JP5875844B2 - ピエゾ電気駆動部を備えるｍｅｍｓ振動ビーム加速度計 - Google Patents

ピエゾ電気駆動部を備えるｍｅｍｓ振動ビーム加速度計 Download PDF

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JP5875844B2
JP5875844B2 JP2011262232A JP2011262232A JP5875844B2 JP 5875844 B2 JP5875844 B2 JP 5875844B2 JP 2011262232 A JP2011262232 A JP 2011262232A JP 2011262232 A JP2011262232 A JP 2011262232A JP 5875844 B2 JP5875844 B2 JP 5875844B2
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trace
teeth
detf
piezoelectric
tooth
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Japanese (ja)
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JP2012159494A (ja
JP2012159494A5 (enExample
Inventor
ジョン・ストレーロー
ダグ・マクグーガン
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Honeywell International Inc
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Honeywell International Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2473—Double-Ended Tuning Fork [DETF] resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
JP2011262232A 2011-02-02 2011-11-30 ピエゾ電気駆動部を備えるｍｅｍｓ振動ビーム加速度計 Expired - Fee Related JP5875844B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/019,913 2011-02-02
US13/019,913 US9759739B2 (en) 2011-02-02 2011-02-02 MEMS vibrating-beam accelerometer with piezoelectric drive

Publications (3)

Publication Number Publication Date
JP2012159494A JP2012159494A (ja) 2012-08-23
JP2012159494A5 JP2012159494A5 (enExample) 2015-01-15
JP5875844B2 true JP5875844B2 (ja) 2016-03-02

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JP2011262232A Expired - Fee Related JP5875844B2 (ja) 2011-02-02 2011-11-30 ピエゾ電気駆動部を備えるｍｅｍｓ振動ビーム加速度計

Country Status (3)

Country Link
US (1) US9759739B2 (enExample)
EP (1) EP2485060B1 (enExample)
JP (1) JP5875844B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10823754B2 (en) 2014-11-14 2020-11-03 Honeywell International Inc. Accelerometer with strain compensation
US9689888B2 (en) 2014-11-14 2017-06-27 Honeywell International Inc. In-plane vibrating beam accelerometer
CN105866470A (zh) * 2016-05-05 2016-08-17 中国工程物理研究院电子工程研究所 一种一体式石英双振梁加速度计
CH713460A2 (de) 2017-02-15 2018-08-15 Digi Sens Ag Schwingsaitensensor und Schwingsaite für einen Schwingsaitensensor.
US11119115B2 (en) 2018-08-27 2021-09-14 Honeywell International Inc. Vibrating beam accelerometer
CN109239436A (zh) * 2018-09-21 2019-01-18 南京理工大学 一种超低功耗谐振式电压传感器
CN111220551B (zh) * 2019-11-29 2022-08-02 哈尔滨工业大学 基于音叉共鸣的光热光谱痕量气体检测装置及方法
CN111796119B (zh) * 2020-07-20 2022-05-17 合肥工业大学 基于纳米压电梁的谐振式加速度传感器及其制备方法
WO2022246749A1 (zh) * 2021-05-27 2022-12-01 天津大学 压电mems谐振器及其形成方法、电子设备
TWI784580B (zh) * 2021-06-18 2022-11-21 國立成功大學 壓電式微機電加速規及其製造方法
EP4194960B1 (fr) * 2021-12-10 2025-09-03 The Swatch Group Research and Development Ltd Ressort spiral piézoélectrique, et procédé de fabrication du ressort spiral

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US3672220A (en) 1970-02-12 1972-06-27 Solartron Electronic Group Force-transducers
US4469979A (en) 1983-05-27 1984-09-04 Statek Corporation Microresonator of double-ended tuning fork configuration
US5442146A (en) * 1992-04-03 1995-08-15 Weigh-Tronix, Inc. Counting scale and load cell assembly therefor
FR2723638B1 (fr) 1994-08-10 1996-10-18 Sagem Transducteur force-frequence a poutres vibrantes
US7523537B1 (en) * 2000-07-13 2009-04-28 Custom Sensors & Technologies, Inc. Method of manufacturing a tuning fork with reduced quadrature errror and symmetrical mass balancing
FR2821434B1 (fr) * 2001-02-26 2003-07-04 Sagem Accelerometre miniature a deux cellules
US7050271B2 (en) 2002-11-28 2006-05-23 Tdk Corporation Actuator having doped silicon arms and method of making the same
JP2004193574A (ja) 2002-11-28 2004-07-08 Tdk Corp アクチュエータ及びその製造方法
US6874363B1 (en) 2003-10-31 2005-04-05 Honeywell International, Inc. Trapped charge field bias vibrating beam accelerometer
US7379629B1 (en) * 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7443509B1 (en) * 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
JP3969442B2 (ja) * 2005-09-26 2007-09-05 エプソントヨコム株式会社 圧力センサ
JP2008209389A (ja) 2006-10-13 2008-09-11 Seiko Epson Corp 加速度センサ
US7802475B2 (en) 2006-10-13 2010-09-28 Seiko Epson Corporation Acceleration sensor
JP4687643B2 (ja) 2006-12-22 2011-05-25 パナソニック株式会社 角速度センサ
US7990232B1 (en) * 2007-06-06 2011-08-02 Rf Micro Devices, Inc. Anchor/support design for MEMS resonators
JP2009060478A (ja) 2007-09-03 2009-03-19 Nippon Dempa Kogyo Co Ltd 圧電振動片の製造方法及び音叉型圧電振動片
JP2010019827A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP4998860B2 (ja) * 2009-02-26 2012-08-15 セイコーエプソン株式会社 圧力センサー素子、圧力センサー
JP2011146973A (ja) * 2010-01-15 2011-07-28 Seiko Epson Corp 圧電デバイスの製造方法
JP5375624B2 (ja) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 加速度センサー、及び加速度検出装置
JP5341807B2 (ja) * 2010-03-26 2013-11-13 株式会社東芝 加速度センサ

Also Published As

Publication number Publication date
EP2485060B1 (en) 2014-01-29
US20120192649A1 (en) 2012-08-02
JP2012159494A (ja) 2012-08-23
US9759739B2 (en) 2017-09-12
EP2485060A1 (en) 2012-08-08

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