JP5804848B2 - 撮像装置 - Google Patents

撮像装置 Download PDF

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Publication number
JP5804848B2
JP5804848B2 JP2011186204A JP2011186204A JP5804848B2 JP 5804848 B2 JP5804848 B2 JP 5804848B2 JP 2011186204 A JP2011186204 A JP 2011186204A JP 2011186204 A JP2011186204 A JP 2011186204A JP 5804848 B2 JP5804848 B2 JP 5804848B2
Authority
JP
Japan
Prior art keywords
interference pattern
light
light emitting
pattern
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011186204A
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English (en)
Japanese (ja)
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JP2012078350A (ja
JP2012078350A5 (https=
Inventor
長井　健太郎
健太郎 長井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011186204A priority Critical patent/JP5804848B2/ja
Publication of JP2012078350A publication Critical patent/JP2012078350A/ja
Publication of JP2012078350A5 publication Critical patent/JP2012078350A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
    • A61B6/4291—Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48—Diagnostic techniques
    • A61B6/484—Diagnostic techniques involving phase contrast X-ray imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/064—Investigating materials by wave or particle radiation by diffraction, scatter or reflection interference of radiation, e.g. Borrmann effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Measurement Of Radiation (AREA)
  • Crystallography & Structural Chemistry (AREA)
JP2011186204A 2010-09-08 2011-08-29 撮像装置 Expired - Fee Related JP5804848B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011186204A JP5804848B2 (ja) 2010-09-08 2011-08-29 撮像装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010201065 2010-09-08
JP2010201065 2010-09-08
JP2011186204A JP5804848B2 (ja) 2010-09-08 2011-08-29 撮像装置

Publications (3)

Publication Number Publication Date
JP2012078350A JP2012078350A (ja) 2012-04-19
JP2012078350A5 JP2012078350A5 (https=) 2014-10-16
JP5804848B2 true JP5804848B2 (ja) 2015-11-04

Family

ID=44800212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011186204A Expired - Fee Related JP5804848B2 (ja) 2010-09-08 2011-08-29 撮像装置

Country Status (3)

Country Link
US (1) US20130163717A1 (https=)
JP (1) JP5804848B2 (https=)
WO (1) WO2012032950A1 (https=)

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US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
JP2013120126A (ja) * 2011-12-07 2013-06-17 Canon Inc 微細構造体、およびその微細構造体を備えた撮像装置
WO2013187970A2 (en) * 2012-05-14 2013-12-19 The General Hospital Corporation Method for coded-source phase contrast x-ray imaging
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
CN104837409B (zh) * 2013-09-30 2019-08-13 皇家飞利浦有限公司 具有可移动光栅的微分相位衬度成像装置
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
CN106535769B (zh) * 2014-05-01 2020-03-13 斯格瑞公司 X射线干涉成像系统
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
WO2020051061A1 (en) 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
DE112020004169T5 (de) 2019-09-03 2022-05-25 Sigray, Inc. System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
JP7395775B2 (ja) 2020-05-18 2023-12-11 シグレイ、インコーポレイテッド 結晶解析装置及び複数の検出器素子を使用するｘ線吸収分光法のためのシステム及び方法
WO2022061347A1 (en) 2020-09-17 2022-03-24 Sigray, Inc. System and method using x-rays for depth-resolving metrology and analysis
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
KR20260030946A (ko) 2020-12-07 2026-03-06 시그레이, 아이엔씨. 투과 x-선 소스를 이용한 고처리량 3D x-선 이미징 시스템
WO2023168204A1 (en) 2022-03-02 2023-09-07 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
WO2023177981A1 (en) 2022-03-15 2023-09-21 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
CN119173759A (zh) 2022-05-02 2024-12-20 斯格瑞公司 X射线顺序阵列波长色散光谱仪
CN121013975A (zh) 2023-02-16 2025-11-25 斯格瑞公司 具有至少两个堆叠的平面布拉格衍射器的x射线探测器系统
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025155719A1 (en) 2024-01-18 2025-07-24 Sigray, Inc. Sequential array of x-ray imaging detectors
WO2025174966A1 (en) 2024-02-15 2025-08-21 Sigray, Inc. System and method for generating a focused x‑ray beam

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951305A (en) * 1989-05-30 1990-08-21 Eastman Kodak Company X-ray grid for medical radiography and method of making and using same
JP3843830B2 (ja) * 2001-12-21 2006-11-08 コニカミノルタホールディングス株式会社 デジタル位相コントラストｘ線画像撮影システム
WO2009058976A1 (en) * 2007-10-30 2009-05-07 Massachusetts Institute Of Technology Phase-contrast x-ray imaging
JP5339975B2 (ja) * 2008-03-13 2013-11-13 キヤノン株式会社 Ｘ線位相イメージングに用いられる位相格子、該位相格子を用いたｘ線位相コントラスト像の撮像装置、ｘ線コンピューター断層撮影システム
JP2009240378A (ja) 2008-03-28 2009-10-22 Univ Of Tokyo Ｘ線撮像装置、及び、これに用いるスリット部材の製造方法
JP5451150B2 (ja) * 2008-04-15 2014-03-26 キヤノン株式会社 Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置
EP2347284B1 (en) * 2008-11-18 2018-05-23 Koninklijke Philips N.V. Spectral imaging detector

Also Published As

Publication number Publication date
US20130163717A1 (en) 2013-06-27
JP2012078350A (ja) 2012-04-19
WO2012032950A1 (en) 2012-03-15

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