrum.

  As shown in FIGS. 2 and 3, the transport pad 40 has a holding surface 41 having an area substantially the same diameter as the circular plate-shaped workpiece W. 3, the inside of the holding surface 41 is formed by a porous member 41a for sucking and holding the upper surface Wa of the workpiece W, and the workpiece W is held by the suction force generated by a suction source (not shown). Can be absorbed. The transport pad 40 includes a rotating shaft 44 having a vertical axis and a motor 441 serving as a drive source, and includes a rotation means 44 that rotates the transport pad 40 in the horizontal direction. Can be rotated in both directions of the arrows C1 and C2 while sucking and holding the upper surface Wa. The rotation speed can be freely changed by the control of the motor 441.

  As shown in FIG. 3, the transport pad 40 further includes blow means 45 that can release air, water, or a mixture of air and water to the holding surface 41.

  The porous member 41a communicates with a pipe 450 formed inside the transport pad 40, communicates with a cleaning water supply source 453 via a valve 451, and communicates with an air supply source 454 via a valve 452. Yes.

  Since the blow means 45 is configured as described above, cleaning water is discharged from the holding surface 41 through the pipe 450 when the valve 451 is opened, and air is discharged from the holding surface 41 through the pipe 450 when the valve 452 is opened. It is like that. When supplying a mixture of air and water, the valve 451 and the valve 452 may be opened to allow the air and water to flow into the pipe 450 to be mixed and discharged from the holding surface 41.

  On the carry-out path L shown in FIGS. 1 and 2, the workpiece cleaning means 5 for cleaning the lower surface Wb of the workpiece W shown in FIG. 3, the holding surface cleaning means 6 for cleaning the holding surface 41 of the transfer pad 40, and the cleaning A drying means 7 for blowing air to the subsequent workpiece W and a sensor 8 for determining whether or not the workpiece W is sucked and held on the holding surface 41 of the transport pad 40 are provided.

  The work cleaning means 5 shown in FIG. 2 includes a rectangular cleaning sponge 50 and a plurality of cleaning water supply ports 51 arranged in parallel with the longitudinal direction of the cleaning sponge 50. The cleaning sponge 50 is disposed on the carry-out path L with the longitudinal direction of the cleaning sponge 50 intersecting the carry-out path L. As the cleaning sponge 50, Sofras sponge manufactured by AION Co., Ltd. having excellent water absorption and heat resistance is desirable.

  As shown in FIG. 3, a cleaning base 52 for supporting the cleaning sponge 50 is fixed to the lower end of the cleaning sponge 50. A cleaning water supply port 51 is formed through the center of the cleaning sponge 50 and the cleaning base 52, and is connected to a cleaning water supply source 53. When cleaning the lower surface Wb of the workpiece W by the workpiece cleaning means 5, the cleaning water is supplied between the lower surface Wb of the workpiece W and the cleaning sponge 50 while the cleaning sponge 50 is in contact with the lower surface Wb of the workpiece W, and conveyed. The grinding scraps adhering to the lower surface Wb of the workpiece W are cleaned by the rotation of the pad 40.

  The holding surface cleaning means 6 shown in FIG. 2 includes a rectangular cleaning brush 60 that cleans the holding surface 41 on which the transport pad 40 sucks and holds the workpiece W, and a rectangular cleaning plate 61 that is disposed in parallel with the cleaning brush 60. And. The cleaning brush 60 and the cleaning plate 61 are both disposed on the carry-out path L with the longitudinal direction intersecting the carry-out path L. The cleaning brush 60 and the cleaning plate 61 are disposed in parallel with the cleaning sponge 50.

  As shown in FIG. 3, the cleaning brush 60 is connected to an air cylinder 60b via a piston 60a that supports the cleaning brush 60 so as to be movable up and down. In the cleaning brush 60, the cleaning brush 60 and the holding surface 41 of the transfer pad 40 slide by the rotation of the transfer pad 40, and grinding dust and the like attached to the holding surface 41 can be removed. Similarly to the cleaning brush 60, the cleaning plate 61 is connected to the air cylinder 61b through a piston 61a that supports the cleaning plate 61 so as to be movable up and down. In the cleaning plate 61, by the rotation of the transport pad 40, the cleaning plate 61 can scrape the holding surface 41 itself and scrape off grinding dust and the like firmly attached to the holding surface 41.

  The cleaning brush 60 and the cleaning plate 61 are relatively operable in a direction in which the transport pad 40 approaches or separates by raising and lowering the piston 60a and the piston 61a. That is, the cleaning brush 60 and the cleaning plate 61 can be moved up and down as the piston 60 a and the piston 61 a move up and down.

  The drying means 7 shown in FIGS. 2 and 3 includes a drying nozzle 70 that faces the holding surface 41 of the transport pad 40. An air supply source (not shown) is connected to the drying nozzle 70, and air can be blown from below to the lower surface Wb of the work W that rotates with the transport pad 40 above the drying nozzle 70.

  The sensor 8 shown in FIGS. 1 and 2 determines whether the work W is held on the holding surface 41 of the transfer pad 40, on the carry-out path L, and on the turntable 2 and the work cleaning means 5. Between the two.

Below, the operation example of the grinding apparatus 1 comprised as mentioned above is demonstrated.
The transfer robot 11 shown in FIG. 1 takes out one workpiece W before grinding from the storage cassette 9 and transfers it to the transfer pad 40. When the transfer pad 40 sucks and holds the workpiece W, the workpiece W is transferred to the upper surface of the chuck table 3 waiting in the attachment / detachment region P1 in order to move the workpiece W to the grinding process.

  After the workpiece W is held on the chuck table 3, the rotation of the turntable 2 causes the first grinding means 13 located in the grinding area P2, the second grinding means 14 located in the grinding area P3, and the grinding. Sequentially fed into the third grinding means 15 located in the region P4. After all grinding is completed, the chuck table 3 moves to the attachment / detachment region P1. And since the grinding waste may adhere to the upper surface Wa and the lower surface Wb of the workpiece W after grinding, it is necessary to clean the workpiece W.

  The moving means 4 shown in FIG. 1 is activated to move the transport pad 40 above the chuck table 3. When the transport pad 40 sucks and holds the workpiece W, the moving means 4 moves horizontally in the direction of the arrow B1 and feeds the transport pad 40 above the work cleaning means 5. When the transport pad 40 moves on the transport path L and passes above the sensor 8, the sensor 8 determines whether or not the work W is held on the holding surface 41 of the transport pad 40.

  If the sensor 8 determines that the work W is held on the transport pad 40, the transport pad 40 is lowered toward the cleaning sponge 50 of the work cleaning means 5, as shown in FIG. At this time, if the cleaning brush 60 and the cleaning plate 61 of the holding surface cleaning means 6 are higher than the cleaning sponge 50, the cleaning brush 60 and the cleaning plate 61 are lowered and moved to a position lower than the cleaning sponge 50. Let

  As shown in FIG. 4, when the lower surface Wb of the workpiece W comes into contact with the cleaning sponge 50, the workpiece cleaning means 5 is operated. The cleaning water is supplied from the cleaning water supply source 53, and the cleaning water is supplied from the cleaning water supply port 51 between the cleaning sponge 50 and the lower surface Wb of the workpiece W. At the same time, the conveyance pad 40 is rotated in the direction of the arrow C1 by the rotation means 44.

  Thus, when the work W rotates with the rotation of the transport pad 40, the lower surface Wb of the work W slides on the upper surface of the cleaning sponge 50, and the grinding dust adhering to the lower surface Wb of the work W is removed. Then, the cleaning of one workpiece W is completed. The conveyance pad 40 holding the workpiece W rotates, so that the workpiece W can be sufficiently cleaned without swinging the cleaning sponge 50, and the rotation is adjusted at an optimum speed. The work W is not peeled off from the transport pad 40.

  In the upper surface of the cleaning sponge 50 shown in FIG. 2, grinding debris tends to accumulate particularly in a portion where a pressing force is strongly applied due to the rotation direction of the transport pad 40. For this reason, the upper surface of the cleaning sponge 50 includes a dirty portion and a clean portion, and the entire surface of the cleaning sponge that can be cleaned cannot be utilized. Reverse the direction of rotation. That is, when another workpiece W subsequently conveyed by the conveyance pad 40 is cleaned, the rotation means 44 reverses the rotation direction of the cleaning pad 41 to rotate in the direction of the arrow C2.

  Thus, if the rotation direction is alternately reversed every time one workpiece W is cleaned, the entire surface of the cleaning sponge 50 can be used, and the cleaning sponge 50 is supplied by the cleaning water supplied from the center of the cleaning sponge 50. Grinding waste adhering to can be removed. Further, by using the entire surface of the cleaning sponge 50, the replacement frequency of the cleaning sponge 50 can be reduced. The timing at which the rotation means 44 reverses the rotation direction of the transport pad 40 is arbitrary.

  After the cleaning of the lower surface Wb of the workpiece W by the workpiece cleaning means 5 is completed, since the cleaning water adheres to the lower surface Wb of the workpiece W, the drying means 7 dries the workpiece W. Specifically, the moving means 4 shown in FIG. 1 is operated to move the transport pad 40 above the drying means 7 disposed on the carry-out path L.

  As shown in FIG. 5, when the transport pad 40 is moved above the drying means 7 to the air blowing start position of the drying nozzle 70 serving as an air blowing port, the air is directed from the drying nozzle 70 toward the lower surface Wb of the workpiece W. Spray. The moving means 4 shown in FIG. 1 rotates the workpiece W by rotating the conveyance pad 40 by the rotation means 44 while feeding the conveyance pad 40 in the direction of the arrow B1. Moreover, the conveyance pad 40 is moved in the direction of the arrow B1 or the arrow B2 as necessary. Thereby, the cleaning water adhering to the lower surface Wb of the workpiece W is removed by the rotation of the transport pad 40 and the air blown from the drying nozzle 70, and the lower surface Wb of the workpiece W is dried.

  After the lower surface Wb of the workpiece W is dried, the moving means 4 shown in FIG. 1 moves in the arrow B1 direction. Then, the transport pad 40 transports the workpiece W to the spinner table 12. In the spinner table 12, the grinding waste adhering to the upper surface Wa of the workpiece W is cleaned and the workpiece W is dried. When the upper surface Wa of the workpiece W is cleaned, the workpiece W is stored in the storage cassette 10 by the transfer robot 11.

  Below, the operation example which cleans the holding surface 41 of the conveyance pad 40 by the holding surface washing | cleaning means 6 is demonstrated.

  As described above, after grinding the workpiece W, grinding scraps may adhere to the upper surface Wa and the lower surface Wb of the workpiece W. Therefore, the holding surface of the transport pad 40 that sucks and holds the upper surface Wa. 41 may also be contaminated with grinding scraps. Therefore, it is necessary to clean the holding surface 41 of the transport pad 40 as well. The timing for cleaning the holding surface 41 is preferably from when the ground workpiece W is transferred to the spinner table 12 until another ground workpiece W moves to the attachment / detachment region P1.

  The transport pad 40 shown in FIG. 1 moves above the sensor 8 by horizontally moving the transport path L in the direction of the arrow B <b> 2 in order to operate the holding surface cleaning means 6 and clean the holding surface 41. Then, the sensor 8 determines whether or not the work W is held on the holding surface 41 of the transport pad 40.

  When the sensor 8 determines that the workpiece W is not held on the transport pad 40, the transport pad 40 is lowered and the cleaning brush 60 and the cleaning plate 61 are positioned higher than the cleaning sponge 50 as shown in FIG. Raise. Then, the holding surface 41 is brought into contact with the cleaning brush 60 and the cleaning plate 61.

  As shown in FIG. 7, when the holding surface 41 comes into contact with the cleaning brush 60 and the cleaning plate 61, the blowing means 45 is operated and the rotation means 44 is moved while feeding the transport pad 40 in the direction of the arrow B1 shown in FIG. Operate to rotate the transport pad 40.

  When the blow means 45 is operated, cleaning water is supplied from the cleaning water supply source 453 and air is supplied from the air supply source 454. When the valve 451 is opened, cleaning water is discharged from the holding surface 41 through the pipe 450, and when the valve 452 is opened, air is released from the holding surface 41 through the pipe 450. When supplying a mixture of air and water, the valve 451 and the valve 452 are opened, air and water are flown into the pipe 450, mixed, and discharged from the holding surface 41.

  Air, water, or a mixture of air and water discharged from the holding surface 40 is supplied between the holding surface 41, the cleaning brush 60, and the cleaning plate 61. As a result of the holding surface 41 sliding on the upper surface of the cleaning brush 60 due to the rotation of the conveyance pad 40, the grinding dust adhering to the holding surface 41 of the conveyance pad 40 is removed. Further, as the holding surface 41 slides on the upper surface of the cleaning plate 61 due to the rotation of the transport pad 40, the grinding dust firmly attached to the holding surface 41 is scraped off. When the entire holding surface 41 is cleaned, the cleaning by the holding surface cleaning means 6 is finished. Thus, since the conveyance pad 40 rotates, sufficient cleaning can be performed without swinging the cleaning brush 60 and the cleaning plate 61.

  The workpiece cleaning means 5 shown in the embodiment does not move up and down, but is not limited to this. Accordingly, the cleaning sponge 50 may be moved by allowing the workpiece cleaning means 5 to move up and down.

  In the embodiment, the workpiece cleaning means 5 and the holding surface cleaning means 6 are not configured to rotate, and the rotation means 44 is provided only on the transport pad 40, so that the rotation means in the entire apparatus is more than the conventional grinding apparatus. Can be reduced. Also, the work cleaning means 5 and the holding surface cleaning means 6 can be disposed below the transport pad 40 and the work W, and any means can be selectively operated. Therefore, even if the workpiece cleaning means 5 and the holding surface cleaning means 6 are both installed in the grinding apparatus 1, the installation area can be reduced, and the workpiece cleaning and pad cleaning similar to the conventional one can be performed. .

  Note that only one of the workpiece cleaning means 5 and the holding surface cleaning means 6 can be arranged in the grinding apparatus, and the grinding apparatus is provided with neither the workpiece cleaning means 5 nor the holding surface cleaning means 6. You can also. Even when neither the work cleaning means 5 nor the holding surface cleaning means 6 is provided, the work W or the transport pad 40 can be dried by rotating the transport pad 40.

1: Grinding device 2: Turntable 3: Chuck table 4: Moving means 40: Transfer pad 41: Holding surface 41a: Porous holding member 42: Arm 43: Moving base 44: Rotating means 440: Rotating shaft 45: Blow means 450: Piping 451, 452: Valve 453: Cleaning water supply source 454: Air supply source 5: Work cleaning means 50: Cleaning sponge 51: Cleaning water supply port 52: Cleaning base 53: Cleaning water supply source 6: Holding surface cleaning Means 60: Cleaning brush 60a: Piston 60b: Air cylinder 61: Cleaning plate 61a: Piston 61b: Air cylinder 7: Drying means 70: Drying nozzle 8: Sensor 9: Storage cassette 10: Storage cassette 11: Transfer robot 11a: Arm 11b : Pickup hand 12: Spinner table 13: First grinding means 14: Second grinding hand 15: third grinding means W: Work Wa: top Wb: the lower surface L: conveyance path

Claims (5)

A chuck table for holding a circular plate-shaped workpiece, a conveyance pad having a holding surface for sucking and holding the upper surface of the circular plate-shaped workpiece held by the chuck table, and a moving means for moving a carry-out path to the conveyance pad; In a grinding apparatus comprising at least
The transport pad includes a rotation means for rotating the transport pad in a horizontal direction around the center of the transport pad ,
A workpiece cleaning means for cleaning the circular plate-shaped workpiece held on the holding surface is disposed on the carry-out path,
The workpiece cleaning means includes a rectangular cleaning sponge,
A plurality of cleaning water supply ports arranged in parallel with the longitudinal direction of the cleaning sponge,
The cleaning sponge is disposed on the carry-out path with the longitudinal direction of the wash sponge intersecting the carry-out path, and the transport pad and the wash sponge are relatively operable in the approaching or separating directions. Yes,
While supplying cleaning water from the cleaning supply port toward the lower surface of the circular plate-like workpiece sucked and held by the transport pad, the lower surface of the circular plate-shaped workpiece is brought into contact with the cleaning sponge and is rotated by the rotation means. Rotate the transport pad to clean the circular plate workpiece,
The grinding device , wherein the transport pad that sucks and holds the circular plate-shaped workpiece reverses the rotation direction every time the circular plate-shaped workpiece is cleaned . On the carry-out path, a drying means having a drying nozzle serving as an air outlet facing the holding surface is disposed,
The circular plate-like workpiece sucked and held by the conveyance pad is moved to the air blowing start position of the drying nozzle by the moving means, and the conveyance means is conveyed by the rotation means while blowing air to the circular plate-like workpiece by the drying means. causes the rotation of the pad, said moving means grinding apparatus <br/> according to claim 1, in which the drying of the circular shape plate workpiece by moving the spray position of the drying nozzle by. A chuck table for holding a circular plate-shaped workpiece, a conveyance pad having a holding surface for sucking and holding the upper surface of the circular plate-shaped workpiece held by the chuck table, and a moving means for moving a carry-out path to the conveyance pad; In a grinding apparatus comprising at least
The transport pad includes a rotation means for rotating the transport pad in a horizontal direction around the center of the transport pad,
A holding surface cleaning means for cleaning the holding surface of the transport pad is disposed on the carry-out path,
The holding surface cleaning means includes a rectangular cleaning brush for cleaning the holding surface for sucking and holding the upper surface of the circular plate-shaped workpiece;
A rectangular cleaning plate disposed in parallel with the cleaning brush,
The longitudinal direction of the cleaning brush and the cleaning plate intersects the carry-out path,
The transport pad includes blow means capable of discharging air, water, or a mixture of air and water from the holding surface of the circular plate-shaped workpiece,
The transport pad and the cleaning brush, and the transport pad and the cleaning plate are relatively operable in a direction approaching or separating from each other,
The blowing means is operated, the holding surface is brought into contact with the cleaning brush or the cleaning plate by the moving means, and the carrier pad is rotated by the rotation means, thereby enabling the cleaning of the holding surface. <br/> Grinding equipment. A workpiece cleaning means for cleaning the circular plate-shaped workpiece held on the holding surface is disposed on the carry-out path,
The workpiece cleaning means includes a rectangular cleaning sponge,
A plurality of cleaning water supply ports arranged in parallel with the longitudinal direction of the cleaning sponge,
The cleaning sponge is disposed on the carry-out path with the longitudinal direction of the wash sponge intersecting the carry-out path, and the transport pad and the cleaning sponge are relatively operable in the approaching or separating directions. Yes,
While supplying cleaning water from the cleaning supply port toward the lower surface of the circular plate-like workpiece sucked and held by the transport pad, the lower surface of the circular plate-shaped workpiece is brought into contact with the cleaning sponge and is rotated by the rotation means. The grinding apparatus according to claim 3, wherein the circular plate-shaped workpiece is cleaned by rotating the conveyance pad . The grinding apparatus according to claim 3, wherein the holding surface cleaning unit cleans the holding surface by simultaneously sliding the cleaning surface on the cleaning brush and the cleaning plate .

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