JP5850847B2 - 誘電体バリア放電によって基板の表面を被覆するための装置、無機基板上に膜を蒸着するための方法及び誘電体バリア放電によって基板の表面を被覆するための装置の使用 - Google Patents

誘電体バリア放電によって基板の表面を被覆するための装置、無機基板上に膜を蒸着するための方法及び誘電体バリア放電によって基板の表面を被覆するための装置の使用 Download PDF

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JP5850847B2
JP5850847B2 JP2012540404A JP2012540404A JP5850847B2 JP 5850847 B2 JP5850847 B2 JP 5850847B2 JP 2012540404 A JP2012540404 A JP 2012540404A JP 2012540404 A JP2012540404 A JP 2012540404A JP 5850847 B2 JP5850847 B2 JP 5850847B2
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substrate
voltage
electrodes
plasma
transformer
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Expired - Fee Related
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JP2012540404A
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Japanese (ja)
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JP2013511816A (ja
Inventor
エリック ミシェル，
エリック ミシェル，
エリック ティクソン，
エリック ティクソン，
ジョセフ ルクラーク，
ジョセフ ルクラーク，
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AGC Glass Europe SA
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AGC Glass Europe SA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
JP2012540404A 2009-11-24 2010-11-23 誘電体バリア放電によって基板の表面を被覆するための装置、無機基板上に膜を蒸着するための方法及び誘電体バリア放電によって基板の表面を被覆するための装置の使用 Expired - Fee Related JP5850847B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP09176940.6 2009-11-24
EP09176940 2009-11-24
EP10153448.5 2010-02-12
EP10153448A EP2326151A1 (fr) 2009-11-24 2010-02-12 Procédé et dispositif de polarisation d'une électrode DBD
PCT/EP2010/068049 WO2011064217A1 (fr) 2009-11-24 2010-11-23 Procédé et dispositif de polarisation d'une électrode dbd

Publications (2)

Publication Number Publication Date
JP2013511816A JP2013511816A (ja) 2013-04-04
JP5850847B2 true JP5850847B2 (ja) 2016-02-03

Family

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JP2012540404A Expired - Fee Related JP5850847B2 (ja) 2009-11-24 2010-11-23 誘電体バリア放電によって基板の表面を被覆するための装置、無機基板上に膜を蒸着するための方法及び誘電体バリア放電によって基板の表面を被覆するための装置の使用

Country Status (10)

Country Link
US (1) US9401265B2 (pt)
EP (2) EP2326151A1 (pt)
JP (1) JP5850847B2 (pt)
CN (1) CN102668721B (pt)
AR (1) AR087137A1 (pt)
BR (1) BR112012012496B1 (pt)
EA (1) EA023480B1 (pt)
PL (1) PL2505041T3 (pt)
SI (1) SI2505041T1 (pt)
WO (1) WO2011064217A1 (pt)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014097621A1 (en) * 2012-12-21 2014-06-26 Asahi Glass Company Limited Pair of electrodes for dbd plasma process
SG11201912569UA (en) 2017-06-27 2020-01-30 Canon Anelva Corp Plasma processing apparatus
PL3648551T3 (pl) 2017-06-27 2021-12-06 Canon Anelva Corporation Urządzenie do obróbki plazmowej
WO2019003312A1 (ja) * 2017-06-27 2019-01-03 キヤノンアネルバ株式会社 プラズマ処理装置
KR102421625B1 (ko) * 2017-06-27 2022-07-19 캐논 아네르바 가부시키가이샤 플라스마 처리 장치
CZ2018206A3 (cs) * 2018-05-02 2019-06-12 Fyzikální Ústav Av Čr, V. V. I. Způsob generování nízkoteplotního plazmatu, způsob povlakování vnitřního povrchu dutých elektricky vodivých nebo feromagnetických trubic a zařízení pro provádění těchto způsobů
JP6688440B1 (ja) 2018-06-26 2020-04-28 キヤノンアネルバ株式会社 プラズマ処理装置、プラズマ処理方法、プログラムおよびメモリ媒体
TWI728569B (zh) * 2019-11-25 2021-05-21 馗鼎奈米科技股份有限公司 放電極化設備

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JP3577601B2 (ja) * 1993-09-20 2004-10-13 株式会社ダイオー 大気圧グロ−放電プラズマ処理法
JPH07155529A (ja) * 1993-12-01 1995-06-20 Takuma Co Ltd ガス処理装置とそれの運転方法
DE19537212A1 (de) 1994-10-06 1996-04-11 Leybold Ag Vorrichtung zum Beschichten von Substraten im Vakuum
US5573597A (en) * 1995-06-07 1996-11-12 Sony Corporation Plasma processing system with reduced particle contamination
JPH08337497A (ja) * 1995-06-09 1996-12-24 Iwatani Internatl Corp ダイヤモンド薄膜の気相合成法
WO1997013266A2 (en) * 1995-06-19 1997-04-10 The University Of Tennessee Research Corporation Discharge methods and electrodes for generating plasmas at one atmosphere of pressure, and materials treated therewith
CN1161820C (zh) * 1998-07-31 2004-08-11 佳能株式会社 半导体层制造方法和制造设备、光生伏打电池的制造方法
FR2782837B1 (fr) * 1998-08-28 2000-09-29 Air Liquide Procede et dispositif de traitement de surface par plasma a pression atmospherique
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KR20080024885A (ko) * 2006-09-15 2008-03-19 이택기 플라즈마 반응기의 파라미터 계산 방법
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Also Published As

Publication number Publication date
SI2505041T1 (sl) 2014-03-31
JP2013511816A (ja) 2013-04-04
EP2326151A1 (fr) 2011-05-25
EP2505041B1 (fr) 2013-09-18
BR112012012496B1 (pt) 2020-11-17
PL2505041T3 (pl) 2014-07-31
BR112012012496A2 (pt) 2016-04-12
EA201290431A1 (ru) 2013-04-30
EP2505041B8 (fr) 2014-04-23
US9401265B2 (en) 2016-07-26
WO2011064217A1 (fr) 2011-06-03
WO2011064217A8 (fr) 2011-09-01
AR087137A1 (es) 2014-02-26
US20120258260A1 (en) 2012-10-11
CN102668721B (zh) 2015-04-29
CN102668721A (zh) 2012-09-12
EA023480B1 (ru) 2016-06-30
EP2505041A1 (fr) 2012-10-03

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