JP5894833B2 - 渦電流センサ並びに研磨方法および装置 - Google Patents

渦電流センサ並びに研磨方法および装置 Download PDF

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Publication number
JP5894833B2
JP5894833B2 JP2012079555A JP2012079555A JP5894833B2 JP 5894833 B2 JP5894833 B2 JP 5894833B2 JP 2012079555 A JP2012079555 A JP 2012079555A JP 2012079555 A JP2012079555 A JP 2012079555A JP 5894833 B2 JP5894833 B2 JP 5894833B2
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Japan
Prior art keywords
coil
coils
eddy current
sensor
substrate
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Active
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JP2012079555A
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English (en)
Japanese (ja)
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JP2013211354A5 (https=
JP2013211354A (ja
Inventor
高橋　太郎
太郎 高橋
光男 多田
光男 多田
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Ebara Corp
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Ebara Corp
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Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2012079555A priority Critical patent/JP5894833B2/ja
Priority to TW102110868A priority patent/TWI543847B/zh
Priority to KR1020130033452A priority patent/KR101697812B1/ko
Priority to US13/853,023 priority patent/US9632061B2/en
Priority to CN201310110317.6A priority patent/CN103358222B/zh
Publication of JP2013211354A publication Critical patent/JP2013211354A/ja
Publication of JP2013211354A5 publication Critical patent/JP2013211354A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B24B49/105—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means using eddy currents
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/207—Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • H10P74/238—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement

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  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP2012079555A 2012-03-30 2012-03-30 渦電流センサ並びに研磨方法および装置 Active JP5894833B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012079555A JP5894833B2 (ja) 2012-03-30 2012-03-30 渦電流センサ並びに研磨方法および装置
TW102110868A TWI543847B (zh) 2012-03-30 2013-03-27 Eddy current sensor and grinding method
KR1020130033452A KR101697812B1 (ko) 2012-03-30 2013-03-28 와전류 센서 및 연마 방법 및 장치
US13/853,023 US9632061B2 (en) 2012-03-30 2013-03-28 Eddy current sensor and polishing method
CN201310110317.6A CN103358222B (zh) 2012-03-30 2013-03-29 涡电流传感器以及研磨方法和装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012079555A JP5894833B2 (ja) 2012-03-30 2012-03-30 渦電流センサ並びに研磨方法および装置

Publications (3)

Publication Number Publication Date
JP2013211354A JP2013211354A (ja) 2013-10-10
JP2013211354A5 JP2013211354A5 (https=) 2014-11-13
JP5894833B2 true JP5894833B2 (ja) 2016-03-30

Family

ID=49235625

Family Applications (1)

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JP2012079555A Active JP5894833B2 (ja) 2012-03-30 2012-03-30 渦電流センサ並びに研磨方法および装置

Country Status (5)

Country Link
US (1) US9632061B2 (https=)
JP (1) JP5894833B2 (https=)
KR (1) KR101697812B1 (https=)
CN (1) CN103358222B (https=)
TW (1) TWI543847B (https=)

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WO2025109944A1 (ja) * 2023-11-20 2025-05-30 株式会社荏原製作所 基板処理装置および基板処理方法

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9316618B2 (en) * 2014-03-26 2016-04-19 Olympus Ndt, Inc. Method for monitoring the integrity of an eddy current inspection channel
JP6369548B2 (ja) * 2014-07-24 2018-08-08 株式会社村田製作所 磁気センサ
JP6399873B2 (ja) * 2014-09-17 2018-10-03 株式会社荏原製作所 膜厚信号処理装置、研磨装置、膜厚信号処理方法、及び、研磨方法
US20160284461A1 (en) * 2015-03-28 2016-09-29 Intel IP Corporation Tuning inductance ratio of a passive device
DE102015209589A1 (de) 2015-05-26 2016-12-01 Wacker Chemie Ag Vorrichtung zur Förderung eines Produktstroms aus Polysiliciumbruch oder Polysiliciumgranulat
TW201710029A (zh) * 2015-09-01 2017-03-16 荏原製作所股份有限公司 渦電流檢測器
JP6779633B2 (ja) * 2016-02-23 2020-11-04 株式会社荏原製作所 研磨装置
HK1224137A (zh) * 2016-10-06 2017-08-11 陳偉權 號 用電量超負荷警報的裝置
WO2018080764A1 (en) * 2016-10-28 2018-05-03 Applied Materials, Inc. Core configuration with alternating posts for in-situ electromagnetic induction monitoring system
EP3321043A3 (en) * 2016-11-10 2018-10-10 Canon Kabushiki Kaisha Method of controlling holding apparatus, holding apparatus, and robot apparatus
WO2018135463A1 (ja) * 2017-01-20 2018-07-26 日本精機株式会社 渦電流式計器
JP6817896B2 (ja) * 2017-05-26 2021-01-20 株式会社荏原製作所 基板研磨装置および基板研磨方法
US11759912B2 (en) * 2017-12-26 2023-09-19 Ebara Corporation Magnetic element and eddy current sensor using the same
JP7244250B2 (ja) * 2017-12-26 2023-03-22 株式会社荏原製作所 磁性素子、及びそれを用いた渦電流式センサ
JP7084811B2 (ja) * 2018-07-13 2022-06-15 株式会社荏原製作所 研磨装置および研磨方法
DE102018211761A1 (de) * 2018-07-16 2020-01-16 MTU Aero Engines AG Vorrichtung mit einem Untersuchungsmittel zur zerstörungsfreien Untersuchung eines Bauteils und Verfahren zum Untersuchen eines Bauteils
JP7179586B2 (ja) * 2018-11-08 2022-11-29 株式会社荏原製作所 渦電流検出装置及び研磨装置
JP7291558B2 (ja) * 2019-07-03 2023-06-15 株式会社荏原製作所 渦電流センサ
US11536693B2 (en) * 2020-04-07 2022-12-27 Fbs, Inc. Folded flat flexible cable guided wave sensor
CN118786322A (zh) * 2022-05-20 2024-10-15 华为技术有限公司 测量导电膜的厚度的装置和传感器
CN115415929B (zh) * 2022-08-30 2024-04-19 中国船舶重工集团公司第七0七研究所 一种用于球铰链球面组合研磨控制系统及使用方法
CN115464556B (zh) * 2022-09-14 2024-01-26 清华大学 一种金属膜厚测量方法和化学机械抛光设备
CN115319634B (zh) * 2022-10-14 2023-03-07 杭州众硅电子科技有限公司 一种涡流终点检测装置及方法
JP2024092231A (ja) 2022-12-26 2024-07-08 株式会社荏原製作所 渦電流センサ、研磨装置および膜厚検出方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2410047A1 (de) * 1974-03-02 1975-09-11 Nix Steingroeve Elektro Physik Elektromagnetischer schichtdickenmesser mit umschaltbarer mess-frequenz
JP3276295B2 (ja) * 1996-10-09 2002-04-22 三菱重工業株式会社 渦電流探傷装置
JP2008032575A (ja) * 2006-07-29 2008-02-14 Nippon Hihakai Kensa Kk 渦電流測定用プローブ及びそれを用いた探傷装置
JP2009036682A (ja) * 2007-08-02 2009-02-19 Toyota Motor Corp 渦電流センサ、硬化層深さ検査装置及び硬化層深さ検査方法
JP5513795B2 (ja) 2009-07-16 2014-06-04 株式会社荏原製作所 研磨方法および装置
TWI572441B (zh) * 2008-08-05 2017-03-01 荏原製作所股份有限公司 硏磨方法及裝置
US20110124269A1 (en) * 2009-07-16 2011-05-26 Mitsuo Tada Eddy current sensor and polishing method and apparatus
US8657644B2 (en) * 2009-07-16 2014-02-25 Ebara Corporation Eddy current sensor and polishing method and apparatus
JP5730747B2 (ja) * 2010-12-10 2015-06-10 株式会社荏原製作所 渦電流センサ並びに研磨方法および装置
JP5411084B2 (ja) * 2010-08-05 2014-02-12 株式会社東海理化電機製作所 回転角度検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025109944A1 (ja) * 2023-11-20 2025-05-30 株式会社荏原製作所 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
TW201347911A (zh) 2013-12-01
KR101697812B1 (ko) 2017-01-18
KR20130111403A (ko) 2013-10-10
CN103358222A (zh) 2013-10-23
JP2013211354A (ja) 2013-10-10
TWI543847B (zh) 2016-08-01
CN103358222B (zh) 2017-03-01
US20130260645A1 (en) 2013-10-03
US9632061B2 (en) 2017-04-25

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