JP5892472B2 - A surface-coated cutting tool with a hard coating layer that exhibits excellent peeling and chipping resistance in high-speed intermittent cutting. - Google Patents
A surface-coated cutting tool with a hard coating layer that exhibits excellent peeling and chipping resistance in high-speed intermittent cutting. Download PDFInfo
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- JP5892472B2 JP5892472B2 JP2012137413A JP2012137413A JP5892472B2 JP 5892472 B2 JP5892472 B2 JP 5892472B2 JP 2012137413 A JP2012137413 A JP 2012137413A JP 2012137413 A JP2012137413 A JP 2012137413A JP 5892472 B2 JP5892472 B2 JP 5892472B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/141—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness
- B23B27/145—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness characterised by having a special shape
- B23B27/146—Means to improve the adhesion between the substrate and the coating
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Description
この発明は、各種の鋼や鋳鉄などの切削加工を、高速で、かつ、切刃に断続的・衝撃的負荷が作用する断続切削条件で行った場合でも、硬質被覆層がすぐれた耐剥離性と耐チッピング性を発揮し、長期に亘ってすぐれた耐摩耗性を示す表面被覆切削工具（以下、被覆工具という）に関するものである。 This invention has excellent resistance to peeling even when various cutting processes such as steel and cast iron are performed at high speed and under intermittent cutting conditions in which intermittent and impact loads are applied to the cutting edge. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits chipping resistance and exhibits excellent wear resistance over a long period of time.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなるＴｉ化合物層、
（ｂ）上部層が、化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム層（以下、Ａｌ２Ｏ３層で示す）、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆工具が知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). And a Ti compound layer composed of one or more of a carbonitride oxide (hereinafter referred to as TiCNO) layer,
(B) an aluminum oxide layer (hereinafter referred to as an Al 2 O 3 layer) having an α-type crystal structure in a state where the upper layer is chemically vapor-deposited
A coated tool formed by vapor-depositing the hard coating layer constituted by (a) and (b) is known.
しかし、上記従来の被覆工具は、例えば各種の鋼や鋳鉄などの連続切削や断続切削では優れた耐摩耗性を発揮するが、これを、高速重切削、高速断続切削に用いた場合には、被覆層の剥離、チッピングが発生しやすく、工具寿命が短命になるという問題点があった。
そこで、被覆層のチッピングを抑制することを目的として、硬質被覆層の層構造については各種の提案がなされている。
However, the above conventional coated tools exhibit excellent wear resistance in continuous cutting and intermittent cutting of various steels and cast irons, for example, but when this is used for high-speed heavy cutting and high-speed intermittent cutting, There was a problem that peeling and chipping of the coating layer were likely to occur, and the tool life was shortened.
Therefore, various proposals have been made for the layer structure of the hard coating layer for the purpose of suppressing chipping of the coating layer.
例えば、特許文献１に示すように、工具基体の表面に、下部層としてのＴｉ化合物層、上部層としてのＡｌ２Ｏ３層を被覆した被覆工具において、電界放出型走査電子顕微鏡を用い、表面研磨面の法線に対して、上部層のＡｌ２Ｏ３結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、傾斜角度数分布グラフを作成した場合、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占めるＡｌ２Ｏ３層で上部層を構成することにより、耐チッピング性の向上を図ることが提案されている。 For example, as shown in Patent Document 1, in a coated tool in which the surface of a tool base is coated with a Ti compound layer as a lower layer and an Al 2 O 3 layer as an upper layer, a field emission scanning electron microscope is used, When the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the Al 2 O 3 crystal grains of the upper layer, is measured with respect to the normal of the polished surface, Al 2 occupies a ratio of 45% or more of the total frequency in the inclination angle distribution graph, with the highest peak existing in the inclination angle section within the range of 10 degrees and the total frequency existing in the range of 0 to 10 degrees. It has been proposed to improve the chipping resistance by forming the upper layer with an O 3 layer.
また、例えば、特許文献２に示すように、工具基体の表面に、下部層としてのＴｉ化合物層、上部層としてのＡｌ２Ｏ３層を被覆した被覆工具において、電界放出型走査電子顕微鏡を用い、表面研磨面の法線に対して、上部層のＡｌ２Ｏ３結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、傾斜角度数分布グラフを作成した場合、１２〜２２度の範囲内の傾斜角区分に最高ピークが存在すると共に、１２〜２２度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占めるＡｌ２Ｏ３層で上部層を構成することにより、上部層のＡｌ２Ｏ３層を厚膜化した場合であっても、耐チッピング性の向上を図り得ることが知られている。 Further, for example, as shown in Patent Document 2, a field emission scanning electron microscope is used in a coated tool in which the surface of a tool base is coated with a Ti compound layer as a lower layer and an Al 2 O 3 layer as an upper layer. When the inclination angle formed by the normal line of the (0001) plane which is the crystal plane of the Al 2 O 3 crystal grains of the upper layer is measured with respect to the normal line of the surface polished surface, and an inclination angle number distribution graph is created, The highest peak is present in the inclination angle section within the range of 12 to 22 degrees, and the total of the frequencies existing within the range of 12 to 22 degrees occupies a ratio of 45% or more of the entire degrees in the inclination angle frequency distribution graph. by constituting the upper layer in the Al 2 O 3 layer, also the Al 2 O 3 layer of the upper layer in a case where it is thicker, it is known to obtain aim to improve the chipping resistance.
さらに、例えば、特許文献３に示すように、工具基体の表面に、下部層としてのＴｉ化合物層、上部層としてのＡｌ２Ｏ３層を被覆し、さらに、下部層と上部層との間にＡｌ２Ｏ３層からなる補強層を介在形成した被覆工具において、上部層は、電界放出型走査電子顕微鏡を用い、表面研磨面の法線に対して、上部層のＡｌ２Ｏ３結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、傾斜角度数分布グラフを作成した場合、０〜１５度の範囲内の傾斜角区分に最高ピークが存在すると共に、０〜１５度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の５０％以上の割合を占めるＡｌ２Ｏ３層で構成し、さらに、補強層は、同じく表面研磨面の法線に対して、（０００１）面の法線がなす傾斜角を測定し、傾斜角度数分布グラフ作成した場合、７５〜９０度の範囲内の傾斜角区分に最高ピークが存在すると共に、７５〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の５０％以上の割合を占めるＡｌ２Ｏ３層で構成することにより、耐チッピング性の向上を図ることが提案されている。 Further, for example, as shown in Patent Document 3, the surface of the tool base is coated with a Ti compound layer as a lower layer and an Al 2 O 3 layer as an upper layer, and further, between the lower layer and the upper layer. In the coated tool in which the reinforcing layer composed of the Al 2 O 3 layer is interposed, the upper layer is formed by using a field emission scanning electron microscope, and the Al 2 O 3 crystal grains of the upper layer with respect to the normal line of the surface polished surface. When the inclination angle formed by the normal of the (0001) plane which is a crystal plane is measured and an inclination angle number distribution graph is created, the highest peak exists in the inclination angle section within the range of 0 to 15 degrees, and The total frequency within the range of 15 degrees is composed of an Al 2 O 3 layer that accounts for 50% or more of the total frequency in the tilt angle frequency distribution graph, and the reinforcing layer is also a surface polished surface method. The inclination of the normal of the (0001) plane to the line When the angle is measured and the inclination angle number distribution graph is created, the highest peak exists in the inclination angle section in the range of 75 to 90 degrees, and the total of the frequencies existing in the range of 75 to 90 degrees is the inclination angle. It has been proposed to improve chipping resistance by forming the Al 2 O 3 layer that accounts for 50% or more of the total frequency in the number distribution graph.
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化すると共に、断続切削等で切刃に高負荷が作用する傾向にあるが、上記の従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを高速断続切削条件で用いた場合には、硬質被覆層を構成するＴｉ化合物層からなる下部層とＡｌ２Ｏ３層からなる上部層の付着強度が不十分となり、上部層と下部層間での剥離、チッピング等の異常損傷の発生により、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been dramatically improved, while on the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work. However, in the above-mentioned conventional coated tool, there is no problem when it is used for continuous cutting or intermittent cutting under normal conditions such as steel or cast iron. When used under high-speed interrupted cutting conditions, the adhesion strength between the lower layer composed of the Ti compound layer and the upper layer composed of the Al 2 O 3 layer constituting the hard coating layer becomes insufficient, and peeling between the upper layer and the lower layer occurs. At present, the service life is reached in a relatively short time due to the occurrence of abnormal damage such as chipping.
そこで、本発明者等は、上述のような観点から、Ｔｉ化合物層からなる下部層とＡｌ２Ｏ３層からなる上部層の付着強度を改善し、もって、剥離、チッピング等の異常損傷の発生を防止するとともに、工具寿命の長寿命化を図るべく鋭意研究を行った結果、
Ｔｉ化合物層からなる下部層とＡｌ２Ｏ３層からなる上部層とを被覆形成した被覆工具において、下部層の最表面層直上のＡｌ２Ｏ３結晶粒の結晶方位傾斜角度分布性を制御することで、上部層と下部層の付着強度を向上させ得るとともに、さらに、上部層全体のＡｌ２Ｏ３結晶粒についての結晶方位傾斜角度分布性を制御することで、上部層全体の高温硬さと高温強度を維持することができるため、切刃に高負荷・衝撃的負荷が作用する高速断続切削に用いた場合でも、上部層と下部層間での剥離、チッピング等の異常損傷の発生が抑え、長期の使用にわたってすぐれた切削性能を発揮する被覆工具を得られることを見出したのである。
In view of the above, the present inventors have improved the adhesion strength of the lower layer made of the Ti compound layer and the upper layer made of the Al 2 O 3 layer, thereby causing abnormal damage such as peeling and chipping. As a result of earnest research to improve tool life and prevent tool life,
In a coated tool formed by coating a lower layer made of a Ti compound layer and an upper layer made of an Al 2 O 3 layer, the crystal orientation inclination angle distribution of Al 2 O 3 crystal grains immediately above the outermost surface layer of the lower layer is controlled. Thus, the adhesion strength between the upper layer and the lower layer can be improved, and furthermore, the crystal orientation tilt angle distribution of the Al 2 O 3 crystal grains of the entire upper layer is controlled, thereby increasing the high-temperature hardness of the entire upper layer. Since high temperature strength can be maintained, even when used for high-speed intermittent cutting where a high load / impact load acts on the cutting blade, the occurrence of abnormal damage such as peeling and chipping between the upper and lower layers is suppressed, It has been found that a coated tool that exhibits excellent cutting performance over a long period of use can be obtained.
この発明は、上記知見に基づいてなされたものであって、
「 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
（ａ）下部層として、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの合計平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、２〜１５μｍの平均層厚を有し、化学蒸着した状態でα型の結晶構造を有するＡｌ２Ｏ３層、
上記（ａ）、（ｂ）からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ｃ）下部層の最表面層と上部層との界面における上部層のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうちの０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、その傾斜角が２５〜３５度の範囲内にあるＡｌ２Ｏ３結晶粒の該傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の３０〜７０％の割合を占め、
（ｄ）上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定した場合、前記測定傾斜角のうちの０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、その傾斜角が０〜１０度の範囲内にあるＡｌ２Ｏ３結晶粒の該傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上であることを特徴とする表面被覆切削工具。」
に特徴を有するものである。
This invention has been made based on the above findings,
"On the surface of the tool base made of tungsten carbide base cemented carbide or titanium carbonitride base cermet,
(A) As a lower layer, it is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide layer, and a total average layer of 3 to 20 μm A Ti compound layer having a thickness;
(B) As an upper layer, an Al 2 O 3 layer having an average layer thickness of 2 to 15 μm and having an α-type crystal structure in a state of chemical vapor deposition,
In the surface-coated cutting tool in which the hard coating layer composed of the above (a) and (b) is formed by vapor deposition,
(C) About the Al 2 O 3 crystal grains of the upper layer at the interface between the outermost surface layer and the upper layer of the lower layer, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, the measurement range of the cross-section polished surface Each crystal grain having a hexagonal crystal lattice existing therein is irradiated with an electron beam, and the normal line of the (0001) plane which is the crystal plane of the crystal grain is formed with respect to the normal line of the surface of the tool base. The tilt angle is measured, and the measured tilt angles within the range of 0 to 45 degrees of the measured tilt angles are divided for each pitch of 0.25 degrees, and the frequencies existing in each section are totaled. When represented by an inclination angle frequency distribution graph, the total of the frequencies existing in the inclination angle section of the Al 2 O 3 crystal grains having an inclination angle in the range of 25 to 35 degrees is the entire frequency in the inclination angle frequency distribution graph. Of 30-70% of
(D) About the Al 2 O 3 crystal grains of the entire upper layer, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, the crystal grains having a hexagonal crystal lattice existing within the measurement range of the cross-section polished surface When the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface of the tool base, individually with the electron beam, When the measurement inclination angle within the range of 0 to 45 degrees is divided into pitches of 0.25 degrees and the frequency existing in each division is represented by an inclination angle number distribution graph, The total of the frequencies existing in the tilt angle section of the Al 2 O 3 crystal grains having the tilt angle in the range of 0 to 10 degrees is 60% or more of the total power in the tilt angle frequency distribution graph. Surface coated cutting tool. "
It has the characteristics.
以下に、この発明の被覆工具の硬質被覆層の構成層について詳細に説明する。
（ａ）Ｔｉ化合物層（下部層）：
Ｔｉ化合物層（例えば、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層およびＴｉＣＮＯ層）は、基本的にはα型の結晶構造を有するＡｌ２Ｏ３（以下、単に「Ａｌ２Ｏ３」で示す）層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようになるほか、工具基体、Ａｌ２Ｏ３層のいずれにも密着し、硬質被覆層の工具基体に対する密着性を維持する作用を有するが、その合計平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その合計平均層厚が２０μｍを越えると、特に高熱発生を伴う高速断続切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その合計平均層厚を３〜２０μｍと定めた。
Hereinafter, the constituent layers of the hard coating layer of the coated tool of the present invention will be described in detail.
(A) Ti compound layer (lower layer):
The Ti compound layer (eg, TiC layer, TiN layer, TiCN layer, TiCO layer, and TiCNO layer) is basically Al 2 O 3 having an α-type crystal structure (hereinafter simply referred to as “Al 2 O 3 ”). ) Existing as a lower layer of the layer, the hard coating layer has high temperature strength due to its excellent high temperature strength, and also adheres to both the tool base and the Al 2 O 3 layer, and the hard coating layer However, if the total average layer thickness is less than 3 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, if the total average layer thickness exceeds 20 μm, particularly high heat In high-speed intermittent cutting with generation, it becomes easy to cause thermoplastic deformation, which causes uneven wear. Therefore, the total average layer thickness is set to 3 to 20 μm.
（ｂ）下部層の最表面層：
この発明では、下部層の最表面層に、例えば、以下のような処理を施すことにより、下部層表面直上に形成される上部層のＡｌ２Ｏ３結晶粒を、所定の結晶方位傾斜角度分布形態（後記参照）になるよう蒸着することができる。
即ち、まず、通常の化学蒸着装置を使用して、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層およびＴｉＣＮＯ層のうちの１層または２層以上からなる種々のＴｉ化合物層を蒸着形成した後、
反応ガス組成（容量％）：ＣＯ ５〜１０％、ＣＯ２ ５〜１０％、残部Ｈ２、
雰囲気温度：９８０〜１０４０ ℃、
雰囲気圧力：５〜１５ ｋＰａ、
時間：１〜５ｍｉｎ、
という条件でＣＯとＣＯ２混合ガスによる酸化処理を行うことによって、次のＡｌ２Ｏ３層成膜工程におけるＡｌ２Ｏ３核生成に際し、所定の方位のＡｌ２Ｏ３核を分散形成せしめることができる。
(B) The outermost surface layer of the lower layer:
In the present invention, the uppermost Al 2 O 3 crystal grains formed immediately above the surface of the lower layer are subjected to, for example, the following treatment on the uppermost surface layer of the lower layer, and a predetermined crystal orientation tilt angle distribution Vapor deposition can be performed in the form (see below).
That is, first, after forming various Ti compound layers composed of one or more of TiC layer, TiN layer, TiCN layer, TiCO layer and TiCNO layer by vapor deposition using a normal chemical vapor deposition apparatus,
Reaction gas composition (volume%): CO 5-10%, CO 2 5-10%, balance H 2 ,
Atmospheric temperature: 980-1040 ° C.,
Atmospheric pressure: 5-15 kPa,
Time: 1-5 min
By performing an oxidation treatment with a CO and CO 2 mixed gas under the conditions: Al 2 O 3 nuclei in a predetermined orientation are dispersedly formed when the Al 2 O 3 nuclei are generated in the next Al 2 O 3 layer forming step. Can do.
（ｃ）下部層の最表面層直上のＡｌ２Ｏ３結晶粒：
上記（ｂ）で成膜した下部層の表面に、例えば、
反応ガス組成（容量％）：ＡｌＣｌ３ １〜３％、ＣＯ２ １〜３％、残部Ｈ２、
反応雰囲気温度：９８０〜１０４０ ℃、
反応雰囲気圧力：５〜１５ ｋＰａ、
時間：５〜３０ ｍｉｎ、
の条件でＡｌ２Ｏ３を蒸着することにより、下部層の最表面層直上に、所定の結晶方位傾斜角度分布形態を有するＡｌ２Ｏ３核を分散形成することができる。
(C) Al 2 O 3 crystal grains immediately above the outermost surface layer of the lower layer:
On the surface of the lower layer formed in (b) above, for example,
Reaction gas composition (volume%): AlCl 3 1-3%, CO 2 1-3%, balance H 2 ,
Reaction atmosphere temperature: 980 to 1040 ° C.
Reaction atmosphere pressure: 5 to 15 kPa,
Time: 5-30 min,
By depositing Al 2 O 3 in conditions, can be directly outermost surface layer of the lower layer, it is dispersed form Al 2 O 3 nuclei having a predetermined crystal orientation inclination angle distribution form.
下部層の最表面層直上（上部層と下部層の界面直上）に形成した上記（ｃ）のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射することにより、工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、下部層の最表面層から膜厚方向１μｍ以内のＡｌ２Ｏ３結晶粒について、その傾斜角が２５〜３５度の範囲内にある結晶粒の各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、上記結晶方位傾斜角度分布形態（以下、「界面方位形態」という）を有するＡｌ２Ｏ３結晶粒の度数の合計は、Ｔｉ化合物層の最上層の表面組織および、上記蒸着条件のうちの、特に、ＣＯ２ガス比によって影響されるが、上記界面方位形態を有するＡｌ２Ｏ３結晶粒が傾斜角度数分布グラフでの度数の合計の３０％未満であると、上部層Ａｌ２Ｏ３結晶粒の縦長柱状組織が層厚方向に対して、傾斜した状態で形成され、微細な縦長柱状結晶粒でなくなり、上部層Ａｌ２Ｏ３と下部層との付着強度が低下する。一方、上記界面方位形態を有するＡｌ２Ｏ３結晶粒の傾斜角度数分布グラフでの度数の合計が７０％を超えると、上部層Ａｌ２Ｏ３の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒（後記する）の傾斜角度数分布グラフでの度数の合計が上部層全体のＡｌ２Ｏ３結晶粒の全度数に対して６０％未満となり、上部層Ａｌ２Ｏ３の高温強度が低下する。
したがって、上部層と下部層との界面直上における上部層のＡｌ２Ｏ３結晶粒について、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、上記界面形態を有するＡｌ２Ｏ３結晶粒の度数の合計を３０〜７０％と定めた。
図１に、下部層と上部層の界面直上のＡｌ２Ｏ３結晶粒について測定した界面方位形態のＡｌ２Ｏ３結晶粒の傾斜角度数分布グラフの一例を示す。
For the Al 2 O 3 crystal grains formed in (c) just above the outermost surface layer of the lower layer (immediately above the interface between the upper layer and the lower layer), using a field emission scanning electron microscope and an electron beam backscatter diffraction device, By irradiating each crystal grain having a hexagonal crystal lattice existing within the measurement range of the cross-section polished surface with an electron beam, the crystal plane of the crystal grain is normal to the surface of the tool base (0001). ) The inclination angle formed by the normal of the surface is measured, and about the Al 2 O 3 crystal grains within 1 μm in the film thickness direction from the outermost surface layer of the lower layer, the inclination angle is within the range of 25 to 35 degrees. When represented by an inclination angle distribution graph obtained by counting the frequencies existing in each section, the frequency of Al 2 O 3 crystal grains having the above crystal orientation inclination angle distribution form (hereinafter referred to as “interface orientation form”) is shown. Total is the surface group of the top layer of the Ti compound layer And, of the above deposition conditions, in particular, is affected by CO 2 gas ratio, Al 2 O 3 crystal grains is the sum less than 30% of the power in the inclination angle frequency distribution graph having the interface orientation form In addition, the vertical columnar structure of the upper layer Al 2 O 3 crystal grains is formed in an inclined state with respect to the layer thickness direction, and is not a fine vertical columnar crystal grain, and the upper layer Al 2 O 3 and the lower layer are attached to each other. Strength decreases. On the other hand, when the sum of the frequencies in the inclination angle number distribution graph of the Al 2 O 3 crystal grains having the interface orientation form exceeds 70%, Al 2 having the (0001) orientation inclination angle distribution of the upper layer Al 2 O 3. The total frequency in the gradient angle distribution graph of O 3 crystal grains (described later) is less than 60% with respect to the total frequency of Al 2 O 3 crystal grains in the entire upper layer, and the high temperature strength of the upper layer Al 2 O 3 Decreases.
Therefore, when the upper layer Al 2 O 3 crystal grains immediately above the interface between the upper layer and the lower layer are represented by an inclination angle number distribution graph obtained by counting the frequencies existing in each section, the above-described interface form is obtained. The total frequency of Al 2 O 3 crystal grains was determined to be 30 to 70%.
FIG. 1 shows an example of an inclination angle number distribution graph of Al 2 O 3 crystal grains in the interface orientation mode measured for Al 2 O 3 crystal grains immediately above the interface between the lower layer and the upper layer.
（ｄ）上部層のＡｌ２Ｏ３結晶粒：
下部層の最表面層直上に上記（ｃ）のＡｌ２Ｏ３核を蒸着形成した後、上部層のＡｌ２Ｏ３結晶粒を以下の条件で形成する。
即ち、上記（ｃ）でＡｌ２Ｏ３核を蒸着形成した後、
反応ガス組成（容量％）：ＡｌＣｌ３ １〜３％、ＨＣｌ １〜３％、ＣＯ２ ５〜１０％、Ｈ２Ｓ ０．１〜０．５％、残部Ｈ２、
反応雰囲気温度：９８０〜１０４０ ℃、
反応雰囲気圧力：５〜１５ ｋＰａ、
時間：（目標とする上部層層厚になるまで）
という条件で蒸着することにより、層厚方向とほぼ平行に成長した微細な縦長柱状Ａｌ２Ｏ３結晶粒で構成された上部層が成膜される。
(D) Al 2 O 3 crystal grains in the upper layer:
After the Al 2 O 3 nucleus of (c) is deposited on the uppermost surface layer of the lower layer, the upper layer Al 2 O 3 crystal grains are formed under the following conditions.
That is, after forming the Al 2 O 3 nucleus by vapor deposition in the above (c),
Reaction gas composition (volume%): AlCl 3 1-3%, HCl 1-3%, CO 2 5-10%, H 2 S 0.1-0.5%, balance H 2
Reaction atmosphere temperature: 980 to 1040 ° C.
Reaction atmosphere pressure: 5 to 15 kPa,
Time: (until the target upper layer thickness is reached)
By vapor deposition under the conditions, an upper layer composed of fine vertical columnar Al 2 O 3 crystal grains grown almost parallel to the layer thickness direction is formed.
上記（ｄ）のＡｌ２Ｏ３結晶粒は、層厚方向とほぼ平行な方向に微細な縦長柱状Ａｌ２Ｏ３結晶粒として成長する。しかも、工具基体の表面の法線に対して、Ａｌ２Ｏ３結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表し、その傾斜角が０〜１０度の範囲内にあるＡｌ２Ｏ３結晶粒の度数の合計を求めた場合、上記結晶方位傾斜角度分布形態（以下、「（０００１）方位傾斜角度分布」という）を有するＡｌ２Ｏ３結晶粒の度数の合計は、上部層全体のＡｌ２Ｏ３結晶粒の全度数に対して６０％以上を占める。
上記（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計は、上記蒸着条件のうちの、特に、反応雰囲気温度およびＣＯ２、Ｈ２Ｓガス比によって影響される。
そして、（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計が、６０％以上を占める場合に、上部層Ａｌ２Ｏ３の高温硬さ、高温強度が維持されることから、本発明では、上部層の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計を、６０％以上と定めた。
The Al 2 O 3 crystal grains in (d) above grow as fine vertical columnar Al 2 O 3 crystal grains in a direction substantially parallel to the layer thickness direction. In addition, the inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the Al 2 O 3 crystal grain, is measured with respect to the normal line of the surface of the tool base, and the frequencies existing in each section are tabulated. When the sum of the frequencies of Al 2 O 3 crystal grains having an inclination angle in the range of 0 to 10 degrees is obtained, the crystal orientation inclination angle distribution form (hereinafter referred to as “(0001 The total frequency of Al 2 O 3 crystal grains having “) orientation tilt angle distribution” occupies 60% or more of the total frequency of Al 2 O 3 crystal grains in the entire upper layer.
The total frequency of the Al 2 O 3 crystal grains having the (0001) azimuth tilt angle distribution is influenced by the reaction atmosphere temperature and the CO 2 , H 2 S gas ratio among the above deposition conditions.
And when the total frequency of the Al 2 O 3 crystal grains having the (0001) orientation tilt angle distribution occupies 60% or more, the high-temperature hardness and high-temperature strength of the upper layer Al 2 O 3 are maintained. In the present invention, the total frequency of the Al 2 O 3 crystal grains having the (0001) orientation tilt angle distribution of the upper layer is determined to be 60% or more.
上記（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計は、上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、その傾斜角が０〜１０度である結晶粒（（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒）の度数の合計として求められる。
図２に、上部層全体について測定した（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の傾斜角度数分布グラフの一例を示す。
なお、上部層全体の層厚が、２μｍ未満であると長期の使用にわたってすぐれた高温強度および高温硬さを発揮することができず、一方、１５μｍを越えると、チッピングが発生し易くなることから、上部層の層厚は２〜１５μｍと定めた。
The total frequency of the Al 2 O 3 crystal grains having the (0001) azimuth tilt angle distribution is calculated using a field emission scanning electron microscope and an electron beam backscatter diffraction apparatus for the Al 2 O 3 crystal grains of the entire upper layer. Then, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the cross-sectional polished surface is irradiated with an electron beam, and is a crystal plane of the crystal grain with respect to the normal of the surface of the tool base (0001 The tilt angle formed by the normal of the surface) is measured, and is determined as the sum of the frequencies of crystal grains (Al 2 O 3 crystal grains having a (0001) orientation tilt angle distribution) whose tilt angle is 0 to 10 degrees.
FIG. 2 shows an example of an inclination angle number distribution graph of Al 2 O 3 crystal grains having a (0001) orientation inclination angle distribution measured for the entire upper layer.
If the thickness of the entire upper layer is less than 2 μm, excellent high-temperature strength and high-temperature hardness cannot be exhibited over a long period of use, whereas if it exceeds 15 μm, chipping is likely to occur. The layer thickness of the upper layer was determined to be 2 to 15 μm.
この発明の被覆工具は、硬質被覆層の下部層最表面に、例えば、酸化処理を施すことにより、下部層と上部層の界面直上には、所定の度数の合計の界面方位形態を有するＡｌ２Ｏ３結晶粒を形成し、さらに、上部層全体として所定の度数の合計を有する（０００１）方位傾斜角度分布Ａｌ２Ｏ３結晶粒を有する上部層を形成することにより、下部層と上部層の付着強度を高めることができるため、各種の鋼や鋳鉄などの切削加工を高速で、かつ切れ刃に対して衝撃的負荷が作用する高速断続切削条件で行っても、すぐれた高温強度と高温硬さを示し、硬質被覆層の剥離・チッピングの発生もなく、長期の使用にわたってすぐれた切削性能を発揮する。 In the coated tool of the present invention, for example, by subjecting the outermost surface of the lower layer of the hard coating layer to an oxidation treatment, Al 2 having a total interface orientation of a predetermined frequency immediately above the interface between the lower layer and the upper layer. By forming O 3 crystal grains, and further forming an upper layer having (0001) orientation tilt angle distribution Al 2 O 3 crystal grains having a total of predetermined frequencies as the entire upper layer, the lower layer and the upper layer Adhesion strength can be increased, so excellent high-temperature strength and high-temperature hardness can be achieved even when cutting various steels and cast irons at high speed and under high-speed intermittent cutting conditions in which an impact load is applied to the cutting edge. It shows excellent cutting performance over a long period of use without the occurrence of peeling or chipping of the hard coating layer.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するインサート形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder and Co powder all having an average particle diameter of 1 to 3 μm are prepared. Then, blended into the composition shown in Table 1, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and then press-molded into a green compact of a predetermined shape at a pressure of 98 MPa. Is vacuum-sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge is subjected to honing of R: 0.07 mm. -WC base cemented carbide tool bases A to F each having an insert shape specified in CNMG120408 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分に幅：０．１ｍｍ、角度：２０度のチャンファーホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１６０４１２のインサート形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, a chamfer with a width of 0.1 mm and an angle of 20 degrees at the cutting edge portion. By performing honing, tool bases a to f made of TiCN base cermet having an insert shape of ISO standard / CNMG 160412 were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、
（ａ）まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表６，７に示される目標層厚のＴｉ化合物層を蒸着形成した。
（ｂ）ついで、表４に示される条件にて、下部層の最表面のＴｉ化合物層にＣＯとＣＯ２混合ガスによる酸化処理を行い、
（ｃ）ついで、上記（ｂ）の処理を施したＴｉ化合物層の表面に、表５に示される二段階の条件にて、上部層のＡｌ２Ｏ３層を表６に示される目標層厚で形成することにより、
本発明被覆工具１〜１３をそれぞれ製造した。
Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically elongated crystal structure described in JP-A-6-8010, and the other conditions are ordinary granularity. The Ti compound layer having the target layer thickness shown in Tables 6 and 7 was formed by vapor deposition under the conditions shown in Table 6 and 7.
(B) Then, under the conditions shown in Table 4, the outermost Ti compound layer of the lower layer is subjected to an oxidation treatment with a CO and CO 2 mixed gas,
(C) Next, on the surface of the Ti compound layer subjected to the treatment of (b) above, the upper Al 2 O 3 layer is formed in the target layer thickness shown in Table 6 under the two-stage conditions shown in Table 5. By forming with
The present coated tools 1 to 13 were produced, respectively.
また、比較の目的で、上記本発明被覆工具１〜１３の上記工程（ｂ），（ｃ）を行わずに、あるいは、本発明から外れる条件（表４、５で、それぞれ本発明外として示す）で行うことにより、表７に示す比較被覆工具１〜１３を製造した。 Moreover, for the purpose of comparison, the above steps (b) and (c) of the coated tools 1 to 13 of the present invention are not performed, or the conditions deviating from the present invention (Tables 4 and 5 are shown as outside the present invention, respectively). ) To produce comparative coated tools 1 to 13 shown in Table 7.
ついで、硬質被覆層の下部層と上部層との界面直上のＡｌ２Ｏ３について、界面方位形態Ａｌ２Ｏ３結晶粒の（０００１）面の法線がなす傾斜角度分布割合を、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて測定した。
すなわち、上記の本発明被覆工具１〜１３、比較被覆工具１〜１３の下部層と上部層との界面から上部層の深さ方向へ０．３μｍ、また、工具基体表面と平行方向に５０μｍの断面研磨面の測定範囲（０．３μｍ×５０μｍ）を、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、それぞれの前記研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて、下部層の最表面層から膜厚方向１μｍ以内のＡｌ２Ｏ３結晶粒について、０．３×５０μｍの測定領域を０．１μｍ／ｓｔｅｐの間隔で、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表し、この測定結果に基づいて、前記測定傾斜角が２５〜３５度である結晶粒（界面方位形態Ａｌ２Ｏ３結晶粒）の度数の合計を測定することによって求めた。
表６、表７にこれらの値を示す。
また、図１に、本発明被覆工具１について測定した界面方位形態Ａｌ２Ｏ３結晶粒の傾斜角度数分布グラフを示す。
Next, with respect to Al 2 O 3 immediately above the interface between the lower layer and the upper layer of the hard coating layer, the inclination angle distribution ratio formed by the normal of the (0001) plane of the interface orientation form Al 2 O 3 crystal grains is expressed as a field emission type. The measurement was performed using a scanning electron microscope and an electron beam backscatter diffraction apparatus.
That is, 0.3 μm in the depth direction of the upper layer from the interface between the lower layer and the upper layer of the present invention coated tools 1 to 13 and comparative coated tools 1 to 13, and 50 μm in the direction parallel to the tool base surface. The measurement range (0.3 μm × 50 μm) of the cross-section polished surface is set in a lens barrel of a field emission scanning electron microscope, and the polishing surface is irradiated with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees and 1 nA. By irradiating each crystal grain having a hexagonal crystal lattice existing within the measurement range of each polished surface with an electric current, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, the outermost layer of the lower layer is irradiated. With respect to Al 2 O 3 crystal grains within a thickness direction of 1 μm from the surface layer, the crystal grains are measured with respect to the normal of the surface of the tool base at a measurement area of 0.3 × 50 μm at intervals of 0.1 μm / step. Of the (0001) plane which is the crystal plane of An inclination angle formed by a line is measured and expressed in an inclination angle number distribution graph obtained by aggregating the frequencies existing in each section. Based on the measurement result, a crystal grain having a measurement inclination angle of 25 to 35 degrees ( It was determined by measuring the total frequency of the interface orientation form (Al 2 O 3 crystal grains).
Tables 6 and 7 show these values.
Further, in FIG. 1, showing the inclination angle frequency distribution graph of the interfacial orientation form Al 2 O 3 crystal grains were measured for the present invention coated tools 1.
さらに、本発明被覆工具１〜１３、比較被覆工具１〜１３の硬質被覆層の上部層全体の（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の（０００１）面の法線がなす傾斜角度分布割合については、上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて、前記と同様、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、その傾斜角が０〜１０度である結晶粒（（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒）の度数の合計を測定することによって求めた。
なお、ここでいう「上部層全体」とは、下部層と上部層との界面から上部層最表面までの測定範囲をいい、界面直上の界面方位形態Ａｌ２Ｏ３結晶粒の測定範囲も含む。
表６、表７にこれらの値を示す。
また、図２に、本発明被覆工具１について測定した（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の傾斜角度数分布グラフを示す。
Furthermore, the normal line of the (0001) plane of the Al 2 O 3 crystal grains having the (0001) orientation inclination angle distribution of the entire upper layer of the hard coating layer of the present coated tools 1 to 13 and comparative coated tools 1 to 13 is formed. As for the tilt angle distribution ratio, Al 2 O 3 crystal grains in the entire upper layer exist within the measurement range of the cross-section polished surface as described above using a field emission scanning electron microscope and an electron beam backscatter diffraction apparatus. Each crystal grain having a hexagonal crystal lattice is irradiated with an electron beam, and an inclination angle formed by a normal line of the (0001) plane which is a crystal plane of the crystal grain with respect to a normal line of the surface of the tool base measured, was determined by measuring the sum of the frequencies of the inclination angle is 0 degrees grains ((0001) orientation inclination angle distribution Al 2 O 3 crystal grains having a).
The “overall upper layer” as used herein refers to the measurement range from the interface between the lower layer and the upper layer to the uppermost surface of the upper layer, and includes the measurement range of the interface orientation form Al 2 O 3 crystal grains immediately above the interface. .
Tables 6 and 7 show these values.
FIG. 2 shows an inclination angle number distribution graph of Al 2 O 3 crystal grains having a (0001) orientation inclination angle distribution measured for the coated tool 1 of the present invention.
また、本発明被覆工具１〜１３、比較被覆工具１〜１３の硬質被覆層の各構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Moreover, when the thickness of each structural layer of the hard coating layer of this invention coated tool 1-13 and comparative coating tool 1-13 was measured using the scanning electron microscope (longitudinal section measurement), all are target layer thickness. The average layer thickness (average value of 5-point measurement) was substantially the same.
つぎに、上記の本発明被覆工具１〜１３、比較被覆工具１〜１３の各種の被覆工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＣＭ４４０の長さ方向等間隔８本縦溝入り、
切削速度：３２０ｍ／ｍｉｎ、
切り込み：２．０ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ａという）での合金鋼の湿式高速断続切削試験（通常の切削速度は、２００ｍ／ｍｉｎ）、
被削材：ＪＩＳ・Ｓ４５Ｃの長さ方向等間隔８本縦溝入り、
切削速度：３８０ｍ／ｍｉｎ、
切り込み：１．５ｍｍ、
送り：０．４ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｂという）での炭素鋼の湿式高速断続切削試験（通常の切削速度は、２５０ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＦＣＤ５００の長さ方向等間隔８本縦溝入り、
切削速度：３５０ｍ／ｍｉｎ、
切り込み：２．０ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｃという）でのダグタイル鋳鉄の湿式高速断続切削試験（通常の切削速度は２５０ｍ／ｍｉｎ）、
を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。
表８にこの測定結果を示した。
Next, for the various coated tools of the present invention coated tools 1 to 13 and comparative coated tools 1 to 13, all of them are screwed with a fixing jig to the tip of the tool steel tool,
Work material: Eight vertical grooves with equal intervals in the length direction of JIS / SCM440,
Cutting speed: 320 m / min,
Cutting depth: 2.0 mm
Feed: 0.3mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test (normal cutting speed is 200 m / min) of alloy steel under the above conditions (referred to as cutting condition A),
Work material: Eight longitudinally spaced grooves in the length direction of JIS / S45C,
Cutting speed: 380 m / min,
Incision: 1.5mm,
Feed: 0.4mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test of carbon steel under the above conditions (referred to as cutting condition B) (normal cutting speed is 250 m / min),
Work material: Eight longitudinally spaced grooves in the length direction of JIS / FCD500
Cutting speed: 350 m / min,
Cutting depth: 2.0 mm
Feed: 0.3mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test (normal cutting speed is 250 m / min) of ductile cast iron under the above conditions (referred to as cutting condition C),
In each cutting test, the flank wear width of the cutting edge was measured.
Table 8 shows the measurement results.
表６〜８に示される結果から、本発明被覆工具１〜１３は、いずれも、下部層と上部層の界面直上のＡｌ２Ｏ３結晶粒に占める界面方位形態Ａｌ２Ｏ３結晶粒の度数の合計は３０〜７０％であり、さらに、上部層全体のＡｌ２Ｏ３結晶粒に占める（０００１）方位傾斜角度分布を有するＡｌ２Ｏ３結晶粒の度数の合計は６０％以上であるため、高熱発生を伴い、かつ、切刃に断続的・衝撃的負荷が作用する高速断続切削条件に用いた場合でも、硬質被覆層の耐剥離性が優れるとともに、耐チッピング性にも優れる。
これに対して、比較被覆工具１〜１３では、高速断続切削加工においては、硬質被覆層の剥離発生、チッピング発生により、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Table 6-8, the present invention coated tool 1-13 are both the frequency of the interface orientation form Al 2 O 3 crystal grains occupying the Al 2 O 3 crystal grains immediately above the interface of the lower layer and the upper layer the total 30 to 70%, more accounts on Al 2 O 3 crystal grains of the whole upper layer (0001) for the total power of Al 2 O 3 crystal grains having an orientation angle of inclination distribution is 60% or more Even when used in high-speed intermittent cutting conditions that involve high heat generation and intermittent and impact loads on the cutting edge, the hard coating layer has excellent peeling resistance and excellent chipping resistance.
On the other hand, it is apparent that the comparative coated tools 1 to 13 reach the service life in a relatively short time due to occurrence of peeling and chipping of the hard coating layer in high-speed intermittent cutting.
上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、切刃に断続的・衝撃的負荷が作用する高速断続切削という厳しい切削条件下でも、硬質被覆層の剥離、チッピングが発生することはなく、長期の使用に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。
As described above, the coated tool of the present invention is not only continuous cutting and interrupted cutting under normal conditions such as various steels and cast irons, but also severe cutting such as high-speed intermittent cutting in which intermittent and impact loads act on the cutting edge. Even under cutting conditions, no peeling or chipping of the hard coating layer will occur, and excellent cutting performance will be demonstrated over long-term use. It can cope with energy saving and cost reduction sufficiently satisfactorily.
Claims (1)
（ａ）下部層として、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの合計平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、２〜１５μｍの平均層厚を有し、化学蒸着した状態でα型の結晶構造を有するＡｌ２Ｏ３層、
上記（ａ）、（ｂ）からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ｃ）下部層の最表面層と上部層との界面における上部層のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうちの０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、その傾斜角が２５〜３５度の範囲内にあるＡｌ２Ｏ３結晶粒の該傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の３０〜７０％の割合を占め、
（ｄ）上部層全体のＡｌ２Ｏ３結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定した場合、前記測定傾斜角のうちの０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、その傾斜角が０〜１０度の範囲内にあるＡｌ２Ｏ３結晶粒の該傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上であることを特徴とする表面被覆切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, it is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide layer, and a total average layer of 3 to 20 μm A Ti compound layer having a thickness;
(B) As an upper layer, an Al 2 O 3 layer having an average layer thickness of 2 to 15 μm and having an α-type crystal structure in a state of chemical vapor deposition,
In the surface-coated cutting tool in which the hard coating layer composed of the above (a) and (b) is formed by vapor deposition,
(C) About the Al 2 O 3 crystal grains of the upper layer at the interface between the outermost surface layer and the upper layer of the lower layer, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, the measurement range of the cross-section polished surface Each crystal grain having a hexagonal crystal lattice existing therein is irradiated with an electron beam, and the normal line of the (0001) plane which is the crystal plane of the crystal grain is formed with respect to the normal line of the surface of the tool base. The tilt angle is measured, and the measured tilt angles within the range of 0 to 45 degrees of the measured tilt angles are divided for each pitch of 0.25 degrees, and the frequencies existing in each section are totaled. When represented by an inclination angle frequency distribution graph, the total of the frequencies existing in the inclination angle section of the Al 2 O 3 crystal grains having an inclination angle in the range of 25 to 35 degrees is the entire frequency in the inclination angle frequency distribution graph. Of 30-70% of
(D) About the Al 2 O 3 crystal grains of the entire upper layer, using a field emission scanning electron microscope and an electron beam backscatter diffractometer, the crystal grains having a hexagonal crystal lattice existing within the measurement range of the cross-section polished surface When the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface of the tool base, individually with the electron beam, When the measurement inclination angle within the range of 0 to 45 degrees is divided into pitches of 0.25 degrees and the frequency existing in each division is represented by an inclination angle number distribution graph, The total of the frequencies existing in the tilt angle section of the Al 2 O 3 crystal grains having the tilt angle in the range of 0 to 10 degrees is 60% or more of the total power in the tilt angle frequency distribution graph. Surface coated cutting tool.
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