CN103658707A - Surface-coated cutting tool - Google Patents

Surface-coated cutting tool Download PDF

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CN103658707A
CN103658707A CN201310403643.6A CN201310403643A CN103658707A CN 103658707 A CN103658707 A CN 103658707A CN 201310403643 A CN201310403643 A CN 201310403643A CN 103658707 A CN103658707 A CN 103658707A
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layer
crystal grain
inclination angle
degrees
upper layer
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CN103658707B (en
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奥出正树
五十岚诚
山口健志
长田晃
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material

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  • Mechanical Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
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Abstract

The invention provides a surface-coated cutting tool of excellent peeling resistance and good anti-tipping property during the high-speed interrupted cutting operation, which comprises a Ti compound layer formed as a lower layer through the evaporation process, and an alpha-type Al2O3 hard coating layer formed as an upper layer, wherein alpha-type Al2O3 crystalline grains, close to the interface of the upper and lower layer and having an average particle diameter of 0.05-1 [mu] m, together form a wedge-shaped crystalline structure. Meanwhile, with the reference of the normal of the 10*10 surface of an Al2O3 crystalline grain, the distribution of the inclination angles of Al2O3 crystalline grains, relative to the matrix surface of the surface-coated cutting tool, is figured out by means of a field emission type scanning electron microscope and an electron backscatter diffraction device. Al2O3 crystalline grains with the inclination angles thereof within the range of 0-10 degrees account for 20% to 40%. Meanwhile, for all Al2O3 crystalline grains of the upper layer, Al2O3 crystalline grains with the inclination angles thereof within the range of 0-10 degrees account for over 60%.

Description

Surface-coated cutting tool
Technical field
The present invention relates to a kind of surface-coated cutting tool (following, be called coating tool), even its at a high speed and interrupted impact load act on the machining of carrying out various steel or cast iron etc. under the interrupted cut condition of cutting edge, hard coating layer is also brought into play excellent resistance to fissility and the resistance to cutter that collapses, and through the excellent mar proof of long-term performance.
Background technology
In the past, known have conventionally (following by tungsten carbide, with WC, representing) base cemented carbide or titanium carbonitride be (following, with TiCN, representing) evaporation forms the coating tool being formed by following (a) and the hard coating layer that (b) forms on the surface of the matrix (following, they are referred to as to tool base) that forms of based ceramic metal:
(a) lower layer is Ti compound layer, this Ti compound layer is (following by the carbide of Ti, with TiC, representing) layer, nitride be (following, with TiN, representing) layer, carbonitride be (following, with TiCN, representing) layer, oxycarbide be (following, with TiCO, represent) one deck in layer and carbon nitrogen oxide (following, represent with TiCNO) layer or two-layerly form above
(b) upper layer is that alumina layer is (below, with Al 2o 3layer represents), this alumina layer has ɑ type crystalline texture under the state of chemical vapor deposition.
But, above-mentioned coating tool in the past, although such as bringing into play excellent mar proof in the continuous cutting at various steel or cast iron etc. or interrupted cut, by this during for high speed interrupted cut, exist easily produce clad peel off, collapse cutter, the problem shortening life tools.
Therefore, with suppress clad collapse cutter, peel off be produced as object, the layer structure of hard coating layer proposed to various suggestions.
For example, as Patent Document 1, propose to have on the surface of tool base as at least one in the smooth TiC layer of la m clad surface proterties, TiN layer, TiCN layer, as the smooth Al of exterior layer clad surface proterties 2o 3in the coating tool of layer, between la m and outside, using surface texture be in the TiCO layer, TiCNO layer of sharpening acicular crystal at least any forms as intermediate layer, realize thus resistance to improvement of collapsing cutter.
And, for example, as shown in patent documentation 2, propose to have at the coated Ti compound layer as lower layer in the surface of tool base, as the Al of upper layer 2o 3in the coating tool of layer, by using field emission type SEM to measure the Al as upper layer 2o 3the inclination angle that the normal of (0001) face of the crystal plane of crystal grain becomes with respect to the normal of surface grinding face, and while making inclination angle number of degrees scatter chart, there is peak-peak in the inclination angle subregion in the scope of 0~10 degree, and by being present in the total ratio of the number of degrees within the scope of 0~10 degree, accounts for the Al of more than 45% ratio of the total number of degrees in the number of degrees scatter chart of inclination angle 2o 3layer forms upper layer, realizes thus resistance to raising of collapsing cutter.
In addition, for example, as shown in patent documentation 3, propose to have at the coated Ti compound layer as lower layer in the surface of tool base, as the Al of upper layer 2o 3layer, and, between lower layer and upper layer, form by Al 2o 3in the coating tool of the enhancement Layer that layer forms, upper layer is by following Al 2o 3layer forms, though with field emission type SEM mensuration upper layer as Al 2o 3the inclination angle that the normal of (0001) face of the crystal plane of crystal grain becomes with respect to the normal of surface grinding face, and while making inclination angle number of degrees scatter chart, in inclination angle subregion within the scope of 0~15 degree, there is peak-peak, and the total ratio of the number of degrees within the scope of 0~15 degree accounts for more than 50% ratio of the total number of degrees in the number of degrees scatter chart of inclination angle, in addition, enhancement Layer is by following Al 2o 3layer forms, the inclination angle that the same normal of measuring (0001) face becomes with respect to the normal of surface grinding face, and while making inclination angle number of degrees scatter chart, in inclination angle subregion within the scope of 75~90 degree, there is peak-peak, and the total ratio that is present in the number of degrees within the scope of 75~90 degree accounts for more than 50% ratio of the total number of degrees in the number of degrees scatter chart of inclination angle, realize thus resistance to raising of collapsing cutter.
Patent documentation 1: No. 3250134 communique of Japan Patent
Patent documentation 2: Japanese Patent Publication 2005-205586 communique
Patent documentation 3: No. 4747388 communique of Japan Patent
In recent years, the high performance of topping machanism is remarkable, on the other hand, for the Labor-saving of machining and energy-saving, further the requirement of cost degradation is strong, with this, machining is high speed more, and exist high load capacity to act on the tendency of cutting edge in interrupted cut etc., but the present situation of above-mentioned coating tool is in the past, this is not had problems when the continuous cutting under usual conditions or interrupted cut for steel or cast iron etc., but especially by this during for high speed interrupted cut condition, the lower layer being formed by the Ti compound layer that forms hard coating layer with by Al 2o 3the adhesive strength of the upper layer that layer forms is also insufficient, by the generation of peeling off, collapsing the Abnormal damages such as cutter between upper layer and lower layer, reaches service life within a short period of time.
Summary of the invention
Therefore, the inventor etc. from the above point of view, in order to improve the lower layer that formed by Ti compound layer and by Al 2o 3the adhesive strength of the upper layer that layer forms and prevent the generation of peeling off, collapsing the Abnormal damages such as cutter, and seek the long lifetime of life tools and conduct in-depth research, it found that following opinion:
Coated, be formed with the lower layer that formed by Ti compound layer and by Al 2o 3in the coating tool of the upper layer that layer forms, by the Al directly over the most surface layer of control lower layer 2o 3the crystalline structure of crystal grain and crystalline orientation angle of inclination distributivity, can improve the adhesive strength of upper layer and lower layer, and, by controlling the Al for upper layer integral body 2o 3the crystalline orientation angle of inclination distributivity of crystal grain, can maintain high temperature hardness and the elevated temperature strength of upper layer integral body, therefore even while using in high load capacity/impact load acts on the high speed interrupted cut of cutting edge, also the generation of peeling off, collapsing the Abnormal damages such as cutter between upper layer and lower layer can be suppressed, and the coating tool of bringing into play excellent cutting ability in long-term use can be accessed.
The present invention completes according to above-mentioned opinion, has following feature:
(1) surface-coated cutting tool, on the surface of the tool base consisting of tungsten carbide base carbide alloy or base titanium carbonitride, evaporation is formed with the hard coating layer consisting of following (a) and (b),
(a) lower layer is Ti compound layer, one deck in carbide lamella, nitride layer, carbonitride layer, oxycarbide layer and the carbon nitrogen oxide layer of Ti of this Ti compound layer or two-layerly form above, and there is the average bed thickness of total of 3~20 μ m,
(b) upper layer is Al 2o 3layer, this Al 2o 3layer has the average bed thickness of 2~15 μ m and under the state of chemical vapor deposition, has ɑ type crystalline texture,
Described surface-coated cutting tool, wherein,
(c) Al of the upper layer in the most surface layer of lower layer and the interface of upper layer 2o 3crystal grain has wedge shape crystalline structure, and the average difference of height of the jog of this wedge shape crystalline structure is 0.5~2.0 μ m, and the equispaced of protuberance is 2~5 μ m, for the Al with this wedge shape crystalline structure 2o 3crystal grain, is used field emission type SEM and EBSD device, and each is present in to this Al 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray measures the inclination angle that becomes with respect to the normal to a surface of described tool base as the normal of { 10-10 } face of the crystal plane of described crystal grain, and subregion is carried out to by the spacing of every 0.25 degree in the mensuration inclination angle within the scope of 0~45 degree in the inclination angle of described mensuration, and when being present in inclination angle number of degrees scatter chart that the number of degrees in each subregion form and representing to add up to, in inclination angle subregion in the scope of 0~10 degree, there is peak-peak, and be present in 20~40% the ratio that the total ratio of the number of degrees in the inclination angle subregion in the scope of 0~10 degree accounts for total number of degrees in the number of degrees scatter chart of inclination angle,
(d) for the Al of upper layer integral body 2o 3crystal grain, by using field emission type SEM and EBSD device, is present in this Al to each 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray measures the inclination angle that becomes with respect to the normal to a surface of described tool base as the normal of (0001) face of the crystal plane of described crystal grain, subregion is carried out to by the spacing of every 0.25 degree in mensuration inclination angle within the scope of 0~45 degree in described mensuration inclination angle, and when being present in inclination angle number of degrees scatter chart that the number of degrees in each subregion form and representing to add up to, in inclination angle subregion within the scope of 0~10 degree, there is peak-peak, and the total ratio that is present in the number of degrees in the inclination angle subregion within the scope of 0~10 degree accounts for more than 60% ratio of total number of degrees in the number of degrees scatter chart of inclination angle.
(2) above-mentioned (1) described surface-coated cutting tool, wherein,
The wedge shape crystalline structure of above-mentioned (c) is the Al of 0.05~1 μ m by average grain diameter 2o 3the aggregation of crystal grain forms.
Below, the structure sheaf of the hard coating layer of coating tool of the present invention is elaborated.
(a) Ti compound layer (lower layer):
Ti compound layer (for example, TiC layer, TiN layer, TiCN layer, TiCO layer and TiCNO layer), substantially as the Al with the crystalline texture of α type 2o 3(following, only with " Al 2o 3" represent) lower layer of layer and existing, the excellent elevated temperature strength possessing because of self makes hard coating layer possess elevated temperature strength, in addition, is all close to tool base and Al 2o 3layer, therefore have and maintain hard coating layer with respect to the effect of the close property of tool base, but when it amounts to average bed thickness lower than 3 μ m, cannot give full play to described effect, on the other hand, if it amounts to average bed thickness, surpass 20 μ m, especially with height, in thermogenetic high speed interrupted cut, easily causing pyroplastic deformation, this is the reason that causes eccentric wear, and therefore being amounted to average bed thickness is decided to be 3~20 μ m.
(b) the most surface layer of lower layer:
In the present invention, at the most surface layer of lower layer, for example implement the following processing, thus can be by the Al of the upper layer forming directly over lower layer surface 2o 3crystal grain evaporation becomes predetermined crystalline structure and orientation form (with reference to aftermentioned).
; first; use after common chemical evaporation plating device evaporation forms the one deck or the two-layer above various Ti compound layers that form in TiC layer, TiN layer, TiCN layer, TiCO layer and TiCNO layer, as pre-oxidation treatment condition under the following conditions by CO and CO 2mist carries out pre-oxidation treatment, thus at following Al 2o 3in layer film formation process, generate Al 2o 3during core, can disperse to form predetermined crystalline structure and the Al of predetermined orientation 2o 3core.
Reacting gas forms (capacity %): CO5~10%, CO 25~10%, remainder H 2,
Atmosphere temperature: 900~960 ℃,
Atmosphere pressures: 3~10kPa,
Time: 2~5min.
(c) Al directly over the most surface layer of lower layer 2o 3crystal grain:
On the surface of the lower layer by above-mentioned (b) film forming, for example, as primary growth condition, pass through evaporating Al under the following conditions 2o 3, can directly over the most surface layer of lower layer, disperse thus formation to have predetermined crystalline structure (is the Al of 0.05~1 μ m by average grain diameter 2o 3the wedge shape crystalline structure that the aggregation of crystal grain forms) and there is the Al of predetermined orientation form (the total ratio of the number of degrees of the crystal grain of the inclination angle that the normal of { 10-10 } face becomes with respect to the normal to a surface of tool base in the scope of 0~10 degree is 20~40%) 2o 3core.
Reacting gas forms (capacity %): AlCl 31~3%, CO 25~10%, HCl0.5~2.0%, H 2s0.1~0.3% and remainder H 2,
Reaction atmosphere temperature: 960~1000 ℃,
Reaction atmosphere pressure: 5~15kPa,
Time: 5~30min.
That is the Al of above-mentioned (c), forming for (directly over the interface of upper layer and lower layer) directly over the most surface layer at lower layer 2o 3in crystal grain, for the most surface layer apart from lower layer at film thickness direction 1 μ m with interior Al 2o 3crystal grain, by using field emission type SEM and EBSD device, to this Al 2o 3the crystalline structure of crystal grain is observed, and can observe the Al that average grain diameter is 0.05~1 μ m 2o 3crystal grain, and, can observe this Al 2o 3crystal grain is assembled and is formed the wedge shape crystalline structure illustrating in Fig. 1.
Below wedge shape crystalline structure is described.The Al of the inclination angle that the normal of { 10-10 } face of growing directly over the most surface layer of lower layer becomes within the scope of 0~10 degree 2o 3in crystal grain, obtain the angle that the normal of { 10-10 } face in the mutual interface of the crystal grain of adjacency separately intersects each other, differential seat angle is in the scope lower than 20 degree time, mutually be wedge shape crystalline structure, if differential seat angle is 20 degree when above, its crystal boundary becomes makes wedge shape crystalline structure and upper layer Al described later 2o 3the position that crystal grain separates.And this wedge shape crystalline structure is not exposed to Al 2o 3the most surface of epithelium.
The reason that forms this wedge shape crystalline structure can infer it is because Al 2o 3crystal grain, when the upper growth of the most surface layer (especially TiCNO layer and TiCO layer) of the Ti of lower layer compound, is grown when the lattice plane of the most surface layer of early growth period and Ti compound keeps epitaxial relationship, but along with Al 2o 3the thickness thickening of layer, the lattice plane of most surface layer and the impact of crystalline structure of Ti compound diminish, and finally form the irregular wedge-type shape of tool.
And, by average grain diameter, be the Al of 0.05~1 μ m 2o 3the aggregation of crystal grain forms the Al of wedge shape crystalline structure 2o 3the average grain diameter of crystal grain is during lower than 0.05 μ m, the concavo-convex fillibility variation to the Ti compound surface directly over lower layer, so Ti compound and Al directly over lower layer 2o 3adhesive strength between layer declines, and on the other hand, works as Al 2o 3when the average grain diameter of crystal grain surpasses 1 μ m, the Al of layer growth thereon 2o 3it is large that the particle diameter of crystallization becomes, and the resistance to cutter that collapses declines, and at the Al that forms wedge shape crystalline structure 2o 3the Al of crystal grain and its upper layer 2o 3the interface of layer easily forms hole, so the hardness of upper layer and intensity decline, and the decline of the adhesive strength in upper layer and intermediate layer, therefore forms the Al of wedge shape crystalline structure 2o 3the average grain diameter of crystal grain is preferably within the scope of 0.05~1 μ m.
And as shown in Figure 1, the wedge shape crystalline structure described in the present invention is defined as by having the Al of various particle diameters 2o 3the crystalline structure that the aggregation of crystal grain forms, and as the irregular structure of wedge shape crystalline structure integral body tool on film thickness direction.
The average difference of height of jog (b in Fig. 1) need, within the scope of 0.5~2.0 μ m, when lower than 0.5 μ m, cannot estimate to form the Al of wedge shape crystalline structure 2o 3the Al of crystal grain and its upper layer 2o 3the surface area contacted increase at the interface of crystal grain, and average difference of height is while surpassing 2.0 μ m, the thereon Al of layer growth 2o 3the orientation form of layer cannot become desired form, therefore the average discrepancy in elevation of jog is made as to 0.5~2.0 μ m.
The equispaced of protuberance (in Fig. 1 a) need be within the scope of 2~5 μ m, when being 2 μ m when following, at the recess of wedge shape crystalline structure and the Al of growth at an upper portion thereof 2o 3on the interface of layer, easily form hole, and when the equispaced of protuberance when above, cannot estimate to form the Al of wedge shape crystalline structure at 5 μ m 2o 3the Al of crystal grain and its upper layer 2o 3the surface area contacted increase at the interface of layer, is therefore made as 2~5 μ m by the equispaced of protuberance.
In the present application, by (directly over the interface of upper layer and lower layer) directly over the most surface layer at lower layer, form above-mentioned wedge shape crystalline structure, form thus the Al of wedge shape crystalline structure 2o 3the Al of crystal grain and its upper layer 2o 3the surface area contacted increase at the interface of layer, thus can realize the close property improving between upper layer and lower layer.
And, for the Al that is formed at above-mentioned (c) at (directly over the interface of upper layer and lower layer) directly over the most surface layer of lower layer 2o 3crystal grain, by using field emission type SEM and EBSD device, is present in this Al to each 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray measures the inclination angle that becomes with respect to the normal to a surface of tool base as the normal of { 10-10 } face of the crystal plane of described crystal grain, and subregion is carried out to by the spacing of every 0.25 degree in the mensuration inclination angle within the scope of 0~45 degree in described mensuration inclination angle, and when being present in inclination angle number of degrees scatter chart that the number of degrees in each subregion form and representing to add up to, for the most surface layer from lower layer till the Al of the height of the film thickness direction of the protuberance of wedge shape crystalline structure 2o 3crystal grain, if obtain the total ratio of the number of degrees of the crystal grain of its inclination angle in the scope of 0~10 degree, in the inclination angle subregion within the scope of 0~10 degree, have peak-peak, and the total ratio with the number of degrees in the inclination angle subregion being present within the scope of 0~10 degree accounts for the Al of orientation form (hereinafter referred to as " interface orientation form ") of 20~40% ratio of total number of degrees in the number of degrees scatter chart of inclination angle 2o 3the total ratio of the number of degrees of crystal grain is subject to surface texture and the above-mentioned especially CO in the evaporation condition of pre-oxidation, primary growth of the superiors of Ti compound layer 2the impact of gas capacity.
If but there is the Al that above-mentioned interface is orientated form 2o 3the total ratio of the number of degrees of crystal grain is lower than 20% of the total number of degrees in the number of degrees scatter chart of inclination angle, upper layer Al 2o 3the lengthwise columnar structure of crystal grain forms with the state tilting with respect to bed thickness direction, rather than fine lengthwise columnar grain, cannot obtain the desired orientation form as upper layer integral body.On the other hand, if there is the Al of above-mentioned interface orientation form 2o 3the total ratio of the number of degrees of crystal grain surpasses 40%, has upper layer Al 2o 3the Al that distributes of (0001) orientation inclination angle number of degrees 2o 3the total ratio of the number of degrees in the inclination angle number of degrees scatter chart of crystal grain is with respect to the Al of upper layer integral body 2o 3total number of degrees of crystal grain become lower than 60%, upper layer Al 2o 3elevated temperature strength decline.
Thus, for the Al of the upper layer directly over the interface at upper layer and lower layer 2o 3crystal grain, when being present in inclination angle number of degrees scatter chart that the number of degrees in each subregion form and representing to add up to, will have the Al of above-mentioned interface orientation form 2o 3the total ratio of the number of degrees of crystal grain is set as 20~40%.
Shown in Figure 2 to the Al directly over the interface of lower layer and upper layer 2o 3the interface orientation form Al that crystal grain is measured 2o 3one example of the inclination angle number of degrees scatter chart of crystal grain.In addition, interface orientation form Al 2o 3crystal grain refers to measures the inclination angle that the normal as { 10-10 } face of the crystal plane of described crystal grain becomes, and for the most surface layer from lower layer till the Al of the height of the film thickness direction of the protuberance of wedge shape crystalline structure 2o 3crystal grain, while obtaining the total ratio of the number of degrees of the crystal grain of its inclination angle in the scope of 0~10 degree, in inclination angle subregion in the scope of 0~10 degree, have peak-peak, and the total ratio with the number of degrees in the inclination angle subregion being present within the scope of 0~10 degree accounts for the crystal grain of orientation form of 20~40% ratio of total number of degrees in the number of degrees scatter chart of inclination angle.
(d) Al of upper layer 2o 3crystal grain:
Directly over the most surface layer of lower layer, evaporation forms the Al of above-mentioned (c) 2o 3after core, with following condition, form the Al of upper layer 2o 3crystal grain.
That is, with above-mentioned (c) evaporation, form Al 2o 3after core,
Reacting gas forms (capacity %): AlCl 31~3%, CO 23~10%, HCl1~3%, H 2s0.25~0.5%, remainder H 2,
Reaction atmosphere temperature: 960~1000 ℃,
Reaction atmosphere pressure: 5~15kPa,
Time: (until reaching upper layer target bed thickness)
Condition under carry out evaporation, film forming is by the fine lengthwise column Al with bed thickness direction almost parallel growth thus 2o 3the upper layer that crystal grain forms.
The Al of above-mentioned (d) 2o 3crystal grain towards with the direction of bed thickness direction almost parallel as fine lengthwise column Al 2o 3crystal grain and growing.And, measure as Al 2o 3the inclination angle that the normal of (0001) face of the crystal plane of crystal grain becomes with respect to the normal to a surface of tool base, and be present in the inclination angle number of degrees scatter chart that the number of degrees in each subregion form and represent to add up to, and obtain the Al of this inclination angle within the scope of 0~10 degree 2o 3during the total ratio of the number of degrees of crystal grain, form the there is above-mentioned crystalline orientation angle of inclination distributional pattern Al of (following, to be called " (0001) orientation angle of inclination distributes ") 2o 3the total ratio of the number of degrees of crystal grain is with respect to the Al of upper layer integral body 2o 3crystal grain accounts for more than 60%.
There is the Al that above-mentioned (0001) orientation angle of inclination distributes 2o 3the total ratio of the number of degrees of crystal grain is subject in above-mentioned evaporation condition, especially reaction atmosphere temperature and CO 2, H 2the impact of S gas capacity, for example, lower cannot the obtaining of reaction atmosphere temperature has the Al that desired (0001) orientation angle of inclination distributes 2o 3crystal grain, on the other hand, if the higher resulting Al of reaction atmosphere temperature 2o 3the particle diameter chap of layer, the resistance to cutter that collapses declines.
And, if CO 2the value of gas capacity is less, to the Al on Ti compound 2o 3layer initial stage karyomorphism becomes to become insufficient, the Al of its result upper layer 2o 3layer cannot have desired (0001) orientation angle of inclination and distribute, on the other hand, if CO 2the value of gas capacity is larger, to the Al on Ti compound 2o 3layer initial stage core position becomes thick, the Al of its result upper layer 2o 3the particle diameter chap of layer, the resistance to cutter that collapses declines.
And, there is the Al that (0001) orientation angle of inclination distributes 2o 3the total ratio of the number of degrees of crystal grain accounts for 60% when above, can maintain upper layer Al 2o 3high temperature hardness, elevated temperature strength, so will have in the present invention the Al that distributes of (0001) orientation angle of inclination of upper layer 2o 3the total ratio of the number of degrees of crystal grain is set as more than 60%,
There is the Al that above-mentioned (0001) orientation angle of inclination distributes 2o 3the total ratio of the number of degrees of crystal grain, for the Al of upper layer integral body 2o 3crystal grain, by using field emission type SEM and EBSD device, is present in this Al to each 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray measures the inclination angle that becomes with respect to the normal to a surface of tool base as the normal of (0001) face of the crystal plane of described crystal grain, and the crystal grain within the scope of 0~10 degree (has the Al that (0001) orientation angle of inclination distributes as this inclination angle 2o 3the total ratio of number of degrees crystal grain) is obtained.
The Al with the angle of inclination distribution of (0001) orientation that upper layer integral body is measured shown in Figure 3 2o 3one example of the inclination angle number of degrees scatter chart of crystal grain.
In addition, if the bed thickness of upper layer integral body, lower than 2 μ m, cannot be brought into play excellent elevated temperature strength and high temperature hardness in long-term use, on the other hand, if surpass 15 μ m, owing to easily collapsing cutter, so the bed thickness of upper layer is set as 2~15 μ m.
At this, if disclose, be conceived to Al 2o 3thermal coefficient of expansion, Al 2o 3there is structure of hexagonal crystal, and have anisotropy in thermal coefficient of expansion.In the direction parallel with (0001) face, thermal coefficient of expansion is shown as 5.3 * 10 -6(℃ -1), in the direction vertical with (0001) face, thermal coefficient of expansion is shown as 4.5 * 10 -6(℃ -1) value.The Al making with the method for narrating in the present invention 2o 3in the situation of epithelium, from Al 2o 3{ 10-10 } face and (0001) face be that orthogonal relation exists following relation: directly over lower layer, Ti compound surface is towards the Al of { 10-10 } face direction growth 2o 3in lower layer, in face, the thermal coefficient of expansion of direction becomes 5.3 * 10 -6(℃ -1), in the upper layer of (0001) face direction growth, in face, the thermal coefficient of expansion of direction becomes 4.5 * 10 -6(℃ -1), it is large that the thermal coefficient of expansion of lower layer becomes.Existence is during with co-relation, and the be full of cracks in the film forming by heat chemistry vapour deposition method with upper layer is difficult to the feature of progress.
Coating tool of the present invention is by the lower layer most surface at hard coating layer, for example by implementing pre-oxidation treatment, directly over the interface of lower layer and upper layer, form and there is predetermined wedge shape crystalline structure, and there is the Al of the orientation form of predetermined number of degrees distribution proportion 2o 3crystal grain, in addition, has the Al distributing as whole (0001) orientation angle of inclination with predetermined number of degrees with respect distribution proportion of upper layer by formation 2o 3the upper layer of crystal grain, thereby because of Al 2o 3the relation of thermal coefficient of expansion, there is Al 2o 3the less structure of thermal coefficient of expansion of upper layer, suppress thus the progress of be full of cracks, and by with the mating of wedge shape crystalline structure, it is large that the contact area of lower layer and upper layer becomes, therefore matching is excellent, the resistance to cutter excellence that collapses, even if therefore carry out the machining of various steel or cast iron etc. under the high speed interrupted cut condition that acts on cutting edge with high speed and impact load, also demonstrate excellent elevated temperature strength and high temperature hardness, and without the generation of peeling off/collapsing cutter of hard coating layer, in long-term use, bring into play excellent cutting ability.
Accompanying drawing explanation
Fig. 1 represents the signal vertical section schematic diagram to the hard coating layer of coating tool of the present invention.
Fig. 2 represents the interface orientation form Al to measuring directly over the interface of the lower layer of coating tool 1 of the present invention and upper layer 2o 3the inclination angle number of degrees scatter chart of crystal grain.
Fig. 3 represents the Al that (0001) orientation angle of inclination distributes that has that the upper layer integral body of coating tool 1 of the present invention is measured 2o 3the inclination angle number of degrees scatter chart of crystal grain.
The specific embodiment
Then, according to embodiment, coating tool of the present invention is specifically described.
[embodiment]
As material powder, preparation all has WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, the Cr of the average grain diameter of 1~3 μ m 3c 2powder, TiN powder and Co powder, these material powders are fitted in to the mix proportion shown in table 1, further add paraffin, in acetone, ball milling mixes 24 hours, after carrying out drying under reduced pressure, the pressed compact that the pressure punch forming of 98MPa of take is reservation shape, by this pressed compact in the vacuum of 5Pa, with the condition keeping under the predetermined temperature in the scope at 1370~1470 ℃ 1 hour, carry out vacuum-sintering, after sintering, by the cutting edge reconditioning of cutting blade enforcement R:0.07mm is processed and is produced respectively the WC base cemented carbide tool base A~F processed with the blade shapes of stipulating in ISOCNMG120412.
And as material powder, the TiCN(for preparing all to have the average grain diameter of 0.5~2 μ m is TiC/TiN=50/50 by quality ratio) powder, Mo 2c powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder and Ni powder, these material powders are fitted in to the mix proportion shown in table 2, with ball mill wet mixed 24 hours, after being dried, the pressure punch forming of 98MPa of take is pressed compact, by this pressed compact in the blanket of nitrogen of 1.3kPa, with the condition keeping at the temperature at 1540 ℃ 1 hour, carry out sintering, after sintering, by cutting blade is implemented to width: 0.1mm, angle: the chamfered edge cutting edge reconditioning of 20 degree processes to produce the TiCN based ceramic metal tool base a~f processed of the blade shapes with iso standard CNMG120412.
Then, these tool base A~F and tool base a~f are respectively charged in common chemical evaporation plating device,
(a) first, the formation condition of the TiCN layer with longitudinal growth crystalline structure that the l-TiCN in table 3(table 3 records in representing Japanese Patent Publication 6-8010 communique, in addition also represent the formation condition of common granular crystal tissue) shown in condition under, evaporation forms the Ti compound layer of the target bed thickness shown in table 6,7.
(b) then, with the condition shown in table 4, the Ti compound layer of the most surface of lower layer is carried out based on CO and CO 2the pre-oxidation treatment of mist,
(c) then, the Ti compound layer surface of processing implementing above-mentioned (b), with the condition of the two-stage shown in table 5, forms the Al of upper layer with the target bed thickness shown in table 6 2o 3layer, thus produce respectively coating tool 1~13 of the present invention.
And, take is relatively object, do not carry out above-mentioned operation (b), (c) of the invention described above coating tool 1~13, or by carrying out to depart from condition of the present invention (being expressed as the present invention in table 4,5 outer), thereby produce the comparison coating tool 1~13 shown in table 7.
Then, for the Al directly over the lower layer of hard coating layer and the interface of upper layer 2o 3, use field emission type SEM and EBSD device to measure interface orientation form Al 2o 3the angle of inclination distribution proportion that the normal of { 10-10 } face of crystal grain becomes.
, by above-mentioned coating tool of the present invention 1~13, the depth direction 0.3 μ m that compares the interface distance upper layer from lower layer and upper layer of coating tool 1~13, and, be set in the lens barrel of field emission type SEM with the measurement range (0.3 μ m * 50 μ m) of the section abradant surface of the parallel direction distance 50 μ m on tool base surface, the crystal grain with the hexagoinal lattice electron ray of the accelerating potential of 15kV being present in each with the irradiation electric current of 1nA with the incident angle of 70 degree at described abradant surface in the measurement range of described abradant surface separately irradiates, use EBSD device, to the most surface layer from lower layer apart from film thickness direction 1 μ m with interior Al 2o 3crystal grain, by usingd in the mensuration region of 0.3 * 50 μ m the measuring space of 0.1 μ m/step as the normal of { 10-10 } face of the crystal plane of described crystal grain the inclination angle that normal to a surface was become with respect to described tool base, and measure the crystal grain that described mensuration inclination angle is 0~10 degree (interface orientation form Al according to this measurement result 2o 3the total ratio of number of degrees crystal grain) is obtained.
In their value shown in table 6, table 7.
And, the interface orientation form Al that coating tool 1 of the present invention is measured shown in Figure 2 2o 3the inclination angle number of degrees scatter chart of crystal grain.
And, for coating tool 1~13 of the present invention, relatively the hard coating layer of coating tool 1~13 upper layer integral body there is the Al that (0001) orientation inclination angle number of degrees distribute 2o 3the total ratio of the number of degrees of crystal grain, the Al to upper layer integral body 2o 3crystal grain, is used field emission type SEM and EBSD device, with similarly above-mentioned, by each being present in to this Al 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray measures the inclination angle that becomes with respect to the normal to a surface of described tool base as the normal of (0001) face of the crystal plane of described crystal grain, and (has the Al that orientation angle of inclination distributes by measuring the crystal grain that this inclination angle is 0~10 degree 2o 3the total ratio of number of degrees crystal grain) is obtained.
In addition, " upper layer is whole " described herein refers to from the interface of lower layer and upper layer till the measurement range of upper layer most surface comprises that the interface directly over interface is orientated form Al 2o 3the measurement range of crystal grain.
In their value shown in table 6, table 7.
And, the Al with the angle of inclination distribution of (0001) orientation that coating tool 1 of the present invention is measured shown in Figure 3 2o 3the inclination angle number of degrees scatter chart of crystal grain.
And, the result of the thickness of each structure sheaf of the hard coating layer of use scanning electron microscope mensuration (vertical section mensuration) coating tool 1~13 of the present invention, comparison coating tool 1~13, all demonstrates substantially identical with target bed thickness average bed thickness (measuring the mean values of 5 points).
And, to the Al directly over lower layer Ti compound layer 2o 3crystal grain, is used field emission type SEM and EBSD device, with similarly above-mentioned, by each being present in to this Al 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray and calculates the equispaced of the protuberance of wedge shape crystalline structure, the Al of the average difference of height of jog and formation wedge shape crystalline structure 2o 3the average grain diameter of crystal grain.
The distance between the adjacent protuberance of the wedge shape crystalline structure of narrating in the present invention, as shown in a portion of Fig. 1, is measured in the equispaced of the protuberance of wedge shape crystalline structure, and the mean value of measuring 5 points is made as to the equispaced of protuberance.The average difference of height of the jog of wedge shape crystalline structure as shown in the b portion of Fig. 1, measure with the present invention in the distance of the protuberance that is close to of the recess of the crystal group narrated, and the mean value of measuring 5 points is made as to the average difference of height of jog.Form the Al of wedge shape crystalline structure 2o 3the average grain diameter of crystal grain, from having the Al of the interface orientation form directly over lower layer Ti compound layer 2o 3the Al that on average obtains formation wedge shape crystalline structure of the measured value at horizontal line segment measuring point 10 places in crystal grain 2o 3the horizontal average grain diameter of crystal grain.
[table 1]
Figure BDA0000378244460000111
[table 2]
Figure BDA0000378244460000112
[table 3]
[table 4]
Figure BDA0000378244460000122
[table 5]
Figure BDA0000378244460000131
(in table, the symbol ※ on " time " hurdle represents to carry out evaporation until become upper layer target bed thickness)
[table 6]
Figure BDA0000378244460000141
[table 7]
Figure BDA0000378244460000151
Then, various coating tools to the invention described above coating tool 1~13, comparison coating tool 1~13, under the state of leading section that is all fastened on instrument steel lathe tool with stationary fixture, the following condition (being called machining condition A) of take is carried out the wet type high speed interrupted cut test (common cutting speed is 200m/min) of steel alloy
On the length direction of workpiece: JISSCM440 be uniformly-spaced formed with 8 pods pole,
Cutting speed: 320m/min,
Cutting-in amount: 2.0mm,
Feed speed: 0.3mm/rev,
Cutting time: 5 minutes,
The following condition (being called machining condition B) of take is carried out the firm wet type high speed interrupted cut test (common cutting speed is 200m/min) of carbon,
On the length direction of workpiece: JISS45C be uniformly-spaced formed with 8 pods pole,
Cutting speed: 350m/min,
Cutting-in amount: 1.8mm,
Feed speed: 0.3mm/rev,
Cutting time: 5 minutes,
The following condition (being called machining condition C) of take is carried out the wet type high speed interrupted cut test (common cutting speed is 250m/min) of spheroidal graphite cast-iron,
On the length direction of workpiece: JISFCD450 be uniformly-spaced formed with 8 pods pole,
Cutting speed: 320m/min,
Cutting-in amount: 1.5mm,
Feed speed: 0.35mm/rev,
Cutting time: 5 minutes,
And in a cutting test in office, all measured the wear of the tool flank width of cutting edge.
In this measurement result shown in table 8.
[table 8]
Figure BDA0000378244460000171
(in table, symbol ※ represent because of peeling off cutting time till reaching service life of occurring at hard coating layer (minute), symbol ※ ※ represent because of hard coating layer generation collapse cutter to reach service life till cutting time (minute))
From the result shown in table 6~8, coating tool 1~13 of the present invention, the Al directly over the interface of lower layer and upper layer 2o 3crystal grain all shows the wedge shape crystalline structure with the average difference of height of predetermined jog and the equispaced of protuberance, and this wedge shape crystalline structure median surface orientation form Al 2o 3the total ratio of the number of degrees that crystal grain is shared is 20~40%, in addition, has the Al that (0001) orientation angle of inclination distributes 2o 3crystal grain is at the Al of upper layer integral body 2o 3in crystal grain, the total ratio of the shared number of degrees is more than 60%, therefore with high heat, produce, and, even while using under interrupted impact load acts on the high speed interrupted cut condition of cutting edge, the resistance to fissility of hard coating layer is also excellent, and the resistance to also excellence of cutter that collapses.
With respect to this, relatively clearer and more definite in coating tool 1~13, in the processing of high speed interrupted cut, by what produce hard coating layer, peel off, collapse cutter, and arrive service life within the shorter time.
Utilizability in industry
As above-mentioned, coating tool of the present invention is not only in the continuous cutting or interrupted cut under the usual conditions such as various steel or cast iron, even if act at interrupted impact load under the machining condition of this sternness of high speed interrupted cut of cutting edge, what hard coating layer can not occur yet peels off, collapses cutter, in long-term use, bring into play excellent cutting ability, therefore can be enough to tackle the high performance of topping machanism and the Labor-saving of machining, energy-saving and cost degradation.

Claims (2)

1. a surface-coated cutting tool, on the surface of the tool base consisting of tungsten carbide base carbide alloy or base titanium carbonitride, evaporation is formed with the hard coating layer consisting of following (a) and (b),
(a) lower layer is Ti compound layer, one deck in carbide lamella, nitride layer, carbonitride layer, oxycarbide layer and the carbon nitrogen oxide layer of Ti of this Ti compound layer or two-layerly form above, and there is the average bed thickness of total of 3~20 μ m,
(b) upper layer is Al 2o 3layer, this Al 2o 3layer has the average bed thickness of 2~15 μ m and under the state of chemical vapor deposition, has ɑ type crystalline texture,
Described surface-coated cutting tool is characterised in that,
(c) Al of the upper layer in the most surface layer of lower layer and the interface of upper layer 2o 3crystal grain has wedge shape crystalline structure, and the average difference of height of the jog of this wedge shape crystalline structure is 0.5~2.0 μ m, and the equispaced of protuberance is 2~5 μ m, for the Al with this wedge shape crystalline structure 2o 3crystal grain, is used field emission type SEM and EBSD device, and each is present in to this Al 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray measures the inclination angle that becomes with respect to the normal to a surface of described tool base as the normal of { 10-10 } face of the crystal plane of described crystal grain, and subregion is carried out to by the spacing of every 0.25 degree in the mensuration inclination angle within the scope of 0~45 degree in the inclination angle of described mensuration, and when being present in inclination angle number of degrees scatter chart that the number of degrees in each subregion form and representing to add up to, in inclination angle subregion in the scope of 0~10 degree, there is peak-peak, and be present in 20~40% the ratio that the total ratio of the number of degrees in the inclination angle subregion in the scope of 0~10 degree accounts for total number of degrees in the number of degrees scatter chart of inclination angle,
(d) for the Al of upper layer integral body 2o 3crystal grain, by using field emission type SEM and EBSD device, is present in Al to each 2o 3the crystal grain with hexagoinal lattice in the measurement range of the section abradant surface of crystal grain irradiates electron ray measures the inclination angle that becomes with respect to the normal to a surface of described tool base as the normal of (0001) face of the crystal plane of described crystal grain, subregion is carried out to by the spacing of every 0.25 degree in mensuration inclination angle within the scope of 0~45 degree in the inclination angle of described mensuration, and when being present in inclination angle number of degrees scatter chart that the number of degrees in each subregion form and representing to add up to, in inclination angle subregion in the scope of 0~10 degree, there is peak-peak, and the total ratio that is present in the number of degrees in the inclination angle subregion within the scope of 0~10 degree accounts for more than 60% ratio of total number of degrees in the number of degrees scatter chart of inclination angle.
2. surface-coated cutting tool according to claim 1, is characterized in that,
The wedge shape crystalline structure of above-mentioned (c) is the Al of 0.05~1 μ m by average grain diameter 2o 3the aggregation of crystal grain forms.
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