JP5875546B2 - ガルバノスキャナ - Google Patents

ガルバノスキャナ Download PDF

Info

Publication number
JP5875546B2
JP5875546B2 JP2013054590A JP2013054590A JP5875546B2 JP 5875546 B2 JP5875546 B2 JP 5875546B2 JP 2013054590 A JP2013054590 A JP 2013054590A JP 2013054590 A JP2013054590 A JP 2013054590A JP 5875546 B2 JP5875546 B2 JP 5875546B2
Authority
JP
Japan
Prior art keywords
permanent magnet
rotor
galvano scanner
coil
rotation center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013054590A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014182167A5 (enExample
JP2014182167A (ja
Inventor
森　剛
剛 森
知也 立花
知也 立花
悌史 ▲高▼橋
悌史 ▲高▼橋
福島　一彦
一彦 福島
浩之 竹田
浩之 竹田
樋口　峰夫
峰夫 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2013054590A priority Critical patent/JP5875546B2/ja
Publication of JP2014182167A publication Critical patent/JP2014182167A/ja
Publication of JP2014182167A5 publication Critical patent/JP2014182167A5/ja
Application granted granted Critical
Publication of JP5875546B2 publication Critical patent/JP5875546B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP2013054590A 2013-03-18 2013-03-18 ガルバノスキャナ Active JP5875546B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013054590A JP5875546B2 (ja) 2013-03-18 2013-03-18 ガルバノスキャナ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013054590A JP5875546B2 (ja) 2013-03-18 2013-03-18 ガルバノスキャナ

Publications (3)

Publication Number Publication Date
JP2014182167A JP2014182167A (ja) 2014-09-29
JP2014182167A5 JP2014182167A5 (enExample) 2014-11-27
JP5875546B2 true JP5875546B2 (ja) 2016-03-02

Family

ID=51700965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013054590A Active JP5875546B2 (ja) 2013-03-18 2013-03-18 ガルバノスキャナ

Country Status (1)

Country Link
JP (1) JP5875546B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210173177A1 (en) * 2019-12-05 2021-06-10 Panasonic Automotive Systems Company Of America, Division Of Panasonic Corporation Of North America Magnetic mirror movement
JP7140980B2 (ja) 2019-12-13 2022-09-22 ミツミ電機株式会社 回転往復駆動アクチュエーター
JP7155099B2 (ja) 2019-12-13 2022-10-18 ミツミ電機株式会社 光走査装置
US11543652B2 (en) * 2020-04-20 2023-01-03 Luminar, Llc Imaging system having coil on mirror actuator
CN113138460B (zh) * 2021-05-17 2025-03-14 北京京东方显示技术有限公司 一种成像仪及成像系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4531022B2 (ja) * 2006-08-18 2010-08-25 住友重機械工業株式会社 ビームスキャナ
JP2008228524A (ja) * 2007-03-15 2008-09-25 Hitachi Via Mechanics Ltd 揺動アクチュエータ装置およびレーザ加工装置
JP2010014920A (ja) * 2008-07-03 2010-01-21 Nidec Sankyo Corp レンズ駆動装置
JP5153719B2 (ja) * 2009-04-28 2013-02-27 三菱電機株式会社 ガルバノスキャナ
JP5640687B2 (ja) * 2010-11-16 2014-12-17 セイコーエプソン株式会社 アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置

Also Published As

Publication number Publication date
JP2014182167A (ja) 2014-09-29

Similar Documents

Publication Publication Date Title
JP5875546B2 (ja) ガルバノスキャナ
US9030060B2 (en) Galvanoscanner and laser processing machine
JP4193685B2 (ja) アキシャルギャップモータ構造
JP6367924B2 (ja) スキャナ装置
JP2007525937A5 (enExample)
JP6044848B2 (ja) 回転電機
KR20150033547A (ko) 리니어 모터 유닛
CN110100379A (zh) 具有多层永磁体的检流计驱动装置
WO2021149722A1 (ja) 外径側磁石界磁及び磁気歯車
JP3434430B2 (ja) モータ及びそのモータを備えた出力装置
JP2013200487A (ja) ガルバノスキャナ及びレーザ加工装置
US20230046584A1 (en) Magnetic pole piece device and magnetic gear
JP6083640B2 (ja) 永久磁石埋込型モータ
JP5153806B2 (ja) ガルバノスキャナ
JP4816679B2 (ja) アキシャルギャップモータ構造
JP5153719B2 (ja) ガルバノスキャナ
JP2013190669A (ja) ガルバノスキャナ及びレーザ加工機
JP6685175B2 (ja) 回転電機
JP5447308B2 (ja) リニアモータ
JP7561669B2 (ja) 磁気ギアードモータおよび磁気ギアードモータの製造方法
JP5609514B2 (ja) リングコイルモータ
JP2023042363A (ja) 磁気ギアード回転機械、発電システム、および、駆動システム
WO2023188430A1 (ja) ガルバノスキャナ
JP7108378B2 (ja) モータおよび磁石
JP6414094B2 (ja) ガルバノスキャナ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141015

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20141015

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150527

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150602

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20151222

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160119

R150 Certificate of patent or registration of utility model

Ref document number: 5875546

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250