JP2012199603A5 - - Google Patents

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Publication number
JP2012199603A5
JP2012199603A5 JP2011060458A JP2011060458A JP2012199603A5 JP 2012199603 A5 JP2012199603 A5 JP 2012199603A5 JP 2011060458 A JP2011060458 A JP 2011060458A JP 2011060458 A JP2011060458 A JP 2011060458A JP 2012199603 A5 JP2012199603 A5 JP 2012199603A5
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JP
Japan
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resonator element
vibrating arm
vibrating
element according
base
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JP2011060458A
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English (en)
Japanese (ja)
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JP5923862B2 (ja
JP2012199603A (ja
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Priority to JP2011060458A priority Critical patent/JP5923862B2/ja
Priority claimed from JP2011060458A external-priority patent/JP5923862B2/ja
Publication of JP2012199603A publication Critical patent/JP2012199603A/ja
Publication of JP2012199603A5 publication Critical patent/JP2012199603A5/ja
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Publication of JP5923862B2 publication Critical patent/JP5923862B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011060458A 2011-03-18 2011-03-18 振動片、振動子、発振器及び電子機器 Expired - Fee Related JP5923862B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011060458A JP5923862B2 (ja) 2011-03-18 2011-03-18 振動片、振動子、発振器及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011060458A JP5923862B2 (ja) 2011-03-18 2011-03-18 振動片、振動子、発振器及び電子機器

Publications (3)

Publication Number Publication Date
JP2012199603A JP2012199603A (ja) 2012-10-18
JP2012199603A5 true JP2012199603A5 (enrdf_load_stackoverflow) 2014-05-01
JP5923862B2 JP5923862B2 (ja) 2016-05-25

Family

ID=47181436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011060458A Expired - Fee Related JP5923862B2 (ja) 2011-03-18 2011-03-18 振動片、振動子、発振器及び電子機器

Country Status (1)

Country Link
JP (1) JP5923862B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP2017216753A (ja) * 2017-09-15 2017-12-07 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、および移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH607880B (fr) * 1976-01-16 Centre Electron Horloger Resonateur piezo-electrique.
JP2001203560A (ja) * 2000-01-20 2001-07-27 Nippon Dempa Kogyo Co Ltd 音叉型水晶振動子
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4715652B2 (ja) * 2006-06-30 2011-07-06 セイコーエプソン株式会社 圧電振動片
JP2008141307A (ja) * 2006-11-30 2008-06-19 Citizen Holdings Co Ltd 圧電振動子及びその製造方法ならびに物理量センサー
JP5168002B2 (ja) * 2008-07-22 2013-03-21 セイコーエプソン株式会社 振動子及び発振器
JP5369741B2 (ja) * 2009-02-12 2013-12-18 セイコーエプソン株式会社 振動片および振動子

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