JP5856839B2 - 有機el素子の製造方法及び製造装置 - Google Patents
有機el素子の製造方法及び製造装置 Download PDFInfo
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- JP5856839B2 JP5856839B2 JP2011285565A JP2011285565A JP5856839B2 JP 5856839 B2 JP5856839 B2 JP 5856839B2 JP 2011285565 A JP2011285565 A JP 2011285565A JP 2011285565 A JP2011285565 A JP 2011285565A JP 5856839 B2 JP5856839 B2 JP 5856839B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 60
- 238000000034 method Methods 0.000 title description 8
- 239000000463 material Substances 0.000 claims description 153
- 238000007740 vapor deposition Methods 0.000 claims description 47
- 239000011364 vaporized material Substances 0.000 claims description 37
- 230000008016 vaporization Effects 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 15
- 238000011144 upstream manufacturing Methods 0.000 claims description 15
- 238000009834 vaporization Methods 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000002585 base Substances 0.000 description 92
- 239000010410 layer Substances 0.000 description 63
- 239000000758 substrate Substances 0.000 description 30
- 230000000052 comparative effect Effects 0.000 description 14
- 230000008021 deposition Effects 0.000 description 7
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 239000012044 organic layer Substances 0.000 description 6
- XJHCXCQVJFPJIK-UHFFFAOYSA-M caesium fluoride Chemical compound [F-].[Cs+] XJHCXCQVJFPJIK-UHFFFAOYSA-M 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 2
- SPDPTFAJSFKAMT-UHFFFAOYSA-N 1-n-[4-[4-(n-[4-(3-methyl-n-(3-methylphenyl)anilino)phenyl]anilino)phenyl]phenyl]-4-n,4-n-bis(3-methylphenyl)-1-n-phenylbenzene-1,4-diamine Chemical compound CC1=CC=CC(N(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=CC(=CC=2)N(C=2C=C(C)C=CC=2)C=2C=C(C)C=CC=2)C=2C=C(C)C=CC=2)=C1 SPDPTFAJSFKAMT-UHFFFAOYSA-N 0.000 description 1
- VQGHOUODWALEFC-UHFFFAOYSA-N 2-phenylpyridine Chemical compound C1=CC=CC=C1C1=CC=CC=N1 VQGHOUODWALEFC-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- -1 N, N-di-m-tolylamino Chemical group 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- SJCKRGFTWFGHGZ-UHFFFAOYSA-N magnesium silver Chemical compound [Mg].[Ag] SJCKRGFTWFGHGZ-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Description
(実施例1)
(比較例)
Claims (4)
- 帯状の基材が所定の走行方向に沿って走行するように、基材を走行させる工程と、
気化材料を蒸着源から吐出することにより、前記基材の所定部位に前記気化材料を蒸着させる工程と、
前記気化材料を蒸着する際に、前記気化材料が前記所定部位を除く部位に蒸着するのを防止するように、前記基材を遮蔽するための遮蔽部を前記蒸着源及び前記基材間に配置させる工程と、を有し、
前記遮蔽部は、前記蒸着源及び前記基材間に配置されることで前記基材を遮蔽する遮蔽位置と、前記蒸着源及び前記基材間から退避されることで前記基材を遮蔽するのを解除する遮蔽解除位置とに切り替え可能に構成されるとともに、前記走行方向で往復移動する範囲である移動範囲が設けられ、
前記遮蔽部は、前記遮蔽位置に位置した状態で、前記基材と同じ速度で前記走行方向に前記移動範囲の上流端から下流端まで移動すると共に、前記遮蔽解除位置に位置した状態で、前記走行方向と反対方向に前記移動範囲の下流端から上流端まで移動することを特徴とする有機EL素子の製造方法。 - 前記遮蔽部は、前記遮蔽位置に位置した状態で前記基材の幅方向に亘って配置されるべく、基材の幅寸法よりも大きく形成される請求項1に記載の有機EL素子の製造方法。
- 前記遮蔽部は、フリップ式遮蔽板である請求項1又は2に記載の有機ELの製造方法。
- 帯状の基材を所定の走行方向に沿って走行させる走行装置と、気化材料を前記基材に蒸着すべく、前記基材の所定部位に向けて前記気化材料を吐出する蒸着源と、前記気化材料が前記所定部位を除く部位に蒸着するのを防止するように、前記基材を遮蔽するための遮蔽部を有する遮蔽装置と、前記遮蔽部を前記走行方向で往復移動させる範囲として設けられる移動範囲内で移動させる移動装置と、を備え、
前記遮蔽装置は、前記遮蔽部を、前記蒸着源及び前記基材間に配置されることで前記基材を遮蔽する遮蔽位置と、前記蒸着源及び前記基材間から退避されることで前記基材を遮蔽するのを解除する遮蔽解除位置とに切り替え可能な切替機構、を備え、
前記移動装置は、前記遮蔽位置に位置した前記遮蔽部を、前記基材と同じ速度で走行方向に前記移動範囲の上流端から下流端まで移動させると共に、前記遮蔽解除位置に位置した前記遮蔽部を、前記走行方向と反対方向に前記移動範囲の下流端から上流端まで移動させることを特徴とする有機EL素子の製造装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011285565A JP5856839B2 (ja) | 2011-12-27 | 2011-12-27 | 有機el素子の製造方法及び製造装置 |
US14/115,778 US20140134762A1 (en) | 2011-12-27 | 2012-12-10 | Method and apparatus for manufacturing organic el device |
CN2012800057418A CN103329620A (zh) | 2011-12-27 | 2012-12-10 | 有机el元件的制造方法和制造装置 |
PCT/JP2012/081976 WO2013099579A1 (ja) | 2011-12-27 | 2012-12-10 | 有機el素子の製造方法及び製造装置 |
KR1020137015699A KR20140107100A (ko) | 2011-12-27 | 2012-12-10 | 유기 el 소자의 제조 방법 및 제조 장치 |
EP12863567.9A EP2701466A4 (en) | 2011-12-27 | 2012-12-10 | METHOD AND DEVICE FOR PRODUCING ORGANIC ELECTROLUMINESCENCE ELEMENT |
TW101148375A TW201332180A (zh) | 2011-12-27 | 2012-12-19 | 有機el元件之製造方法及製造裝置(二) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011285565A JP5856839B2 (ja) | 2011-12-27 | 2011-12-27 | 有機el素子の製造方法及び製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013134937A JP2013134937A (ja) | 2013-07-08 |
JP5856839B2 true JP5856839B2 (ja) | 2016-02-10 |
Family
ID=48697072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011285565A Expired - Fee Related JP5856839B2 (ja) | 2011-12-27 | 2011-12-27 | 有機el素子の製造方法及び製造装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140134762A1 (ja) |
EP (1) | EP2701466A4 (ja) |
JP (1) | JP5856839B2 (ja) |
KR (1) | KR20140107100A (ja) |
CN (1) | CN103329620A (ja) |
TW (1) | TW201332180A (ja) |
WO (1) | WO2013099579A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106477912A (zh) * | 2016-09-23 | 2017-03-08 | 东莞市联洲知识产权运营管理有限公司 | 一种镀膜遮掩板平移机构 |
KR102576993B1 (ko) | 2018-07-27 | 2023-09-12 | 삼성디스플레이 주식회사 | 표시 장치, 표시 장치의 제조장치 및 표시 장치의 제조방법 |
CN113278918B (zh) * | 2021-05-19 | 2023-01-31 | 云谷(固安)科技有限公司 | 掩膜装置及蒸镀方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000183500A (ja) | 1998-12-18 | 2000-06-30 | Sony Corp | パターン形成装置およびパターン形成方法 |
JP4944341B2 (ja) * | 2002-02-26 | 2012-05-30 | 日本電気株式会社 | リチウムイオン二次電池用負極の製造方法 |
CN1723741B (zh) * | 2002-12-12 | 2012-09-05 | 株式会社半导体能源研究所 | 发光装置、制造装置、成膜方法及清洁方法 |
US7153180B2 (en) * | 2003-11-13 | 2006-12-26 | Eastman Kodak Company | Continuous manufacture of flat panel light emitting devices |
JP2007059188A (ja) * | 2005-08-24 | 2007-03-08 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子 |
US20070137568A1 (en) * | 2005-12-16 | 2007-06-21 | Schreiber Brian E | Reciprocating aperture mask system and method |
JP5354821B2 (ja) * | 2011-12-27 | 2013-11-27 | 日東電工株式会社 | 有機el素子の製造方法及び製造装置 |
-
2011
- 2011-12-27 JP JP2011285565A patent/JP5856839B2/ja not_active Expired - Fee Related
-
2012
- 2012-12-10 CN CN2012800057418A patent/CN103329620A/zh active Pending
- 2012-12-10 WO PCT/JP2012/081976 patent/WO2013099579A1/ja active Application Filing
- 2012-12-10 US US14/115,778 patent/US20140134762A1/en not_active Abandoned
- 2012-12-10 KR KR1020137015699A patent/KR20140107100A/ko not_active Application Discontinuation
- 2012-12-10 EP EP12863567.9A patent/EP2701466A4/en not_active Withdrawn
- 2012-12-19 TW TW101148375A patent/TW201332180A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
US20140134762A1 (en) | 2014-05-15 |
TW201332180A (zh) | 2013-08-01 |
WO2013099579A1 (ja) | 2013-07-04 |
EP2701466A4 (en) | 2015-06-24 |
JP2013134937A (ja) | 2013-07-08 |
KR20140107100A (ko) | 2014-09-04 |
EP2701466A1 (en) | 2014-02-26 |
CN103329620A (zh) | 2013-09-25 |
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