JP5908073B2 - 太陽電池基板及びこれを用いた太陽電池 - Google Patents
太陽電池基板及びこれを用いた太陽電池 Download PDFInfo
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- JP5908073B2 JP5908073B2 JP2014515716A JP2014515716A JP5908073B2 JP 5908073 B2 JP5908073 B2 JP 5908073B2 JP 2014515716 A JP2014515716 A JP 2014515716A JP 2014515716 A JP2014515716 A JP 2014515716A JP 5908073 B2 JP5908073 B2 JP 5908073B2
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- 239000000758 substrate Substances 0.000 title claims description 77
- 229910052751 metal Inorganic materials 0.000 claims description 84
- 239000002184 metal Substances 0.000 claims description 84
- 238000009792 diffusion process Methods 0.000 claims description 46
- 239000011206 ternary composite Substances 0.000 claims description 33
- 230000002265 prevention Effects 0.000 claims description 27
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 230000031700 light absorption Effects 0.000 claims description 9
- 230000003405 preventing effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 150000002739 metals Chemical class 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000011888 foil Substances 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910002549 Fe–Cu Inorganic materials 0.000 claims description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 94
- 239000011734 sodium Substances 0.000 description 47
- 239000010408 film Substances 0.000 description 30
- 239000004065 semiconductor Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000011669 selenium Substances 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000002803 fossil fuel Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- 239000013077 target material Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000010248 power generation Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 229910052711 selenium Inorganic materials 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000003306 harvesting Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052778 Plutonium Inorganic materials 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 238000013084 building-integrated photovoltaic technology Methods 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- OYEHPCDNVJXUIW-UHFFFAOYSA-N plutonium atom Chemical compound [Pu] OYEHPCDNVJXUIW-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- DNYWZCXLKNTFFI-UHFFFAOYSA-N uranium Chemical compound [U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U] DNYWZCXLKNTFFI-UHFFFAOYSA-N 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03926—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
- H01L31/03928—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate including AIBIIICVI compound, e.g. CIS, CIGS deposited on metal or polymer foils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Description
20 多層拡散防止膜
21、22、23 拡散防止膜
30、30’ 下部電極、
31 Mo‐X‐Na三成分系複合金属層
32 Mo層
40 CI(G)S層
Claims (10)
- 下部基板と前記下部基板上に形成された下部電極を含み、前記下部電極はMo‐X‐Na三成分系複合金属層からなり、前記Mo‐X‐Na三成分系複合金属層のうちMoの含量は50重量%以下であり、前記XはNb、Ni、Si、Ti、W、Crのうちから選択された一種であり、前記下部基板と前記Mo‐X‐Na三成分系複合金属層との間に、少なくとも二層以上の金属層で形成され且つ隣り合う金属層が異種の金属からなる多層金属拡散防止膜を含む、太陽電池基板。
- 前記下部電極は、前記Mo‐X‐Na三成分系複合金属層上に形成されたMo層をさらに含む、請求項1に記載の太陽電池基板。
- 前記多層金属拡散防止膜は金属層の間に酸化物層をさらに含む、請求項1または2に記載の太陽電池基板。
- 前記下部基板はステンレス、アルミニウムホイル、Fe‐Ni系金属、Fe‐Cu系金属、ポリイミド系材料からなる群から選択された一種からなる、請求項1から3のいずれか1項に記載の太陽電池基板。
- 前記下部電極の厚さは1μm以下である、請求項1から4のいずれか1項に記載の太陽電池基板。
- 前記Mo層と前記Mo‐X‐Na三成分系複合金属層との厚さの比は1:0.5〜1.5である、請求項2に記載の太陽電池基板。
- 前記多層金属拡散防止膜の厚さは100〜1500nmである、請求項1から6のいずれか1項に記載の太陽電池基板。
- 下部基板と前記下部基板上に形成された下部電極であるMo‐X‐Na三成分系複合金属層を含む太陽電池基板と、
前記太陽電池基板上に形成された光吸収層と、
前記光吸収層上に形成されたバッファ層と、
前記バッファ層上に形成された透明窓と、
前記透明窓上に形成された上部電極と、
を含み、
前記Mo‐X‐Na三成分系複合金属層のうちMoの含量は50重量%以下であり、前記下部基板と前記下部電極との間に、少なくとも二層以上の金属層で形成され且つ隣り合う金属層が異種の金属からなる多層金属拡散防止膜を含む、太陽電池。 - 前記下部電極は前記Mo‐X‐Na三成分系複合金属層上に形成されたMo層をさらに含む、請求項8に記載の太陽電池。
- 前記多層金属拡散防止膜は金属層の間に酸化物層をさらに含む、請求項8または9に記載の太陽電池。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110057108A KR101228685B1 (ko) | 2011-06-13 | 2011-06-13 | Ci(g)s태양전지용 기판 및 이를 이용한 ci(g)s태양전지 |
KR1020110057116A KR101228666B1 (ko) | 2011-06-13 | 2011-06-13 | 다층 하부전극을 포함한 ci(g)s 태양전지용 기판 및 이를 이용한 ci(g)s 태양전지 |
KR10-2011-0057116 | 2011-06-13 | ||
KR10-2011-0057108 | 2011-06-13 | ||
PCT/KR2012/004573 WO2012173360A2 (ko) | 2011-06-13 | 2012-06-08 | 태양전지 기판 및 이를 이용한 태양전지 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014522583A JP2014522583A (ja) | 2014-09-04 |
JP5908073B2 true JP5908073B2 (ja) | 2016-04-26 |
Family
ID=47357579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014515716A Active JP5908073B2 (ja) | 2011-06-13 | 2012-06-08 | 太陽電池基板及びこれを用いた太陽電池 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20140130859A1 (ja) |
EP (1) | EP2720279A4 (ja) |
JP (1) | JP5908073B2 (ja) |
CN (1) | CN103733352A (ja) |
WO (1) | WO2012173360A2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI573284B (zh) * | 2015-03-26 | 2017-03-01 | 茂迪股份有限公司 | 太陽能電池、其模組及其製造方法 |
US10217877B2 (en) | 2015-07-27 | 2019-02-26 | Lg Electronics Inc. | Solar cell |
CN107452818A (zh) * | 2017-08-16 | 2017-12-08 | 蚌埠兴科玻璃有限公司 | 一种铜铟镓硒薄膜太阳能电池背电极及其制备方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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DE4442824C1 (de) * | 1994-12-01 | 1996-01-25 | Siemens Ag | Solarzelle mit Chalkopyrit-Absorberschicht |
US6258620B1 (en) * | 1997-10-15 | 2001-07-10 | University Of South Florida | Method of manufacturing CIGS photovoltaic devices |
US5942799A (en) * | 1997-11-20 | 1999-08-24 | Novellus Systems, Inc. | Multilayer diffusion barriers |
KR100366351B1 (ko) * | 2001-01-02 | 2002-12-31 | 삼성에스디아이 주식회사 | 태양전지의 후면전극부 형성방법 |
EP1365455A4 (en) * | 2001-01-31 | 2006-09-20 | Shinetsu Handotai Kk | SOLAR CELL AND METHOD FOR MANUFACTURING SAME |
WO2003069684A1 (fr) * | 2002-02-14 | 2003-08-21 | Honda Giken Kogyo Kabushiki Kaisha | Procédé de formation de couche absorbant la lumière |
US20060060237A1 (en) * | 2004-09-18 | 2006-03-23 | Nanosolar, Inc. | Formation of solar cells on foil substrates |
JP2006165386A (ja) * | 2004-12-09 | 2006-06-22 | Showa Shell Sekiyu Kk | Cis系薄膜太陽電池及びその作製方法 |
AT10578U1 (de) * | 2007-12-18 | 2009-06-15 | Plansee Metall Gmbh | Dunnschichtsolarzelle mit molybdan-haltiger ruckelektrodenschicht |
KR20110129392A (ko) * | 2009-02-15 | 2011-12-01 | 자콥 우드러프 | 균형 전구체(들)로부터 형성된 태양전지 흡수제층 |
JP5229901B2 (ja) * | 2009-03-09 | 2013-07-03 | 富士フイルム株式会社 | 光電変換素子、及び太陽電池 |
US8134069B2 (en) * | 2009-04-13 | 2012-03-13 | Miasole | Method and apparatus for controllable sodium delivery for thin film photovoltaic materials |
JP5512219B2 (ja) * | 2009-10-06 | 2014-06-04 | 富士フイルム株式会社 | 太陽電池 |
KR101081270B1 (ko) * | 2009-11-03 | 2011-11-08 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
US20110259413A1 (en) * | 2010-04-21 | 2011-10-27 | Stion Corporation | Hazy Zinc Oxide Film for Shaped CIGS/CIS Solar Cells |
US8772076B2 (en) * | 2010-09-03 | 2014-07-08 | Solopower Systems, Inc. | Back contact diffusion barrier layers for group ibiiiavia photovoltaic cells |
-
2012
- 2012-06-08 EP EP12800914.9A patent/EP2720279A4/en not_active Withdrawn
- 2012-06-08 US US14/126,115 patent/US20140130859A1/en not_active Abandoned
- 2012-06-08 CN CN201280039611.6A patent/CN103733352A/zh active Pending
- 2012-06-08 WO PCT/KR2012/004573 patent/WO2012173360A2/ko active Application Filing
- 2012-06-08 JP JP2014515716A patent/JP5908073B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN103733352A (zh) | 2014-04-16 |
EP2720279A2 (en) | 2014-04-16 |
WO2012173360A2 (ko) | 2012-12-20 |
WO2012173360A3 (ko) | 2013-03-28 |
JP2014522583A (ja) | 2014-09-04 |
EP2720279A4 (en) | 2014-12-24 |
US20140130859A1 (en) | 2014-05-15 |
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