JP5854680B2 - 撮像装置 - Google Patents

撮像装置 Download PDF

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Publication number
JP5854680B2
JP5854680B2 JP2011162157A JP2011162157A JP5854680B2 JP 5854680 B2 JP5854680 B2 JP 5854680B2 JP 2011162157 A JP2011162157 A JP 2011162157A JP 2011162157 A JP2011162157 A JP 2011162157A JP 5854680 B2 JP5854680 B2 JP 5854680B2
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JP
Japan
Prior art keywords
imaging
sample
point
optical system
detection point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011162157A
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English (en)
Japanese (ja)
Other versions
JP2013025251A5 (https=
JP2013025251A (ja
Inventor
智朗 川上
智朗 川上
和彦 梶山
和彦 梶山
辻　俊彦
俊彦 辻
鈴木　雅之
雅之 鈴木
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Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011162157A priority Critical patent/JP5854680B2/ja
Priority to CN201280036063.1A priority patent/CN103688205A/zh
Priority to US14/234,516 priority patent/US20140160267A1/en
Priority to PCT/JP2012/068046 priority patent/WO2013015143A1/en
Publication of JP2013025251A publication Critical patent/JP2013025251A/ja
Publication of JP2013025251A5 publication Critical patent/JP2013025251A5/ja
Application granted granted Critical
Publication of JP5854680B2 publication Critical patent/JP5854680B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/67—Focus control based on electronic image sensor signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
  • Studio Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2011162157A 2011-07-25 2011-07-25 撮像装置 Expired - Fee Related JP5854680B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011162157A JP5854680B2 (ja) 2011-07-25 2011-07-25 撮像装置
CN201280036063.1A CN103688205A (zh) 2011-07-25 2012-07-10 摄像装置
US14/234,516 US20140160267A1 (en) 2011-07-25 2012-07-10 Image Pickup Apparatus
PCT/JP2012/068046 WO2013015143A1 (en) 2011-07-25 2012-07-10 Image pickup apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011162157A JP5854680B2 (ja) 2011-07-25 2011-07-25 撮像装置

Publications (3)

Publication Number Publication Date
JP2013025251A JP2013025251A (ja) 2013-02-04
JP2013025251A5 JP2013025251A5 (https=) 2014-07-24
JP5854680B2 true JP5854680B2 (ja) 2016-02-09

Family

ID=47600994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011162157A Expired - Fee Related JP5854680B2 (ja) 2011-07-25 2011-07-25 撮像装置

Country Status (4)

Country Link
US (1) US20140160267A1 (https=)
JP (1) JP5854680B2 (https=)
CN (1) CN103688205A (https=)
WO (1) WO2013015143A1 (https=)

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US9360662B2 (en) * 2011-10-20 2016-06-07 Samsung Electronics Co., Ltd. Optical measurement system and method for measuring critical dimension of nanostructure
US9322640B2 (en) * 2012-08-07 2016-04-26 Samsing Electronics Co., Ltd. Optical measuring system and method of measuring critical size
DE102013006994A1 (de) * 2013-04-19 2014-10-23 Carl Zeiss Microscopy Gmbh Digitalmikroskop und Verfahren zur Optimierung des Arbeitsablaufes in einem Digitalmikroskop
US9842256B2 (en) * 2013-07-17 2017-12-12 International Business Machines Corporation Detection of astronomical objects
FR3013128B1 (fr) * 2013-11-13 2016-01-01 Univ Aix Marseille Dispositif et methode de mise au point tridimensionnelle pour microscope
CN104198164B (zh) * 2014-09-19 2017-02-15 中国科学院光电技术研究所 一种基于哈特曼波前检测原理的检焦方法
JP6134348B2 (ja) * 2015-03-31 2017-05-24 シスメックス株式会社 細胞撮像装置及び細胞撮像方法
JP6692660B2 (ja) * 2016-03-01 2020-05-13 株式会社Ｓｃｒｅｅｎホールディングス 撮像装置
US10341567B2 (en) * 2016-03-16 2019-07-02 Ricoh Imaging Company, Ltd. Photographing apparatus
GB201610434D0 (en) 2016-06-15 2016-07-27 Q-Linea Ab Image based analysis of samples
JP7604354B2 (ja) * 2021-10-29 2024-12-23 株式会社ニューフレアテクノロジー 検査装置及び焦点位置調整方法

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JP3329018B2 (ja) * 1993-08-25 2002-09-30 株式会社島津製作所 赤外顕微鏡
US5956141A (en) * 1996-09-13 1999-09-21 Olympus Optical Co., Ltd. Focus adjusting method and shape measuring device and interference microscope using said focus adjusting method
US6055054A (en) * 1997-05-05 2000-04-25 Beaty; Elwin M. Three dimensional inspection system
JP4332905B2 (ja) * 1998-02-12 2009-09-16 株式会社ニコン 顕微鏡システム
JP4544850B2 (ja) * 2002-11-29 2010-09-15 オリンパス株式会社 顕微鏡画像撮影装置
US7064824B2 (en) * 2003-04-13 2006-06-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. High spatial resoulution imaging and modification of structures
JP2006039315A (ja) * 2004-07-28 2006-02-09 Hamamatsu Photonics Kk 自動焦点装置及びそれを用いた顕微鏡装置
JP4582406B2 (ja) * 2004-12-28 2010-11-17 ソニー株式会社 生体撮像装置
JP4577126B2 (ja) * 2005-07-08 2010-11-10 オムロン株式会社 ステレオ対応づけのための投光パターンの生成装置及び生成方法
US20070031056A1 (en) * 2005-08-02 2007-02-08 Perz Cynthia B System for and method of focusing in automated microscope systems
FR2889774B1 (fr) * 2005-08-12 2009-10-16 Thales Sa Source laser a recombinaison coherente de faisceaux
JP4773198B2 (ja) * 2005-12-22 2011-09-14 シスメックス株式会社 標本撮像装置及びこれを備える標本分析装置
US7616330B2 (en) * 2006-04-07 2009-11-10 AMO Wavefront Sciences, LLP Geometric measurement system and method of measuring a geometric characteristic of an object
US7768654B2 (en) * 2006-05-02 2010-08-03 California Institute Of Technology On-chip phase microscope/beam profiler based on differential interference contrast and/or surface plasmon assisted interference
WO2008010417A1 (en) * 2006-07-20 2008-01-24 Nikon Corporation Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device
JPWO2008069220A1 (ja) * 2006-11-30 2010-03-18 株式会社ニコン 結像装置及び顕微鏡
CN101652626B (zh) * 2007-04-05 2011-07-13 株式会社尼康 形状测定装置及形状测定方法
WO2008137746A1 (en) * 2007-05-04 2008-11-13 Aperio Technologies, Inc. Rapid microscope scanner for volume image acquisition
CN201050978Y (zh) * 2007-06-15 2008-04-23 西安普瑞光学仪器有限公司 白光干涉测量样品表面形状精细分布的装置
US8126246B2 (en) * 2008-01-08 2012-02-28 Amo Wavefront Sciences, Llc Systems and methods for measuring surface shape
US8325349B2 (en) * 2008-03-04 2012-12-04 California Institute Of Technology Focal plane adjustment by back propagation in optofluidic microscope devices
WO2010038418A1 (ja) * 2008-09-30 2010-04-08 パナソニック株式会社 表面形状計測装置及び方法
JP5368261B2 (ja) * 2008-11-06 2013-12-18 ギガフォトン株式会社 極端紫外光源装置、極端紫外光源装置の制御方法
JP5712342B2 (ja) * 2008-11-27 2015-05-07 ナノフォトン株式会社 光学顕微鏡、及びスペクトル測定方法
JP5395507B2 (ja) * 2009-05-21 2014-01-22 キヤノン株式会社 三次元形状測定装置、三次元形状測定方法及びコンピュータプログラム
CN201540400U (zh) * 2009-11-19 2010-08-04 福州福特科光电有限公司 光纤熔接机的显微成像光路的调节结构
EP2353736A1 (en) * 2010-01-29 2011-08-10 3M Innovative Properties Company Continuous process for forming a multilayer film and multilayer film prepared by such method
FR2967791B1 (fr) * 2010-11-22 2012-11-16 Ecole Polytech Procede et systeme de calibration d'un modulateur optique spatial dans un microscope optique
JP5829030B2 (ja) * 2011-03-23 2015-12-09 オリンパス株式会社 顕微鏡
EP2732326B1 (en) * 2011-07-14 2020-11-18 Howard Hughes Medical Institute Microscopy with adaptive optics
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Also Published As

Publication number Publication date
WO2013015143A1 (en) 2013-01-31
JP2013025251A (ja) 2013-02-04
CN103688205A (zh) 2014-03-26
US20140160267A1 (en) 2014-06-12

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