JP5860217B2 - Laser processing equipment - Google Patents

Description

In the present invention, a plurality of streets are formed in a lattice pattern on the surface, and a device such as a micro electro mechanical system (MEMS) is formed in a plurality of regions partitioned by the plurality of streets. along about Les Za processing apparatus for forming a deteriorated layer.

  In the semiconductor device manufacturing process, a plurality of regions are defined by dividing lines called streets arranged in a lattice pattern on the surface of a semiconductor wafer having a substantially disk shape, and ICs, LSIs, and microelectronics are defined in the partitioned regions. Form devices such as mechanical systems (MEMS). Then, the semiconductor wafer is cut along the streets to divide the region in which the device is formed to manufacture individual devices.

  The above-described cutting along the wafer street is usually performed by a cutting device called a dicer. This cutting apparatus includes a chuck table for holding a workpiece such as a wafer, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and a chuck table and the cutting means relative to each other. And a cutting feed means for cutting and feeding, and cutting along the wafer street by rotating the cutting blade and feeding the chuck table while supplying cutting water to the cutting portion of the cutting blade.

  However, since the cutting blade has a thickness of about 20 to 30 μm, the street that partitions the device needs to have a width of about 50 μm. For this reason, the area ratio which a street occupies becomes high, and there exists a problem that productivity is bad.

  On the other hand, as a method of dividing the wafer along the street, a pulsed laser beam having a wavelength that is transmissive to the wafer is irradiated along the street with a focusing point inside, and the wafer is broken along the street. A method of dividing the wafer along the street by applying an external force along the street where the altered layer as the starting point is formed continuously and the altered layer as the starting point of breakage is formed and the strength is reduced has been proposed. ing. (For example, refer to Patent Document 1.)

Japanese Patent No. 3408805

By continuously forming an altered layer that becomes the starting point of fracture along the street inside the wafer, and applying an external force along the street where the altered layer that becomes the starting point of fracture is formed and the strength is reduced, the wafer is As a method of dividing, a denatured layer is formed by irradiating a laser beam from the back surface side of the wafer where the street is not formed to the inside of the area corresponding to the street and irradiating the laser beam, and then dicing the back surface of the wafer. A method of dividing a wafer by applying an external force to a wafer attached to a tape and having a deteriorated layer formed inside along a street has been practiced. However, there is a problem that the wafer breaks along the street when the wafer having the altered layer formed along the street is stuck on the dicing tape.
On the other hand, by carrying out a method of forming a deteriorated layer by condensing a laser beam from the front surface side of the wafer to the inside of the street with the back surface of the wafer attached to a dicing tape attached to an annular frame, However, in the wafer in which a micro electro mechanical system (MEMS) having a thickness of, for example, 400 μm is formed, the laser beam irradiation area needs to have a width of 20 to 30% with respect to the thickness of the wafer. , A street width of about 100 μm is required, and there is a problem in that productivity is poor due to a large design restriction of the wafer.
If the method of forming a deteriorated layer by condensing a laser beam from the back side of the wafer to the inside of the street with the surface of the wafer attached to a dicing tape attached to an annular frame, the above problem will occur. However, in wafers with micro electromechanical system (MEMS) devices such as micro horns, acceleration sensors, pressure sensors, etc., the adhesive is fine when the device surface is affixed to dicing tape. There is a problem that the device is damaged by adhering to the electromechanical system (MEMS).

The present invention has been made in view of the above-mentioned facts, and the main technical problem thereof is that the street width is not increased and the dicing tape is not attached to the surface of the wafer along the street. to provide a record Za processing apparatus capable of forming a deteriorated layer.

In order to solve the main technical problem , according to the present invention, a plurality of streets are formed in a lattice shape on the surface, and a device is formed in a plurality of regions partitioned by the plurality of streets. A laser processing apparatus for irradiating a laser beam along a street and forming an altered layer along the street inside the wafer,
An annular frame holder having a wafer holding part for holding a wafer attached to a dicing tape attached to an annular frame, and a frame holding surface provided on the outer periphery side of the wafer holding part for holding the annular frame. and a chuck table having a section, a laser beam application means having a condenser for applying a laser beam having a transmission wavelength to retained wafer and the dicing tape on the chuck table, the chuck table and the Moving means for relatively moving the condenser,
The wafer holding portion of the chuck table is formed of a transparent member ,
The frame holding surface of the annular frame holding part of the chuck table has a plurality of suction holes for sucking the annular frame through the dicing tape, and an area between the annular frame and the outer periphery of the wafer. A plurality of suction holes for sucking and holding the dicing tape are formed,
The concentrator of the laser beam irradiation means is configured to irradiate a wafer with a laser beam from the lower side of the wafer holding portion of the chuck table through the wafer holding portion and the dicing tape.
A laser processing apparatus is provided.

A laser processing apparatus according to the present invention includes a wafer holding portion that holds a wafer attached to a dicing tape attached to an annular frame, and a frame that is provided on the outer periphery side of the wafer holding portion and that holds the annular frame. Laser beam irradiation including a chuck table having an annular frame holding portion having a holding surface , and a condenser for irradiating a laser beam having a wavelength that is transparent to the wafer and the dicing tape held by the chuck table. And a moving means for relatively moving the chuck table and the condenser, wherein the wafer holding portion of the chuck table is formed of a transparent member, and an annular frame holding portion of the chuck table A plurality of suction holes for sucking the annular frame through the dicing tape are provided on the frame holding surface. Hole and a plurality of suction holes for sucking and holding the dicing tape in the region between the outer periphery of the annular frame and the wafer is formed, condenser of the laser beam irradiation means, said from the bottom of the wafer holding portion of the chuck table Since the wafer is irradiated with the laser beam through the wafer holding portion and the dicing tape, the device formed on the surface of the wafer is not irradiated with the pulsed laser beam. Therefore, since a street having a width of 20 to 30% is not required with respect to the thickness of the wafer, the width of the street on the design of the wafer is not restricted. In addition, since the wafer is attached from the beginning to the dicing tape, it is not necessary to reverse the front and back after forming the deteriorated layer, so the wafer breaks along the street when the wafer is replaced. Is avoided in advance.

The perspective view of the laser processing apparatus comprised according to this invention. The perspective view of the wafer laser-processed by the laser processing method of the wafer by this invention. FIG. 3 is a perspective view showing a state in which a wafer supporting step in the wafer laser processing method according to the present invention is performed and the back surface of the wafer is attached to a dicing tape mounted on an annular frame. Explanatory drawing of the wafer support process in the laser processing method of the wafer by this invention. Explanatory drawing of the alignment process in the laser processing method of the wafer by this invention. Explanatory drawing of the altered layer formation process in the laser beam processing method of the wafer by this invention. Explanatory drawing of the altered layer formation process in the laser beam processing method of the wafer by this invention. The perspective view of the tape expansion apparatus for implementing the wafer fracture | rupture process which fractures | ruptures the wafer in which the deteriorated layer formation process in the wafer laser processing method by this invention was implemented along the street in which the deteriorated layer was formed. Explanatory drawing of the wafer fracture | rupture process implemented with the tape expansion apparatus shown in FIG. Explanatory drawing of the pick-up process implemented by the tape expansion apparatus shown in FIG.

  Preferred embodiments of a wafer laser processing method and a laser processing apparatus according to the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a laser processing apparatus constructed according to the present invention.
The laser processing apparatus 1 shown in FIG. 1 includes a stationary base 2, a first movable base 3, a second movable base 4, and a third movable base 5. A pair of guide rails 21, 21 extending in parallel along the direction indicated by the arrow Y (Y-axis direction) is provided on the side surface on the near side of the stationary base 2.

  A first movable base 3 is slidably mounted on the stationary base 2 along the pair of guide rails 21 and 21. That is, as shown in FIG. 1, one surface of the first movable base 3 facing the first movable base 3 is fitted to a pair of guide rails 21, 21 provided on the stationary base 2. A pair of guided grooves 31, 31 are provided, and the first movable base 3 is a stationary base by fitting the pair of guided grooves 31, 31 to the pair of guide rails 21, 21. 2 is slidably mounted along the pair of guide rails 21 and 21 in the Y-axis direction. Further, a pair of guide rails 32, 32 extending in parallel with the direction indicated by the arrow Z (Z-axis direction) is provided on the other surface of the first movable base 3. The laser processing apparatus in the illustrated embodiment includes a first moving means for moving the first movable base 3 in the Y-axis direction along a pair of guide rails 21, 21 provided on the stationary base 2. 30. The first moving means 30 includes a male screw rod 301 disposed between the pair of guide rails 21 and 21 in parallel with the guide rail, and a pulse motor 302 for driving the male screw rod 301 to rotate. It is out. The male screw rod 301 is screwed into the female screw 33 provided on the first movable base 3, and one end of the male screw rod 301 is rotatably supported by a bearing member 303 provided on the stationary base 2. The drive shaft of the pulse motor 302 is connected to the other end of the male screw rod 301. Therefore, the first movable base 3 is moved to the pair of guide rails 21, 21 provided on the stationary base 2 by driving the pulse motor 302 forward or backward and driving the male screw rod 301 forward or backward. Move along the Y axis.

  A second movable base 4 is slidably mounted on the first movable base 3 along the pair of guide rails 32 and 32. That is, one side surface of the second movable base 4 facing the first movable base 3 is slidably fitted to a pair of guide rails 32, 32 provided on the first movable base 3. A pair of guided grooves 41, 41 is provided. By fitting the pair of guided grooves 41, 41 to the pair of guide rails 32, 32, the second movable base 4 is the first The movable base 3 is slidably mounted along the pair of guide rails 32, 32 in the direction indicated by the arrow Z (Z-axis direction). The second movable base 4 includes a pair of guide rails 42 and 42 provided on a side surface perpendicular to the one side surface and extending in parallel with a direction indicated by an arrow X (X-axis direction). The laser processing apparatus in the illustrated embodiment is a condensing light for moving the second movable base 4 in the Z-axis direction along a pair of guide rails 32, 32 provided on the first movable base 3. Point position adjusting means 40 is provided. The condensing point position adjusting means 40 includes a male screw rod 401 disposed between the pair of guide rails 32 and 32 in parallel with the guide rail, and a pulse motor 402 for rotationally driving the male screw rod 401. Contains. The male screw rod 401 is screwed into the female screw 43 provided on the second movable base 4, and one end of the male screw rod 401 is rotatably supported by a bearing member 403 provided on the first movable base 3. Yes. The drive shaft of the pulse motor 402 is connected to the other end of the male screw rod 401. Therefore, by driving the pulse motor 402 forward or backward and driving the male screw rod 401 forward or backward, the second movable base 4 is provided with a pair of guide rails 32 provided on the first movable base 3. , 32 along the Z axis.

  A third movable base 5 is slidably mounted on the second movable base 4 along the pair of guide rails 42 and 42. In other words, one side surface of the third movable base 5 facing the second movable base 4 is slidably fitted to a pair of guide rails 42 and 42 provided on the second movable base 4. A pair of guided grooves 51, 51 (only one of the upper side is shown in FIG. 1) is provided, and the pair of guided grooves 51, 51 are formed on the pair of guide rails 42, 42. By fitting, the third movable base 5 is attached to the second movable base 4 so as to be slidable in the direction indicated by the arrow X (X-axis direction) along the pair of guide rails 42 and 42. . The laser processing apparatus 1 in the illustrated embodiment is a first for moving the third movable base 5 in the X-axis direction along a pair of guide rails 42, 42 provided on the second movable base 4. Two moving means 50 are provided. The second moving means 50 includes a male screw rod 501 disposed between the pair of guide rails 42 and 42 in parallel with the guide rail, and a pulse motor 502 for rotationally driving the male screw rod 501. It is out. The male screw rod 501 is screwed into a female screw (not shown) provided on the third movable base 5, and one end of the male screw rod 501 is rotatable to a bearing member 503 provided on the second movable base 4. It is supported by. The drive shaft of the pulse motor 502 is connected to the other end of the male screw rod 501. Therefore, by driving the pulse motor 502 forward or backward and driving the male screw rod 501 forward or backward, the third movable base 5 is paired with the pair of guide rails 42 provided on the second movable base 4. , 42 in the X-axis direction.

  On the other surface of the third movable base 5, a chuck table 6 that holds a wafer attached to a dicing tape mounted on an annular frame described later is mounted via a support member 60. The chuck table 6 includes an annular frame holding portion 61 that holds an annular frame that will be described later, and a circular wafer that holds a wafer attached to a dicing tape attached to the annular frame that will be described later via the dicing tape. The holding portion 62 is included. The frame holding portion 61 is formed of a metal material in a hollow shape, and a plurality of suction holes 612 are opened in a frame holding surface 611 that is an upper surface. In the frame holding part 61 formed in this way, a plurality of suction holes 612 are communicated with suction means (not shown) through a hollow part. Note that two positioning pins 613 a and 613 b for positioning an annular frame to be described later are provided upright on the frame holding surface 611 of the frame holding portion 61. The wafer holding part 62 is formed of a transparent member such as a glass plate, and is attached to the inner peripheral wall of the frame holding part 61 whose outer peripheral surface is annular with an appropriate adhesive. The wafer holding part 62 configured in this manner holds a wafer attached to a dicing tape attached to an annular frame described later on a wafer holding surface 621 which is an upper surface.

  A laser processing apparatus 1 shown in FIG. 1 includes laser beam irradiation means 7 that irradiates a wafer, which is a workpiece, held on a chuck table 6 with a laser beam. The laser beam irradiation means 7 includes a casing 71, a laser beam oscillation means (not shown) such as a YAG laser oscillator or a YVO4 laser oscillator disposed in the casing 71, and a laser beam oscillation means disposed on the upper surface of one end of the casing 71. A condenser 72 for condensing and irradiating the pulse laser beam oscillated from the laser beam upward is provided.

  On the upper side of the laser beam irradiation means 7, an image pickup means 8 for detecting a processing region to be laser processed by the laser beam irradiation means 7 is arranged. The imaging unit 8 includes an illuminating unit that illuminates the workpiece, an optical system that captures an area illuminated by the illuminating unit, an imaging device (CCD) that captures an image captured by the optical system, and the like. The captured image signal is sent to a control means (not shown). In the illustrated embodiment, the image pickup unit 8 is disposed immediately above the condenser 72 at a predetermined interval. The image pickup means 8 is mounted on an L-shaped bracket 80 mounted on the casing 71 of the laser beam irradiation means 7 so that the chuck table 6 can move between the condenser 72 and the image pickup means 8. It is configured.

  The laser processing apparatus 1 in the illustrated embodiment is configured as described above, and the operation thereof will be described below.

  FIG. 2 is a perspective view of a wafer to be processed by the wafer laser processing method according to the present invention. A wafer 10 shown in FIG. 2 is made of a silicon wafer having a thickness of, for example, 400 μm, and a plurality of regions are defined by a plurality of streets 101 formed in a lattice shape on the surface 10a. As a result, a micro electro mechanical system (MEMS) is formed.

  In the wafer laser processing method according to the present invention, first, the back surface 10b of the wafer 10 is attached to the surface of the dicing tape 12 mounted on the annular frame 11 as shown in FIG. 3 (wafer support step). In the wafer support step, the back surface 10b of the wafer 10 may be simultaneously attached to the surface of the dicing tape 12 when the dicing tape 12 is attached to the annular frame 11. On the outer peripheral end surface of the annular frame 11, two positioning pins 613a and 613b which are erected on the frame holding surface 611 of the frame holding portion 61 constituting the chuck table 6 of the laser processing apparatus are engaged. Engaging recesses 111a and 111b are provided. The dicing tape 12 is made of, for example, polyvinyl chloride (PVC) or polyolefin (PO) sheet through which the laser beam irradiated by the laser beam irradiation means 7 of the laser processing apparatus 1 described above is transmitted.

An altered layer that forms an altered layer along the street 101 inside the wafer 10 attached to the surface of the dicing tape 12 attached to the annular frame 11 as shown in FIG. 3 using the laser processing apparatus 1 described above. The formation process will be described with reference to FIGS.
In order to carry out the deteriorated layer forming step, first, as shown in FIG. 4, the wafer 10 supported on the annular frame 11 via the dicing tape 12 is placed on the chuck table 6 of the laser processing apparatus 1. At this time, the wafer 10 is placed on the wafer holder 62 via the dicing tape 12, and the annular frame 11 is placed on the annular frame holder 61 constituting the chuck table 6. The two engaging recesses 111 a and 111 b provided on the upper surface 611 of the frame holding portion 61 are engaged with the two positioning pins 613 a and 613 b. As a result, the wafer 10 supported by the annular frame 11 via the dicing tape 12 is positioned at a predetermined position of the chuck table 6. By operating a suction means (not shown), the annular frame 11 and the wafer 10 are sucked and held on the chuck table 6 via the dicing tape 12 (wafer holding step). Accordingly, the wafer 10 held on the chuck table 6 has the surface 10a on the upper side.

  If the wafer holding step described above is performed, the chuck table 6 that sucks and holds the wafer 10 is positioned directly below the image pickup means 8 as shown in FIG. 5 by operating the first moving means 30. When the chuck table 6 is positioned immediately below the image pickup means 8, an alignment process for detecting a processing region to be laser processed along the street 101 of the wafer 10 is executed by the image pickup means 8 and a control means (not shown). That is, the imaging unit 8 and a control unit (not shown) align the street 101 formed in a predetermined direction of the wafer 10 with the condenser 72 of the laser beam irradiation unit 7 that irradiates the laser beam along the street 101. Image processing such as pattern matching is performed to perform alignment of the laser beam irradiation position. In addition, the alignment of the laser beam irradiation positions is similarly performed on the plurality of streets 101 formed in the direction orthogonal to the plurality of streets 101 formed on the wafer 10.

  When the street 101 formed on the wafer 10 held on the chuck table 6 is detected as described above and alignment of the laser beam irradiation position is performed, the chuck table as shown in FIG. 6 is moved to the laser beam irradiation region where the condenser 72 of the laser beam irradiation means 7 is located, and one end of the predetermined street 101 (the left end in FIG. 6A) is directly above the condenser 72 of the laser beam irradiation means 7. Position. Then, the condensing point P of the pulse laser beam is adjusted to a position below the surface 10a (upper surface) of the wafer 10 by about 30 μm, for example. Next, the chuck table 6 is moved at a predetermined feed speed in the direction indicated by the arrow X1 in FIG. 6A while irradiating a pulse laser beam having a wavelength that is transmissive to the silicon wafer from the condenser 72. At this time, the pulsed laser beam irradiated from the condenser 72 passes through the wafer holding part 62 formed of a transparent member such as a glass plate and the dicing tape 12 made of polyvinyl chloride (PVC) or polyolefin (PO) sheet. The wafer 10 is irradiated from the back surface 10b side. Then, as shown in FIG. 6B, when the other end of the street 101 (the right end in FIG. 6B) reaches the irradiation position of the condenser 72 of the laser beam irradiation means 7, the irradiation of the pulsed laser beam is stopped. At the same time, the movement of the chuck table 6 is stopped. As a result, an altered layer 110 is formed in the vicinity of the surface 10 a (upper surface) of the wafer 10 along the street 101 inside the wafer 10. This altered layer 110 is formed as a melt-resolidified layer.

The processing conditions in the deteriorated layer forming step are set as follows, for example.
Light source: LD excitation Q switch Nd: YVO4 laser Wavelength: 1064 nm pulse laser Average output: 1.2 W
Repetition frequency: 80 kHz
Pulse width: 120 ns
Condensing spot diameter: φ2μm
Feeding speed: 100 mm / second

  Note that, in the above-described processing conditions, the thickness of the altered layer 110 formed by one laser beam irradiation is 50 to 60 μm. Therefore, in order to easily divide the wafer 10 having a thickness of 400 μm, it is necessary to form about 5 altered layers having a thickness of 50 to 60 μm. Therefore, by moving the focused point P of the pulsed laser beam irradiated from the collector 72 of the laser beam irradiation means 7 sequentially downward and performing the above-mentioned deteriorated layer forming step, as shown in FIG. Five altered layers 110 are formed along the street 101 inside the wafer 10. The deteriorated layer forming step passes through the wafer holding portion 62 formed of a transparent member such as a glass plate and the dicing tape 12 made of polyvinyl chloride (PVC) or polyolefin (PO) sheet and passes through the back surface 10b side of the wafer 10. Therefore, the device 102 is not irradiated with the pulse laser beam. Therefore, since a street having a width of 20 to 30% with respect to the thickness of the wafer 10 is not required, the width of the street in the design of the wafer is not restricted. Further, since the wafer 10 is attached to the dicing tape 12 from the beginning on the back side, there is no need to reverse the front and back after forming the deteriorated layer, so the wafer breaks along the street when the wafer is replaced. This problem is avoided in advance.

  In this way, if the altered layer forming step is executed along all the streets 101 extending in the predetermined direction of the wafer 10, the altered layer is formed along the streets 101 formed in the direction orthogonal to the predetermined direction. A forming step is performed. That is, as shown in FIG. 7A, one end (the right end in FIG. 7A) of the street 101 formed in the direction orthogonal to the predetermined direction is directly above the condenser 72 of the laser beam irradiation means 7. Position. Then, the condensing point P of the pulse laser beam is adjusted to a position below the surface 10a (upper surface) of the wafer 10 by about 30 μm, for example. Next, the chuck table 6 is moved at a predetermined feed speed in the direction indicated by the arrow Y1 in FIG. 7A while irradiating a pulse laser beam having a wavelength that is transmissive to the silicon wafer from the condenser 72. At this time, the pulsed laser beam irradiated from the condenser 72 passes through the wafer holding part 62 formed of a transparent member such as a glass plate and the dicing tape 12 made of polyvinyl chloride (PVC) or polyolefin (PO) sheet. The wafer 10 is irradiated from the back surface 10b side. In this manner, the deteriorated layer forming step is performed along each street 101 formed in a direction orthogonal to the predetermined direction.

  If the above-described deteriorated layer forming step is performed, an external force is applied to the wafer 10 and a breaking step of breaking along the street 101 on which the deteriorated layer 110 is formed is performed. This breaking process is performed using the tape expansion device 9 shown in FIG. 8 includes a frame holding means 91 that holds the annular frame 11 and a tape extending means that extends the dicing tape 12 mounted on the annular frame 11 held by the frame holding means 91. 92 and a pickup collet 93. The frame holding means 91 includes an annular frame holding member 911 and a plurality of clamps 912 as fixing means provided on the outer periphery of the frame holding member 911. An upper surface of the frame holding member 911 forms a mounting surface 911a on which the annular frame 11 is mounted, and the annular frame 11 is mounted on the mounting surface 911a. The annular frame 11 placed on the placement surface 911 a is fixed to the frame holding member 911 by a clamp 912. The frame holding means 91 configured as described above is supported by the tape expanding means 92 so as to be movable back and forth in the vertical direction.

  The tape expansion means 92 includes an expansion drum 921 disposed inside the annular frame holding member 911. The expansion drum 921 has an inner diameter and an outer diameter that are smaller than the inner diameter of the annular frame 11 and larger than the outer diameter of the wafer 10 attached to the dicing tape 12 attached to the annular frame 11. The expansion drum 921 includes a support flange 922 at the lower end. The tape expansion means 92 in the illustrated embodiment includes support means 923 that can advance and retract the annular frame holding member 911 in the vertical direction. The support means 923 includes a plurality of air cylinders 923 a disposed on the support flange 922, and the piston rod 923 b is connected to the lower surface of the annular frame holding member 911. As described above, the support means 923 including the plurality of air cylinders 923a is configured such that the annular frame holding member 911 has a reference position at which the mounting surface 911a is substantially flush with the upper end of the expansion drum 921 as shown in FIG. Then, as shown in FIG. 9 (b), it is moved in the vertical direction between the extended positions below the upper end of the expansion drum 921 by a predetermined amount.

  The wafer implemented using the tape expansion device 9 configured as described above will be described with reference to FIG. That is, the annular frame 11 on which the dicing tape 12 to which the wafer 10 is attached is attached to the mounting surface 911a of the frame holding member 911 constituting the frame holding means 91 as shown in FIG. And fixed to the frame holding member 911 by the clamp 912 (frame holding step). At this time, the frame holding member 911 is positioned at the reference position shown in FIG.

  When the above-described frame holding step is performed, the plurality of air cylinders 923a as the supporting means 923 constituting the tape expansion means 92 are operated as shown in FIG. Lower to the extended position. Accordingly, since the annular frame 11 fixed on the mounting surface 911a of the frame holding member 911 is also lowered, the dicing tape 12 attached to the annular frame 11 is an expansion drum as shown in FIG. It expands in contact with the upper edge of 921 (tape expansion process). As a result, the tensile force acts radially on the wafer 10 adhered to the dicing tape 12. When a tensile force is applied to the wafer 10 in a radial manner in this manner, the deteriorated layer 110 formed along the street 101 is reduced in strength, so that the deteriorated layer 110 in which the strength is reduced in the wafer 10 is broken. It breaks along the street 101 as a starting point and is divided into individual devices 102.

  If the wafer 10 is broken along the street 101 on which the deteriorated layer 110 is formed and divided into individual devices 102 by performing the wafer breaking process described above, the pickup collet 93 is operated as shown in FIG. Then, the device 102 is adsorbed, peeled off from the dicing tape 12 and picked up (pickup process). In the pickup process, since the gap S between the individual devices 102 is widened, the pickup can be easily performed without contacting the adjacent devices 102.

  Although the present invention has been described based on the illustrated embodiment, the present invention is not limited to the embodiment, and various modifications are possible within the scope of the gist of the present invention. For example, in the above-described embodiment, an example in which a wafer on which a device composed of a microelectromechanical system (MEMS) is formed is divided into individual devices, but the present invention is a semiconductor on which a device such as an IC or LSI is formed. You may apply to the optical device wafer in which optical devices, such as a wafer, a light emitting diode, and CCD, were formed.

1: Laser processing device 2: Stationary base 3: First movable base 30: First moving means 4: Second movable base 40: Focusing point position adjusting means 5: Third movable base 50 : Second moving means 6: chuck table 60: support member 61: annular frame holding part 62: circular wafer holding part 7: laser beam irradiation means 72: condenser 8: imaging means 9: tape expansion device 91: Frame holding means 92: Tape expanding means 93: Pickup collet 10: Wafer 11: Annular frame 12: Dicing tape

Claims (1)

A plurality of streets are formed in a lattice pattern on the surface, and a device is formed on a plurality of regions partitioned by the plurality of streets. A laser beam is irradiated along the streets inside the wafer, and the streets are formed inside the wafer. A laser processing apparatus for forming an altered layer along the
An annular frame holder having a wafer holding part for holding a wafer attached to a dicing tape attached to an annular frame, and a frame holding surface provided on the outer periphery side of the wafer holding part for holding the annular frame. and a chuck table having a section, a laser beam application means having a condenser for applying a laser beam having a transmission wavelength to the retained wafer and the dicing tape on the chuck table, the chuck table and the Moving means for relatively moving the condenser,
The wafer holding portion of the chuck table is formed of a transparent member ,
The frame holding surface of the annular frame holding part of the chuck table has a plurality of suction holes for sucking the annular frame through the dicing tape, and an area between the annular frame and the outer periphery of the wafer. A plurality of suction holes for sucking and holding the dicing tape are formed,
The concentrator of the laser beam irradiation means is configured to irradiate a wafer with a laser beam from the lower side of the wafer holding portion of the chuck table through the wafer holding portion and the dicing tape.
Laser processing equipment characterized by that.

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