JP5788182B2 - 放射線検出器 - Google Patents
放射線検出器 Download PDFInfo
- Publication number
- JP5788182B2 JP5788182B2 JP2011004116A JP2011004116A JP5788182B2 JP 5788182 B2 JP5788182 B2 JP 5788182B2 JP 2011004116 A JP2011004116 A JP 2011004116A JP 2011004116 A JP2011004116 A JP 2011004116A JP 5788182 B2 JP5788182 B2 JP 5788182B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- boron
- detector
- grid
- conductive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005855 radiation Effects 0.000 title claims description 25
- 239000010410 layer Substances 0.000 claims description 215
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 76
- 229910052796 boron Inorganic materials 0.000 claims description 76
- 238000000034 method Methods 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 34
- 229910052782 aluminium Inorganic materials 0.000 claims description 26
- 239000004020 conductor Substances 0.000 claims description 23
- 239000011241 protective layer Substances 0.000 claims description 22
- 238000001312 dry etching Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 13
- 238000001039 wet etching Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229910052580 B4C Inorganic materials 0.000 claims description 3
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052810 boron oxide Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 239000002245 particle Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 7
- 239000007943 implant Substances 0.000 description 6
- 230000035515 penetration Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 150000001639 boron compounds Chemical class 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003116 impacting effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 125000003821 2-(trimethylsilyl)ethoxymethyl group Chemical group [H]C([H])([H])[Si](C([H])([H])[H])(C([H])([H])[H])C([H])([H])C(OC([H])([H])[*])([H])[H] 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 238000001350 scanning transmission electron microscopy Methods 0.000 description 2
- 238000011896 sensitive detection Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
- H01L31/118—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation of the surface barrier or shallow PN junction detector type, e.g. surface barrier alpha-particle detectors
- H01L31/1185—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation of the surface barrier or shallow PN junction detector type, e.g. surface barrier alpha-particle detectors of the shallow PN junction detector type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PIN type
Description
・nドープ平面及び該nドープ平面に形成された真性層を有する平面状基板を供給するステップ;
・該真性層に、ホウ素を含む層を重ねることによって、p+型拡散層及びホウ素を含む最上層を形成するステップ;
・そのホウ素において導電性材料のグリッドを形成し、該グリッドの少なくとも一部分は最上層において形成され、該グリッドは、その最上層の一部分を露出したままに残す一方、その最上層に電気接続され、第1電極を形成する、ステップ;及び
・そのnドープ平面に接続された第2電極を形成するステップ;
を含む。
104…放射線感受性表面
106…放射線感受性表面
108…nドープ平面
110…第2電極
112…貫通孔
114…導電層
116…真性層
118…ホウ素層
120…p+型拡散層
122…pインプラント領域
124…nドープ・インプラント領域
126…二酸化シリコン層
128…アルミニウム・グリッド
130…アルミニウム・トラック
202-1…検出器
202-2…検出器
202-3…検出器
202-4…検出器
204-1…検出器
204-2…検出器
204-3…検出器
204-4…検出器
206-j…接続パッド
208-j…トラック
400…SEM
402…SEMカラム
404…電子ビーム
406…真空チャンバー
408…サンプル・ステージ
410…サンプル
412…電子ソース
414…レンズ
416…レンズ
418…偏向ユニット
420…Everhart-Thornley検出器
422…電源
424…コントローラ
426…表示ユニット
Claims (11)
- 放射線感受性表面を有する放射線検出器を製造する方法であり:
・nドープ平面及び該nドープ平面に形成された真性層を有する平面状基板を供給するステップ;
・該真性層の上に、ホウ素を含む層を重ねることによって、p+型拡散層及びホウ素を含む最上層を形成するステップ;
・導電性材料のグリッドを形成するステップであり、該グリッドの少なくとも一部分は、前記最上層において形成され、該グリッドは該最上層を露出したままに残す一方、該最上層に電気接続され、第1電極を形成する、ステップ;及び
・前記nドープ平面に接続された第2電極を形成するステップ;
を含み、
前記導電性材料のグリッドは、
・前記最上層を導電性材料の層で完全に覆い、次に、該導電性材料の層の一部分をエッチングによって除去し、該エッチングは、ドライ・エッチングの第1ステップを含み、該ドライ・エッチングのステップは、前記グリッドを定義するが、前記最上層の露出される部分に導電性材料の薄い層を残し、次にウェット・エッチングの第2ステップが続き、該ウェット・エッチングのステップは、前記最上層の露出される部分から前記導電性の層を完全に除去する、ステップ;
によって形成されることを特徴とする、方法。 - 前記検出器は、少なくとも前記最上層の露出された部分に形成された、窒化ホウ素、炭化ホウ素、酸化ホウ素、又はそれらの混合物の保護層を有し、該保護層は、10ナノメートル未満の厚さを有する、請求項1に記載の方法。
- 前記最上層の露出された部分をウェット・エッチングするステップの前に、貫通孔が前記基板において形成され、該最上層の露出された部分をウェット・エッチングする前又は後に、前記貫通孔の内部が導電層によって覆われる、請求項1又は2に記載の方法。
- 前記導電性材料のグリッドは、Al、Ti、TiN、Co、Mo、Pd、Pt、W、Au、Ni、Cr、Cu及び/又はCのグループからの材料を含む、請求項1乃至3のいずれか1項に記載の方法。
- 前記真性層は、1μmを超える厚さを有し、結果として、前記検出器のキャパシタンスの表面積Nmm2は、それぞれ、100×NpF未満である、請求項1乃至4のいずれか1項に記載の方法。
- 前記真性層はエピタキシャル層である、請求項1乃至5のいずれか1項に記載の方法。
- 前記ホウ素層を形成する間及び後に、その温度が750℃未満で維持される、請求項1乃至6のいずれか1項に記載の方法。
- 多数の検出器が前記基板上に形成され、該検出器は、隣接して又は互いに重なり合って配置される、請求項1乃至7のいずれか1項に記載の方法。
- 前記のホウ素を含む層を重ねるステップは、70%よりも高い純度のホウ素を重ねるステップである、請求項1乃至8のいずれか1項に記載の方法。
- 前記ホウ素を含む層を重ねるステップが、炭素、窒素又は酸素、又はそれらの混合物を重ねるステップを含む、請求項9に記載の方法。
- 前記導電性材料の層は、導電性材料の均一層である、請求項1乃至10のいずれか1項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10150660.8 | 2010-01-13 | ||
EP10150660A EP2346094A1 (en) | 2010-01-13 | 2010-01-13 | Method of manufacturing a radiation detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011145292A JP2011145292A (ja) | 2011-07-28 |
JP5788182B2 true JP5788182B2 (ja) | 2015-09-30 |
Family
ID=42235125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011004116A Active JP5788182B2 (ja) | 2010-01-13 | 2011-01-12 | 放射線検出器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8450820B2 (ja) |
EP (2) | EP2346094A1 (ja) |
JP (1) | JP5788182B2 (ja) |
CN (1) | CN102130218B (ja) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8405116B2 (en) * | 2009-03-18 | 2013-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Lighting device |
US8847480B2 (en) | 2009-03-18 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Lighting device |
EP2525385A1 (en) | 2011-05-16 | 2012-11-21 | Fei Company | Charged-particle microscope |
EP2544025A1 (en) | 2011-07-07 | 2013-01-09 | FEI Company | Silicon Drift Detector for use in a charged particle apparatus |
EP2557584A1 (en) | 2011-08-10 | 2013-02-13 | Fei Company | Charged-particle microscopy imaging method |
CN103021840B (zh) * | 2011-09-23 | 2015-11-04 | 中国科学院微电子研究所 | 防止钝化层过刻蚀的方法 |
US10197501B2 (en) | 2011-12-12 | 2019-02-05 | Kla-Tencor Corporation | Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors |
US9496425B2 (en) | 2012-04-10 | 2016-11-15 | Kla-Tencor Corporation | Back-illuminated sensor with boron layer |
US9601299B2 (en) | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
JP5662393B2 (ja) * | 2012-08-30 | 2015-01-28 | 株式会社アドバンテスト | 電子ビーム検出器、電子ビーム処理装置及び電子ビーム検出器の製造方法 |
NL2011568A (en) * | 2012-10-31 | 2014-05-06 | Asml Netherlands Bv | Sensor and lithographic apparatus. |
JP6068954B2 (ja) * | 2012-11-28 | 2017-01-25 | 浜松ホトニクス株式会社 | フォトダイオードアレイ |
US9426400B2 (en) | 2012-12-10 | 2016-08-23 | Kla-Tencor Corporation | Method and apparatus for high speed acquisition of moving images using pulsed illumination |
US9478402B2 (en) * | 2013-04-01 | 2016-10-25 | Kla-Tencor Corporation | Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor |
CN103700719B (zh) * | 2013-12-05 | 2016-03-02 | 中国航天科技集团公司第九研究院第七七一研究所 | 一种电容式Si基辐射探测器件及其制备方法 |
US9347890B2 (en) | 2013-12-19 | 2016-05-24 | Kla-Tencor Corporation | Low-noise sensor and an inspection system using a low-noise sensor |
US9748294B2 (en) | 2014-01-10 | 2017-08-29 | Hamamatsu Photonics K.K. | Anti-reflection layer for back-illuminated sensor |
US9410901B2 (en) | 2014-03-17 | 2016-08-09 | Kla-Tencor Corporation | Image sensor, an inspection system and a method of inspecting an article |
EP2924708A1 (en) * | 2014-03-25 | 2015-09-30 | Fei Company | Imaging a sample with multiple beams and multiple detectors |
EP2991112A1 (en) | 2014-08-25 | 2016-03-02 | Fei Company | Improved radiation sensor, and its application in a charged-particle microscope |
US9767986B2 (en) * | 2014-08-29 | 2017-09-19 | Kla-Tencor Corporation | Scanning electron microscope and methods of inspecting and reviewing samples |
DE102014226985B4 (de) | 2014-12-23 | 2024-02-08 | Carl Zeiss Microscopy Gmbh | Verfahren zum Analysieren eines Objekts, Computerprogrammprodukt sowie Teilchenstrahlgerät zur Durchführung des Verfahrens |
JP6661283B2 (ja) * | 2015-05-14 | 2020-03-11 | 東京エレクトロン株式会社 | クリーニング方法及びプラズマ処理方法 |
US9860466B2 (en) | 2015-05-14 | 2018-01-02 | Kla-Tencor Corporation | Sensor with electrically controllable aperture for inspection and metrology systems |
US10748730B2 (en) | 2015-05-21 | 2020-08-18 | Kla-Tencor Corporation | Photocathode including field emitter array on a silicon substrate with boron layer |
US9484431B1 (en) * | 2015-07-29 | 2016-11-01 | International Business Machines Corporation | Pure boron for silicide contact |
US10462391B2 (en) | 2015-08-14 | 2019-10-29 | Kla-Tencor Corporation | Dark-field inspection using a low-noise sensor |
US10778925B2 (en) | 2016-04-06 | 2020-09-15 | Kla-Tencor Corporation | Multiple column per channel CCD sensor architecture for inspection and metrology |
US10313622B2 (en) | 2016-04-06 | 2019-06-04 | Kla-Tencor Corporation | Dual-column-parallel CCD sensor and inspection systems using a sensor |
US10126437B1 (en) * | 2017-05-15 | 2018-11-13 | Prismatic Sensors Ab | Detector for x-ray imaging |
JP7179839B2 (ja) * | 2017-09-29 | 2022-11-29 | エーエスエムエル ネザーランズ ビー.ブイ. | 荷電粒子のためのマルチセル検出器 |
CN107884811A (zh) * | 2017-11-27 | 2018-04-06 | 中核控制系统工程有限公司 | 一种基于硅pin的中子探测器 |
US11114489B2 (en) | 2018-06-18 | 2021-09-07 | Kla-Tencor Corporation | Back-illuminated sensor and a method of manufacturing a sensor |
US10943760B2 (en) | 2018-10-12 | 2021-03-09 | Kla Corporation | Electron gun and electron microscope |
US11114491B2 (en) | 2018-12-12 | 2021-09-07 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor |
US11843069B2 (en) * | 2018-12-31 | 2023-12-12 | Asml Netherlands B.V. | Semiconductor detector and method of fabricating same |
JP7286778B2 (ja) * | 2019-02-26 | 2023-06-05 | エーエスエムエル ネザーランズ ビー.ブイ. | 利得要素を備えた荷電粒子検出器およびその製造方法 |
EP3767663A1 (en) * | 2019-07-16 | 2021-01-20 | FEI Company | Method of manufacturing a charged particle detector |
CN111129226A (zh) * | 2019-12-26 | 2020-05-08 | 中国科学院微电子研究所 | 锗探测器的制造方法 |
US11848350B2 (en) | 2020-04-08 | 2023-12-19 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer |
CN112054075B (zh) * | 2020-07-31 | 2023-01-06 | 重庆鹰谷光电股份有限公司 | 一种超高精度的硅象限光电探测器 |
JP7404202B2 (ja) | 2020-09-14 | 2023-12-25 | 株式会社東芝 | 放射線検出器 |
US11699607B2 (en) * | 2021-06-09 | 2023-07-11 | Kla Corporation | Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons |
CN114093652A (zh) * | 2021-10-27 | 2022-02-25 | 浙江田中精机股份有限公司 | 一种套管及导线进线机构 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4238760A (en) | 1978-10-06 | 1980-12-09 | Recognition Equipment Incorporated | Multi-spectrum photodiode devices |
US5320878A (en) * | 1992-01-10 | 1994-06-14 | Martin Marietta Energy Systems, Inc. | Method of chemical vapor deposition of boron nitride using polymeric cyanoborane |
JPH05258701A (ja) | 1992-03-16 | 1993-10-08 | Hitachi Ltd | 電子線装置 |
JPH10107239A (ja) * | 1996-09-27 | 1998-04-24 | Sony Corp | 固体撮像素子およびその製造方法 |
US6175145B1 (en) * | 1997-07-26 | 2001-01-16 | Samsung Electronics Co., Ltd. | Method of making a fuse in a semiconductor device and a semiconductor device having a fuse |
JP3652095B2 (ja) * | 1998-01-21 | 2005-05-25 | シャープ株式会社 | 回路内蔵受光素子の製造方法 |
JP3947420B2 (ja) * | 2002-03-25 | 2007-07-18 | 浜松ホトニクス株式会社 | 電子線検出器 |
US20040021061A1 (en) * | 2002-07-30 | 2004-02-05 | Frederik Bijkerk | Photodiode, charged-coupled device and method for the production |
KR100630679B1 (ko) | 2003-12-17 | 2006-10-02 | 삼성전자주식회사 | 포토 다이오드 및 이의 제조 방법 |
US7417249B2 (en) * | 2004-08-20 | 2008-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a wiring including an aluminum carbon alloy and titanium or molybdenum |
US8877765B2 (en) | 2006-06-14 | 2014-11-04 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Highly soluble pyrimido-dione-quinoline compounds and their use in the treatment of cancer |
EP1956633A3 (en) | 2007-02-06 | 2009-12-16 | FEI Company | Particle-optical apparatus for simultaneous observing a sample with particles and photons |
US8138485B2 (en) | 2007-06-25 | 2012-03-20 | Asml Netherlands B.V. | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector |
US7586108B2 (en) * | 2007-06-25 | 2009-09-08 | Asml Netherlands B.V. | Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
-
2010
- 2010-01-13 EP EP10150660A patent/EP2346094A1/en not_active Withdrawn
-
2011
- 2011-01-12 EP EP11150672A patent/EP2346095A3/en not_active Withdrawn
- 2011-01-12 JP JP2011004116A patent/JP5788182B2/ja active Active
- 2011-01-13 CN CN201110006527.1A patent/CN102130218B/zh active Active
- 2011-01-13 US US13/006,305 patent/US8450820B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20110169116A1 (en) | 2011-07-14 |
CN102130218B (zh) | 2016-03-16 |
EP2346094A1 (en) | 2011-07-20 |
US8450820B2 (en) | 2013-05-28 |
CN102130218A (zh) | 2011-07-20 |
JP2011145292A (ja) | 2011-07-28 |
EP2346095A2 (en) | 2011-07-20 |
EP2346095A3 (en) | 2011-07-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5788182B2 (ja) | 放射線検出器 | |
JP5102580B2 (ja) | 荷電粒子線応用装置 | |
US7968959B2 (en) | Methods and systems of thick semiconductor drift detector fabrication | |
KR102390303B1 (ko) | 전자 소스 | |
Sakic et al. | High-efficiency silicon photodiode detector for sub-keV electron microscopy | |
JP2016046529A (ja) | 改良された放射線センサ及び当該改良された放射線センサの荷電粒子顕微鏡内での応用 | |
JP7286778B2 (ja) | 利得要素を備えた荷電粒子検出器およびその製造方法 | |
JP7434443B2 (ja) | 半導体検出器及びこれを製造する方法 | |
JP6576257B2 (ja) | 荷電粒子検出器、及び荷電粒子線装置 | |
WO2010045655A1 (en) | Thick semiconductor drift detector fabrication | |
Šakić et al. | Silicon photodiodes for high-efficiency low-energy electron detection | |
US9245709B1 (en) | Charged particle beam specimen inspection system and method for operation thereof | |
JP2001305234A (ja) | 半導体電子線検出器 | |
US20240136462A1 (en) | Semiconductor detector and method of fabricating same | |
TW202249053A (zh) | 用於偵測二次及背向散射之電子的具有通孔之分段多通道背面照明固態偵測器 | |
Zha et al. | Direct detection of low-energy electrons with a novel CMOS APS sensor | |
US20230137186A1 (en) | Systems and methods for signal electron detection | |
WO2024033071A1 (en) | Particle detector with reduced inter-symbol interference | |
Rabinovich et al. | Creating AlGaAs Photodetectors | |
WO2023177916A1 (en) | Electron gun and electron microscope | |
JPH06338549A (ja) | 半導体基板に埋め込まれた絶縁膜の欠陥検出方法 | |
JPH05190826A (ja) | 電子検出器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140109 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20141118 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141125 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150224 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150714 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150729 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5788182 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |