JP5923862B2 - 振動片、振動子、発振器及び電子機器 - Google Patents
振動片、振動子、発振器及び電子機器 Download PDFInfo
- Publication number
- JP5923862B2 JP5923862B2 JP2011060458A JP2011060458A JP5923862B2 JP 5923862 B2 JP5923862 B2 JP 5923862B2 JP 2011060458 A JP2011060458 A JP 2011060458A JP 2011060458 A JP2011060458 A JP 2011060458A JP 5923862 B2 JP5923862 B2 JP 5923862B2
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- Prior art keywords
- vibrating
- resonator element
- base
- electrode
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011060458A JP5923862B2 (ja) | 2011-03-18 | 2011-03-18 | 振動片、振動子、発振器及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011060458A JP5923862B2 (ja) | 2011-03-18 | 2011-03-18 | 振動片、振動子、発振器及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012199603A JP2012199603A (ja) | 2012-10-18 |
| JP2012199603A5 JP2012199603A5 (enrdf_load_stackoverflow) | 2014-05-01 |
| JP5923862B2 true JP5923862B2 (ja) | 2016-05-25 |
Family
ID=47181436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011060458A Expired - Fee Related JP5923862B2 (ja) | 2011-03-18 | 2011-03-18 | 振動片、振動子、発振器及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5923862B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014165573A (ja) * | 2013-02-22 | 2014-09-08 | Seiko Epson Corp | 振動片、振動子、電子デバイス、電子機器、および移動体 |
| JP2017216753A (ja) * | 2017-09-15 | 2017-12-07 | セイコーエプソン株式会社 | 振動片、振動子、電子デバイス、電子機器、および移動体 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH607880B (fr) * | 1976-01-16 | Centre Electron Horloger | Resonateur piezo-electrique. | |
| JP2001203560A (ja) * | 2000-01-20 | 2001-07-27 | Nippon Dempa Kogyo Co Ltd | 音叉型水晶振動子 |
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP4715652B2 (ja) * | 2006-06-30 | 2011-07-06 | セイコーエプソン株式会社 | 圧電振動片 |
| JP2008141307A (ja) * | 2006-11-30 | 2008-06-19 | Citizen Holdings Co Ltd | 圧電振動子及びその製造方法ならびに物理量センサー |
| JP5168002B2 (ja) * | 2008-07-22 | 2013-03-21 | セイコーエプソン株式会社 | 振動子及び発振器 |
| JP5369741B2 (ja) * | 2009-02-12 | 2013-12-18 | セイコーエプソン株式会社 | 振動片および振動子 |
-
2011
- 2011-03-18 JP JP2011060458A patent/JP5923862B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012199603A (ja) | 2012-10-18 |
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