JP5892473B2 - A surface-coated cutting tool with a hard coating layer that exhibits excellent peeling and chipping resistance in high-speed intermittent cutting. - Google Patents
A surface-coated cutting tool with a hard coating layer that exhibits excellent peeling and chipping resistance in high-speed intermittent cutting. Download PDFInfo
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- JP5892473B2 JP5892473B2 JP2012201904A JP2012201904A JP5892473B2 JP 5892473 B2 JP5892473 B2 JP 5892473B2 JP 2012201904 A JP2012201904 A JP 2012201904A JP 2012201904 A JP2012201904 A JP 2012201904A JP 5892473 B2 JP5892473 B2 JP 5892473B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
Description
この発明は、各種の鋼や鋳鉄などの切削加工を、高速で、かつ、切刃に断続的・衝撃的負荷が作用する断続切削条件で行った場合でも、硬質被覆層がすぐれた耐剥離性と耐チッピング性を発揮し、長期に亘ってすぐれた耐摩耗性を示す表面被覆切削工具（以下、被覆工具という）に関するものである。 This invention has excellent resistance to peeling even when various cutting processes such as steel and cast iron are performed at high speed and under intermittent cutting conditions in which intermittent and impact loads are applied to the cutting edge. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits chipping resistance and exhibits excellent wear resistance over a long period of time.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなるＴｉ化合物層、
（ｂ）上部層が、化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム層（以下、Ａｌ２Ｏ３層で示す）、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆工具が知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). And a Ti compound layer composed of one or more of a carbonitride oxide (hereinafter referred to as TiCNO) layer,
(B) an aluminum oxide layer (hereinafter referred to as an Al 2 O 3 layer) having an α-type crystal structure in a state where the upper layer is chemically vapor-deposited
A coated tool formed by vapor-depositing the hard coating layer constituted by (a) and (b) is known.
しかし、上記従来の被覆工具は、例えば各種の鋼や鋳鉄などの連続切削や断続切削では優れた耐摩耗性を発揮するが、これを、高速断続切削に用いた場合には、被覆層の剥離、チッピングが発生しやすく、工具寿命が短命になるという問題点があった。
そこで、被覆層のチッピング、剥離の発生を抑制することを目的として、硬質被覆層の層構造については各種の提案がなされている。
However, the above conventional coated tools exhibit excellent wear resistance in continuous cutting and intermittent cutting of various steels and cast irons, for example, but when this is used for high-speed intermittent cutting, the coating layer is peeled off. There is a problem that chipping is likely to occur and the tool life is shortened.
Accordingly, various proposals have been made for the layer structure of the hard coating layer for the purpose of suppressing the occurrence of chipping and peeling of the coating layer.
例えば、特許文献１に示すように、工具基体の表面に、内側層として、表面性状が平坦なＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層のうちの少なくともいずれか１種、外側層として、表面性状が平坦なＡｌ２Ｏ３層を被覆した被覆工具において、内側層と外側その間に、表面性状が先鋭化針状結晶のＴｉＣＯ層、ＴｉＣＮＯ層のうちの少なくともいずれかを中間層として形成することにより、耐チッピング性の改善を図ることが提案されている。 For example, as shown in Patent Document 1, at least one of a TiC layer, a TiN layer, and a TiCN layer having a flat surface property as an inner layer is formed on the surface of the tool base, and a surface property is flat as an outer layer. In a coated tool coated with a new Al 2 O 3 layer, by forming at least one of a TiCO layer and a TiCNO layer having a sharpened needle crystal surface as an intermediate layer between the inner layer and the outer surface, the anti-resistance It has been proposed to improve chipping.
また、例えば、特許文献２に示すように、工具基体の表面に、下部層としてのＴｉ化合物層、上部層としてのＡｌ２Ｏ３層を被覆した被覆工具において、電界放出型走査電子顕微鏡を用い、表面研磨面の法線に対して、上部層のＡｌ２Ｏ３結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、傾斜角度数分布グラフを作成した場合、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、０〜１０度の範囲内に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占めるＡｌ２Ｏ３層で上部層を構成することにより、耐チッピング性の向上を図ることが提案されている。 Further, for example, as shown in Patent Document 2, a field emission scanning electron microscope is used in a coated tool in which the surface of a tool base is coated with a Ti compound layer as a lower layer and an Al 2 O 3 layer as an upper layer. When the inclination angle formed by the normal line of the (0001) plane which is the crystal plane of the Al 2 O 3 crystal grains of the upper layer is measured with respect to the normal line of the surface polished surface, and an inclination angle number distribution graph is created, The highest peak is present in the inclination angle section within the range of 0 to 10 degrees, and the total ratio of the frequencies existing within the range of 0 to 10 degrees is a ratio of 45% or more of the entire degrees in the inclination angle frequency distribution graph. It has been proposed to improve the chipping resistance by constituting the upper layer with the occupied Al 2 O 3 layer.
さらに、例えば、特許文献３に示すように、工具基体の表面に、下部層としてのＴｉ化合物層、上部層としてのＡｌ２Ｏ３層を被覆し、さらに、下部層と上部層との間にＡｌ２Ｏ３層からなる補強層を介在形成した被覆工具において、上部層は、電界放出型走査電子顕微鏡を用い、表面研磨面の法線に対して、上部層のＡｌ２Ｏ３結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、傾斜角度数分布グラフを作成した場合、０〜１５度の範囲内の傾斜角区分に最高ピークが存在すると共に、０〜１５度の範囲内に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の５０％以上の割合を占めるＡｌ２Ｏ３層で構成し、さらに、補強層は、同じく表面研磨面の法線に対して、（０００１）面の法線がなす傾斜角を測定し、傾斜角度数分布グラフ作成した場合、７５〜９０度の範囲内の傾斜角区分に最高ピークが存在すると共に、７５〜９０度の範囲内に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の５０％以上の割合を占めるＡｌ２Ｏ３層で構成することにより、耐チッピング性の向上を図ることが提案されている。 Further, for example, as shown in Patent Document 3, the surface of the tool base is coated with a Ti compound layer as a lower layer and an Al 2 O 3 layer as an upper layer, and further, between the lower layer and the upper layer. In the coated tool in which the reinforcing layer composed of the Al 2 O 3 layer is interposed, the upper layer is formed by using a field emission scanning electron microscope, and the Al 2 O 3 crystal grains of the upper layer with respect to the normal line of the surface polished surface. When the inclination angle formed by the normal of the (0001) plane which is a crystal plane is measured and an inclination angle number distribution graph is created, the highest peak exists in the inclination angle section within the range of 0 to 15 degrees, and The total ratio of the frequencies existing in the range of 15 degrees is composed of an Al 2 O 3 layer that occupies a ratio of 50% or more of the entire frequencies in the inclination angle frequency distribution graph. The normal of the (0001) plane is When the inclination angle is measured and the inclination angle number distribution graph is created, the highest peak exists in the inclination angle section within the range of 75 to 90 degrees, and the total ratio of the frequencies existing within the range of 75 to 90 degrees is It has been proposed to improve the chipping resistance by constituting the Al 2 O 3 layer accounting for 50% or more of the entire frequency in the inclination angle distribution graph.
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化すると共に、断続切削等で切刃に高負荷が作用する傾向にあるが、上記の従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを高速断続切削条件で用いた場合には、硬質被覆層を構成するＴｉ化合物層からなる下部層とＡｌ２Ｏ３層からなる上部層の付着強度が不十分となり、上部層と下部層間での剥離、チッピング等の異常損傷の発生により、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been dramatically improved, while on the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work. However, in the above-mentioned conventional coated tool, there is no problem when it is used for continuous cutting or intermittent cutting under normal conditions such as steel or cast iron. When used under high-speed interrupted cutting conditions, the adhesion strength between the lower layer composed of the Ti compound layer and the upper layer composed of the Al 2 O 3 layer constituting the hard coating layer becomes insufficient, and peeling between the upper layer and the lower layer occurs. At present, the service life is reached in a relatively short time due to the occurrence of abnormal damage such as chipping.
そこで、本発明者等は、上述のような観点から、Ｔｉ化合物層からなる下部層とＡｌ２Ｏ３層からなる上部層の付着強度を改善し、もって、剥離、チッピング等の異常損傷の発生を防止するとともに、工具寿命の長寿命化を図るべく鋭意研究を行った結果、
Ｔｉ化合物層からなる下部層とＡｌ２Ｏ３層からなる上部層とを被覆形成した被覆工具において、下部層の最表面層直上のＡｌ２Ｏ３結晶粒の結晶組織と結晶方位傾斜角度分布性を制御することで、上部層と下部層の付着強度を向上させ得るとともに、さらに、上部層全体のＡｌ２Ｏ３結晶粒についての結晶方位傾斜角度分布性を制御することで、上部層全体の高温硬さと高温強度を維持することができるため、切刃に高負荷・衝撃的負荷が作用する高速断続切削に用いた場合でも、上部層と下部層間での剥離、チッピング等の異常損傷の発生が抑え、長期の使用にわたってすぐれた切削性能を発揮する被覆工具を得られることを見出したのである。
In view of the above, the present inventors have improved the adhesion strength of the lower layer made of the Ti compound layer and the upper layer made of the Al 2 O 3 layer, thereby causing abnormal damage such as peeling and chipping. As a result of earnest research to improve tool life and prevent tool life,
In a coated tool formed by coating a lower layer made of a Ti compound layer and an upper layer made of an Al 2 O 3 layer, the crystal structure and crystal orientation inclination angle distribution of the Al 2 O 3 crystal grains immediately above the outermost surface layer of the lower layer By controlling the above, it is possible to improve the adhesion strength between the upper layer and the lower layer, and further, by controlling the crystal orientation inclination angle distribution of the Al 2 O 3 crystal grains of the entire upper layer, High temperature hardness and high strength can be maintained, so even when used for high-speed intermittent cutting where a high load or impact load is applied to the cutting edge, abnormal damage such as peeling or chipping between the upper and lower layers occurs. It was found that it is possible to obtain a coated tool that suppresses the above and exhibits excellent cutting performance over a long period of use.
この発明は、上記知見に基づいてなされたものであって、
「（１） 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
（ａ）下部層として、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの合計平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、２〜１５μｍの平均層厚を有し、化学蒸着した状態でα型の結晶構造を有するＡｌ２Ｏ３層、
上記（ａ）、（ｂ）からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ｃ）下部層の最表面層と上部層との界面における上部層のＡｌ２Ｏ３結晶粒は、くさび形結晶組織を有し、該くさび形結晶組織の凹凸部の平均高低差が０．５〜２．０μｍ、凸部の平均間隔が２〜５μｍであり、該くさび形結晶組織を有するＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である｛１０−１０｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、０〜１０度の範囲内の傾斜角区分に最高ピークが存在するとともに、０〜１０度の範囲内の傾斜角区分に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の２０〜４０％の割合を占め、
（ｄ）上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、０〜１０度の範囲内の傾斜角区分に最高ピークが存在するとともに、０〜１０度の範囲内の傾斜角区分に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占めることを特徴とする表面被覆切削工具。
（２） 上記（ｃ）のくさび形結晶組織は、平均粒径０．０５〜１μｍのＡｌ２Ｏ３結晶粒の集合体によって構成されていることを特徴とする前記（１）に記載の表面被覆切削工具。」
に特徴を有するものである。
This invention has been made based on the above findings,
“(1) On the surface of a tool base made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A) As a lower layer, it is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide layer, and a total average layer of 3 to 20 μm A Ti compound layer having a thickness;
(B) As an upper layer, an Al 2 O 3 layer having an average layer thickness of 2 to 15 μm and having an α-type crystal structure in a state of chemical vapor deposition,
In the surface-coated cutting tool in which the hard coating layer composed of the above (a) and (b) is formed by vapor deposition,
(C) The Al 2 O 3 crystal grains of the upper layer at the interface between the outermost surface layer and the upper layer of the lower layer have a wedge-shaped crystal structure, and the average height difference of the uneven portions of the wedge-shaped crystal structure is 0. The Al 2 O 3 crystal grains having a wedge-shaped crystal structure having an average interval of 5 to 2.0 μm and a convex portion of 2 to 5 μm, using a field emission scanning electron microscope and an electron beam backscatter diffraction apparatus, An electron beam is irradiated to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the cross-section polished surface, and the crystal face of the crystal grain is {10− Measure the tilt angle formed by the normal of the 10} plane, and divide the measured tilt angles within the range of 0 to 45 degrees out of the measured tilt angles into pitches of 0.25 degrees and exist in each section 0 to 10 when represented by an inclination angle distribution graph formed by counting the frequencies to be The highest peak is present in the inclination angle section within the range of degrees, and the total ratio of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is 20 to 40% of the entire degrees in the inclination angle distribution graph. Occupy a proportion
(D) About the Al 2 O 3 crystal grains of the entire upper layer, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, the crystal grains having a hexagonal crystal lattice existing within the measurement range of the cross-section polished surface Individually irradiating an electron beam, measuring the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal of the surface of the tool base, When the measured inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, and represented by an inclination angle number distribution graph obtained by counting the frequencies existing in each division, 0 to 10 The highest peak exists in the inclination angle section within the range of degrees, and the total ratio of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is a ratio of 60% or more of the entire degrees in the inclination angle distribution graph Surface coated cutting characterized by Ingredients.
(2) The surface according to (1), wherein the wedge-shaped crystal structure of (c) is composed of an aggregate of Al 2 O 3 crystal grains having an average particle diameter of 0.05 to 1 μm. Coated cutting tool. "
It has the characteristics.
以下に、この発明の被覆工具の硬質被覆層の構成層について詳細に説明する。
（ａ）Ｔｉ化合物層（下部層）：
Ｔｉ化合物層（例えば、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層およびＴｉＣＮＯ層）は、基本的にはα型の結晶構造を有するＡｌ２Ｏ３（以下、単に「Ａｌ２Ｏ３」で示す）層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようになるほか、工具基体、Ａｌ２Ｏ３層のいずれにも密着し、硬質被覆層の工具基体に対する密着性を維持する作用を有するが、その合計平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その合計平均層厚が２０μｍを越えると、特に高熱発生を伴う高速断続切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その合計平均層厚を３〜２０μｍと定めた。
Hereinafter, the constituent layers of the hard coating layer of the coated tool of the present invention will be described in detail.
(A) Ti compound layer (lower layer):
The Ti compound layer (eg, TiC layer, TiN layer, TiCN layer, TiCO layer, and TiCNO layer) is basically Al 2 O 3 having an α-type crystal structure (hereinafter simply referred to as “Al 2 O 3 ”). ) Existing as a lower layer of the layer, the hard coating layer has high temperature strength due to its excellent high temperature strength, and also adheres to both the tool base and the Al 2 O 3 layer, and the hard coating layer However, if the total average layer thickness is less than 3 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, if the total average layer thickness exceeds 20 μm, particularly high heat In high-speed intermittent cutting with generation, it becomes easy to cause thermoplastic deformation, which causes uneven wear. Therefore, the total average layer thickness is set to 3 to 20 μm.
（ｂ）下部層の最表面層：
この発明では、下部層の最表面層に、例えば、以下のような処理を施すことにより、下部層表面直上に形成される上部層のＡｌ２Ｏ３結晶粒を、所定の結晶組織および方位形態（後記参照）になるよう蒸着することができる。
即ち、まず、通常の化学蒸着装置を使用して、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層およびＴｉＣＮＯ層のうちの１層または２層以上からなる種々のＴｉ化合物層を蒸着形成した後、予備酸化処理条件として、
反応ガス組成（容量％）：ＣＯ ５〜１０％、ＣＯ２ ５〜１０％、残部Ｈ２、
雰囲気温度：９００〜９６０ ℃、
雰囲気圧力：３〜１０ ｋＰａ、
時間：２〜５ｍｉｎ、
という条件でＣＯとＣＯ２混合ガスによる予備酸化処理を行うことによって、次のＡｌ２Ｏ３層成膜工程におけるＡｌ２Ｏ３核生成に際し、所定の結晶組織および所定方位のＡｌ２Ｏ３核を分散形成せしめることができる。
(B) The outermost surface layer of the lower layer:
In the present invention, the uppermost Al 2 O 3 crystal grains formed immediately above the surface of the lower layer are subjected to, for example, the following treatment on the outermost surface layer of the lower layer, so that a predetermined crystal structure and orientation form are obtained. It can be vapor-deposited to be (see below).
That is, first, after forming various Ti compound layers composed of one or more of TiC layer, TiN layer, TiCN layer, TiCO layer and TiCNO layer by vapor deposition using a normal chemical vapor deposition apparatus, As pre-oxidation treatment conditions,
Reaction gas composition (volume%): CO 5-10%, CO 2 5-10%, balance H 2 ,
Atmospheric temperature: 900-960 ° C.
Atmospheric pressure: 3-10 kPa,
Time: 2-5min,
By performing the preliminary oxidation treatment with CO and CO 2 mixed gas with the proviso that, when Al 2 O 3 nucleation in the next Al 2 O 3 layer forming step, a predetermined crystal structure and a predetermined orientation of the Al 2 O 3 nuclei Can be dispersedly formed.
（ｃ）下部層の最表面層直上のＡｌ２Ｏ３結晶粒：
上記（ｂ）で成膜した下部層の表面に、例えば、初期成長条件として、
反応ガス組成（容量％）：ＡｌＣｌ３ １〜３％、ＣＯ２ ５〜１０％、ＨＣｌ ０．５〜２．０％、Ｈ２Ｓ ０．１〜０．３％、残部Ｈ２、
反応雰囲気温度：９６０〜１０００ ℃、
反応雰囲気圧力：５〜１５ ｋＰａ、
時間：５〜３０ ｍｉｎ、
の条件でＡｌ２Ｏ３を蒸着することにより、下部層の最表面層直上に、所定の結晶組織（平均粒径が０．０５〜１μｍのＡｌ２Ｏ３結晶粒の集合体からなるくさび形結晶組織）および所定の方位（形態工具基体の表面の法線に対して、｛１０−１０｝面の法線がなす傾斜角が０〜１０度の範囲内にある結晶粒の度数の合計割合が２０〜４０％を有するＡｌ２Ｏ３核を分散形成することができる。
(C) Al 2 O 3 crystal grains immediately above the outermost surface layer of the lower layer:
On the surface of the lower layer formed in the above (b), for example, as an initial growth condition,
Reaction gas composition (% by volume): AlCl 3 1-3%, CO 2 5-10%, HCl 0.5-2.0%, H 2 S 0.1-0.3%, balance H 2 ,
Reaction atmosphere temperature: 960 to 1000 ° C.
Reaction atmosphere pressure: 5 to 15 kPa,
Time: 5-30 min,
By vapor-depositing Al 2 O 3 under the conditions of the above, a wedge shape comprising a predetermined crystal structure (an aggregate of Al 2 O 3 crystal grains having an average grain size of 0.05 to 1 μm) is formed directly on the outermost surface layer of the lower layer. Crystal structure) and a predetermined orientation (the total ratio of the frequency of crystal grains having an inclination angle formed by a normal of the {10-10} plane within a range of 0 to 10 degrees with respect to the normal of the surface of the shape tool substrate) Can form Al 2 O 3 nuclei with 20-40%.
即ち、下部層の最表面層直上（上部層と下部層の界面直上）に形成した上記（ｃ）のＡｌ２Ｏ３結晶粒のうち、下部層の最表面層から膜厚方向１μｍ以内のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて、その結晶組織を観察すると、平均粒径０．０５〜１μｍのＡｌ２Ｏ３結晶粒を観察することができ、また、このＡｌ２Ｏ３結晶粒が集合して、図１に概略図示されるくさび形結晶組織を形成していることが観察される。
以下にくさび型結晶組織について説明する。下部層の最表面層直上に成長した｛１０−１０｝面の法線がなす傾斜角が０〜１０度の範囲内にあるＡｌ２Ｏ３結晶粒において、それぞれ隣接する結晶粒相互間の界面における｛１０−１０｝面の法線同士の交わる角度を求め、角度差が２０度未満の範囲にある場合は、互いがくさび型結晶構造をなしており、角度差が２０度以上の場合、その結晶粒界がくさび型結晶組織と後述する上部層Ａｌ２Ｏ３結晶粒を分ける箇所となる。また、そのくさび型結晶組織がＡｌ２Ｏ３皮膜の再表面に露出することはない。
このようなくさび形結晶組織が形成される理由は、下部層のＴｉ化合物の最表面層（特にＴｉＣＮＯ層やＴｉＣＯ層）上にＡｌ２Ｏ３結晶粒が成長する際に、成長初期ではＴｉ化合物の最表面層の格子面とエピタキシャル関係を保ちながら成長するが、Ａｌ２Ｏ３層の膜厚が厚くなるに従って、Ｔｉ化合物の最表面層の格子面や結晶組織の影響が小さくなり、最終的に凹凸を有したくさび型形状が形成されるためと推察される。
そして、平均粒径０．０５〜１μｍのＡｌ２Ｏ３結晶粒の集合体によりくさび形結晶組織を構成するＡｌ２Ｏ３結晶粒の平均粒径が０．０５μｍ未満である場合には、下部層直上Ｔｉ化合物表面の凹凸に対する充填性が悪くなるため、下部層直上Ｔｉ化合物とＡｌ２Ｏ３層間の付着強度が低下し、一方、Ａｌ２Ｏ３結晶粒の平均粒径が１μｍを超える場合には、その上層に成長するＡｌ２Ｏ３結晶の粒径が大きくなり、耐チッピング性が低下するとともに、くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒とその上部層のＡｌ２Ｏ３層の界面にポアが形成されやすくなり、そのため上部層の硬さ、強度が低下するともに、上部層と中間層との付着強度が低下するため、くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒の平均粒径は、０．０５〜１μｍの範囲内であることが望ましい。
また、この発明でいうくさび形結晶組織とは、図１に示すように、種々の粒径を持つＡｌ２Ｏ３結晶粒の集合体により形成されるものであり、くさび形結晶組織全体としては膜厚方向に凹凸を有した構造と定義される。
凹凸部の平均高低差（図１におけるｂ）は０．５〜２．０μｍの範囲であることが必要であり、０．５μｍ未満である場合は、くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒とその上部層のＡｌ２Ｏ３層の界面の接触する表面積の増大が見込めず、また平均高低差が２．０μｍを超える場合には、その上層に成長するＡｌ２Ｏ３層の方位形態が所望のものとならなくなるため、凹凸部の平均高低差は０．５〜２．０μｍとした。
凸部の平均間隔（図１におけるａ）は２〜５μｍの範囲であることが必要であり、２μｍ以下である場合は、くさび形結晶組織の凹部とその上部に成長するＡｌ２Ｏ３層の界面にポアが形成しやすくなり、また凸部の平均間隔が５μｍ以上である場合には、くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒とその上部層のＡｌ２Ｏ３層の界面の接触する表面積の増大が見込めないため、凸部の平均間隔を２〜５μｍとした。
本願発明では、下部層の最表面層直上（上部層と下部層の界面直上）に上記のくさび形結晶組織が形成されることによって、くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒とその上部層のＡｌ２Ｏ３層の界面の接触する表面積が増大することから、上部層と下部層間の密着性向上が図られる。
That is, among the Al 2 O 3 crystal grains of the above (c) formed immediately above the outermost surface layer of the lower layer (immediately above the interface between the upper layer and the lower layer), Al within 1 μm in the film thickness direction from the uppermost surface layer of the lower layer About 2 O 3 crystal grains, using a field emission scanning electron microscope and the electron backscatter diffraction apparatus, when observing the crystal structure, to observe the Al 2 O 3 crystal grains having an average grain size of 0.05~1μm It is observed that the Al 2 O 3 crystal grains are aggregated to form a wedge-shaped crystal structure schematically illustrated in FIG.
The wedge-shaped crystal structure will be described below. In the Al 2 O 3 crystal grains in which the inclination angle formed by the normal line of the {10-10} plane grown immediately above the outermost surface layer of the lower layer is in the range of 0 to 10 degrees, the interfaces between the adjacent crystal grains respectively The angle at which the normals of the {10-10} planes intersect is determined, and when the angle difference is in the range of less than 20 degrees, each has a wedge-shaped crystal structure, and when the angle difference is 20 degrees or more, The crystal grain boundary is a part that separates the wedge-shaped crystal structure from the upper layer Al 2 O 3 crystal grains described later. Further, the wedge-shaped crystal structure is not exposed on the resurface of the Al 2 O 3 film.
The reason why such a wedge-shaped crystal structure is formed is that when Al 2 O 3 crystal grains grow on the outermost surface layer (particularly, TiCNO layer or TiCO layer) of the Ti compound in the lower layer, the Ti compound is initially grown. While growing in an epitaxial relationship with the lattice plane of the outermost surface layer, the influence of the lattice plane and crystal structure of the outermost surface layer of the Ti compound decreases as the thickness of the Al 2 O 3 layer increases, and the final This is probably because a wedge-shaped shape having irregularities is formed.
When the average grain size of Al 2 O 3 crystal grains constituting the wedge-shaped crystal structure is an aggregate of Al 2 O 3 crystal grains having an average grain size of 0.05 to 1 μm, When the unevenness on the surface of the Ti compound directly above the layer becomes poor, the adhesion strength between the Ti compound directly above the lower layer and the Al 2 O 3 layer decreases, while the average grain size of the Al 2 O 3 crystal grains exceeds 1 μm the particle size of the Al 2 O 3 crystal grown thereon is increased, with the chipping resistance is lowered, Al 2 O 3 crystal grains and Al 2 O 3 of the upper layer of the wedge-shaped crystal structure Since pores are easily formed at the interface of the layers, the hardness and strength of the upper layer are lowered, and the adhesion strength between the upper layer and the intermediate layer is lowered. Therefore, Al 2 O 3 crystals constituting a wedge-shaped crystal structure The average grain size is It is preferably in the range of 0.05 to 1 [mu] m.
In addition, the wedge-shaped crystal structure referred to in the present invention is formed by an aggregate of Al 2 O 3 crystal grains having various grain sizes as shown in FIG. It is defined as a structure having irregularities in the film thickness direction.
The average height difference (b in FIG. 1) of the concavo-convex portion needs to be in the range of 0.5 to 2.0 μm, and when it is less than 0.5 μm, Al 2 O 3 constituting the wedge-shaped crystal structure. When the surface area where the crystal grain and the Al 2 O 3 layer of the upper layer are in contact with each other cannot be expected to increase, and the average height difference exceeds 2.0 μm, the orientation of the Al 2 O 3 layer grown on the upper layer Since the shape does not become a desired one, the average height difference of the concavo-convex portions was set to 0.5 to 2.0 μm.
The average interval between the convex portions (a in FIG. 1) needs to be in the range of 2 to 5 μm, and when it is 2 μm or less, the concave portion of the wedge-shaped crystal structure and the Al 2 O 3 layer grown on the concave portion are formed. interfacial pores tends to form on, and the average interval of the convex portions in the case where 5μm or more, the interface between the Al 2 O 3 layer of Al 2 O 3 grain and its upper layer constituting the wedge-shaped crystal structure Since the increase of the surface area to contact cannot be expected, the average interval between the convex portions was set to 2 to 5 μm.
In the present invention, the above wedge-shaped crystal structure is formed immediately above the outermost surface layer of the lower layer (immediately above the interface between the upper layer and the lower layer), so that the Al 2 O 3 crystal grains constituting the wedge-shaped crystal structure and the Since the surface area in contact with the interface of the upper Al 2 O 3 layer is increased, the adhesion between the upper layer and the lower layer can be improved.
また、下部層の最表面層直上（上部層と下部層の界面直上）に形成した上記（ｃ）のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射することにより、工具基体の表面の法線に対して、前記結晶粒の結晶面である｛１０−１０｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、下部層の最表面層からくさび形結晶組織の凸部の膜厚方向の高さまでのＡｌ２Ｏ３結晶粒について、その傾斜角が０〜１０度の範囲内にある結晶粒の度数の合計割合を求めると、０〜１０度の範囲内の傾斜角区分に最高ピークが存在するとともに、０〜１０度の範囲内の傾斜角区分に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の２０〜４０％の割合を占める方位形態（以下、「界面方位形態」という）を有するＡｌ２Ｏ３結晶粒の度数の合計割合は、Ｔｉ化合物層の最上層の表面組織および、上記予備酸化、初期成長における蒸着条件のうちの、特に、ＣＯ２ガス容量によって影響される。
上記界面方位形態を有するＡｌ２Ｏ３結晶粒の度数の合計割合が傾斜角度数分布グラフでの度数の合計の２０％未満であると、上部層Ａｌ２Ｏ３結晶粒の縦長柱状組織が層厚方向に対して、傾斜した状態で形成され、微細な縦長柱状結晶粒でなくなり、上部層全体としての所望の方位形態が得られなくなる。一方、上記界面方位形態を有するＡｌ２Ｏ３結晶粒の度数の合計割合が４０％を超えると、上部層Ａｌ２Ｏ３の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の傾斜角度数分布グラフでの度数の合計割合が上部層全体のＡｌ２Ｏ３結晶粒の全度数に対して６０％未満となり、上部層Ａｌ２Ｏ３の高温強度が低下する。
したがって、上部層と下部層との界面直上における上部層のＡｌ２Ｏ３結晶粒について、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、上記界面方位形態を有するＡｌ２Ｏ３結晶粒の度数の合計割合を２０〜４０％と定めた。
図２に、下部層と上部層の界面直上のＡｌ２Ｏ３結晶粒について測定した界面方位形態Ａｌ２Ｏ３結晶粒の傾斜角度数分布グラフの一例を示す。なお、界面方位形態Ａｌ２Ｏ３結晶粒とは、前記結晶粒の結晶面である｛１０−１０｝面の法線がなす傾斜角を測定し、下部層の最表面層からくさび形結晶組織の凸部の膜厚方向の高さまでのＡｌ２Ｏ３結晶粒について、その傾斜角が０〜１０度の範囲内にある結晶粒の度数の合計割合を求めた場合、上０〜１０度の範囲内の傾斜角区分に最高ピークが存在するとともに、０〜１０度の範囲内の傾斜角区分に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の２０〜４０％の割合を占める方位形態を有する結晶粒のことである。
In addition, for the Al 2 O 3 crystal grains of (c) formed just above the outermost surface layer of the lower layer (immediately above the interface between the upper layer and the lower layer), a field emission scanning electron microscope and an electron beam backscatter diffraction device were used. By irradiating an electron beam to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the cross-sectional polished surface, the crystal plane of the crystal grain is normal to the surface normal of the tool base { The inclination angle formed by the normal of the 10-10} plane is measured, and the measurement inclination angles within the range of 0 to 45 degrees are divided into the 0.25 degree pitches among the measurement inclination angles, When the Al 2 O 3 crystal grains from the outermost surface layer of the lower layer to the height in the film thickness direction of the convex portion of the wedge-shaped crystal structure are represented by The degree of the frequency of crystal grains whose inclination angle is in the range of 0 to 10 degrees. When the ratio is obtained, the highest peak exists in the inclination angle section within the range of 0 to 10 degrees, and the total ratio of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is calculated in the inclination angle number distribution graph. The total ratio of the frequency of Al 2 O 3 crystal grains having an orientation form (hereinafter referred to as “interface orientation form”) occupying a ratio of 20 to 40% of the entire frequency is the surface texture of the uppermost layer of the Ti compound layer and the above Of the deposition conditions in the pre-oxidation and initial growth, it is particularly affected by the CO 2 gas capacity.
When the total ratio of the frequencies of the Al 2 O 3 crystal grains having the interface orientation form is less than 20% of the total frequency in the tilt angle distribution graph, the vertically long columnar structure of the upper layer Al 2 O 3 crystal grains is It is formed in an inclined state with respect to the thickness direction, and is not a fine vertical columnar crystal grain, and a desired orientation form as the entire upper layer cannot be obtained. On the other hand, when the total ratio of the frequency of the Al 2 O 3 crystal grains having the interface orientation form exceeds 40%, the slope of the Al 2 O 3 crystal grains having the (0001) orientation tilt angle distribution of the upper layer Al 2 O 3 The total ratio of the frequencies in the angle distribution graph is less than 60% with respect to the total frequency of the Al 2 O 3 crystal grains of the entire upper layer, and the high-temperature strength of the upper layer Al 2 O 3 is lowered.
Therefore, when the Al 2 O 3 crystal grains in the upper layer just above the interface between the upper layer and the lower layer are represented by an inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the interface orientation form is The total ratio of the frequency of the Al 2 O 3 crystal grains is 20 to 40%.
FIG. 2 shows an example of an inclination angle number distribution graph of the interface orientation form Al 2 O 3 crystal grains measured for the Al 2 O 3 crystal grains immediately above the interface between the lower layer and the upper layer. The interface orientation form Al 2 O 3 crystal grains are measured by measuring the inclination angle formed by the normal of the {10-10} plane which is the crystal plane of the crystal grains, and the wedge-shaped crystal structure from the outermost surface layer of the lower layer. For the Al 2 O 3 crystal grains up to the height in the film thickness direction of the convex part of the above, when the total ratio of the frequency of the crystal grains whose inclination angle is in the range of 0 to 10 degrees is determined, the upper 0 to 10 degrees The highest peak is present in the inclination angle section within the range, and the total ratio of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is a ratio of 20 to 40% of the entire frequency in the inclination angle distribution graph. It is a crystal grain having an occupied orientation form.
（ｄ）上部層のＡｌ２Ｏ３結晶粒：
下部層の最表面層直上に上記（ｃ）のＡｌ２Ｏ３核を蒸着形成した後、上部層のＡｌ２Ｏ３結晶粒を以下の条件で形成する。
即ち、上記（ｃ）でＡｌ２Ｏ３核を蒸着形成した後、
反応ガス組成（容量％）：ＡｌＣｌ３ １〜３％、ＣＯ２ ３〜１０％、ＨＣｌ １〜３％、Ｈ２Ｓ ０．２５〜０．５％、残部Ｈ２、
反応雰囲気温度：９６０〜１０００ ℃、
反応雰囲気圧力：５〜１５ ｋＰａ、
時間：（目標とする上部層層厚になるまで）
という条件で蒸着することにより、層厚方向とほぼ平行に成長した微細な縦長柱状Ａｌ２Ｏ３結晶粒で構成された上部層が成膜される。
(D) Al 2 O 3 crystal grains in the upper layer:
After the Al 2 O 3 nucleus of (c) is deposited on the uppermost surface layer of the lower layer, the upper layer Al 2 O 3 crystal grains are formed under the following conditions.
That is, after forming the Al 2 O 3 nucleus by vapor deposition in the above (c),
Reaction gas composition (volume%): AlCl 3 1-3%, CO 2 3-10%, HCl 1-3%, H 2 S 0.25-0.5%, balance H 2
Reaction atmosphere temperature: 960 to 1000 ° C.
Reaction atmosphere pressure: 5 to 15 kPa,
Time: (until the target upper layer thickness is reached)
By vapor deposition under the conditions, an upper layer composed of fine vertical columnar Al 2 O 3 crystal grains grown almost parallel to the layer thickness direction is formed.
上記（ｄ）のＡｌ２Ｏ３結晶粒は、層厚方向とほぼ平行な方向に微細な縦長柱状Ａｌ２Ｏ３結晶粒として成長する。しかも、工具基体の表面の法線に対して、Ａｌ２Ｏ３結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表し、その傾斜角が０〜１０度の範囲内にあるＡｌ２Ｏ３結晶粒の度数の合計割合を求めた場合、上記結晶方位傾斜角度分布形態（以下、「（０００１）方位傾斜角度分布」という）を有するＡｌ２Ｏ３結晶粒が形成される度数の合計割合は、上部層全体のＡｌ２Ｏ３結晶粒に対して６０％以上を占める。
上記（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計割合は、上記蒸着条件のうちの、特に、反応雰囲気温度およびＣＯ２、Ｈ２Ｓガス容量によって影響され、例えば、反応雰囲気温度が低いと所望の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒を得ることができず、一方、反応雰囲気温度が高いと得られるＡｌ２Ｏ３層の粒径が粗粒になり、耐チッピング性が低下する。
また、ＣＯ２ガス容量の値が小さいと、Ｔｉ化合物上へのＡｌ２Ｏ３層初期核形成が不十分となり、その結果上部層のＡｌ２Ｏ３層が所望の（０００１）方位傾斜角度分布を有することができなくなり、一方、ＣＯ２ガス容量の値が大きいとＴｉ化合物上へのＡｌ２Ｏ３層初期核サイトが粗大になり、その結果上部層のＡｌ２Ｏ３層の粒径が粗粒になり、耐チッピング性が低下する。
そして、（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計割合が、６０％以上を占める場合に、上部層Ａｌ２Ｏ３の高温硬さ、高温強度が維持されることから、本発明では、上部層の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計割合を、６０％以上と定めた。
The Al 2 O 3 crystal grains in (d) above grow as fine vertical columnar Al 2 O 3 crystal grains in a direction substantially parallel to the layer thickness direction. In addition, the inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the Al 2 O 3 crystal grain, is measured with respect to the normal line of the surface of the tool base, and the frequencies existing in each section are tabulated. When the total ratio of the Al 2 O 3 crystal grains whose tilt angle is in the range of 0 to 10 degrees is determined, the crystal orientation tilt angle distribution form (hereinafter referred to as “( The total ratio of the frequency at which Al 2 O 3 crystal grains having “0001) orientation inclination angle distribution” are formed occupies 60% or more with respect to the Al 2 O 3 crystal grains of the entire upper layer.
The total ratio of the frequency of the Al 2 O 3 crystal grains having the (0001) orientation tilt angle distribution is influenced by the reaction atmosphere temperature and the CO 2 , H 2 S gas capacity, among the deposition conditions, When the reaction atmosphere temperature is low, Al 2 O 3 crystal grains having a desired (0001) orientation tilt angle distribution cannot be obtained, while when the reaction atmosphere temperature is high, the resulting Al 2 O 3 layer has a coarse particle size. It becomes a grain and chipping resistance decreases.
Also, if the value of the CO 2 gas capacity is small, the initial nucleation of the Al 2 O 3 layer on the Ti compound becomes insufficient, and as a result, the upper Al 2 O 3 layer has a desired (0001) orientation tilt angle distribution. On the other hand, when the value of the CO 2 gas capacity is large, the initial nucleus site of the Al 2 O 3 layer on the Ti compound becomes coarse, and as a result, the particle size of the upper Al 2 O 3 layer is reduced. It becomes coarse and chipping resistance decreases.
And when the total ratio of the frequency of the Al 2 O 3 crystal grains having the (0001) orientation tilt angle distribution occupies 60% or more, the high-temperature hardness and high-temperature strength of the upper layer Al 2 O 3 should be maintained. Therefore, in the present invention, the total ratio of the frequency of the Al 2 O 3 crystal grains having the (0001) orientation inclination angle distribution of the upper layer is set to 60% or more.
上記（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計割合は、上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、その傾斜角が０〜１０度である結晶粒（（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒）の度数の合計割合として求められる。
図３に、上部層全体について測定した（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の傾斜角度数分布グラフの一例を示す。
なお、上部層全体の層厚が、２μｍ未満であると長期の使用にわたってすぐれた高温強度および高温硬さを発揮することができず、一方、１５μｍを越えると、チッピングが発生し易くなることから、上部層の層厚は２〜１５μｍと定めた。
The total ratio of the frequency of the Al 2 O 3 crystal grains having the (0001) azimuth tilt angle distribution was determined using a field emission scanning electron microscope and an electron beam backscatter diffraction apparatus for the Al 2 O 3 crystal grains of the entire upper layer. Then, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the cross-sectional polished surface is irradiated with an electron beam, and is a crystal plane of the crystal grain with respect to the normal of the surface of the tool base (0001 ) The inclination angle formed by the normal of the surface is measured, and it is obtained as the total ratio of the frequency of crystal grains (Al 2 O 3 crystal grains having (0001) orientation inclination angle distribution) whose inclination angle is 0 to 10 degrees. .
FIG. 3 shows an example of an inclination angle number distribution graph of Al 2 O 3 crystal grains having a (0001) orientation inclination angle distribution measured for the entire upper layer.
If the thickness of the entire upper layer is less than 2 μm, excellent high-temperature strength and high-temperature hardness cannot be exhibited over a long period of use, whereas if it exceeds 15 μm, chipping is likely to occur. The layer thickness of the upper layer was determined to be 2 to 15 μm.
ここで、Ａｌ２Ｏ３の熱膨張係数に着目すると、Ａｌ２Ｏ３は六方晶構造を有しており、熱膨張係数に異方性があることが報告されている。（０００１）面と平行な方向では、熱膨張係数が５．３×１０−６（℃―１）、（０００１）面と垂直な方向では、熱膨張係数が４．５×１０−６（℃―１）という値を示す。本発明で述べる手法で作製されたＡｌ２Ｏ３皮膜の場合、Ａｌ２Ｏ３の｛１０−１０｝面と（０００１）面が互いに垂直である関係から、下部層直上Ｔｉ化合物表面に｛１０−１０｝面方向に成長したＡｌ２Ｏ３下部層では、面内方向の熱膨張係数が５．３×１０−６（℃―１）となり、（０００１）面方向に成長した上部層では、面内方向の熱膨張係数が４．５×１０−６（℃―１）となり、下部層の熱膨張係数が大きくなる関係にある。このような関係にある場合、熱化学蒸着法による成膜では上部層のクラックが進展しにくくなる特徴がある。 Here, focusing on the thermal expansion coefficient of Al 2 O 3, Al 2 O 3 has a hexagonal structure, that there is anisotropy in the thermal expansion coefficient has been reported. In the direction parallel to the (0001) plane, the thermal expansion coefficient is 5.3 × 10 −6 (° C. −1 ), and in the direction perpendicular to the (0001) plane, the thermal expansion coefficient is 4.5 × 10 −6 (° C. -Shows the value 1 ). In the case of the Al 2 O 3 film produced by the technique described in the present invention, the {10-10} plane and the (0001) plane of Al 2 O 3 are perpendicular to each other on the surface of the Ti compound directly above the lower layer. In the Al 2 O 3 lower layer grown in the −10} plane direction, the thermal expansion coefficient in the in-plane direction is 5.3 × 10 −6 (° C. −1 ), and in the upper layer grown in the (0001) plane direction, The thermal expansion coefficient in the in-plane direction is 4.5 × 10 −6 (° C. −1 ), and the thermal expansion coefficient of the lower layer is increased. In such a relationship, there is a feature that cracks in the upper layer are difficult to progress in the film formation by the thermal chemical vapor deposition method.
この発明の被覆工具は、硬質被覆層の下部層最表面に、例えば、予備酸化処理を施すことにより、下部層と上部層の界面直上には、所定のくさび形結晶組織を有するとともに、所定の度数分布割合の方位形態を有するＡｌ２Ｏ３結晶粒を形成し、さらに、上部層全体として所定度数分布割合の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒を有する上部層を形成することにより、Ａｌ２Ｏ３の熱膨張係数の関係から、Ａｌ２Ｏ３上部層の熱膨張係数が小さい構造を有することで、クラックの進展が抑えられること、またくさび形結晶組織との整合により下部層と上部層の接触面積が大きいため整合性に優れ、耐チッピング性に優れることから、各種の鋼や鋳鉄などの切削加工を高速で、かつ切れ刃に対して衝撃的負荷が作用する高速断続切削条件で行っても、すぐれた高温強度と高温硬さを示し、硬質被覆層の剥離・チッピングの発生もなく、長期の使用にわたってすぐれた切削性能を発揮する。 The coated tool of the present invention has a predetermined wedge-shaped crystal structure immediately above the interface between the lower layer and the upper layer by performing, for example, pre-oxidation treatment on the outermost surface of the lower layer of the hard coating layer, An Al 2 O 3 crystal grain having an orientation form with a frequency distribution ratio is formed, and an upper layer having an Al 2 O 3 crystal grain having a (0001) orientation tilt angle distribution with a predetermined frequency distribution ratio as a whole is formed. by matching from the relationship of the thermal expansion coefficient of Al 2 O 3, the thermal expansion coefficient of Al 2 O 3 top layer to have a small structure, crack propagation is suppressed, also a wedge crystal structure Because of the large contact area between the lower layer and the upper layer, it has excellent alignment and excellent chipping resistance.Therefore, various types of steel and cast iron can be cut at high speed and an impact load is applied to the cutting edge. Be performed at a high speed interrupted cutting conditions, shows excellent high-temperature strength and high-temperature hardness, without occurrence of peeling and chipping of the hard coating layer, it exhibits a cutting performance which is superior over a long period of use.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４１２に規定するインサート形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder and Co powder all having an average particle diameter of 1 to 3 μm are prepared. Then, blended into the composition shown in Table 1, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and then press-molded into a green compact of a predetermined shape at a pressure of 98 MPa. Is vacuum-sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge is subjected to honing of R: 0.07 mm. -WC base cemented carbide tool bases A to F each having an insert shape defined in CNMG12041 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分に幅：０．１ｍｍ、角度：２０度のチャンファーホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のインサート形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, a chamfer with a width of 0.1 mm and an angle of 20 degrees at the cutting edge portion. By performing honing, tool bases a to f made of TiCN-based cermet having an ISO standard / CNMG120212 insert shape were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、
（ａ）まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表６，７に示される目標層厚のＴｉ化合物層を蒸着形成した。
（ｂ）ついで、表４に示される条件にて、下部層の最表面のＴｉ化合物層にＣＯとＣＯ２混合ガスによる予備酸化処理を行い、
（ｃ）ついで、上記（ｂ）の処理を施したＴｉ化合物層の表面に、表５に示される二段階の条件にて、上部層のＡｌ２Ｏ３層を表６に示される目標層厚で形成することにより、
本発明被覆工具１〜１３をそれぞれ製造した。
Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically elongated crystal structure described in JP-A-6-8010, and the other conditions are ordinary granularity. The Ti compound layer having the target layer thickness shown in Tables 6 and 7 was formed by vapor deposition under the conditions shown in Table 6 and 7.
(B) Next, under the conditions shown in Table 4, the outermost Ti compound layer of the lower layer is subjected to a pre-oxidation treatment with a CO and CO 2 mixed gas,
(C) Next, on the surface of the Ti compound layer subjected to the treatment of (b) above, the upper Al 2 O 3 layer is formed in the target layer thickness shown in Table 6 under the two-stage conditions shown in Table 5. By forming with
The present coated tools 1 to 13 were produced, respectively.
また、比較の目的で、上記本発明被覆工具１〜１３の上記工程（ｂ），（ｃ）を行わずに、あるいは、本発明から外れる条件（表４、５で、それぞれ本発明外として示す）で行うことにより、表７に示す比較被覆工具１〜１３を製造した。 Moreover, for the purpose of comparison, the above steps (b) and (c) of the coated tools 1 to 13 of the present invention are not performed, or the conditions deviating from the present invention (Tables 4 and 5 are shown as outside the present invention, respectively). ) To produce comparative coated tools 1 to 13 shown in Table 7.
ついで、硬質被覆層の下部層と上部層との界面直上のＡｌ２Ｏ３について、界面方位形態Ａｌ２Ｏ３結晶粒の｛１０−１０｝面の法線がなす傾斜角度分布割合を、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて測定した。
すなわち、上記の本発明被覆工具１〜１３、比較被覆工具１〜１３の下部層と上部層との界面から上部層の深さ方向へ０．３μｍ、また、工具基体表面と平行方向に５０μｍの断面研磨面の測定範囲（０．３μｍ×５０μｍ）を、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、それぞれの前記研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子線後方散乱回折像装置を用い、下部層の最表面層から膜厚方向１μｍ以内のＡｌ２Ｏ３結晶粒について、０．３×５０μｍの測定領域を０．１μｍ／ｓｔｅｐの間隔で、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である｛１０−１０｝面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角が０〜１０度である結晶粒（界面方位形態Ａｌ２Ｏ３結晶粒）の度数の合計割合を測定することによって求めた。
表６、表７にこれらの値を示す。
また、図２に、本発明被覆工具１について測定した界面方位形態Ａｌ２Ｏ３結晶粒の傾斜角度数分布グラフを示す。
Next, regarding the Al 2 O 3 immediately above the interface between the lower layer and the upper layer of the hard coating layer, the inclination angle distribution ratio formed by the normal of the {10-10} plane of the Al 2 O 3 crystal grains of the interface orientation is expressed as the electric field. The measurement was performed using an emission scanning electron microscope and an electron beam backscatter diffraction apparatus.
That is, 0.3 μm in the depth direction of the upper layer from the interface between the lower layer and the upper layer of the present invention coated tools 1 to 13 and comparative coated tools 1 to 13, and 50 μm in the direction parallel to the tool base surface. The measurement range (0.3 μm × 50 μm) of the cross-section polished surface is set in a lens barrel of a field emission scanning electron microscope, and the polishing surface is irradiated with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees and 1 nA. Irradiate each crystal grain having a hexagonal crystal lattice existing within the measurement range of each polished surface with an electric current, and use an electron beam backscatter diffraction image apparatus to measure the film thickness direction from the outermost surface layer of the lower layer to 1 μm. The Al 2 O 3 crystal grains are within the crystal plane of the crystal grains with respect to the normal line of the surface of the tool base with a measurement area of 0.3 × 50 μm at an interval of 0.1 μm / step {10 -10} Measure the tilt angle formed by the normal of the plane Based on this measurement result, the measurement inclination angle is determined by measuring the percentage of total power of 0 degrees a crystal grain (surface orientation form Al 2 O 3 grains).
Tables 6 and 7 show these values.
FIG. 2 shows an inclination angle number distribution graph of the interface orientation form Al 2 O 3 crystal grains measured for the coated tool 1 of the present invention.
さらに、本発明被覆工具１〜１３、比較被覆工具１〜１３の硬質被覆層の上部層全体の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計割合については、上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、前記と同様、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、その傾斜角が０〜１０度である結晶粒（方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒）の度数の合計割合を測定することによって求めた。
なお、ここでいう「上部層全体」とは、下部層と上部層との界面から上部層最表面までの測定範囲をいい、界面直上の界面方位形態Ａｌ２Ｏ３結晶粒の測定範囲も含む。
表６、表７にこれらの値を示す。
また、図３に、本発明被覆工具１について測定した（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の傾斜角度数分布グラフを示す。
Furthermore, the present invention coated tool 1 to 13, for a total proportion of power of Al 2 O 3 crystal grains having a (0001) orientation inclination angle distribution of the entire upper layer of the hard coating layer of the comparative coated tool 1 to 13, the upper layer For the entire Al 2 O 3 crystal grains, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, each crystal grain having a hexagonal crystal lattice existing within the measurement range of its cross-sectional polished surface is the same as described above. Is irradiated with an electron beam, and an inclination angle formed by a normal line of the (0001) plane, which is a crystal plane of the crystal grain, is measured with respect to a normal line of the surface of the tool base. It was determined by measuring the total ratio of the frequency of crystal grains (Al 2 O 3 crystal grains having an azimuth tilt angle distribution).
The “overall upper layer” as used herein refers to the measurement range from the interface between the lower layer and the upper layer to the uppermost surface of the upper layer, and includes the measurement range of the interface orientation form Al 2 O 3 crystal grains immediately above the interface. .
Tables 6 and 7 show these values.
FIG. 3 shows an inclination angle number distribution graph of Al 2 O 3 crystal grains having a (0001) orientation inclination angle distribution measured for the coated tool 1 of the present invention.
また、本発明被覆工具１〜１３、比較被覆工具１〜１３の硬質被覆層の各構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。
また、下部層Ｔｉ化合物層直上のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、前記と同様、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射することで、くさび形結晶組織の凸部の平均間隔、凹凸部の平均高低差、くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒の平均粒径を算出した。
くさび形結晶組織の凸部の平均間隔は図１のａ部に示すように、本発明で述べた、くさび型結晶組織の隣あう凸部間の距離を測定し、５点測定の平均値を凸部の平均間隔とした。くさび形結晶組織の凹凸部の平均高低差は図１のｂ部に示すように、本発明で述べた、結晶群の凹部と一つ隣の凸部の距離を測定し、５点測定の平均値を凹凸部の平均高低差とした。くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒の平均粒径は、下部層Ｔｉ化合物層直上の界面方位形態を有するＡｌ２Ｏ３結晶粒における横方向の線分測定点１０箇所の測定値の平均から、くさび形結晶組織を構成するＡｌ２Ｏ３結晶粒の横方向平均粒径を求めた。
Moreover, when the thickness of each structural layer of the hard coating layer of this invention coated tool 1-13 and comparative coating tool 1-13 was measured using the scanning electron microscope (longitudinal section measurement), all are target layer thickness. The average layer thickness (average value of 5-point measurement) was substantially the same.
Further, for Al 2 O 3 crystal grains immediately above the lower Ti compound layer, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, a hexagonal crystal existing within the measurement range of the cross-sectional polished surface is the same as described above. By irradiating each crystal grain having a crystal lattice with an electron beam, the average interval between the convex portions of the wedge-shaped crystal structure, the average height difference of the concave-convex portions, the average grain of the Al 2 O 3 crystal grains constituting the wedge-shaped crystal structure The diameter was calculated.
The average interval between the convex portions of the wedge-shaped crystal structure is measured by measuring the distance between adjacent convex portions of the wedge-shaped crystal structure described in the present invention as shown in part a of FIG. The average interval between the convex portions was used. As shown in part b of FIG. 1, the average height difference between the concave and convex portions of the wedge-shaped crystal structure is the average of five points measured by measuring the distance between the concave portion of the crystal group and the adjacent convex portion described in the present invention. The value was defined as the average height difference of the uneven portions. The average grain size of the Al 2 O 3 crystal grains constituting the wedge-shaped crystal structure is the measured value at 10 measurement points in the horizontal line segment in the Al 2 O 3 crystal grains having the interface orientation form immediately above the lower Ti compound layer. From the average, the transverse average grain size of the Al 2 O 3 crystal grains constituting the wedge-shaped crystal structure was determined.
つぎに、上記の本発明被覆工具１〜１３、比較被覆工具１〜１３の各種の被覆工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＣＭ４４０の長さ方向等間隔８本縦溝入り丸棒、
切削速度：３２０ｍ／ｍｉｎ、
切り込み：２．０ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ａという）での合金鋼の湿式高速断続切削試験（通常の切削速度は、２００ｍ／ｍｉｎ）、
被削材：ＪＩＳ・Ｓ４５Ｃの長さ方向等間隔８本縦溝入り丸棒、
切削速度：３５０ｍ／ｍｉｎ、
切り込み：１．８ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｂという）での炭素鋼の湿式高速断続切削試験（通常の切削速度は、２００ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＦＣＤ４５０の長さ方向等間隔８本縦溝入り丸棒、
切削速度：３２０ｍ／ｍｉｎ、
切り込み：１．５ｍｍ、
送り：０．３５ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｃという）でのダグタイル鋳鉄の湿式高速断続切削試験（通常の切削速度は２５０ｍ／ｍｉｎ）、
を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。
表８にこの測定結果を示した。
Next, for the various coated tools of the present invention coated tools 1 to 13 and comparative coated tools 1 to 13, all of them are screwed with a fixing jig to the tip of the tool steel tool,
Work material: JIS / SCM440 lengthwise equal 8 round bars with vertical grooves,
Cutting speed: 320 m / min,
Cutting depth: 2.0 mm
Feed: 0.3mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test (normal cutting speed is 200 m / min) of alloy steel under the above conditions (referred to as cutting condition A),
Work material: JIS · S45C length direction equal interval 8 vertical grooved round bar,
Cutting speed: 350 m / min,
Cutting depth: 1.8mm,
Feed: 0.3mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test of carbon steel under the above conditions (referred to as cutting condition B) (normal cutting speed is 200 m / min),
Work material: JIS / FCD450 lengthwise equidistant round bars with 8 vertical grooves,
Cutting speed: 320 m / min,
Incision: 1.5mm,
Feed: 0.35mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test (normal cutting speed is 250 m / min) of ductile cast iron under the above conditions (referred to as cutting condition C),
In each cutting test, the flank wear width of the cutting edge was measured.
Table 8 shows the measurement results.
表６〜８に示される結果から、本発明被覆工具１〜１３は、いずれも、下部層と上部層の界面直上のＡｌ２Ｏ３結晶粒は所定の凹凸部の平均高低差、凸部の平均間隔を有するくさび形結晶組織を示すとともに、該くさび形結晶組織において界面方位形態Ａｌ２Ｏ３結晶粒の占める度数の合計割合は２０〜４０％であり、さらに、上部層全体のＡｌ２Ｏ３結晶粒に占める（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計割合は６０％以上であるため、高熱発生を伴い、かつ、切刃に断続的・衝撃的負荷が作用する高速断続切削条件に用いた場合でも、硬質被覆層の耐剥離性が優れるとともに、耐チッピング性にも優れる。
これに対して、比較被覆工具１〜１３では、高速断続切削加工においては、硬質被覆層の剥離発生、チッピング発生により、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Tables 6 to 8, all of the present coated tools 1 to 13 have Al 2 O 3 crystal grains immediately above the interface between the lower layer and the upper layer. It shows a wedge-shaped crystal structure having an average interval, and the total proportion of the frequency occupied by the interface oriented Al 2 O 3 crystal grains in the wedge-shaped crystal structure is 20 to 40%. Further, the Al 2 O of the entire upper layer Since the total ratio of the frequency of the Al 2 O 3 crystal grains having the (0001) orientation tilt angle distribution in the three crystal grains is 60% or more, high heat generation occurs, and intermittent and impact loads are applied to the cutting edge. Even when used for high-speed interrupted cutting conditions that act, the hard coating layer has excellent peel resistance and excellent chipping resistance.
On the other hand, it is apparent that the comparative coated tools 1 to 13 reach the service life in a relatively short time due to occurrence of peeling and chipping of the hard coating layer in high-speed intermittent cutting.
上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、切刃に断続的・衝撃的負荷が作用する高速断続切削という厳しい切削条件下でも、硬質被覆層の剥離、チッピングが発生することはなく、長期の使用に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention is not only continuous cutting and interrupted cutting under normal conditions such as various steels and cast irons, but also severe cutting such as high-speed intermittent cutting in which intermittent and impact loads act on the cutting edge. Even under cutting conditions, no peeling or chipping of the hard coating layer will occur, and excellent cutting performance will be demonstrated over long-term use. It can cope with energy saving and cost reduction sufficiently satisfactorily.
Claims (2)
（ａ）下部層として、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの合計平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、２〜１５μｍの平均層厚を有し、化学蒸着した状態でα型の結晶構造を有するＡｌ２Ｏ３層、
上記（ａ）、（ｂ）からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ｃ）下部層の最表面層と上部層との界面における上部層のＡｌ２Ｏ３結晶粒は、くさび形結晶組織を有し、該くさび形結晶組織の凹凸部の平均高低差が０．５〜２．０μｍ、凸部の平均間隔が２〜５μｍであり、該くさび形結晶組織を有するＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である｛１０−１０｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、０〜１０度の範囲内の傾斜角区分に最高ピークが存在するとともに、０〜１０度の範囲内の傾斜角区分に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の２０〜４０％の割合を占め、
（ｄ）上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、０〜１０度の範囲内の傾斜角区分に最高ピークが存在するとともに、０〜１０度の範囲内の傾斜角区分に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占めることを特徴とする表面被覆切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, it is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide layer, and a total average layer of 3 to 20 μm A Ti compound layer having a thickness;
(B) As an upper layer, an Al 2 O 3 layer having an average layer thickness of 2 to 15 μm and having an α-type crystal structure in a state of chemical vapor deposition,
In the surface-coated cutting tool in which the hard coating layer composed of the above (a) and (b) is formed by vapor deposition,
(C) The Al 2 O 3 crystal grains of the upper layer at the interface between the outermost surface layer and the upper layer of the lower layer have a wedge-shaped crystal structure, and the average height difference of the uneven portions of the wedge-shaped crystal structure is 0. The Al 2 O 3 crystal grains having a wedge-shaped crystal structure having an average interval of 5 to 2.0 μm and a convex portion of 2 to 5 μm, using a field emission scanning electron microscope and an electron beam backscatter diffraction apparatus, An electron beam is irradiated to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the cross-section polished surface, and the crystal face of the crystal grain is {10− Measure the tilt angle formed by the normal of the 10} plane, and divide the measured tilt angles within the range of 0 to 45 degrees out of the measured tilt angles into pitches of 0.25 degrees and exist in each section 0 to 10 when represented by an inclination angle distribution graph formed by counting the frequencies to be The highest peak is present in the inclination angle section within the range of degrees, and the total ratio of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is 20 to 40% of the entire degrees in the inclination angle distribution graph. Occupy a proportion
(D) About the Al 2 O 3 crystal grains of the entire upper layer, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, the crystal grains having a hexagonal crystal lattice existing within the measurement range of the cross-section polished surface Individually irradiating an electron beam, measuring the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal of the surface of the tool base, When the measured inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, and represented by an inclination angle number distribution graph obtained by counting the frequencies existing in each division, 0 to 10 The highest peak exists in the inclination angle section within the range of degrees, and the total ratio of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is a ratio of 60% or more of the entire degrees in the inclination angle distribution graph Surface coated cutting characterized by Ingredients.
2. The surface-coated cutting tool according to claim 1, wherein the wedge-shaped crystal structure of (c) is composed of an aggregate of Al 2 O 3 crystal grains having an average grain size of 0.05 to 1 μm.
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