JP5877358B2 - 熱処理装置 - Google Patents

熱処理装置 Download PDF

Info

Publication number
JP5877358B2
JP5877358B2 JP2011095685A JP2011095685A JP5877358B2 JP 5877358 B2 JP5877358 B2 JP 5877358B2 JP 2011095685 A JP2011095685 A JP 2011095685A JP 2011095685 A JP2011095685 A JP 2011095685A JP 5877358 B2 JP5877358 B2 JP 5877358B2
Authority
JP
Japan
Prior art keywords
gas
supply pipe
gas supply
heat treatment
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011095685A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012225620A5 (enrdf_load_stackoverflow
JP2012225620A (ja
Inventor
直矢 領木
直矢 領木
関口　大好
大好 関口
祐司 岩上
祐司 岩上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Priority to JP2011095685A priority Critical patent/JP5877358B2/ja
Priority to CN201210113436.2A priority patent/CN102748941B/zh
Publication of JP2012225620A publication Critical patent/JP2012225620A/ja
Publication of JP2012225620A5 publication Critical patent/JP2012225620A5/ja
Application granted granted Critical
Publication of JP5877358B2 publication Critical patent/JP5877358B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D21/0001—Recuperative heat exchangers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0056—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for ovens or furnaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Tunnel Furnaces (AREA)
JP2011095685A 2011-04-22 2011-04-22 熱処理装置 Active JP5877358B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011095685A JP5877358B2 (ja) 2011-04-22 2011-04-22 熱処理装置
CN201210113436.2A CN102748941B (zh) 2011-04-22 2012-04-17 热处理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011095685A JP5877358B2 (ja) 2011-04-22 2011-04-22 熱処理装置

Publications (3)

Publication Number Publication Date
JP2012225620A JP2012225620A (ja) 2012-11-15
JP2012225620A5 JP2012225620A5 (enrdf_load_stackoverflow) 2014-06-19
JP5877358B2 true JP5877358B2 (ja) 2016-03-08

Family

ID=47029330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011095685A Active JP5877358B2 (ja) 2011-04-22 2011-04-22 熱処理装置

Country Status (2)

Country Link
JP (1) JP5877358B2 (enrdf_load_stackoverflow)
CN (1) CN102748941B (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5716734B2 (ja) * 2012-12-28 2015-05-13 株式会社村田製作所 熱処理炉
WO2014203732A1 (ja) * 2013-06-20 2014-12-24 株式会社村田製作所 ガス供給管および熱処理装置
JP5950042B2 (ja) * 2013-06-20 2016-07-13 株式会社村田製作所 ガス供給管および熱処理装置
JP6185312B2 (ja) * 2013-07-17 2017-08-23 日本特殊陶業株式会社 燃料電池
JP6169917B2 (ja) * 2013-08-06 2017-07-26 日本特殊陶業株式会社 燃料電池
JP6300014B2 (ja) * 2014-03-14 2018-03-28 東レ・ファインケミカル株式会社 硫化リチウムの製造方法
DE102014106135A1 (de) * 2014-04-30 2015-11-05 Thyssenkrupp Ag Düseneinrichtung und Verfahren zur Behandlung eines Stahlflachproduktes
CN106546096B (zh) * 2016-12-02 2019-03-05 陕西友力实业有限公司 微波加热生产合金的生产线装置及生产方法
JP6620953B2 (ja) * 2018-01-09 2019-12-18 東レ・ファインケミカル株式会社 硫化リチウム製造装置
DE102018133362A1 (de) 2018-12-21 2020-06-25 Eisenmann Se Injektionseinrichtung zum Abgeben eines Gases, Prozessgassystem zum Zuführen eines Prozessgases, sowie Vorrichtung und Verfahren zum thermischen oder thermo-chemischen Behandeln von Material
IT201900006433A1 (it) * 2019-04-29 2020-10-29 Rotelec Sa Apparato di riscaldamento di prodotti metallici
CN112503952A (zh) * 2020-11-26 2021-03-16 东北大学 一种加热炉内气体供给装置
CN113503733B (zh) * 2021-07-22 2023-05-09 安徽华深铝业有限公司 一种加热均匀的铝型材生产加热炉
CN114300584B (zh) * 2021-12-31 2023-07-14 成都中建材光电材料有限公司 一种太阳能电池芯片的传输装置及退火传输方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001328870A (ja) * 2000-05-19 2001-11-27 Taiyo Yuden Co Ltd セラミックの焼成方法、トンネル式焼成炉、セラミック電子部品の製造方法及び装置、セラミック電子部品の焼成用収納体
TW500910B (en) * 2000-10-10 2002-09-01 Ishikawajima Harima Heavy Ind Continuous sintering furnace and its using method
JP2002195755A (ja) * 2000-10-16 2002-07-10 Matsushita Electric Ind Co Ltd 熱処理装置
US7413592B2 (en) * 2004-03-31 2008-08-19 Nu-Iron Technology, Llc Linear hearth furnace system and methods regarding same
DE602005006099T2 (de) * 2004-08-04 2009-05-07 Ibiden Co., Ltd., Ogaki Durchlaufbrennofen und verfahren zur herstellung eines porösen keramikglieds damit
JP4931414B2 (ja) * 2005-12-21 2012-05-16 株式会社九州日昌 気体加熱装置
JP5318327B2 (ja) * 2006-02-08 2013-10-16 光洋サーモシステム株式会社 熱処理装置
DE102006037703B4 (de) * 2006-08-11 2013-04-18 Eisenmann Ag Heißluftofen
JP2009068739A (ja) * 2007-09-12 2009-04-02 Sumitomo Metal Mining Co Ltd 連続焼成炉
WO2010016421A1 (ja) * 2008-08-08 2010-02-11 芝浦メカトロニクス株式会社 熱処理装置及び熱処理方法
US20110136069A1 (en) * 2009-05-28 2011-06-09 Panasonic Corporation Burning equipment
JP5446653B2 (ja) * 2009-09-18 2014-03-19 パナソニック株式会社 熱処理装置

Also Published As

Publication number Publication date
JP2012225620A (ja) 2012-11-15
CN102748941A (zh) 2012-10-24
CN102748941B (zh) 2015-04-29

Similar Documents

Publication Publication Date Title
JP5877358B2 (ja) 熱処理装置
JP2012225620A5 (enrdf_load_stackoverflow)
US6623269B2 (en) Thermal treatment apparatus
KR101321677B1 (ko) 기판 처리 장치
WO2010137286A1 (ja) 焼成装置
JP5446653B2 (ja) 熱処理装置
JP2012225557A (ja) 熱処理装置
JP2005116898A (ja) プラズマ処理装置
JP5517826B2 (ja) 真空処理装置およびプラズマ処理方法
JP4645448B2 (ja) 真空成膜装置及び真空成膜方法並びに太陽電池材料
JP5468318B2 (ja) 熱処理炉
JP4245177B2 (ja) 熱処理装置
KR101835922B1 (ko) 열처리로
JP2005116900A (ja) 常圧プラズマ処理装置
JP2003077398A (ja) プラズマディスプレイパネルの製造方法およびそのための炉設備
KR20200044446A (ko) 증발소스
JP4360545B2 (ja) 連続熱処理炉
JP4210833B2 (ja) 連続焼成炉
JP2000208053A (ja) プラズマディスプレイパネル用焼成炉
KR101450006B1 (ko) 기판처리장치
JPH10267544A (ja) 連続式熱処理炉
CN100431102C (zh) 真空成膜装置和真空成膜方法以及太阳电池材料
KR20140015874A (ko) 기판 처리 유닛 및 이를 구비하는 기판 처리 장치
JP2000203881A (ja) 連続式焼成炉におけるガラス材の焼成方法
JP7289161B2 (ja) 加熱装置および加熱方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140109

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140430

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20141008

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20141014

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20141015

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150203

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150403

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150519

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150715

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150915

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150918

R151 Written notification of patent or utility model registration

Ref document number: 5877358

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151